loadpatents
Patent applications and USPTO patent grants for Ishii; Nobuo.The latest application filed is for "sputtering target material".
Patent | Date |
---|---|
Sputtering target material Grant 9,127,346 - Hasegawa , et al. September 8, 2 | 2015-09-08 |
Sputtering target material Grant 8,858,877 - Hasegawa , et al. October 14, 2 | 2014-10-14 |
Sputtering Target Material App 20130094990 - Hasegawa; Koichi ;   et al. | 2013-04-18 |
Sputtering target material Grant 8,252,127 - Hasegawa , et al. August 28, 2 | 2012-08-28 |
Sputtering Target Material App 20120070332 - HASEGAWA; Koichi ;   et al. | 2012-03-22 |
Sputtering Target Material App 20110211988 - HASEGAWA; Koichi ;   et al. | 2011-09-01 |
Sputtering target material Grant 7,959,746 - Hasegawa , et al. June 14, 2 | 2011-06-14 |
Radial antenna and plasma processing apparatus comprising the same Grant 7,807,019 - Ishii October 5, 2 | 2010-10-05 |
Plasma source and plasma processing apparatus Grant 7,632,379 - Goto , et al. December 15, 2 | 2009-12-15 |
Method for plasma processing by shaping an induced electric field Grant RE40,963 - Ishii , et al. November 10, 2 | 2009-11-10 |
Apparatus For Measuring Thickness Of A Substrate App 20090051924 - ITO; Masafumi ;   et al. | 2009-02-26 |
Plasma device Grant 7,481,904 - Ishii January 27, 2 | 2009-01-27 |
Sputtering target material Grant 7,465,424 - Hasegawa , et al. December 16, 2 | 2008-12-16 |
Method and apparatus for measuring small displacement Grant 7,457,721 - Takeda , et al. November 25, 2 | 2008-11-25 |
Method and apparatus for measuring temperature of substrate Grant 7,416,330 - Ito , et al. August 26, 2 | 2008-08-26 |
Plasma processing apparatus Grant 7,395,779 - Ishii , et al. July 8, 2 | 2008-07-08 |
Plasma treatment apparatus and plasma generation method Grant 7,305,934 - Ishii December 11, 2 | 2007-12-11 |
Plasma apparatus and production method thereof Grant 7,302,910 - Ishii December 4, 2 | 2007-12-04 |
Radial antenna and plasma device using it Grant 7,296,533 - Ishii , et al. November 20, 2 | 2007-11-20 |
Method and Apparatus for Measuring Small Displacement App 20070219745 - Takeda; Mitsuo ;   et al. | 2007-09-20 |
Plasma device and plasma generating method Grant 7,243,610 - Ishii , et al. July 17, 2 | 2007-07-17 |
Sputtering target material App 20070128456 - Hasegawa; Koichi ;   et al. | 2007-06-07 |
Matching device and plasma processing apparatus App 20070119376 - Ishii; Nobuo ;   et al. | 2007-05-31 |
Plasma processing apparatus and method App 20070113978 - Ishii; Nobuo ;   et al. | 2007-05-24 |
Plasma processor and plasma processing method Grant 7,186,314 - Ishii , et al. March 6, 2 | 2007-03-06 |
Surface treating method and surface-treating apparatus App 20070034601 - Goto; Toshio ;   et al. | 2007-02-15 |
Plasma source and plasma processing apparatus App 20070017636 - Goto; Toshio ;   et al. | 2007-01-25 |
Plasma processing apparatus Grant 7,071,442 - Ishii , et al. July 4, 2 | 2006-07-04 |
Plasma processor and plasma processing method App 20060124244 - Ishii; Nobuo ;   et al. | 2006-06-15 |
Slot array antenna and plasma processing apparatus Grant 7,023,393 - Ishii , et al. April 4, 2 | 2006-04-04 |
Plasma processing apparatus and controlling method therefor App 20060042546 - Ishii; Nobuo ;   et al. | 2006-03-02 |
Plasma processing device and plasma generating method App 20060005929 - Ishii; Nobuo ;   et al. | 2006-01-12 |
Method and apparatus for measuring temperature of substrate App 20050271116 - Ito, Masafumi ;   et al. | 2005-12-08 |
Method and apparatus for measuring temperature of substrate App 20050259716 - Ito, Masafumi ;   et al. | 2005-11-24 |
Plasma device and plasma generating method Grant 6,967,622 - Ishii , et al. November 22, 2 | 2005-11-22 |
Plasma processing apparatus Grant 6,953,908 - Ishii , et al. October 11, 2 | 2005-10-11 |
Plasma processing apparatus App 20050211382 - Ishii, Nobuo ;   et al. | 2005-09-29 |
Plasma processing apparatus App 20050173382 - Ishii, Nobuo ;   et al. | 2005-08-11 |
Plasma device App 20050162335 - Ishii, Nobuo | 2005-07-28 |
Apparatus for plasma processing Grant 6,910,440 - Ishii , et al. June 28, 2 | 2005-06-28 |
Plasma device and plasma generating method Grant 6,911,617 - Ishii , et al. June 28, 2 | 2005-06-28 |
Plasma device App 20050103443 - Ishii, Nobuo | 2005-05-19 |
Processor App 20050087296 - Goto, Toshio ;   et al. | 2005-04-28 |
Plasma processing system App 20050087304 - Ishii, Nobuo | 2005-04-28 |
Plasma treatment apparatus and plasma generation method App 20050082003 - Ishii, Nobuo | 2005-04-21 |
Plasma processing apparatus Grant 6,847,003 - Ishii , et al. January 25, 2 | 2005-01-25 |
Plasma processing device and plasma processing method App 20050000445 - Ishii, Nobuo | 2005-01-06 |
Matching device and plasma processing apparatus App 20040261717 - Ishii, Nobuo ;   et al. | 2004-12-30 |
Electromagnetic field supply apparatus and plasma processing device App 20040244693 - Ishii, Nobuo ;   et al. | 2004-12-09 |
Plasma processing system Grant 6,823,816 - Ishii , et al. November 30, 2 | 2004-11-30 |
Microwave plasma processing system Grant 6,796,268 - Ishii September 28, 2 | 2004-09-28 |
Slot aray antenna and plasma processing apparatus App 20040155829 - Ishii, Nobuo ;   et al. | 2004-08-12 |
Plasma processing apparatus App 20040149741 - Ishii, Nobuo ;   et al. | 2004-08-05 |
Plasma processor and plasma processing method App 20040112541 - Ishii, Nobuo ;   et al. | 2004-06-17 |
Plasma apparatus and production method thereof App 20040112292 - Ishii, Nobuo | 2004-06-17 |
Plasma device and plasma generating method App 20040095074 - Ishii, Nobuo ;   et al. | 2004-05-20 |
Plasma processing system App 20040069229 - Ishii, Nobuo ;   et al. | 2004-04-15 |
Plasma processing apparatus Grant 6,713,968 - Ishii , et al. March 30, 2 | 2004-03-30 |
Sputtering target material App 20040055882 - Hasegawa, Koichi ;   et al. | 2004-03-25 |
Plasma device and plasma generating method App 20040051464 - Ishii, Nobuo ;   et al. | 2004-03-18 |
Radial antenna and plasma device using it App 20040045674 - Ishii, Nobuo ;   et al. | 2004-03-11 |
Plasma processing apparatus Grant 6,695,948 - Ishii , et al. February 24, 2 | 2004-02-24 |
Radial antenna and plasma processing apparatus comprising the same App 20040027302 - Ishii, Nobuo | 2004-02-12 |
Plasma processing apparatus with annular waveguide Grant 6,670,741 - Ishii December 30, 2 | 2003-12-30 |
Plasma processing device Grant 6,657,151 - Ishii , et al. December 2, 2 | 2003-12-02 |
Plasma-assisted processing system and plasma-assisted processing method Grant 6,646,224 - Ishii , et al. November 11, 2 | 2003-11-11 |
Plasma processing apparatus Grant 6,622,650 - Ishii , et al. September 23, 2 | 2003-09-23 |
Plasma processing apparatus App 20030173030 - Ishii, Nobuo ;   et al. | 2003-09-18 |
Plasma-assisted Processing System And Plasma-assisted Processing Method App 20030150846 - Ishii, Nobuo ;   et al. | 2003-08-14 |
Plasma processing apparatus App 20030150561 - Ishii, Nobuo ;   et al. | 2003-08-14 |
Plasma processing apparatus and plasma processing method Grant 6,528,752 - Ishii , et al. March 4, 2 | 2003-03-04 |
Apparatus for plasma processing App 20020148564 - Ishii, Nobuo ;   et al. | 2002-10-17 |
Plasma processing apparatus Grant 6,433,298 - Ishii August 13, 2 | 2002-08-13 |
Plasma processing apparatus App 20020050486 - Ishii, Nobuo ;   et al. | 2002-05-02 |
Plasma Processing apparatus App 20020038692 - Ishii, Nobuo ;   et al. | 2002-04-04 |
Plasma processing apparatus Grant 6,347,602 - Goto , et al. February 19, 2 | 2002-02-19 |
Plasma treatment system Grant 6,322,662 - Ishii , et al. November 27, 2 | 2001-11-27 |
Plasma processing apparatus App 20010035130 - Ishii, Nobuo ;   et al. | 2001-11-01 |
Plasma processing apparatus App 20010019237 - Ishii, Nobuo | 2001-09-06 |
Plasma processing system App 20010017524 - Ishii, Nobuo | 2001-08-30 |
Microwave plasma processing system App 20010011525 - Ishii, Nobuo | 2001-08-09 |
Plasma processing apparatus App 20010008122 - Goto, Naohisa ;   et al. | 2001-07-19 |
Plasma processing apparatus Grant 6,136,140 - Ishii , et al. October 24, 2 | 2000-10-24 |
Plasma treatment method and system Grant 6,066,568 - Kawai , et al. May 23, 2 | 2000-05-23 |
Plasma processing apparatus Grant 6,024,827 - Ishii February 15, 2 | 2000-02-15 |
Microwave plasma processing apparatus using a hybrid microwave having two different modes of oscillation or branched microwaves forming a concentric electric field Grant 5,874,706 - Ishii , et al. February 23, 1 | 1999-02-23 |
Susceptor structure for mounting processing object thereon Grant 5,851,298 - Ishii December 22, 1 | 1998-12-22 |
Plasma processing apparatus Grant 5,795,429 - Ishii , et al. August 18, 1 | 1998-08-18 |
Plasma processing method, plasma processing apparatus, and plasma generating apparatus Grant 5,783,492 - Higuchi , et al. July 21, 1 | 1998-07-21 |
Stage system or device Grant 5,701,228 - Ishii December 23, 1 | 1997-12-23 |
Plasma processing apparatus Grant 5,698,036 - Ishii , et al. December 16, 1 | 1997-12-16 |
Plasma processing apparatus and method Grant 5,685,942 - Ishii November 11, 1 | 1997-11-11 |
Plasma processing apparatus Grant 5,683,537 - Ishii November 4, 1 | 1997-11-04 |
Concentric rings with different RF energies applied thereto Grant 5,637,961 - Ishii , et al. June 10, 1 | 1997-06-10 |
Plasma processing apparatus Grant 5,571,366 - Ishii , et al. November 5, 1 | 1996-11-05 |
Plasma processing apparatus Grant 5,529,657 - Ishii June 25, 1 | 1996-06-25 |
Reduced pressure processing system and reduced pressure processing method Grant 5,455,082 - Saito , et al. October 3, 1 | 1995-10-03 |
Plasma processing method Grant 5,374,327 - Imahashi , et al. December 20, 1 | 1994-12-20 |
Plasma processing apparatus Grant 5,342,472 - Imahashi , et al. August 30, 1 | 1994-08-30 |
Reduced pressure processing system and reduced pressure processing method Grant 5,314,541 - Saito , et al. May 24, 1 | 1994-05-24 |
Plasma generating apparatus Grant 5,173,641 - Imahashi , et al. December 22, 1 | 1992-12-22 |
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