Kao; Chia-Ling
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kao; Chia-Ling.The latest application filed is for "integration processes utilizing boron-doped silicon materials".
- Kao; Chia-Ling - San Jose CA
- Kao; Chia-Ling - Moutain View CA
- Kao; Chia-Ling - Mountain View CA
| Patent | Date |
|---|---|
| Integration Processes Utilizing Boron-doped Silicon Materials App 20220020599 - Koshizawa; Takehito ; et al. | 2022-01-20 |
| Systems and methods utilizing solid-phase etchants Grant 10,872,778 - Chen , et al. December 22, 2 | 2020-12-22 |
| Self-limiting selective etching systems and methods Grant 10,755,941 - Chen , et al. A | 2020-08-25 |
| Self-limiting Selective Etching Systems And Methods App 20200013628 - Chen; Zhijun ; et al. | 2020-01-09 |
| Systems And Methods Utilizing Solid-phase Etchants App 20200013632 - Chen; Zhijun ; et al. | 2020-01-09 |
| Methods for anisotropic control of selective silicon removal Grant 10,170,336 - Li , et al. J | 2019-01-01 |
| Methods for barrier layer removal Grant 9,514,953 - Kao , et al. December 6, 2 | 2016-12-06 |
| Methods for etching a dielectric barrier layer in a dual damascene structure Grant 9,299,577 - Ren , et al. March 29, 2 | 2016-03-29 |
| Methods For Etching A Dielectric Barrier Layer In A Dual Damascene Structure App 20150214101 - REN; He ; et al. | 2015-07-30 |
| Methods For Barrier Layer Removal App 20150140827 - KAO; Chia-Ling ; et al. | 2015-05-21 |
| Method of removing a metal hardmask Grant 9,006,106 - Kao , et al. April 14, 2 | 2015-04-14 |
| Method of fabricating an ultra low-k dielectric self-aligned via Grant 8,992,792 - Chang , et al. March 31, 2 | 2015-03-31 |
| Method of patterning a low-k dielectric film Grant 8,987,139 - Kao , et al. March 24, 2 | 2015-03-24 |
| Low Temperature Plasma Anneal Process For Sublimative Etch Processes App 20150064921 - NEMANI; Srinivas D. ; et al. | 2015-03-05 |
| Delicate dry clean Grant 8,895,449 - Zhu , et al. November 25, 2 | 2014-11-25 |
| Delicate Dry Clean App 20140342532 - Zhu; Lina ; et al. | 2014-11-20 |
| Method Of Removing A Metal Hardmask App 20140273496 - Kao; Chia-Ling ; et al. | 2014-09-18 |
| Method Of Patterning A Low-k Dielectric Film App 20140213060 - Kao; Chia-Ling ; et al. | 2014-07-31 |
| Method Of Fabricating An Ultra Low-k Dielectric Self-aligned Via App 20140024220 - Chang; Chih-Yang ; et al. | 2014-01-23 |
| Methods for forming ultra thin structures on a substrate Grant 7,981,812 - Chiang , et al. July 19, 2 | 2011-07-19 |
| Method Of Substrate Polymer Removal App 20090293907 - Fung; Nancy ; et al. | 2009-12-03 |
| Methods Of For Forming Ultra Thin Structures On A Substrate App 20090035944 - Chiang; Kang-Lie ; et al. | 2009-02-05 |
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