Kamenov; Vladimir

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kamenov; Vladimir.The latest application filed is for "catadioptric projection objective".

Company Profile

2.22.30

Kamenov; Vladimir - Essingen DE
Kamenov, Vladimir - Oberkochen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Microlithography projection objective Grant 10,281,824 - Feldmann , et al.	2019-05-07
Catadioptric Projection Objective App 20180373006 - Epple; Alexander ; et al.	2018-12-27
Catadioptric projection objective Grant 10,042,146 - Epple , et al. August 7, 2	2018-08-07
Catadioptric Projection Objective App 20180095258 - Epple; Alexander ; et al.	2018-04-05
Surface correction of mirrors with decoupling coating Grant 9,921,483 - Dier , et al. March 20, 2	2018-03-20
Microlithographic Projection Exposure Apparatus App 20170322343 - Kamenov; Vladimir ; et al.	2017-11-09
Microlithographic projection exposure apparatus Grant 9,733,395 - Kamenov , et al. August 15, 2	2017-08-15
Catadioptric projection objective Grant 9,726,870 - Epple , et al. August 8, 2	2017-08-08
Microlithography Projection Objective App 20170192362 - Feldmann; Heiko ; et al.	2017-07-06
Catadioptric Projection Objective App 20160231546 - Epple; Alexander ; et al.	2016-08-11
Surface Correction Of Mirrors With Decoupling Coating App 20160209750 - DIER; Oliver ; et al.	2016-07-21
Catadioptric projection objective Grant 9,279,969 - Epple , et al. March 8, 2	2016-03-08
Microlithography projection objective Grant 9,097,984 - Feldmann , et al. August 4, 2	2015-08-04
Projection objective for microlithography with stray light compensation and related methods Grant 9,063,439 - Goehnermeier , et al. June 23, 2	2015-06-23
Catadioptric Projection Objective App 20150055212 - Epple; Alexander ; et al.	2015-02-26
Microlithography Projection Objective App 20140333913 - Feldmann; Heiko ; et al.	2014-11-13
Microlithographic Projection Exposure Apparatus App 20140320955 - Kamenov; Vladimir ; et al.	2014-10-30
Catadioptric projection objective Grant 8,873,137 - Epple , et al. October 28, 2	2014-10-28
Microlithography Projection Objective App 20140293256 - Feldmann; Heiko ; et al.	2014-10-02
Catadioptric Projection Objective App 20130242279 - EPPLE; Alexander ; et al.	2013-09-19
Reflective mask for EUV lithography Grant 8,486,590 - Kamenov , et al. July 16, 2	2013-07-16
Catadioptric projection objective Grant 8,446,665 - Epple , et al. May 21, 2	2013-05-21
Projection objective of a microlithographic projection exposure apparatus Grant 8,339,576 - Loering , et al. December 25, 2	2012-12-25
Reflective Mask For Euv Lithography App 20120320348 - KAMENOV; Vladimir ; et al.	2012-12-20
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20120281196 - Loering; Ulrich ; et al.	2012-11-08
Microlithographic Projection Exposure Apparatus App 20110222043 - Kamenov; Vladimir ; et al.	2011-09-15
Method for determining intensity distribution in the image plane of a projection exposure arrangement Grant 7,961,297 - Greif-Wuestenbecker , et al. June 14, 2	2011-06-14
Catadioptric Projection Objective App 20110038061 - EPPLE; Alexander ; et al.	2011-02-17
Projection exposure apparatus and method for operating the same Grant 7,808,615 - Gruner , et al. October 5, 2	2010-10-05
Projection Objective For Microlithography App 20100079739 - Goehnermeier; Aksel ; et al.	2010-04-01
Microlithography projection objective App 20090115986 - Feldmann; Heiko ; et al.	2009-05-07
Microlithographic projection exposure apparatus App 20080297754 - Kamenov; Vladimir ; et al.	2008-12-04
Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatus Grant 7,456,933 - Wegmann , et al. November 25, 2	2008-11-25
Method for Determining Intensity Distribution in the Image Plane of a Projection Exposure Arrangement App 20080212060 - Greif-Wuestenbecker; Joern ; et al.	2008-09-04
Optical system and photolithography tool comprising same Grant 7,355,791 - Kamenov , et al. April 8, 2	2008-04-08
Method of optimizing an objective with fluoride crystal lenses, and objective with fluoride crystal lenses Grant 7,321,465 - Totzeck , et al. January 22, 2	2008-01-22
Projection Exposure Apparatus And Method For Operating The Same App 20080002167 - Gruner; Toralf ; et al.	2008-01-03
Method of determining lens materials for a projection exposure apparatus App 20070195423 - Kamenov; Vladimir ; et al.	2007-08-23
Method of determining lens materials for a projection exposure apparatus Grant 7,239,450 - Kamenov , et al. July 3, 2	2007-07-03
Optical system of a projection exposure apparatus App 20060238735 - Kamenov; Vladimir ; et al.	2006-10-26
Method of determining lens materials for a projection exposure apparatus App 20060109560 - Kamenov; Vladimir ; et al.	2006-05-25
Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatus App 20060077371 - Wegmann; Ulrich ; et al.	2006-04-13
Optical system and photolithography tool comprising same App 20060066764 - Kamenov; Vladimir ; et al.	2006-03-30
Catadioptric projection lens and method for compensating the intrinsic birefringence in such a lens App 20050270659 - Albert, Michael ; et al.	2005-12-08
Catadioptric reduction objective App 20050190446 - Kuerz, Birgit ; et al.	2005-09-01
Method of optimizing an objective with fluoride crystal lenses, and objective with fluoride crystal lenses App 20050180023 - Totzeck, Michael ; et al.	2005-08-18
Catadioptric projection lens and method for compensating the intrinsic birefringence in such a lens App 20040227988 - Albert, Michael ; et al.	2004-11-18
Retardation element made from cubic crystal and an optical system therewith App 20040218271 - Hartmaier, Juergen ; et al.	2004-11-04