Kalinovski; Ilia

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kalinovski; Ilia.The latest application filed is for "systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system".

Company Profile

1.9.7

Kalinovski; Ilia - Berkeley CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system Grant 10,267,728 - Yang , et al.	2019-04-23
Substrate processing method for depositing a barrier layer to prevent photoresist poisoning Grant 10,109,476 - Cheung , et al. October 23, 2	2018-10-23
Systems and methods for drying high aspect ratio structures without collapse using sacrificial bracing material that is removed using hydrogen-rich plasma Grant 10,068,781 - Sirard , et al. September 4, 2	2018-09-04
Systems And Methods For Detecting Oxygen In-situ In A Substrate Area Of A Substrate Processing System App 20180088031 - Yang; Dengliang ; et al.	2018-03-29
Substrate Processing Method For Depositing A Barrier Layer To Prevent Photoresist Poisoning App 20180005819 - Cheung; David ; et al.	2018-01-04
Ultra low silicon loss high dose implant strip Grant 9,564,344 - Cheung , et al. February 7, 2	2017-02-07
Systems And Methods For Drying High Aspect Ratio Structures Without Collapse Using Sacrificial Bracing Material That Is Removed Using Hydrogen-rich Plasma App 20160097590 - Sirard; Stephen M. ; et al.	2016-04-07
Ultra Low Silicon Loss High Dose Implant Strip App 20150332933 - Cheung; David ; et al.	2015-11-19
Enhanced passivation process to protect silicon prior to high dose implant strip Grant 8,721,797 - Cheung , et al. May 13, 2	2014-05-13
Showerhead Configurations For Plasma Reactors App 20120108072 - Angelov; Ivelin A. ; et al.	2012-05-03
Photoresist strip method for low-k dielectrics Grant 8,058,178 - Goto , et al. November 15, 2	2011-11-15
Enhanced Passivation Process To Protect Silicon Prior To High Dose Implant Strip App 20110139175 - Cheung; David ; et al.	2011-06-16
Ultra Low Silicon Loss High Dose Implant Strip App 20110143548 - Cheung; David ; et al.	2011-06-16
Photoresist strip method for low-k dielectrics Grant 7,585,777 - Goto , et al. September 8, 2	2009-09-08
Photoresist strip method for low-k dielectrics Grant 7,288,484 - Goto , et al. October 30, 2	2007-10-30

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