Kaller; Julian

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kaller; Julian.The latest application filed is for "optical assembly having a thermally conductive component".

Company Profile

4.18.20

Kaller; Julian - Koenigsbronn DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Optical assembly having a thermally conductive component Grant 11,194,119 - Kaller , et al. December 7, 2	2021-12-07
Optical Assembly Having A Thermally Conductive Component App 20200103771 - Kaller; Julian ; et al.	2020-04-02
Optical assembly having a thermally conductive component Grant 10,509,336 - Kaller , et al. Dec	2019-12-17
Microlithography projection objective Grant 10,281,824 - Feldmann , et al.	2019-05-07
Optical element unit for exposure processes Grant 10,203,607 - Schwertner , et al. Feb	2019-02-12
Lens Module Comprising At Least One Exchangeable Optical Element App 20180031827 - SOYEZ; Guido ; et al.	2018-02-01
Optical Assembly Having A Thermally Conductive Component App 20170261867 - Kaller; Julian ; et al.	2017-09-14
Lens module comprising at least one exchangeable optical element Grant 9,703,098 - Soyez , et al. July 11, 2	2017-07-11
Microlithography Projection Objective App 20170192362 - Feldmann; Heiko ; et al.	2017-07-06
Lens Module Comprising At Least One Exchangeable Optical Element App 20160357012 - SOYEZ; Guido ; et al.	2016-12-08
Lens module comprising at least one exchangeable optical element Grant 9,423,695 - Soyez , et al. August 23, 2	2016-08-23
Microlithography projection objective Grant 9,097,984 - Feldmann , et al. August 4, 2	2015-08-04
Optical Element Unit For Exposure Processes App 20150168846 - Schwertner; Tilman ; et al.	2015-06-18
Optical element unit for exposure processes having sealing element Grant 9,046,795 - Schwertner , et al. June 2, 2	2015-06-02
Lens Module Comprising At Least One Exchangeable Optical Element App 20150138521 - SOYEZ; Guido ; et al.	2015-05-21
Lens module comprising at least one exchangeable optical element Grant 8,939,587 - Soyez , et al. January 27, 2	2015-01-27
Microlithography Projection Objective App 20140333913 - Feldmann; Heiko ; et al.	2014-11-13
Substrates for mirrors for EUV lithography and their production Grant 8,870,396 - Kaller , et al. October 28, 2	2014-10-28
Microlithography Projection Objective App 20140293256 - Feldmann; Heiko ; et al.	2014-10-02
Lens Module Comprising At Least One Exchangeable Optical Element App 20130155509 - SOYEZ; Guido ; et al.	2013-06-20
Substrates For Mirrors For Euv Lithography And Their Production App 20130120863 - KALLER; Julian ; et al.	2013-05-16
Lens module comprising at least one exchangeable optical element Grant 8,376,559 - Soyez , et al. February 19, 2	2013-02-19
Projection exposure method and projection exposure system therefor Grant 8,248,578 - Kaller , et al. August 21, 2	2012-08-21
Lens Module Comprising At Least One Exchangeable Optical Element App 20120105958 - SOYEZ; Guido ; et al.	2012-05-03
Lens module comprising at least one exchangeable optical element Grant 8,092,029 - Soyez , et al. January 10, 2	2012-01-10
Cleaning Module And Euv Lithography Device With Cleaning Module App 20110058147 - Ehm; Dirk Heinrich ; et al.	2011-03-10
Devices and methods for inspecting optical elements with a view to contamination Grant 7,659,976 - Kaller , et al. February 9, 2	2010-02-09
Projection Exposure Method And Projection Exposure System Therefor App 20090237636 - KALLER; Julian ; et al.	2009-09-24
Optical element unit for exposure processes Grant 7,545,483 - Gellrich , et al. June 9, 2	2009-06-09
Microlithography projection objective App 20090115986 - Feldmann; Heiko ; et al.	2009-05-07
Apparatus for scattered light inspection of optical elements Grant 7,443,500 - Kaller October 28, 2	2008-10-28
Optical Element Unit For Exposure Processes App 20080225247 - Schwertner; Tilman ; et al.	2008-09-18
Optical element unit for exposure processes App 20080192215 - Gellrich; Bernhard ; et al.	2008-08-14
Lens Module Comprising at Least One Exchangeable Optical Element App 20080137192 - Soyez; Guido ; et al.	2008-06-12
Devices and methods for inspecting optical elements with a view to contamination App 20070132989 - Kaller; Julian ; et al.	2007-06-14
Apparatus for scattered light inspection of optical elements App 20050046832 - Kaller, Julian	2005-03-03

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