| Patent | Date |
|---|
Chemical mechanical polishing apparatus for polishing workpiece
Grant 11,446,784 - Ishii , et al. September 20, 2 | 2022-09-20 |
Substrate processing apparatus and storage medium having program stored therein
Grant 11,436,392 - Ishii , et al. September 6, 2 | 2022-09-06 |
Substrate processing apparatus and substrate processing method
Grant 11,192,147 - Ishii , et al. December 7, 2 | 2021-12-07 |
Substrate processing apparatus and substrate processing method
Grant 11,180,853 - Ishii , et al. November 23, 2 | 2021-11-23 |
Film Thickness Measurement Apparatus, Polishing Apparatus, And Film Thickness Measurement Method
App 20210354262 - Satori; Hirotaka ; et al. | 2021-11-18 |
Apparatus and method for processing a surface of a substrate
Grant 11,139,160 - Ishii , et al. October 5, 2 | 2021-10-05 |
Top Ring For Holding A Substrate And Substrate Processing Apparatus
App 20210170543 - Ishii; Yu ; et al. | 2021-06-10 |
Polishing Method And Polishing Apparatus
App 20210170541 - Ishii; Yu ; et al. | 2021-06-10 |
Method and apparatus for polishing a substrate, and method for processing a substrate
Grant 10,926,376 - Nakanishi , et al. February 23, 2 | 2021-02-23 |
Polishing method, polishing apparatus, and substrate processing system
Grant 10,854,473 - Ishii , et al. December 1, 2 | 2020-12-01 |
Substrate processing apparatus and substrate processing method
Grant 10,799,917 - Ishii , et al. October 13, 2 | 2020-10-13 |
Apparatus and method for cleaning a back surface of a substrate
Grant 10,651,057 - Kobayashi , et al. | 2020-05-12 |
Polishing Head And Polishing Apparatus
App 20200094371 - Akazawa; Kenichi ; et al. | 2020-03-26 |
Substrate Processing Apparatus And Substrate Processing Method
App 20190390335 - ISHII; Yu ; et al. | 2019-12-26 |
Substrate processing apparatus and substrate processing method
Grant 10,458,020 - Ishii , et al. Oc | 2019-10-29 |
Substrate Processing Apparatus And Substrate Processing Method
App 20190262870 - Ishii; Yu ; et al. | 2019-08-29 |
Substrate Processing Apparatus And Substrate Processing Method
App 20190262869 - Ishii; Yu ; et al. | 2019-08-29 |
Chemical Mechanical Polishing Apparatus For Polishing Workpiece
App 20190262968 - ISHII; Yu ; et al. | 2019-08-29 |
Apparatus and method for polishing a surface of a substrate
Grant 10,376,929 - Ishii , et al. A | 2019-08-13 |
Substrate Processing Control System, Substrate Processing Control Method, And Program
App 20190240799 - TAKEDA; Koichi ; et al. | 2019-08-08 |
Substrate processing apparatus and substrate processing method
Grant 10,328,465 - Ishii , et al. | 2019-06-25 |
Substrate Processing Apparatus, Substrate Processing Method, And Storage Medium Storing Program
App 20190184517 - ISHII; Yu ; et al. | 2019-06-20 |
Apparatus And Method For Processing A Surface Of A Substrate
App 20190148125 - ISHII; Yu ; et al. | 2019-05-16 |
Pad holder for polishing apparatus
Grant D845,568 - Ishii , et al. | 2019-04-09 |
Method And Apparatus For Polishing A Substrate, And Method For Processing A Substrate
App 20190054594 - NAKANISHI; Masayuki ; et al. | 2019-02-21 |
Substrate Processing Apparatus And Storage Medium Having Program Stored Therein
App 20180336301 - ISHII; Yu ; et al. | 2018-11-22 |
Apparatus And Method For Cleaning A Back Surface Of A Substrate
App 20180315622 - KOBAYASHI; Kenichi ; et al. | 2018-11-01 |
Polishing Method, Polishing Apparatus, And Substrate Processing System
App 20180254196 - ISHII; Yu ; et al. | 2018-09-06 |
Abrasive film fabrication method and abrasive film
Grant 10,016,875 - Ishii , et al. July 10, 2 | 2018-07-10 |
Apparatus And Method For Polishing A Surface Of A Substrate
App 20180015508 - ISHII; Yu ; et al. | 2018-01-18 |
Polishing pad and chemical mechanical polishing apparatus for polishing a workpiece, and method of polishing a workpiece using the chemical mechanical polishing apparatus
Grant 9,821,429 - Ishii , et al. November 21, 2 | 2017-11-21 |
Substrate processing apparatus
Grant 9,808,836 - Togawa , et al. November 7, 2 | 2017-11-07 |
Method of polishing back surface of substrate and substrate processing apparatus
Grant 9,808,903 - Ishii , et al. November 7, 2 | 2017-11-07 |
Chemical Mechanical Polishing Apparatus For Polishing Workpiece
App 20170312880 - ISHII; Yu ; et al. | 2017-11-02 |
Substrate processing apparatus
Grant 9,566,616 - Togawa , et al. February 14, 2 | 2017-02-14 |
Work holder for polishing apparatus
Grant D777,546 - Ishii , et al. January 31, 2 | 2017-01-31 |
Polishing method
Grant 9,492,910 - Ishii , et al. November 15, 2 | 2016-11-15 |
Abrasive Film Fabrication Method And Abrasive Film
App 20160318155 - ISHII; Yu ; et al. | 2016-11-03 |
Substrate Processing Apparatus And Substrate Processing Method
App 20160305022 - ISHII; Yu ; et al. | 2016-10-20 |
Abrasive film fabrication method and abrasive film
Grant 9,393,595 - Ishii , et al. July 19, 2 | 2016-07-19 |
Polishing Method
App 20160052107 - ISHII; Yu ; et al. | 2016-02-25 |
Polishing method
Grant 9,067,296 - Ono , et al. June 30, 2 | 2015-06-30 |
Substrate Processing Apparatus
App 20150000056 - TOGAWA; Tetsuji ; et al. | 2015-01-01 |
Substrate Processing Apparatus
App 20150000055 - TOGAWA; Tetsuji ; et al. | 2015-01-01 |
Method Of Polishing Back Surface Of Substrate And Substrate Processing Apparatus
App 20140220866 - ISHII; Yu ; et al. | 2014-08-07 |
Abrasive Film Fabrication Method And Abrasive Film
App 20140030962 - ISHII; Yu ; et al. | 2014-01-30 |
Polishing Pad And Chemical Mechanical Polishing Apparatus For Polishing A Workpiece, And Method Of Polishing A Workpiece Using The Chemical Mechanical Polishing Apparatus
App 20140004772 - ISHII; Yu ; et al. | 2014-01-02 |
Substrate Processing Apparatus And Substrate Processing Method
App 20130213437 - Ishii; Yu ; et al. | 2013-08-22 |
Polishing apparatus and polishing method
Grant 8,360,817 - Ishii , et al. January 29, 2 | 2013-01-29 |
Polishing Method
App 20120276816 - Ono; Katsutoshi ; et al. | 2012-11-01 |
Apparatus for heating or cooling a polishing surface of a polishing apparatus
Grant 7,837,534 - Aiyoshizawa , et al. November 23, 2 | 2010-11-23 |
Polishing Apparatus And Polishing Method
App 20100255756 - ISHII; Yu ; et al. | 2010-10-07 |
Apparatus for heating or cooling a polishing surface of a polishing appratus
App 20080311823 - Aiyoshizawa; Shunichi ; et al. | 2008-12-18 |
Apparatus for polishing a substrate
Grant 7,291,057 - Kimura , et al. November 6, 2 | 2007-11-06 |
Apparatus for polishing a substrate
App 20030232576 - Kimura, Norio ; et al. | 2003-12-18 |
Method for polishing a substrate
Grant 6,609,950 - Kimura , et al. August 26, 2 | 2003-08-26 |
Polishing apparatus and polishing table therefor
Grant 6,544,111 - Kimura , et al. April 8, 2 | 2003-04-08 |
Apparatus and method for polishing substrate
App 20020016074 - Kimura, Norio ; et al. | 2002-02-07 |
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