Kim; Sunghyup

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kim; Sunghyup.The latest application filed is for "plasma treatment apparatus, a method of monitoring a process of manufacturing a semiconductor device by using the same, and a method of manufacturing a semiconductor device including the monitoring method".

Company Profile

11.6.17

Kim; Sunghyup - Hwaseong-si KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Pellicle for reflective mask Grant 11,454,882 - Lee , et al. September 27, 2	2022-09-27
Extreme ultraviolet light source system Grant 11,415,891 - Kim , et al. August 16, 2	2022-08-16
Plasma Treatment Apparatus, A Method Of Monitoring A Process Of Manufacturing A Semiconductor Device By Using The Same, And A Method Of Manufacturing A Semiconductor Device Including The Monitoring Method App 20220181219 - LIM; MEEHYUN ; et al.	2022-06-09
Droplet Accelerating Assembly And Extreme Ultra-violet Lithography Apparatus Including The Same App 20220174806 - CHOI; Minseok ; et al.	2022-06-02
Target Debris Collection Device And Extreme Ultraviolet Light Source Apparatus Including The Same App 20220113642 - KIM; Sunghyup ; et al.	2022-04-14
Extreme ultraviolet light source systems Grant 11,304,287 - Kim , et al. April 12, 2	2022-04-12
Extreme Ultraviolet Light Source Systems App 20220104336 - KIM; SUNGHYUP ; et al.	2022-03-31
Apparatus For Generating Extreme Ultraviolet Light And Lithography Apparatus Including The Same App 20220082946 - Lee; Injae ; et al.	2022-03-17
Extreme Ultraviolet Light Source System App 20220075271 - Kim; Sunghyup ; et al.	2022-03-10
Target debris collection device and extreme ultraviolet light source apparatus including the same Grant 11,231,656 - Kim , et al. January 25, 2	2022-01-25
Chip Bonding Apparatus And Method Of Manufacturing Semiconductor Device Using The Apparatus App 20210398935 - Kim; Junhyung ; et al.	2021-12-23
Droplet Generator And Extreme Ultraviolet Exposure Device Including The Same App 20210153332 - LEE; Injae ; et al.	2021-05-20
Pellicle For Reflective Mask App 20210116802 - LEE; Jinhwan ; et al.	2021-04-22
Bonding Head, Die Bonding Apparatus Including The Same And Method Of Manufacturing Semiconductor Package Using The Same App 20210098415 - LEE; Jonggu ; et al.	2021-04-01
Semiconductor Chip Bonding Apparatus Including Head Having Thermally Conductive Materials App 20210069811 - CHOI; Sebin ; et al.	2021-03-11
Substrate Processing Apparatus App 20210074558 - NAM; Sang Ki ; et al.	2021-03-11
Target Debris Collection Device And Extreme Ultraviolet Light Source Apparatus Including The Same App 20210059035 - KIM; Sunghyup ; et al.	2021-02-25
Ring assembly and chuck assembly having the same Grant 10,672,629 - Kim , et al.	2020-06-02
Substrate bonding apparatus having adsorption sectors with different vacuum pressures and method of manufacturing semiconductor device using the same Grant 10,411,062 - Kim , et al. Sept	2019-09-10
Wafer Polishing Pad And Method Of Wafer Polishing Using The Same App 20190193238 - Kim; Seok Ryul ; et al.	2019-06-27
Substrate Bonding Apparatus And Method Of Manufacturing Semiconductor Device Using The Same App 20180122845 - KIM; Jun Hyung ; et al.	2018-05-03
Ring Assembly And Chuck Assembly Having The Same App 20180090344 - KIM; SungHyup ; et al.	2018-03-29
Substrate Treatment Apparatus App 20170110291 - KIM; Tae-Hwa ; et al.	2017-04-20

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