| Patent | Date |
|---|
Wafer Cleaning Apparatus, Method For Cleaning Wafer And Method For Fabricating Semiconductor Device
App 20220262621 - CHO; Seongkeun ; et al. | 2022-08-18 |
Substrate Drying Apparatus And Semiconductor Device Manufacturing Method Using Same
App 20220189765 - JEONG; JI HOON ; et al. | 2022-06-16 |
Wafer Cleaning Apparatus And Wafer Cleaning Method Using The Same
App 20220084812 - Park; Sung Hyun ; et al. | 2022-03-17 |
Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system
Grant 11,189,503 - Kim , et al. November 30, 2 | 2021-11-30 |
Dry Cleaning Apparatus And Dry Cleaning Method
App 20210343552 - SHIN; Seung-Min ; et al. | 2021-11-04 |
Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same
Grant 11,149,234 - Park , et al. October 19, 2 | 2021-10-19 |
Dry cleaning apparatus and dry cleaning method
Grant 11,087,996 - Shin , et al. August 10, 2 | 2021-08-10 |
Substrate Processing Apparatus And Apparatus For Manufacturing Integrated Circuit Device
App 20210217635 - Kim; Young-hoo ; et al. | 2021-07-15 |
Process Chamber and Substrate Processing Apparatus Including the Same
App 20210217636 - Cho; Yong-Jhin ; et al. | 2021-07-15 |
Process chamber and substrate processing apparatus including the same
Grant 10,991,600 - Cho , et al. April 27, 2 | 2021-04-27 |
Substrate processing apparatus and apparatus for manufacturing integrated circuit device
Grant 10,985,036 - Kim , et al. April 20, 2 | 2021-04-20 |
Wafer Cleaning Apparatus And Wafer Cleaning Method Using The Same
App 20210060625 - SHIN; Seung Min ; et al. | 2021-03-04 |
Substrate drying apparatus, facility of manufacturing semiconductor device, and method of drying substrate
Grant 10,825,698 - Cho , et al. November 3, 2 | 2020-11-03 |
Multi-chamber Apparatus
App 20200343113 - CHOI; Yong Jun ; et al. | 2020-10-29 |
Substrate Drying Method, Photoresist Developing Method, Photolithography Method Including The Same, And Substrate Drying System
App 20200152486 - KIM; Young-Hoo ; et al. | 2020-05-14 |
Dry Cleaning Apparatus And Dry Cleaning Method
App 20200083063 - SHIN; Seung-Min ; et al. | 2020-03-12 |
Spot heater and device for cleaning wafer using the same
Grant 10,576,582 - Kim , et al. | 2020-03-03 |
Liquid Chemical Recycle System, Liquid Chemical Supply System, And Method Of Manufacturing Semiconductor Device Using The Liquid
App 20190259641 - KIM; Young-Hoo ; et al. | 2019-08-22 |
Cleaning Composition, Cleaning Apparatus, And Method Of Fabricating Semiconductor Device Using The Same
App 20190241844 - PARK; Mi Hyun ; et al. | 2019-08-08 |
Chemical liquid supply apparatus and semiconductor processing apparatus having the same
Grant 10,332,762 - Kim , et al. | 2019-06-25 |
Substrate treating apparatus
Grant 10,186,427 - Kim , et al. Ja | 2019-01-22 |
Substrate Drying Apparatus, Facility Of Manufacturing Semiconductor Device, And Method Of Drying Substrate
App 20180366348 - Cho; Yong-Jhin ; et al. | 2018-12-20 |
Process Chamber and Substrate Processing Apparatus Including the Same
App 20180366349 - Cho; Yong-Jhin ; et al. | 2018-12-20 |
Substrate Processing Apparatus and Apparatus for Manufacturing Integrated Circuit Device
App 20180358242 - Kim; Young-hoo ; et al. | 2018-12-13 |
Spot Heater And Device For Cleaning Wafer Using The Same
App 20180311764 - KIM; Young-Hoo ; et al. | 2018-11-01 |
Spot heater and device for cleaning wafer using the same
Grant 10,029,332 - Kim , et al. July 24, 2 | 2018-07-24 |
Substrate Treating Apparatus
App 20180096856 - KIM; Kyoung Hwan ; et al. | 2018-04-05 |
Substrate treating apparatus and method of treating substrate
Grant 9,852,921 - Kim , et al. December 26, 2 | 2017-12-26 |
Chemical Liquid Supply Apparatus And Semiconductor Processing Apparatus Having The Same
App 20170062242 - KIM; YOUNG-HOO ; et al. | 2017-03-02 |
Substrate Treating Apparatus And Method Of Treating Substrate
App 20170062287 - KIM; Kyoung Hwan ; et al. | 2017-03-02 |
Spot Heater And Device For Cleaning Wafer Using The Same
App 20160071745 - KIM; Young-Hoo ; et al. | 2016-03-10 |
Methods of manufacturing a three-dimensional semiconductor device
Grant 9,153,597 - Kim , et al. October 6, 2 | 2015-10-06 |
Substrate Treating Apparatus
App 20140373881 - OH; Jung-Min ; et al. | 2014-12-25 |
Substrate Processing Method And Substrate Processing System For Performing The Same
App 20140283886 - CHO; Yong-Jhin ; et al. | 2014-09-25 |
Substrate processing method and substrate processing system for performing the same
Grant 8,795,541 - Cho , et al. August 5, 2 | 2014-08-05 |
Integrated circuit capacitors having sidewall supports
Grant 8,766,343 - Kang , et al. July 1, 2 | 2014-07-01 |
Methods of Manufacturing a Three-Dimensional Semiconductor Device
App 20130078776 - Kim; Young-Hoo ; et al. | 2013-03-28 |
Method of manufacturing nonvolatile memory device and nonvolatile memory device manufactured by the method
Grant 8,404,548 - Park , et al. March 26, 2 | 2013-03-26 |
Vertical-type semiconductor device
Grant 8,344,385 - Kim , et al. January 1, 2 | 2013-01-01 |
Wafer test method and wafer test apparatus
Grant 8,228,089 - Kim , et al. July 24, 2 | 2012-07-24 |
Substrate Processing Method And Substrate Processing System For Performing The Same
App 20120152898 - CHO; YONG JHIN ; et al. | 2012-06-21 |
Integrated Circuit Capacitors Having Sidewall Supports
App 20120112317 - Kang; Dae-Hyuk ; et al. | 2012-05-10 |
Apparatus For Drying Substrate
App 20120080061 - Kim; Young-Hoo ; et al. | 2012-04-05 |
Substrate Treatment Equipment And Method Of Treating Substrate Using The Same
App 20120064727 - Oh; Jung-min ; et al. | 2012-03-15 |
Methods Of Forming A Capacitor Structure And Methods Of Manufacturing Semiconductor Devices Using The Same
App 20120064680 - Oh; Jung-Min ; et al. | 2012-03-15 |
Non-volatile memory device and method for fabricating non-volatile memory device
Grant 8,120,089 - Kim , et al. February 21, 2 | 2012-02-21 |
Methods of forming integrated circuit capacitors having sidewall supports and capacitors formed thereby
Grant 8,119,476 - Kang , et al. February 21, 2 | 2012-02-21 |
Method of forming a contact structure
Grant 8,110,499 - Kang , et al. February 7, 2 | 2012-02-07 |
Methods of Forming Nonvolatile Memory Devices Using Nonselective and Selective Etching Techniques to Define Vertically Stacked Word Lines
App 20120003831 - Kang; Daehyuk ; et al. | 2012-01-05 |
Methods of Manufacturing Semiconductor Devices
App 20110306197 - Kim; Young-Hoo ; et al. | 2011-12-15 |
Method of fabricating nonvolatile memory device
Grant 8,076,198 - Lee , et al. December 13, 2 | 2011-12-13 |
Method Of Manufacturing Nonvolatile Memory Device And Nonvolatile Memory Device Manufactured By The Method
App 20110266606 - Park; Imsoo ; et al. | 2011-11-03 |
Method of manufacturing nonvolatile memory device and nonvolatile memory device manufactured by the method
Grant 7,994,011 - Park , et al. August 9, 2 | 2011-08-09 |
Methods of Forming Integrated Circuit Capacitors Having Sidewall Supports and Capacitors Formed Thereby
App 20110159660 - Kang; Dae-Hyuk ; et al. | 2011-06-30 |
Vertical-type Semiconductor Device
App 20110073866 - Kim; Young-Hoo ; et al. | 2011-03-31 |
Method of manufacturing a semiconductor device
Grant 7,829,437 - Kim , et al. November 9, 2 | 2010-11-09 |
Wafer Test Method And Wafer Test Apparatus
App 20100200431 - Kim; Youngok ; et al. | 2010-08-12 |
Non-volatile Memory Device And Method For Fabricating Non-volatile Memory Device
App 20100181610 - Kim; Young-Hoo ; et al. | 2010-07-22 |
Method of fabricating nonvolatile memory device
App 20100178755 - Lee; Hyosan ; et al. | 2010-07-15 |
Wiring structure of a semiconductor device
App 20100127398 - Kim; Young-Hoo ; et al. | 2010-05-27 |
Method of manufacturing nonvolatile memory device and nonvolatile memory device manufactured by the method
App 20100120214 - Park; Imsoo ; et al. | 2010-05-13 |
Method Of Forming A Contact Structure
App 20090280641 - Kang; Dae-Hyuk ; et al. | 2009-11-12 |
Method of manufacturing a semiconductor device
App 20090004826 - Kim; Young-Hoo ; et al. | 2009-01-01 |
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