| Patent | Date |
|---|
Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices
Grant 11,365,476 - Jha , et al. June 21, 2 | 2022-06-21 |
Plasma processing using multiple radio frequency power feeds for improved uniformity
Grant 11,276,562 - Ye , et al. March 15, 2 | 2022-03-15 |
Ultra-high Modulus And Etch Selectivity Boron-carbon Hardmask Films
App 20210225650 - KULSHRESHTHA; Prashant Kumar ; et al. | 2021-07-22 |
Ultra-high modulus and etch selectivity boron carbon hardmask films
Grant 10,971,364 - Kulshreshtha , et al. April 6, 2 | 2021-04-06 |
Pecvd Process
App 20200399756 - RAJAGOPALAN; Nagarajan ; et al. | 2020-12-24 |
PECVD process
Grant 10,793,954 - Rajagopalan , et al. October 6, 2 | 2020-10-06 |
Plasma Processing Using Multiple Radio Frequency Power Feeds For Improved Uniformity
App 20200203132 - YE; Zheng John ; et al. | 2020-06-25 |
Aluminum fluoride mitigation by plasma treatment
Grant 10,688,538 - Shah , et al. | 2020-06-23 |
Plasma processing using multiple radio frequency power feeds for improved uniformity
Grant 10,580,623 - Ye , et al. | 2020-03-03 |
Methods of dry stripping boron-carbon films
Grant 10,510,518 - Lee , et al. Dec | 2019-12-17 |
High Temperature Electrostatic Chucking With Dielectric Constant Engineered In-situ Charge Trap Materials
App 20190355609 - KULSHRESHTHA; Prashant ; et al. | 2019-11-21 |
VNAND tensile thick TEOS oxide
Grant 10,483,282 - Tsiang , et al. Nov | 2019-11-19 |
Dielectric-metal stack for 3D flash memory application
Grant 10,475,644 - Han , et al. Nov | 2019-11-12 |
Ultra-high modulus and etch selectivity boron-carbon hardmask films
Grant 10,418,243 - Kulshreshtha , et al. Sept | 2019-09-17 |
Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system
Grant 10,403,535 - Ye , et al. Sep | 2019-09-03 |
Gas flow profile modulated control of overlay in plasma CVD films
Grant 10,373,822 - Kulshreshtha , et al. | 2019-08-06 |
Vnand Tensile Thick Teos Oxide
App 20190229128 - TSIANG; Michael Wenyoung ; et al. | 2019-07-25 |
Plasma Enhanced Chemical Vapor Deposition Of Films For Improved Vertical Etch Performance In 3d Nand Memory Devices
App 20190185996 - JHA; Praket P. ; et al. | 2019-06-20 |
High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials
Grant 10,325,800 - Kulshreshtha , et al. | 2019-06-18 |
Dual-channel showerhead for formation of film stacks
Grant 10,276,353 - Alayavalli , et al. | 2019-04-30 |
Ultra-high Modulus And Etch Selectivity Boron-carbon Hardmask Films
App 20190122889 - KULSHRESHTHA; Prashant Kumar ; et al. | 2019-04-25 |
Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices
Grant 10,246,772 - Jha , et al. | 2019-04-02 |
Conformal amorphous carbon for spacer and spacer protection applications
Grant 10,236,182 - Kim , et al. | 2019-03-19 |
VNAND tensile thick TEOS oxide
Grant 10,199,388 - Tsiang , et al. Fe | 2019-02-05 |
Edge hump reduction faceplate by plasma modulation
Grant 10,100,408 - Ha , et al. October 16, 2 | 2018-10-16 |
Pecvd Process
App 20180258535 - RAJAGOPALAN; Nagarajan ; et al. | 2018-09-13 |
Ultra-conformal carbon film deposition
Grant 10,074,534 - Behera , et al. September 11, 2 | 2018-09-11 |
Dielectric-metal Stack For 3d Flash Memory Application
App 20180247808 - HAN; Xinhai ; et al. | 2018-08-30 |
PECVD process
Grant 10,060,032 - Rajagopalan , et al. August 28, 2 | 2018-08-28 |
PECVD apparatus and process
Grant 10,030,306 - Rajagopalan , et al. July 24, 2 | 2018-07-24 |
Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning
Grant 10,014,174 - Mebarki , et al. July 3, 2 | 2018-07-03 |
Dielectric-metal stack for 3D flash memory application
Grant 9,972,487 - Han , et al. May 15, 2 | 2018-05-15 |
Gas Flow Profile Modulated Control Of Overlay In Plasma Cvd Films
App 20180096843 - Kulshreshtha; Prashant Kumar ; et al. | 2018-04-05 |
Pecvd Process
App 20180066364 - RAJAGOPALAN; Nagarajan ; et al. | 2018-03-08 |
Aluminum Fluoride Mitigation By Plasma Treatment
App 20180036775 - SHAH; Vivek Bharat ; et al. | 2018-02-08 |
Gas flow profile modulated control of overlay in plasma CVD films
Grant 9,837,265 - Kulshreshtha , et al. December 5, 2 | 2017-12-05 |
PECVD process
Grant 9,816,187 - Rajagopalan , et al. November 14, 2 | 2017-11-14 |
Ultra-conformal Carbon Film Deposition
App 20170301537 - BEHERA; Swayambhu P. ; et al. | 2017-10-19 |
Conformal Strippable Carbon Film For Line-edge-roughness Reduction For Advanced Patterning
App 20170278709 - MEBARKI; Bencherki ; et al. | 2017-09-28 |
Ultra-conformal carbon film deposition
Grant 9,721,784 - Behera , et al. August 1, 2 | 2017-08-01 |
Methods to improve in-film particle performance of amorphous boron-carbon hardmask process in PECVD system
Grant 9,711,360 - Duan , et al. July 18, 2 | 2017-07-18 |
Conformal Amorphous Carbon For Spacer And Spacer Protection Applications
App 20170170015 - KIM; Sungjin ; et al. | 2017-06-15 |
Method And Apparatus For Clamping And Declamping Substrates Using Electrostatic Chucks
App 20170162417 - YE; Zheng John ; et al. | 2017-06-08 |
Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning
Grant 9,659,771 - Mebarki , et al. May 23, 2 | 2017-05-23 |
Ultra-high Modulus And Etch Selectivity Boron-carbon Hardmask Films
App 20170103893 - KULSHRESHTHA; Prashant Kumar ; et al. | 2017-04-13 |
Low Temperature Conformal Deposition Of Silicon Nitride On High Aspect Ratio Structures
App 20170084448 - BARMAN; Soumendra Narayan ; et al. | 2017-03-23 |
Methods To Improve In-film Particle Performance Of Amorphous Boron-carbon Hardmask Process In Pecvd System
App 20170062218 - DUAN; Ziqing ; et al. | 2017-03-02 |
Vnand Tensile Thick Teos Oxide
App 20170062469 - TSIANG; Michael Wenyoung ; et al. | 2017-03-02 |
Conformal amorphous carbon for spacer and spacer protection applications
Grant 9,570,303 - Kim , et al. February 14, 2 | 2017-02-14 |
Pecvd Process
App 20170016118 - RAJAGOPALAN; Nagarajan ; et al. | 2017-01-19 |
Conformal Strippable Carbon Film For Line-edge-roughness Reduction For Advanced Patterning
App 20160365248 - MEBARKI; Bencherki ; et al. | 2016-12-15 |
Gate stack materials for semiconductor applications for lithographic overlay improvement
Grant 9,490,116 - Tsiang , et al. November 8, 2 | 2016-11-08 |
Dual-channel Showerhead For Formation Of Film Stacks
App 20160322200 - ALAYAVALLI; Kaushik ; et al. | 2016-11-03 |
Gas Flow Profile Modulated Control Of Overlay In Plasma Cvd Films
App 20160307752 - KULSHRESHTHA; Prashant Kumar ; et al. | 2016-10-20 |
Plasma Enhanced Chemical Vapor Deposition Of Films For Improved Vertical Etch Performance In 3d Nand Memory Devices
App 20160293609 - JHA; Praket P. ; et al. | 2016-10-06 |
PECVD process
Grant 9,458,537 - Rajagopalan , et al. October 4, 2 | 2016-10-04 |
Adhesion Improvements For Oxide-silicon Stack
App 20160260602 - SREEKALA; Subbalakshmi ; et al. | 2016-09-08 |
Gate Stack Materials For Semiconductor Applications For Lithographic Overlay Improvement
App 20160203971 - TSIANG; Michael ; et al. | 2016-07-14 |
Gas flow profile modulated control of overlay in plasma CVD films
Grant 9,390,910 - Kulshreshtha , et al. July 12, 2 | 2016-07-12 |
Methods Of Dry Stripping Boron-carbon Films
App 20160133443 - LEE; Kwangduk Douglas ; et al. | 2016-05-12 |
Apparatus and method for substrate clamping in a plasma chamber
Grant 9,337,072 - Balasubramanian , et al. May 10, 2 | 2016-05-10 |
Method for critical dimension reduction using conformal carbon films
Grant 9,337,051 - Mebarki , et al. May 10, 2 | 2016-05-10 |
Gas Flow Profile Modulated Control Of Overlay In Plasma Cvd Films
App 20160099147 - KULSHRESHTHA; Prashant Kumar ; et al. | 2016-04-07 |
Methods of dry stripping boron-carbon films
Grant 9,299,581 - Lee , et al. March 29, 2 | 2016-03-29 |
Nitrogen Doped Amorphous Carbon Hardmask
App 20160086794 - CHENG; Siu F. ; et al. | 2016-03-24 |
High Temperature Electrostatic Chucking With Dielectric Constant Engineered In-situ Charge Trap Materials
App 20160064264 - KULSHRESHTHA; Prashant ; et al. | 2016-03-03 |
Methods Of Dry Stripping Boron-carbon Films
App 20160064209 - LEE; Kwangduk Douglas ; et al. | 2016-03-03 |
Method And Apparatus Of Processing Wafers With Compressive Or Tensile Stress At Elevated Temperatures In A Plasma Enhanced Chemical Vapor Deposition System
App 20160049323 - YE; Zheng John ; et al. | 2016-02-18 |
Method For Critical Dimension Reduction Using Conformal Carbon Films
App 20160049305 - MEBARKI; Bencherki ; et al. | 2016-02-18 |
Integrated Pre-clean And Deposition Of Low-damage Layers
App 20160017487 - CHEN; Yihong ; et al. | 2016-01-21 |
Pecvd Process
App 20160017497 - RAJAGOPALAN; NAGARAJAN ; et al. | 2016-01-21 |
Ultra-conformal Carbon Film Deposition Layer-by-layer Deposition Of Carbon-doped Oxide Films
App 20160005596 - BEHERA; Swayambhu P. ; et al. | 2016-01-07 |
PECVD process
Grant 9,157,730 - Rajagopalan , et al. October 13, 2 | 2015-10-13 |
Elimination of first wafer effect for PECVD films
Grant 9,157,151 - Lakshmanan , et al. October 13, 2 | 2015-10-13 |
Conformal Amorphous Carbon For Spacer And Spacer Protection Applications
App 20150279676 - KIM; Sungjin ; et al. | 2015-10-01 |
Edge Hump Reduction Faceplate By Plasma Modulation
App 20150247237 - HA; Sungwon ; et al. | 2015-09-03 |
Cleaning Process For Cleaning Amorphous Carbon Deposition Residuals Using Low Rf Bias Frequency Applications
App 20150228463 - MANNA; Pramit ; et al. | 2015-08-13 |
Pecvd Apparatus And Process
App 20150226540 - Rajagopalan; Nagarajan ; et al. | 2015-08-13 |
Dielectric-metal Stack For 3d Flash Memory Application
App 20150206757 - HAN; XINHAI ; et al. | 2015-07-23 |
Plasma Processing Using Multiple Radio Frequency Power Feeds For Improved Uniformity
App 20150136325 - YE; Zheng John ; et al. | 2015-05-21 |
Ultra high selectivity doped amorphous carbon strippable hardmask development and integration
Grant 8,993,454 - Seamons , et al. March 31, 2 | 2015-03-31 |
Nitrogen Doped Amorphous Carbon Hardmask
App 20140370711 - CHENG; Siu F. ; et al. | 2014-12-18 |
Conformal Amorphous Carbon For Spacer And Spacer Protection Applications
App 20140349490 - Kim; Sungjin ; et al. | 2014-11-27 |
High Throughput Multi-layer Stack Deposition
App 20140287593 - HAN; Xinhai ; et al. | 2014-09-25 |
Methods For Maintaining Clean Etch Rate And Reducing Particulate Contamination With Pecvd Of Amorphous Silicon Filims
App 20140272184 - SREEKALA; Subbalakshmi ; et al. | 2014-09-18 |
Methods Of Dry Stripping Boron-carbon Films
App 20140216498 - LEE; Kwangduk Douglas ; et al. | 2014-08-07 |
Conformal Sacrificial Film By Low Temperature Chemical Vapor Deposition Technique
App 20140162194 - XU; Jingjing ; et al. | 2014-06-12 |
Pecvd Process
App 20140118751 - RAJAGOPALAN; Nagarajan ; et al. | 2014-05-01 |
Deposition of an amorphous carbon layer with high film density and high etch selectivity
Grant 8,679,987 - Reilly , et al. March 25, 2 | 2014-03-25 |
Ultra High Selectivity Doped Amorphous Carbon Strippable Hardmask Development And Integration
App 20140017897 - SEAMONS; Martin Jay ; et al. | 2014-01-16 |
Deposition Of An Amorphous Carbon Layer With High Film Density And High Etch Selectivity
App 20130302996 - REILLY; Patrick ; et al. | 2013-11-14 |
Silicon nitride passivation layer for covering high aspect ratio features
Grant 8,563,095 - Rajagopalan , et al. October 22, 2 | 2013-10-22 |
Ultra high selectivity doped amorphous carbon strippable hardmask development and integration
Grant 8,536,065 - Seamons , et al. September 17, 2 | 2013-09-17 |
Conformal Amorphous Carbon For Spacer And Spacer Protection Applications
App 20130189845 - Kim; Sungjin ; et al. | 2013-07-25 |
Zero Shrinkage Smooth Interface Oxy-nitride And Oxy-amorphous-silicon Stacks For 3d Memory Vertical Gate Application
App 20130161629 - HAN; XINHAI ; et al. | 2013-06-27 |
Processing chamber with heated chamber liner
Grant 8,444,926 - Fodor , et al. May 21, 2 | 2013-05-21 |
Air gap integration scheme
Grant 8,389,376 - Demos , et al. March 5, 2 | 2013-03-05 |
Amorphous carbon deposition method for improved stack defectivity
Grant 8,349,741 - Yu , et al. January 8, 2 | 2013-01-08 |
Fabrication of through-silicon vias on silicon wafers
Grant 8,329,575 - Rajagopalan , et al. December 11, 2 | 2012-12-11 |
Methods Of Dry Stripping Boron-carbon Films
App 20120285492 - Lee; Kwangduk Douglas ; et al. | 2012-11-15 |
High mobility monolithic p-i-n diodes
Grant 8,298,887 - Han , et al. October 30, 2 | 2012-10-30 |
Fabrication of through-silicon vias on silicon wafers
Grant 8,283,237 - Rajagopalan , et al. October 9, 2 | 2012-10-09 |
Composite removable hardmask
Grant 8,252,699 - Konecni , et al. August 28, 2 | 2012-08-28 |
Method For Depositing An Amorphous Carbon Film With Improved Density And Step Coverage
App 20120208373 - PADHI; DEENESH ; et al. | 2012-08-16 |
Amorphous Carbon Deposition Method For Improved Stack Defectivity
App 20120208374 - Yu; Hang ; et al. | 2012-08-16 |
Amorphous carbon deposition method for improved stack defectivity
Grant 8,227,352 - Yu , et al. July 24, 2 | 2012-07-24 |
Fabrication Of Through-silicon Vias On Silicon Wafers
App 20120164827 - RAJAGOPALAN; Nagarajan ; et al. | 2012-06-28 |
Fabrication Of Through-silicon Vias On Silicon Wafers
App 20120164829 - Rajagopalan; Nagarajan ; et al. | 2012-06-28 |
Composite Removable Hardmask
App 20120129351 - Konecni; Anthony ; et al. | 2012-05-24 |
Semiconductor device having silicon carbide and conductive pathway interface
Grant 8,183,150 - Huang , et al. May 22, 2 | 2012-05-22 |
Ultra High Selectivity Doped Amorphous Carbon Strippable Hardmask Development And Integration
App 20120080779 - SEAMONS; Martin Jay ; et al. | 2012-04-05 |
Method for depositing conformal amorphous carbon film by plasma-enhanced chemical vapor deposition (PECVD)
Grant 8,105,465 - Lee , et al. January 31, 2 | 2012-01-31 |
Amorphous Carbon Deposition Method For Improved Stack Defectivity
App 20120015521 - Yu; Hang ; et al. | 2012-01-19 |
Graphene Deposition
App 20110303899 - Padhi; Deenesh ; et al. | 2011-12-15 |
PECVD oxide-nitride and oxide-silicon stacks for 3D memory application
Grant 8,076,250 - Rajagopalan , et al. December 13, 2 | 2011-12-13 |
Nitrogen Doped Amorphous Carbon Hardmask
App 20110244142 - CHENG; SIU F. ; et al. | 2011-10-06 |
Silicon Nitride Passivation Layer For Covering High Aspect Ratio Features
App 20110223765 - RAJAGOPALAN; Nagarajan ; et al. | 2011-09-15 |
High Mobility Monolithic P-i-n Diodes
App 20110136327 - Han; Xinhai ; et al. | 2011-06-09 |
Plasma Surface Treatment To Prevent Pattern Collapse In Immersion Lithography
App 20110111604 - Kim; Eui Kyoon ; et al. | 2011-05-12 |
Method For Depositing An Amorphous Carbon Film With Improved Density And Step Coverage
App 20110104400 - Padhi; Deenesh ; et al. | 2011-05-05 |
Apparatus And Method For Substrate Clamping In A Plasma Chamber
App 20110090613 - Balasubramanian; Ganesh ; et al. | 2011-04-21 |
Method for depositing an amorphous carbon film with improved density and step coverage
Grant 7,867,578 - Padhi , et al. January 11, 2 | 2011-01-11 |
Novel Air Gap Integration Scheme
App 20100151671 - Demos; Alexandros T. ; et al. | 2010-06-17 |
Reduction of hillocks prior to dielectric barrier deposition in Cu damascene
Grant 7,723,228 - Rajagopalan , et al. May 25, 2 | 2010-05-25 |
Method for Depositing Conformal Amorphous Carbon Film by Plasma-Enhanced Chemical Vapor Deposition (PECVD)
App 20100093187 - Lee; Kwangduk Douglas ; et al. | 2010-04-15 |
High Temperature Bd Development For Memory Applications
App 20100087062 - Lakshmanan; Annamalai ; et al. | 2010-04-08 |
Air gap integration scheme
Grant 7,670,924 - Demos , et al. March 2, 2 | 2010-03-02 |
Blocker plate bypass to distribute gases in a chemical vapor deposition system
Grant 7,572,337 - Rocha-Alvarez , et al. August 11, 2 | 2009-08-11 |
Elimination Of Photoresist Material Collapse And Poisoning In 45-nm Feature Size Using Dry Or Immersion Lithography
App 20090197086 - Rathi; Sudha ; et al. | 2009-08-06 |
Plasma Surface Treatment To Prevent Pattern Collapse In Immersion Lithography
App 20090104541 - Kim; Eui Kyoon ; et al. | 2009-04-23 |
Methods For High Temperature Deposition Of An Amorphous Carbon Layer
App 20090093128 - SEAMONS; MARTIN JAY ; et al. | 2009-04-09 |
High Productivity Plasma Processing Chamber
App 20090068356 - SILVETTI; MARIO David ; et al. | 2009-03-12 |
Semiconductor Device Having Silicon Carbide And Conductive Pathway Interface
App 20090050902 - Huang; Judy H. ; et al. | 2009-02-26 |
Plasma-induced Charge Damage Control For Plasma Enhanced Chemical Vapor Deposition Processes
App 20080254233 - LEE; KWANGDUK DOUGLAS ; et al. | 2008-10-16 |
Liquid precursors for the CVD deposition of amorphous carbon films
Grant 7,407,893 - Seamons , et al. August 5, 2 | 2008-08-05 |
Uv Curing Of Pecvd-deposited Sacrificial Polymer Films For Air-gap Ild
App 20080182403 - NOORI; ATIF ; et al. | 2008-07-31 |
Processing Chamber With Heated Chamber Liner
App 20080178797 - FODOR; MARK A. ; et al. | 2008-07-31 |
Novel Air Gap Integration Scheme
App 20080182404 - DEMOS; ALEXANDROS T. ; et al. | 2008-07-31 |
Hermetic cap layers formed on low-.kappa. films by plasma enhanced chemical vapor deposition
Grant 7,399,364 - Nguyen , et al. July 15, 2 | 2008-07-15 |
Method For Depositing An Amorphous Carbon Film With Improved Density And Step Coverage
App 20080153311 - Padhi; Deenesh ; et al. | 2008-06-26 |
Reduction of hillocks prior to dielectric barrier deposition in Cu damascene
Grant 7,371,427 - Rajagopalan , et al. May 13, 2 | 2008-05-13 |
Apparatus And Method For Substrate Clamping In A Plasma Chamber
App 20080084650 - Balasubramanian; Ganesh ; et al. | 2008-04-10 |
Overall defect reduction for PECVD films
App 20080050932 - Lakshmanan; Annamalai ; et al. | 2008-02-28 |
Method for plasma processing
App 20080008842 - Soo; Jyr Hong ; et al. | 2008-01-10 |
Method For Depositing an Amorphous Carbon Film with Improved Density and Step Coverage
App 20080003824 - Padhi; Deenesh ; et al. | 2008-01-03 |
Methods for low temperature deposition of an amorphous carbon layer
App 20070286954 - Tang; Sum-Yee ; et al. | 2007-12-13 |
Elimination Of First Wafer Effect For Pecvd Films
App 20070281083 - LAKSHMANAN; ANNAMALAI ; et al. | 2007-12-06 |
Hermetic low dielectric constant layer for barrier applications
Grant 7,288,205 - Lakshmanan , et al. October 30, 2 | 2007-10-30 |
Hermetic cap layers formed on low-k films by plasma enhanced chemical vapor deposition
Grant 7,285,503 - Nguyen , et al. October 23, 2 | 2007-10-23 |
Situ oxide cap layer development
Grant 7,273,823 - Lakshmanan , et al. September 25, 2 | 2007-09-25 |
Low-k spacer integration into CMOS transistors
App 20070202640 - Al-Bayati; Amir ; et al. | 2007-08-30 |
Interface engineering to improve adhesion between low k stacks
Grant 7,259,111 - Padhi , et al. August 21, 2 | 2007-08-21 |
Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile
Grant 7,189,658 - Lakshmanan , et al. March 13, 2 | 2007-03-13 |
Non-intrusive plasma monitoring system for arc detection and prevention for blanket CVD films
App 20070042131 - Soo; Jyr Hong ; et al. | 2007-02-22 |
In situ oxide cap layer development
App 20060276054 - Lakshmanan; Annamalai ; et al. | 2006-12-07 |
Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile
App 20060252273 - Lakshmanan; Annamalai ; et al. | 2006-11-09 |
Hermetic Cap Layers Formed On Low-k Films By Plasma Enhanced Chemical Vapor Deposition
App 20060219174 - Nguyen; Vu Ngoc Tran ; et al. | 2006-10-05 |
Nitrogen-free dielectric anti-reflective coating and hardmask
Grant 7,105,460 - Kim , et al. September 12, 2 | 2006-09-12 |
Bi-layer approach for a hermetic low dielectric constant layer for barrier applications
Grant 7,091,137 - Lee , et al. August 15, 2 | 2006-08-15 |
Interface engineering to improve adhesion between low k stacks
App 20060160376 - Padhi; Deenesh ; et al. | 2006-07-20 |
Method of forming low dielectric constant porous films
Grant 7,060,638 - Nguyen , et al. June 13, 2 | 2006-06-13 |
Hermetic low dielectric constant layer for barrier applications
App 20060006140 - Lakshmanan; Annamalai ; et al. | 2006-01-12 |
Liquid precursors for the CVD deposition of amorphous carbon films
App 20050287771 - Seamons, Martin Jay ; et al. | 2005-12-29 |
Hermetic cap layers formed on low-k films by plasma enhanced chemical vapor deposition
App 20050282404 - Nguyen, Vu Ngoc Tran ; et al. | 2005-12-22 |
Advanced low dielectric constant barrier layers
App 20050277302 - Nguyen, Son Van ; et al. | 2005-12-15 |
Semiconductor device having silicon carbide and conductive pathway interface
App 20050263900 - Huang, Judy H. ; et al. | 2005-12-01 |
Blocker plate bypass to distribute gases in a chemical vapor deposition system
App 20050263248 - Rocha-Alvarez, Juan Carlos ; et al. | 2005-12-01 |
High productivity plasma processing chamber
App 20050229849 - Silvetti, Mario David ; et al. | 2005-10-20 |
Low dielectric constant porous films
App 20050215065 - Nguyen, Son Van ; et al. | 2005-09-29 |
Plasma treatment for copper oxide reduction
Grant 6,946,401 - Huang , et al. September 20, 2 | 2005-09-20 |
Nitrogen-free dielectric anti-reflective coating and hardmask
Grant 6,927,178 - Kim , et al. August 9, 2 | 2005-08-09 |
Bi-layer approach for a hermetic low dielectric constant layer for barrier applications
App 20050042889 - Lee, Albert ; et al. | 2005-02-24 |
Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber
Grant 6,843,881 - Kim , et al. January 18, 2 | 2005-01-18 |
Reduction of hillocks prior to dielectric barrier deposition in Cu damascene
App 20040235292 - Rajagopalan, Nagarajan ; et al. | 2004-11-25 |
Reduction of hillocks prior to dielectric barrier deposition in Cu damascene
App 20040231795 - Rajagopalan, Nagarajan ; et al. | 2004-11-25 |
Nitrogen-free dielectric anti-reflective coating and hardmask
App 20040214446 - Kim, Bok Hoen ; et al. | 2004-10-28 |
Plasma treatment for copper oxide reduction
App 20040046260 - Huang, Judy H. ; et al. | 2004-03-11 |
Semiconductor device having reduced oxidation interface
Grant 6,700,202 - Huang , et al. March 2, 2 | 2004-03-02 |
Nitrogen-free dielectric anti-reflective coating and hardmask
App 20040009676 - Kim, Bok Hoen ; et al. | 2004-01-15 |
Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber
App 20030185966 - Kim, Bok Hoen ; et al. | 2003-10-02 |
Method and apparatus for reducing particle contamination on wafer backside during CVD process
Grant 6,413,321 - Kim , et al. July 2, 2 | 2002-07-02 |
Apparatus for reducing copper oxidation and contamination in a semiconductor device
App 20020081856 - Huang, Judy H. ; et al. | 2002-06-27 |
Method and apparatus for reducing copper oxidation and contamination in a semiconductor device
Grant 6,355,571 - Huang , et al. March 12, 2 | 2002-03-12 |
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