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METHOD OF PRODUCING SiC-Si COMPOSITE COMPONENT AND SiC-Si COMPOSITE COMPONENT
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Composition for bonding
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Composition For Bonding
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Synthetic silica glass optical component and process for its production
Grant 8,402,786 - Ikuta , et al. March 26, 2 | 2013-03-26 |
Glass Substrate For Forming Through-substrate Via Of Semiconductor Device
App 20130034688 - Koike; Akio ; et al. | 2013-02-07 |
Glass Substrate For Forming Through-substrate Via Of Semiconductor Device
App 20130034687 - KOIKE; Akio ; et al. | 2013-02-07 |
Mask blanks
Grant 8,323,856 - Kikugawa , et al. December 4, 2 | 2012-12-04 |
Process For Producing Article Having Fine Concave And Convex Structure On Surface
App 20120292793 - KOIKE; Akio ; et al. | 2012-11-22 |
Artificial quartz member, process for producing the same, and optical element comprising the same
Grant 8,257,675 - Agata , et al. September 4, 2 | 2012-09-04 |
Tio2-containing Silica Glass, And Optical Member For Euv Lithography
App 20120149543 - KOIKE; Akio ; et al. | 2012-06-14 |
TiO.sub.2-containing silica glass and optical member for EUV lithography using high energy densities as well as special temperature controlled process for its manufacture
Grant 8,178,450 - Koike , et al. May 15, 2 | 2012-05-15 |
TiO.sub.2-containing silica glass and optical member for EUV lithography using the same
Grant 8,093,165 - Koike , et al. January 10, 2 | 2012-01-10 |
TIO.sub.2-containing silica glass and optical member for lithography using the same
Grant 8,034,731 - Koike , et al. October 11, 2 | 2011-10-11 |
TiO.sub.2-containing silica glass and optical member for lithography using the same
Grant 7,998,892 - Koike , et al. August 16, 2 | 2011-08-16 |
TiO.sub.2-containing silica glass
Grant 7,989,378 - Koike , et al. August 2, 2 | 2011-08-02 |
Mask Blanks
App 20110053059 - Kikugawa; Shinya ; et al. | 2011-03-03 |
Tio2-containing Silica Glass And Optical Member For Lithography Using The Same
App 20100323873 - Koike; Akio ; et al. | 2010-12-23 |
Tio2-containing Silica Glass And Optical Member For Euv Lithography Using High Energy Densities As Well As Special Temperature Controlled Process For Its Manufacture
App 20100323871 - Koike; Akio ; et al. | 2010-12-23 |
Tio2-containing Silica Glass And Optical Member For Euv Lithography Using The Same
App 20100323872 - KOIKE; Akio ; et al. | 2010-12-23 |
Tio2-containing Silica Glass And Optical Member For Lithography Using The Same
App 20100317505 - KOIKE; Akio ; et al. | 2010-12-16 |
Tio2-containing Silica Glass
App 20100261597 - KOIKE; Akio ; et al. | 2010-10-14 |
Optical member made of synthetic quartz glass, and process for its production
Grant 7,784,307 - Ogawa , et al. August 31, 2 | 2010-08-31 |
Process For Producing Silica Glass Containing Tio2, And Optical Material For Euv Lithography Employing Silica Glass Containing Tio2
App 20090242387 - KOIKE; Akio ; et al. | 2009-10-01 |
Quartz glass substrate and process for its production
Grant 7,592,063 - Ikuta , et al. September 22, 2 | 2009-09-22 |
Silica glass and optical material
Grant 7,585,800 - Kawata , et al. September 8, 2 | 2009-09-08 |
Artificial Quartz Member, Process For Producing The Same, And Optical Element Comprising The Same
App 20090104103 - AGATA; Noriyuki ; et al. | 2009-04-23 |
Photomask substrate made of synthetic quartz glass and photomask
Grant 7,491,475 - Kikugawa , et al. February 17, 2 | 2009-02-17 |
Silica glass containing TiO.sub.2 and process for its production
Grant 7,419,924 - Koike , et al. September 2, 2 | 2008-09-02 |
Silica Glass And Optical Material
App 20080103038 - Kawata; Mitsuhiro ; et al. | 2008-05-01 |
Quartz glass substrate and process for its production
App 20080057291 - Ikuta; Yoshiaki ; et al. | 2008-03-06 |
Quartz-type Glass And Process For Its Production
App 20080039310 - HAYASHI; Hideaki ; et al. | 2008-02-14 |
Mask Blanks
App 20080032213 - KIKUGAWA; Shinya ; et al. | 2008-02-07 |
Process For Producing Silica Glass Containing Tio2, And Optical Material For Euv Lithography Employing Silica Glass Containing Tio2
App 20070207911 - KOIKE; Akio ; et al. | 2007-09-06 |
Silica glass containing TiO2 and process for its production
App 20070042893 - Koike; Akio ; et al. | 2007-02-22 |
Optical member made of synthetic quartz glass, and process for its production
App 20070027018 - Ogawa; Tomonori ; et al. | 2007-02-01 |
Photomask substrate made of synthetic quartz glass and photomask
App 20060246363 - Kikugawa; Shinya ; et al. | 2006-11-02 |
Synthetic quartz glass and process for producing it
Grant 7,022,633 - Ikuta , et al. April 4, 2 | 2006-04-04 |
Ultraviolet and vacuum ultraviolet antireflection substrate
Grant 6,829,084 - Takaki , et al. December 7, 2 | 2004-12-07 |
Structure for attaching a pellicle to a photo-mask
Grant 6,795,170 - Mishiro , et al. September 21, 2 | 2004-09-21 |
Pellicle
Grant 6,744,562 - Okada , et al. June 1, 2 | 2004-06-01 |
Pellicle and method of using the same
Grant 6,713,200 - Arishima , et al. March 30, 2 | 2004-03-30 |
Ultraviolet and vacuum ultraviolet antireflection substrate
App 20030214704 - Takaki, Satoru ; et al. | 2003-11-20 |
Synthetic quartz glass and process for producing it
App 20030195107 - Ikuta, Yoshiaki ; et al. | 2003-10-16 |
Ultraviolet and vacuum ultraviolet antireflection substrate
Grant 6,628,456 - Takaki , et al. September 30, 2 | 2003-09-30 |
Exposure apparatus, semiconductor device, and photomask
Grant 6,611,317 - Ogawa , et al. August 26, 2 | 2003-08-26 |
Synthetic quartz glass and method for preparing the same
Grant 6,576,578 - Ikuta , et al. June 10, 2 | 2003-06-10 |
Structure for attaching a pellicle to a photo-mask
App 20030095245 - Mishiro, Hitoshi ; et al. | 2003-05-22 |
Synthetic quartz glass for optical member, process for producing the same, and method of using the same
Grant 6,544,914 - Kikugawa , et al. April 8, 2 | 2003-04-08 |
Synthetic silica glass optical component and process for its production
App 20030051507 - Ikuta, Yoshiaki ; et al. | 2003-03-20 |
Pellicle
App 20030035222 - Okada, Kaname ; et al. | 2003-02-20 |
Ultraviolet and vacuum ultraviolet antireflection substrate
App 20030025991 - Takaki, Satoru ; et al. | 2003-02-06 |
Pellicle and method for manufacture thereof
Grant 6,475,575 - Ikuta , et al. November 5, 2 | 2002-11-05 |
Pellicle and method of using the same
App 20020007907 - Arishima, Hiroshi ; et al. | 2002-01-24 |
Container for an optical article
App 20010035361 - Mishiro, Hitoshi ; et al. | 2001-11-01 |
Quartz glass substrate for polysilicon thin film transistor liquid crystal display
Grant 5,330,941 - Yaba , et al. July 19, 1 | 1994-07-19 |
Solar cell substrate and process for its production
Grant 5,252,140 - Kobayashi , et al. October 12, 1 | 1993-10-12 |
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