Kellogg; Michael C.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kellogg; Michael C..The latest application filed is for "ring structures and systems for use in a plasma chamber".

Company Profile

12.44.43

Kellogg; Michael C. - San Francisco CA
Kellogg; Michael C. - Oakland CA
Kellogg; Michael C. - Pleasanton CA
Kellogg; Michael C. - Dublin CA
Kellogg; Michael C. - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators Grant 11,195,706 - Marakhtanov , et al. December 7, 2	2021-12-07
Monolithic gas distribution manifold and various construction techniques and use cases therefor Grant 10,914,003 - Lee , et al. February 9, 2	2021-02-09
Ring Structures and Systems for Use in a Plasma Chamber App 20200365378 - Kellogg; Michael C. ; et al.	2020-11-19
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring Grant 10,825,656 - Kellogg , et al. November 3, 2	2020-11-03
Systems And Methods For Controlling Directionality Of Ions In An Edge Region By Using An Electrode Within A Coupling Ring App 20200227238 - Kellogg; Michael C. ; et al.	2020-07-16
Chamber with vertical support stem for symmetric conductance and RF delivery Grant 10,665,435 - Brown , et al.	2020-05-26
Monolithic Gas Distribution Manifold And Various Construction Techniques And Use Cases Therefor App 20200141002 - Lee; Andrew C. ; et al.	2020-05-07
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring Grant 10,615,003 - Kellogg , et al.	2020-04-07
Monolithic gas distribution manifold and various construction techniques and use cases therefor Grant 10,557,197 - Lee , et al. Feb	2020-02-11
Chamber With Vertical Support Stem For Symmetric Conductance And Rf Delivery App 20190371579 - Brown; Daniel Arthur ; et al.	2019-12-05
Chamber with vertical support stem for symmetric conductance and RF delivery Grant 10,395,902 - Brown , et al. A	2019-08-27
Systems And Methods For Achieving A Pre-determined Factor Associated With An Edge Region Within A Plasma Chamber By Synchronizin App 20190244788 - Marakhtanov; Alexei ; et al.	2019-08-08
Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators Grant 10,283,330 - Marakhtanov , et al.	2019-05-07
Systems And Methods For Controlling Directionality Of Ions In An Edge Region By Using An Electrode Within A Coupling Ring App 20190057839 - Kellogg; Michael C. ; et al.	2019-02-21
Plasma Processing Devices Having Multi-port Valve Assemblies App 20180323041 - Brown; Daniel A. ; et al.	2018-11-08
Chamber With Vertical Support Stem For Symmetric Conductance And Rf Delivery App 20180323044 - Brown; Daniel Arthur ; et al.	2018-11-08
Monolithic manifold mask and substrate concepts Grant 10,118,263 - Kellogg , et al. November 6, 2	2018-11-06
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring Grant 10,115,568 - Kellogg , et al. October 30, 2	2018-10-30
Chamber with vertical support stem for symmetric conductance and RF delivery Grant 10,049,862 - Brown , et al. August 14, 2	2018-08-14
Plasma processing devices having multi-port valve assemblies Grant 10,037,869 - Brown , et al. July 31, 2	2018-07-31
Systems And Methods For Controlling Directionality Of Ions In An Edge Region By Using An Electrode Within A Coupling Ring App 20180082822 - Kellogg; Michael C. ; et al.	2018-03-22
Systems And Methods For Achieving A Pre-determined Factor Associated With An Edge Region Within A Plasma Chamber By Synchronizing Main And Edge Rf Generators App 20180025891 - Marakhtanov; Alexei ; et al.	2018-01-25
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring Grant 9,852,889 - Kellogg , et al. December 26, 2	2017-12-26
Monolithic Manifold Mask And Substrate Concepts App 20170057028 - Kellogg; Michael C. ; et al.	2017-03-02
Chamber With Vertical Support Stem For Symmetric Conductance And Rf Delivery App 20160307743 - Brown; Daniel Arthur ; et al.	2016-10-20
Monolithic Gas Distribution Manifold And Various Construction Techniques And Use Cases Therefor App 20160108523 - Lee; Andrew C. ; et al.	2016-04-21
Substrate For Mounting Gas Supply Components And Methods Thereof App 20160111257 - Kellogg; Michael C. ; et al.	2016-04-21
Movable Ground Ring For Movable Substrate Support Assembly Of A Plasma Processing Chamber App 20160050781 - Kellogg; Michael C. ; et al.	2016-02-18
Plasma Processing Devices Having Multi-port Valve Assemblies App 20160033977 - Brown; Daniel A. ; et al.	2016-02-04
Silicon Containing Confinement Ring For Plasma Processing Apparatus And Method Of Forming Thereof App 20150364322 - KELLOGG; Michael C.	2015-12-17
Consumable isolation ring for movable substrate support assembly of a plasma processing chamber Grant 9,171,702 - Kellogg , et al. October 27, 2	2015-10-27
Silicon containing confinement ring for plasma processing apparatus and method of forming thereof Grant 9,123,661 - Kellogg September 1, 2	2015-09-01
Gas feed insert in a plasma processing chamber and methods therefor Grant 9,111,731 - de la Llera , et al. August 18, 2	2015-08-18
Pressure controlled heat pipe temperature control plate Grant 8,975,817 - Kellogg , et al. March 10, 2	2015-03-10
Plasma Processing Devices Having Multi-Port Valve Assemblies App 20150047785 - Kellogg; Michael C. ; et al.	2015-02-19
Silicon Containing Confinement Ring For Plasma Processing Apparatus And Method Of Forming Thereof App 20150044873 - Kellogg; Michael C.	2015-02-12
Plasma Processing Chamber With Removable Body App 20150041062 - KELLOGG; Michael C. ; et al.	2015-02-12
Edge Ring Assembly For Plasma Etching Chambers App 20140367047 - Kang; Michael S. ; et al.	2014-12-18
Local plasma confinement and pressure control arrangement and methods thereof Grant 8,900,398 - Dhindsa , et al. December 2, 2	2014-12-02
Edge ring assembly for plasma etching chambers Grant 8,845,856 - Kang , et al. September 30, 2	2014-09-30
Movable grounding arrangements in a plasma processing chamber and methods therefor Grant 8,847,495 - de la Llera , et al. September 30, 2	2014-09-30
C-shaped confinement ring for a plasma processing chamber Grant 8,826,855 - Kellogg , et al. September 9, 2	2014-09-09
Clamped monolithic showerhead electrode Grant 8,796,153 - Patrick , et al. August 5, 2	2014-08-05
Pressure Controlled Heat Pipe Temperature Control Plate App 20140103806 - Kellogg; Michael C. ; et al.	2014-04-17
Rf Ground Return In Plasma Processing Systems And Methods Therefor App 20140060739 - Dhindsa; Rajinder ; et al.	2014-03-06
Cam lock electrode clamp Grant 8,628,268 - Kellogg , et al. January 14, 2	2014-01-14
Clamped Monolithic Showerhead Electrode App 20130337654 - Patrick; Roger ; et al.	2013-12-19
Showerhead electrode Grant 8,573,152 - de la Llera , et al. November 5, 2	2013-11-05
Movable ground ring for a plasma processing chamber Grant 8,485,128 - Kellogg , et al. July 16, 2	2013-07-16
Cam-locked showerhead electrode and assembly Grant 8,470,127 - de la Llera , et al. June 25, 2	2013-06-25
Edge rings for electrostatic chucks Grant 8,469,368 - Kenworthy , et al. June 25, 2	2013-06-25
Movable Grounding Arrangements In A Plasma Processing Chamber And Methods Therefor App 20130134876 - de la Llera; Anthony ; et al.	2013-05-30
Gas Feed Insert In A Plasma Processing Chamber And Methods Therefor App 20130134138 - de la Llera; Anthony ; et al.	2013-05-30
Clamped monolithic showerhead electrode Grant 8,414,719 - Patrick , et al. April 9, 2	2013-04-09
Clamped showerhead electrode assembly Grant 8,313,805 - Kadkhodayan , et al. November 20, 2	2012-11-20
Clamped Monolithic Showerhead Electrode App 20120258603 - Patrick; Roger ; et al.	2012-10-11
Clamped monolithic showerhead electrode Grant 8,221,582 - Patrick , et al. July 17, 2	2012-07-17
Cam-locked Showerhead Electrode And Assembly App 20120175062 - de la Llera; Anthony ; et al.	2012-07-12
Clamped Showerhead Electrode Assembly App 20120171872 - Kadkhodayan; Babak ; et al.	2012-07-05
Showerhead electrode Grant 8,206,506 - Kadkhodayan , et al. June 26, 2	2012-06-26
Clamped showerhead electrode assembly Grant 8,161,906 - Kadkhodayan , et al. April 24, 2	2012-04-24
Showerhead Electrode App 20120055632 - de la Llera; Anthony ; et al.	2012-03-08
Consumable Isolation Ring For Movable Substrate Support Assembly Of A Plasma Processing Chamber App 20120000605 - Kellogg; Michael C. ; et al.	2012-01-05
Movable Ground Ring For A Plasma Processing Chamber App 20120003836 - Kellogg; Michael C. ; et al.	2012-01-05
C-shaped Confinement Ring For A Plasma Processing Chamber App 20120000608 - Kellogg; Michael C. ; et al.	2012-01-05
Edge Ring Assembly For Plasma Etching Chambers App 20110126984 - Kang; Michael S. ; et al.	2011-06-02
Local Plasma Confinement And Pressure Control Arrangement And Methods Thereof App 20110108524 - Dhindsa; Rajinder ; et al.	2011-05-12
Cam Lock Electrode Clamp App 20110042879 - Kellogg; Michael C. ; et al.	2011-02-24
Edge Rings For Electrostatic Chucks App 20100044974 - Kenworthy; Ian Jared ; et al.	2010-02-25
Showerhead electrode App 20100000683 - Kadkhodayan; Babak ; et al.	2010-01-07
Clamped showerhead electrode assembly App 20100003824 - Kadkhodayan; Babak ; et al.	2010-01-07
Clamped monolithic showerhead electrode App 20100003829 - Patrick; Roger ; et al.	2010-01-07

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