| Patent | Date |
|---|
Initiation modulation for plasma deposition
Grant 11,430,654 - Mutyala , et al. August 30, 2 | 2022-08-30 |
Multi-pressure Bipolar Electrostatic Chucking
App 20220122873 - Li; Jian ; et al. | 2022-04-21 |
Method Of Reducing Defects In A Multi-layer Pecvd Teos Oxide Film
App 20220119952 - Howlader; Rana ; et al. | 2022-04-21 |
Electric Arc Mitigating Faceplate
App 20220122811 - Mutyala; Madhu Santosh Kumar ; et al. | 2022-04-21 |
Multi zone electrostatic chuck
Grant 11,270,903 - Mutyala , et al. March 8, 2 | 2022-03-08 |
Process development visualization tool
Grant 11,157,661 - Vats , et al. October 26, 2 | 2021-10-26 |
Methods For Pressure Ramped Plasma Purge
App 20210242016 - Mutyala; Madhu Santosh Kumar ; et al. | 2021-08-05 |
Multi Zone Electrostatic Chuck
App 20210183678 - Mutyala; Madhu Santosh Kumar ; et al. | 2021-06-17 |
Initiation Modulation For Plasma Deposition
App 20210159073 - Mutyala; Madhu Santosh Kumar ; et al. | 2021-05-27 |
Surface Encasing Material Layer
App 20210134592 - Mutyala; Madhu Santosh Kumar ; et al. | 2021-05-06 |
Repulsion Mesh And Deposition Methods
App 20210082732 - Mutyala; Madhu Santosh Kumar ; et al. | 2021-03-18 |
Methods For Forming Films Containing Silicon Boron With Low Leakage Current
App 20200211834 - YANG; Chuanxi ; et al. | 2020-07-02 |
Process Development Visualization Tool
App 20200202044 - Vats; Vinayak Veer ; et al. | 2020-06-25 |
Cvd Based Oxide-metal Multi Structure For 3d Nand Memory Devices
App 20190393042 - SINGHA ROY; Susmit ; et al. | 2019-12-26 |
CVD based oxide-metal multi structure for 3D NAND memory devices
Grant 10,410,869 - Singha Roy , et al. Sept | 2019-09-10 |
Quality Improvement Of Films Deposited On A Substrate
App 20180350563 - MANNA; Pramit ; et al. | 2018-12-06 |
Cvd Based Oxide-metal Multi Structure For 3d Nand Memory Devices
App 20170372953 - ROY; Susmit Singha ; et al. | 2017-12-28 |
Method and system for flow control between a base station controller and a base transceiver station
Grant 9,826,433 - Kamath , et al. November 21, 2 | 2017-11-21 |
Flowable low-k dielectric gapfill treatment
Grant 9,362,107 - Thadani , et al. June 7, 2 | 2016-06-07 |
Flowable Low-k Dielectric Gapfill Treatment
App 20160093488 - Thadani; Kiran V. ; et al. | 2016-03-31 |
Treatments For Decreasing Etch Rates After Flowable Deposition Of Silicon-carbon-and-nitrogen-containing Layers
App 20130217241 - Underwood; Brian S. ; et al. | 2013-08-22 |
Remote plasma clean process with cycled high and low pressure clean steps
Grant 7,967,913 - Hua , et al. June 28, 2 | 2011-06-28 |
Gas baffle and distributor for semiconductor processing chamber
Grant 7,799,704 - Park , et al. September 21, 2 | 2010-09-21 |
Gas baffle and distributor for semiconductor processing chamber
Grant 7,740,706 - Park , et al. June 22, 2 | 2010-06-22 |
HDP-CVD SiON films for gap-fill
Grant 7,704,897 - Mungekar , et al. April 27, 2 | 2010-04-27 |
Remote Plasma Clean Process With Cycled High And Low Pressure Clean Steps
App 20100095979 - Hua; Zhong Qiang ; et al. | 2010-04-22 |
Hdp-cvd Sion Films For Gap-fill
App 20090215281 - MUNGEKAR; HEMANT P. ; et al. | 2009-08-27 |
Gas Baffle and Distributor for Semiconductor Processing Chamber
App 20090093129 - Park; Soonam ; et al. | 2009-04-09 |
Gas Baffle And Distributor For Semiconductor Processing Chamber
App 20080121179 - PARK; SOONAM ; et al. | 2008-05-29 |
Gas Baffle And Distributor For Semiconductor Processing Chamber
App 20080124944 - Park; Soonam ; et al. | 2008-05-29 |
Method And System For Flow Control Between A Base Station Controller And A Base Transceiver Station
App 20070223383 - Kamath; Sanjay ; et al. | 2007-09-27 |
Method and system for flow control between a base station controller and a base transceiver station
Grant 7,237,007 - Kamath , et al. June 26, 2 | 2007-06-26 |
Method and system for flow control between a base station controller and a base transceiver station
App 20030103460 - Kamath, Sanjay ; et al. | 2003-06-05 |
| 