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Patent applications and USPTO patent grants for Kagalwala; Taher.The latest application filed is for "process control of semiconductor fabrication based on spectra quality metrics".
Patent | Date |
---|---|
Process control of semiconductor fabrication based on spectra quality metrics Grant 11,300,948 - Kagalwala , et al. April 12, 2 | 2022-04-12 |
Process Control Of Semiconductor Fabrication Based On Spectra Quality Metrics App 20200409345 - KAGALWALA; TAHER ;   et al. | 2020-12-31 |
Process Control Of Semiconductor Fabrication Based On Linkage Between Different Fabrication Steps App 20200279783 - TIMONEY; PADRAIG ;   et al. | 2020-09-03 |
Measuring Complex Structures In Semiconductor Fabrication App 20200192987 - KAGALWALA; TAHER ;   et al. | 2020-06-18 |
Measuring complex structures in semiconductor fabrication Grant 10,664,638 - Kagalwala , et al. | 2020-05-26 |
Measurement system and method for measuring in thin films Grant 10,030,971 - Bozdog , et al. July 24, 2 | 2018-07-24 |
Measurement System And Method For Measuring In Thin Films App 20170038201 - Bozdog; Cornel ;   et al. | 2017-02-09 |
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