| Patent | Date |
|---|
Method for controlling heat flow within a silicon melt using a heat diffusion barrier assembly
Grant 10,801,125 - Kellerman , et al. October 13, 2 | 2020-10-13 |
Method for achieving sustained anisotropic crystal growth on the surface of a silicon melt
Grant 10,662,548 - Mackintosh , et al. | 2020-05-26 |
Apparatus For Forming Crystalline Sheet From A Melt
App 20200115819 - Sun; Dawei ; et al. | 2020-04-16 |
Apparatus for forming crystalline sheet from a melt
Grant 10,526,720 - Sun , et al. J | 2020-01-07 |
Apparatus For Controlling Heat Flow Within A Silicon Melt
App 20190338442 - Kellerman; Peter L. ; et al. | 2019-11-07 |
Apparatus and method for controlling ion beam properties using energy filter
Grant 10,468,224 - Radovanov , et al. No | 2019-11-05 |
Apparatus For Controlling Heat Flow Within A Silicon Melt
App 20190284715 - Kellerman; Peter L. ; et al. | 2019-09-19 |
Apparatus for controlling heat flow within a silicon melt
Grant 10,415,151 - Kellerman , et al. Sept | 2019-09-17 |
Apparatus And Method For Controlling Ion Beam Properties Using Energy Filter
App 20190198283 - Radovanov; Svetlana ; et al. | 2019-06-27 |
Apparatus and method for crystalline sheet growth
Grant 10,179,958 - Kellerman , et al. Ja | 2019-01-15 |
Apparatus and method for controlling thickness of a crystalline sheet grown on a melt
Grant 10,030,317 - Kellerman , et al. July 24, 2 | 2018-07-24 |
Method For Achieving Sustained Anisotropic Crystal Growth On The Surface Of A Silicon Melt
App 20180202066 - Mackintosh; Brian H. ; et al. | 2018-07-19 |
Method for achieving sustained anisotropic crystal growth on the surface of a silicon melt
Grant 9,970,125 - Mackintosh , et al. May 15, 2 | 2018-05-15 |
System and method for crystalline sheet growth using a cold block and gas jet
Grant 9,957,636 - Kellerman , et al. May 1, 2 | 2018-05-01 |
Apparatus And Method For Crystalline Sheet Growth
App 20180080142 - Kellerman; Peter L. ; et al. | 2018-03-22 |
System And Method For Crystalline Sheet Growth Using A Cold Block And Gas Jet
App 20180047864 - Kellerman; Peter L. ; et al. | 2018-02-15 |
Liquid immersion doping
Grant 9,805,931 - Sinclair , et al. October 31, 2 | 2017-10-31 |
System For Measuring Material Thicknesses At High Temperatures
App 20170247810 - Kellerman; Peter L. ; et al. | 2017-08-31 |
Sheet production apparatus for removing a crystalline sheet from the surface of a melt using gas jets located above and below the crystalline sheet
Grant 9,677,193 - Kellerman , et al. June 13, 2 | 2017-06-13 |
Apparatus for processing a melt
Grant 9,587,324 - Carlson , et al. March 7, 2 | 2017-03-07 |
Liquid Immersion Doping
App 20170062221 - Sinclair; Frank ; et al. | 2017-03-02 |
Apparatus For Forming Crystalline Sheet From A Melt
App 20170051430 - SUN; Dawei ; et al. | 2017-02-23 |
Apparatus and method for monitoring and controlling thickness of a crystalline layer
Grant 9,574,285 - Sinclair , et al. February 21, 2 | 2017-02-21 |
Melt purification and delivery system
Grant 9,567,691 - Kellerman , et al. February 14, 2 | 2017-02-14 |
Apparatus And Method For Monitoring And Controlling Thickness Of A Crystalline Layer
App 20160168748 - Sinclair; Frank ; et al. | 2016-06-16 |
Apparatus And Method For Controlling Thickness Of A Crystalline Sheet Grown On A Melt
App 20160108549 - Kellerman; Peter L. ; et al. | 2016-04-21 |
Gas-lift pumps for flowing and purifying molten silicon
Grant 9,267,219 - Kellerman , et al. February 23, 2 | 2016-02-23 |
Apparatus For Processing A Melt
App 20150322590 - Carlson; Frederick M. ; et al. | 2015-11-12 |
Floating sheet production apparatus and method
Grant 9,112,064 - Kellerman , et al. August 18, 2 | 2015-08-18 |
Method For Achieving Sustained Anisotropic Crystal Growth On The Surface Of A Melt
App 20150040818 - Kellerman; Peter L. ; et al. | 2015-02-12 |
Removing A Sheet From The Surface Of A Melt Using Gas Jets
App 20140209016 - Kellerman; Peter L. ; et al. | 2014-07-31 |
Removing a sheet from the surface of a melt using elasticity and buoyancy
Grant 8,764,901 - Kellerman , et al. July 1, 2 | 2014-07-01 |
Apparatus For Float Grown Crystalline Sheets
App 20140096713 - Sinclair; Frank ; et al. | 2014-04-10 |
Removing a sheet from the surface of a melt using gas jets
Grant 8,685,162 - Kellerman , et al. April 1, 2 | 2014-04-01 |
Method for continuous formation of a purified sheet from a melt
Grant 8,545,624 - Kellerman , et al. October 1, 2 | 2013-10-01 |
Method and apparatus for controlling an asymmetric electrostatic lens about a central ray trajectory of an ion beam
Grant 8,519,353 - Radovanov , et al. August 27, 2 | 2013-08-27 |
Method For Achieving Sustained Anisotropic Crystal Growth On The Surface Of A Silicon Melt
App 20130213295 - Mackintosh; Brian H. ; et al. | 2013-08-22 |
Method For Achieving Sustained Anisotropic Crystal Growth On The Surface Of A Melt
App 20130213296 - Kellerman; Peter L. ; et al. | 2013-08-22 |
Method of controlling a thickness of a sheet formed from a melt
Grant 8,475,591 - Kellerman , et al. July 2, 2 | 2013-07-02 |
Removal of a sheet from a production apparatus
Grant 8,226,903 - Kellerman , et al. July 24, 2 | 2012-07-24 |
Method And Apparatus For Controlling An Electrostatic Lens About A Central Ray Trajectory Of An Ion Beam
App 20120168637 - Radovanov; Svetlana ; et al. | 2012-07-05 |
System and method for controlling deflection of a charged particle beam within a graded electrostatic lens
Grant 8,129,695 - Kellerman , et al. March 6, 2 | 2012-03-06 |
Floating sheet measurement apparatus and method
Grant 8,064,071 - Rowland , et al. November 22, 2 | 2011-11-22 |
Removing A Sheet From The Surface Of A Melt Using Gas Jets
App 20110271899 - Kellerman; Peter L. ; et al. | 2011-11-10 |
Gas-lift Pumps For Flowing And Purifying Molten Silicon
App 20110271897 - Kellerman; Peter L. ; et al. | 2011-11-10 |
Removing A Sheet From The Surface Of A Melt Using Elasticity And Buoyancy
App 20110272115 - Kellerman; Peter L. ; et al. | 2011-11-10 |
Removal Of A Sheet From A Production Apparatus
App 20110271901 - Kellerman; Peter L. ; et al. | 2011-11-10 |
Removal of a sheet from a production apparatus
Grant 7,998,224 - Kellerman , et al. August 16, 2 | 2011-08-16 |
System And Method For Controlling Deflection Of A Charged Particle Beam Within A Graded Electrostatic Lens
App 20110155921 - Kellerman; Peter L. ; et al. | 2011-06-30 |
Floating Sheet Production Apparatus And Method
App 20110117234 - Kellerman; Peter L. ; et al. | 2011-05-19 |
Techniques for independently controlling deflection, deceleration and focus of an ion beam
Grant 7,888,653 - Kellerman , et al. February 15, 2 | 2011-02-15 |
Method And Apparatus For Producing A Dislocation-free Crystalline Sheet
App 20110003024 - KELLERMAN; Peter L. ; et al. | 2011-01-06 |
Floating sheet production apparatus and method
Grant 7,855,087 - Kellerman , et al. December 21, 2 | 2010-12-21 |
Method and apparatus for producing a dislocation-free crystalline sheet
Grant 7,816,153 - Kellerman , et al. October 19, 2 | 2010-10-19 |
Electromagnet with active field containment
Grant 7,800,082 - Kellerman , et al. September 21, 2 | 2010-09-21 |
Removal Of A Sheet From A Production Apparatus
App 20100221142 - KELLERMAN; Peter L. ; et al. | 2010-09-02 |
Techniques For Independently Controlling Deflection, Deceleration And Focus Of An Ion Beam
App 20100171042 - KELLERMAN; Peter L. ; et al. | 2010-07-08 |
Segmented resonant antenna for radio frequency inductively coupled plasmas
Grant 7,748,344 - DiVergilio , et al. July 6, 2 | 2010-07-06 |
Technique for shaping a ribbon-shaped ion beam
Grant 7,675,047 - Radovanov , et al. March 9, 2 | 2010-03-09 |
Melt Purification And Delivery System
App 20100050686 - Kellerman; Peter L. ; et al. | 2010-03-04 |
Sheet Thickness Control
App 20100038826 - Kellerman; Peter L. ; et al. | 2010-02-18 |
Melt Purification And Delivery System
App 20090315220 - Kellerman; Peter L. ; et al. | 2009-12-24 |
Method And Apparatus For Producing A Dislocation-free Crystalline Sheet
App 20090302281 - Kellerman; Peter L. ; et al. | 2009-12-10 |
Methods and systems for trapping ion beam particles and focusing an ion beam
Grant 7,598,495 - Kellerman , et al. October 6, 2 | 2009-10-06 |
Floating Sheet Production Apparatus And Method
App 20090233396 - KELLERMAN; Peter L. ; et al. | 2009-09-17 |
Floating Sheet Measurement Apparatus And Method
App 20090231597 - ROWLAND; Christopher A. ; et al. | 2009-09-17 |
Techniques For Measuring And Controlling Ion Beam Angle And Density Uniformity
App 20090121122 - Kellerman; Peter L. ; et al. | 2009-05-14 |
Techniques For Shaping An Ion Beam
App 20090121149 - Radovanov; Svetlana ; et al. | 2009-05-14 |
System and method for performing SIMOX implants using an ion shower
Grant 7,421,973 - Kellerman , et al. September 9, 2 | 2008-09-09 |
Architecture for ribbon ion beam ion implanter system
Grant 7,394,079 - Saadatmand , et al. July 1, 2 | 2008-07-01 |
Methods And Systems For Trapping Ion Beam Particles And Focusing An Ion Beam
App 20070295901 - Kellerman; Peter L. ; et al. | 2007-12-27 |
Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights
Grant 7,267,520 - Kellerman , et al. September 11, 2 | 2007-09-11 |
Electromagnet With Active Field Containment
App 20070187619 - Kellerman; Peter L. ; et al. | 2007-08-16 |
Architecture For Ribbon Ion Beam Ion Implanter System
App 20070176122 - Saadatmand; Kourosh ; et al. | 2007-08-02 |
Technique for Shaping a Ribbon-Shaped Ion Beam
App 20070108390 - Radovanov; Svetlana B. ; et al. | 2007-05-17 |
Segmented resonant antenna for radio frequency inductively coupled plasmas
App 20070044717 - DiVergilio; William F. ; et al. | 2007-03-01 |
High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer
Grant 7,151,658 - Kellerman , et al. December 19, 2 | 2006-12-19 |
Ion beam scanning control methods and systems for ion implantation uniformity
Grant 7,078,707 - Benveniste , et al. July 18, 2 | 2006-07-18 |
Ion Beam Scanning Control Methods And Systems For Ion Implantation Uniformity
App 20060145096 - Benveniste; Victor M. ; et al. | 2006-07-06 |
Clamping and de-clamping semiconductor wafers on a J-R electrostatic chuck having a micromachined surface by using force delay in applying a single-phase square wave AC clamping voltage
Grant 7,072,166 - Qin , et al. July 4, 2 | 2006-07-04 |
MEMS based multi-polar electrostatic chuck
Grant 7,072,165 - Kellerman , et al. July 4, 2 | 2006-07-04 |
Gas-cooled clamp for RTP
Grant 7,033,443 - Kellerman , et al. April 25, 2 | 2006-04-25 |
Systems and methods for ion beam focusing
Grant 7,019,314 - Benveniste , et al. March 28, 2 | 2006-03-28 |
Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights
App 20050254932 - Kellerman, Peter L. ; et al. | 2005-11-17 |
Method of making a MEMS electrostatic chuck
Grant 6,946,403 - Kellerman , et al. September 20, 2 | 2005-09-20 |
Clamping and de-clamping semiconductor wafers on an electrostatic chuck using wafer inertial confinement by applying a single-phase square wave AC clamping voltage
Grant 6,947,274 - Kellerman , et al. September 20, 2 | 2005-09-20 |
MEMS based contact conductivity electrostatic chuck
Grant 6,905,984 - Kellerman , et al. June 14, 2 | 2005-06-14 |
Method Of Making A Mems Electrostatic Chuck
App 20050099758 - Kellerman, Peter L. ; et al. | 2005-05-12 |
System and method for performing SIMOX implants using an ion shower
App 20050098742 - Kellerman, Peter L. ; et al. | 2005-05-12 |
Segmented resonant antenna for radio frequency inductively coupled plasmas
App 20050098117 - DiVergilio, William F. ; et al. | 2005-05-12 |
Mems Based Contact Conductivity Electrostatic Chuck
App 20050079737 - Kellerman, Peter L. ; et al. | 2005-04-14 |
Clamping and de-clamping semiconductor wafers on a J-R electrostatic chuck having a micromachined surface by using force delay in applying a single-phase square wave AC clamping voltage
App 20050057881 - Qin, Shu ; et al. | 2005-03-17 |
Clamping And De-clamping Semiconductor Wafers On An Electrostatic Chuck Using Wafer Inertial Confinement By Applying A Single-phase Square Wave Ac Clamping Voltage
App 20050052817 - Kellerman, Peter L. ; et al. | 2005-03-10 |
Mems based multi-polar electrostatic chuck
App 20050041364 - Kellerman, Peter L. ; et al. | 2005-02-24 |
High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer
App 20040212946 - Kellerman, Peter L. ; et al. | 2004-10-28 |
Gas-cooled clamp for RTP
App 20040187788 - Kellerman, Peter L. ; et al. | 2004-09-30 |
Pressure controlled heat source and method for using such for RTP
Grant 6,735,378 - Kellerman , et al. May 11, 2 | 2004-05-11 |
Electrostatic chuck wafer port and top plate with edge shielding and gas scavenging
App 20040079289 - Kellerman, Peter L. ; et al. | 2004-04-29 |
Integrated power oscillator RF source of plasma immersion ion implantation system
Grant 6,305,316 - DiVergilio , et al. October 23, 2 | 2001-10-23 |
System for improving energy purity and implant consistency, and for minimizing charge accumulation of an implanted substrate
Grant 6,237,527 - Kellerman , et al. May 29, 2 | 2001-05-29 |
Biased and serrated extension tube for ion implanter electron shower
Grant 5,903,009 - Bernstein , et al. May 11, 1 | 1999-05-11 |
Filament for ion implanter plasma shower
Grant 5,856,674 - Kellerman January 5, 1 | 1999-01-05 |
Accelerator-decelerator electrostatic lens for variably focusing and mass resolving an ion beam in an ion implanter
Grant 5,780,863 - Benveniste , et al. July 14, 1 | 1998-07-14 |
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