Ingle; Nitin
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ingle; Nitin.The latest application filed is for "replacement contact process".
Company Profile
15.52.46
- Ingle; Nitin - San Jose CA
- Ingle; Nitin - Santa Clara CA
- Ingle; Nitin - Campbell CA
Patent Activity
| Patent | Date |
|---|---|
| Selective removal of silicon-containing materials Grant 11,437,242 - Ko , et al. September 6, 2 | 2022-09-06 |
| Chamber conditioning and removal processes Grant 11,328,909 - Zhang , et al. May 10, 2 | 2022-05-10 |
| Replacement Contact Process App 20210217668 - Lin; Sankuei ; et al. | 2021-07-15 |
| Replacement contact process Grant 10,943,834 - Lin , et al. March 9, 2 | 2021-03-09 |
| Systems and methods utilizing solid-phase etchants Grant 10,872,778 - Chen , et al. December 22, 2 | 2020-12-22 |
| Metal recess for semiconductor structures Grant 10,861,676 - Cui , et al. December 8, 2 | 2020-12-08 |
| Metal recess for semiconductor structures Grant 10,854,426 - Cui , et al. December 1, 2 | 2020-12-01 |
| Selective cobalt removal for bottom up gapfill Grant 10,770,346 - Wang , et al. Sep | 2020-09-08 |
| Self-limiting selective etching systems and methods Grant 10,755,941 - Chen , et al. A | 2020-08-25 |
| Selective Removal Of Silicon-containing Materials App 20200168463 - Ko; Jungmin ; et al. | 2020-05-28 |
| SiN spacer profile patterning Grant 10,600,639 - Ko , et al. | 2020-03-24 |
| Germanium etching systems and methods Grant 10,593,553 - Korolik , et al. | 2020-03-17 |
| Gas-phase selective etching systems and methods Grant 10,573,527 - Bajaj , et al. Feb | 2020-02-25 |
| Systems and methods for anisotropic material breakthrough Grant 10,566,206 - Pandit , et al. Feb | 2020-02-18 |
| Systems And Methods Utilizing Solid-phase Etchants App 20200013632 - Chen; Zhijun ; et al. | 2020-01-09 |
| Self-limiting Selective Etching Systems And Methods App 20200013628 - Chen; Zhijun ; et al. | 2020-01-09 |
| Water-free etching methods Grant 10,497,579 - Chen , et al. De | 2019-12-03 |
| Selective atomic layer etching of semiconductor materials Grant 10,497,573 - Goradia , et al. De | 2019-12-03 |
| Water-free etching methods Grant 10,468,267 - Chen , et al. No | 2019-11-05 |
| Gas-phase Selective Etching Systems And Methods App 20190311909 - Bajaj; Geetika ; et al. | 2019-10-10 |
| Selective Atomic Layer Etching Of Semiconductor Materials App 20190287808 - Goradia; Prerna Sonthalia ; et al. | 2019-09-19 |
| Shaped etch profile with oxidation Grant 10,403,507 - Choi , et al. Sep | 2019-09-03 |
| Metal Recess For Semiconductor Structures App 20190214229 - Cui; Zhenjiang ; et al. | 2019-07-11 |
| Metal Recess For Semiconductor Structures App 20190214230 - Cui; Zhenjiang ; et al. | 2019-07-11 |
| Chamber Conditioning And Removal Processes App 20190198300 - Zhang; Hanshen ; et al. | 2019-06-27 |
| Selective SiN lateral recess Grant 10,319,603 - Chen , et al. | 2019-06-11 |
| Selective Cobalt Removal For Bottom Up Gapfill App 20190122923 - Wang; Xikun ; et al. | 2019-04-25 |
| Selective tungsten removal Grant 10,256,112 - Wang , et al. | 2019-04-09 |
| Germanium Etching Systems And Methods App 20190043727 - Korolik; Mikhail ; et al. | 2019-02-07 |
| Selective cobalt removal for bottom up gapfill Grant 10,163,696 - Wang , et al. Dec | 2018-12-25 |
| Water-free Etching Methods App 20180350619 - Chen; Zhijun ; et al. | 2018-12-06 |
| Water-free Etching Methods App 20180350617 - Chen; Zhijun ; et al. | 2018-12-06 |
| Silicon pretreatment for nitride removal Grant 10,128,086 - Huang , et al. November 13, 2 | 2018-11-13 |
| SiN SPACER PROFILE PATTERNING App 20180323075 - Ko; Jungmin ; et al. | 2018-11-08 |
| Transistor Sidewall Formation Process App 20180261686 - Lin; Samkuei ; et al. | 2018-09-13 |
| Replacement Contact Process App 20180261516 - Lin; Samkuei ; et al. | 2018-09-13 |
| Selective SiN lateral recess Grant 10,062,579 - Chen , et al. August 28, 2 | 2018-08-28 |
| Selective in situ cobalt residue removal Grant 10,049,891 - Wang , et al. August 14, 2 | 2018-08-14 |
| Self-limiting Atomic Thermal Etching Systems And Methods App 20180226278 - Arnepalli; Ranga Rao ; et al. | 2018-08-09 |
| Shaped Etch Profile with Oxidation App 20180226259 - Choi; Tom ; et al. | 2018-08-09 |
| Self-limiting atomic thermal etching systems and methods Grant 10,043,684 - Arnepalli , et al. August 7, 2 | 2018-08-07 |
| Germanium etching systems and methods Grant 10,043,674 - Korolik , et al. August 7, 2 | 2018-08-07 |
| SiN spacer profile patterning Grant 10,026,621 - Ko , et al. July 17, 2 | 2018-07-17 |
| Systems And Methods For Anisotropic Material Breakthrough App 20180182633 - Pandit; Mandar ; et al. | 2018-06-28 |
| Selective Cobalt Removal For Bottom Up Gapfill App 20180138085 - Wang; Xikun ; et al. | 2018-05-17 |
| SiN SPACER PROFILE PATTERNING App 20180138049 - Ko; Jungmin ; et al. | 2018-05-17 |
| SELECTIVE SiN LATERAL RECESS App 20180102256 - Chen; Zhijun ; et al. | 2018-04-12 |
| SELECTIVE SiN LATERAL RECESS App 20180102255 - Chen; Zhijun ; et al. | 2018-04-12 |
| Methods for etch of SiN films Grant 9,842,744 - Zhang , et al. December 12, 2 | 2017-12-12 |
| Methods For Etch Of Sin Films App 20160260619 - Zhang; Jingchun ; et al. | 2016-09-08 |
| Methods for etch of sin films Grant 9,343,327 - Zhang , et al. May 17, 2 | 2016-05-17 |
| Methods For Etch Of Sin Films App 20150214067 - Zhang; Jingchun ; et al. | 2015-07-30 |
| Methods for etch of metal and metal-oxide films Grant 9,064,815 - Zhang , et al. June 23, 2 | 2015-06-23 |
| Method Of Depositing A Low-temperature, No-damage Hdp Sic-like Film With High Wet Etch Resistance App 20150140833 - THADANI; Kiran V. ; et al. | 2015-05-21 |
| Intrench profile Grant 9,012,302 - Sapre , et al. April 21, 2 | 2015-04-21 |
| Methods for etch of sin films Grant 8,999,856 - Zhang , et al. April 7, 2 | 2015-04-07 |
| HDD patterning using flowable CVD film Grant 8,986,557 - Underwood , et al. March 24, 2 | 2015-03-24 |
| Oxygen-doping for non-carbon radical-component CVD films Grant 8,980,382 - Ingle , et al. March 17, 2 | 2015-03-17 |
| Intrench Profile App 20150031211 - Sapre; Kedar ; et al. | 2015-01-29 |
| Intrench profile Grant 8,927,390 - Sapre , et al. January 6, 2 | 2015-01-06 |
| Hdd Patterning Using Flowable Cvd Film App 20140231384 - UNDERWOOD; Brian Saxton ; et al. | 2014-08-21 |
| Air gap formation Grant 8,765,573 - Mallick , et al. July 1, 2 | 2014-07-01 |
| Double patterning etching process Grant 8,759,223 - Sapre , et al. June 24, 2 | 2014-06-24 |
| Uniform dry etch in two stages Grant 8,741,778 - Yang , et al. June 3, 2 | 2014-06-03 |
| Intrench Profile App 20130260533 - Sapre; Kedar ; et al. | 2013-10-03 |
| Smooth SiConi etch for silicon-containing films Grant 8,501,629 - Tang , et al. August 6, 2 | 2013-08-06 |
| High-temperature selective dry etch having reduced post-etch solid residue Grant 8,475,674 - Thadani , et al. July 2, 2 | 2013-07-02 |
| Invertable pattern loading with dry etch Grant 8,435,902 - Tang , et al. May 7, 2 | 2013-05-07 |
| Double Patterning Etching Process App 20130048605 - SAPRE; Kedar ; et al. | 2013-02-28 |
| Methods For Etch Of Metal And Metal-oxide Films App 20120238103 - Zhang; Jingchun ; et al. | 2012-09-20 |
| Methods For Etch Of Sin Films App 20120238102 - Zhang; Jingchun ; et al. | 2012-09-20 |
| Uniform Dry Etch In Two Stages App 20120196447 - Yang; Dongqing ; et al. | 2012-08-02 |
| Silicon-selective dry etch for carbon-containing films Grant 8,211,808 - Sapre , et al. July 3, 2 | 2012-07-03 |
| Air Gap Formation App 20120070957 - Mallick; Abhijit Basu ; et al. | 2012-03-22 |
| Post-ash Sidewall Healing App 20120009796 - Cui; Zhenjiang ; et al. | 2012-01-12 |
| High-temperature Selective Dry Etch Having Reduced Post-etch Solid Residue App 20110266252 - Thadani; Kiran V. ; et al. | 2011-11-03 |
| Integration sequences with top surface profile modification Grant 8,043,933 - Kao , et al. October 25, 2 | 2011-10-25 |
| Invertable Pattern Loading With Dry Etch App 20110230052 - Tang; Jing ; et al. | 2011-09-22 |
| Smooth Siconi Etch For Silicon-containing Films App 20110151674 - TANG; JING ; et al. | 2011-06-23 |
| Oxygen-doping For Non-carbon Radical-component Cvd Films App 20110129616 - Ingle; Nitin ; et al. | 2011-06-02 |
| Silicon-selective Dry Etch For Carbon-containing Films App 20110053380 - Sapre; Kedar ; et al. | 2011-03-03 |
| Integration Sequences With Top Surface Profile Modification App 20100129982 - Kao; Chien-Teh ; et al. | 2010-05-27 |
| Reduction of reactive gas attack on substrate heater App 20060005856 - Sun; David ; et al. | 2006-01-12 |
| Gas flow control in a wafer processing system having multiple chambers for performing same process Grant 6,843,882 - Janakiraman , et al. January 18, 2 | 2005-01-18 |
| Gas distribution showerhead Grant 6,793,733 - Janakiraman , et al. September 21, 2 | 2004-09-21 |
| Gas distribution showerhead App 20040060514 - Janakiraman, Karthik ; et al. | 2004-04-01 |
| Gas flow control in a wafer processing system having multiple chambers for performing same process App 20040007176 - Janakiraman, Karthik ; et al. | 2004-01-15 |
| Gas distribution showerhead App 20030140851 - Janakiraman, Karthik ; et al. | 2003-07-31 |
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