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Method for manufacturing semiconductor device and substrate processing apparatus Grant 9,856,560 - Kameda , et al. January 2, 2 | 2018-01-02 |
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Method of manufacturing semiconductor device and substrate processing apparatus Grant 8,895,457 - Akae , et al. November 25, 2 | 2014-11-25 |
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Method Of Manufacturing Semiconductor Device And Method Of Cleaning Processing Vessel App 20140235066 - KAMEDA; Kenji ;   et al. | 2014-08-21 |
Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium Grant 8,741,783 - Kameda , et al. June 3, 2 | 2014-06-03 |
Substrate processing apparatus, method of manufacturing semiconductor device and method of cleaning processing vessel Grant 8,679,259 - Kameda , et al. March 25, 2 | 2014-03-25 |
Method of manufacturing semiconductor device including removal of deposits from process chamber and supply portion Grant 8,679,989 - Nakashima , et al. March 25, 2 | 2014-03-25 |
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CVD apparatus and method of cleaning the CVD apparatus Grant 8,277,560 - Sakai , et al. October 2, 2 | 2012-10-02 |
Map display system, map data processing apparatus, map display apparatus, and map display method Grant 8,115,764 - Kameda , et al. February 14, 2 | 2012-02-14 |
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Device for cleaning CVD device and method of cleaning CVD device Grant 8,043,438 - Sakai , et al. October 25, 2 | 2011-10-25 |
Sugar intake promoters Grant 7,820,636 - Okuda , et al. October 26, 2 | 2010-10-26 |
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus App 20090305517 - Nakashima; Sadao ;   et al. | 2009-12-10 |
Animation generating apparatus, animation generating method, and animation generating program Grant 7,612,777 - Nagata , et al. November 3, 2 | 2009-11-03 |
Method for manufacturing semiconductor device and substrate processing method App 20090170328 - Kameda; Kenji ;   et al. | 2009-07-02 |
Method for manufacturing semiconductor device and substrate processing apparatus App 20090149032 - Kameda; Kenji ;   et al. | 2009-06-11 |
Manufacturing Method Of Semiconductor Device And Substrate Processing Apparatus App 20080268644 - Kameda; Kenji ;   et al. | 2008-10-30 |
Boundary line detection apparatus and method, and image processing apparatus and method as well as recording medium Grant 7,177,482 - Ohki , et al. February 13, 2 | 2007-02-13 |
Animation generating apparatus, animation generating method, and animation generating program App 20060284879 - Nagata; Hisanori ;   et al. | 2006-12-21 |
Device for cleaning cvd device and method of cleaning cvd device App 20060207630 - Sakai; Katsuo ;   et al. | 2006-09-21 |
Cvd apparatus and method for cleaning cvd apparatus App 20060201533 - Wani; Etsuo ;   et al. | 2006-09-14 |
Communication system App 20060143266 - Ohto; Yasunori ;   et al. | 2006-06-29 |
Communication system Grant 7,047,021 - Ohto , et al. May 16, 2 | 2006-05-16 |
Cvd apparatus having means for cleaning with fluorine gas and method of cleaning cvd apparatus with fluorine gas App 20050252451 - Beppu, Tatsuro ;   et al. | 2005-11-17 |
Map display system, map data processing apparatus, map display apparatus, and map display method App 20050035883 - Kameda, Kenji ;   et al. | 2005-02-17 |
Cvd apparatus and method of cleaning the cvd apparatus App 20040250775 - Sakai, Katsuo ;   et al. | 2004-12-16 |
Communication system App 20040137917 - Ohto, Yasunori ;   et al. | 2004-07-15 |
Sugar intake promoters App 20040116373 - Okuda, Hiromichi ;   et al. | 2004-06-17 |
Boundary line detection apparatus and method, and image processing apparatus and method as well as recording medium App 20010024519 - Ohki, Mitsuharu ;   et al. | 2001-09-27 |