| Patent | Date |
|---|
Method for Compensating Pattern Placement Errors Caused by Variation of Pattern Exposure Density in a Multi-Beam Writer
App 20170357153 - Platzgummer; Elmar | 2017-12-14 |
Bi-directional double-pass multi-beam writing
Grant 9,799,487 - Platzgummer October 24, 2 | 2017-10-24 |
Multi-beam writing of pattern areas of relaxed critical dimension
Grant 9,653,263 - Platzgummer , et al. May 16, 2 | 2017-05-16 |
Correction of short-range dislocations in a multi-beam writer
Grant 9,568,907 - Platzgummer , et al. February 14, 2 | 2017-02-14 |
Compensation of imaging deviations in a particle-beam writer using a convolution kernel
Grant 9,520,268 - Platzgummer December 13, 2 | 2016-12-13 |
Multi-Beam Writing Using Inclined Exposure Stripes
App 20160336147 - Platzgummer; Elmar | 2016-11-17 |
Compensation of dose inhomogeneity using overlapping exposure spots
Grant 9,495,499 - Platzgummer , et al. November 15, 2 | 2016-11-15 |
Multi-Beam Writing of Pattern Areas of Relaxed Critical Dimension
App 20160276132 - Platzgummer; Elmar ; et al. | 2016-09-22 |
Bi-Directional Double-Pass Multi-Beam Writing
App 20160276131 - Platzgummer; Elmar | 2016-09-22 |
Multi-beam tool for cutting patterns
Grant 9,443,699 - Platzgummer , et al. September 13, 2 | 2016-09-13 |
Customizing a particle-beam writer using a convolution kernel
Grant 9,373,482 - Platzgummer June 21, 2 | 2016-06-21 |
Correction of Short-Range Dislocations in a Multi-Beam Writer
App 20160071684 - Platzgummer; Elmar ; et al. | 2016-03-10 |
Compensation of defective beamlets in a charged-particle multi-beam exposure tool
Grant 9,269,543 - Reiter , et al. February 23, 2 | 2016-02-23 |
Compensation of Imaging Deviations in a Particle-Beam Writer Using a Convolution Kernel
App 20160013019 - Platzgummer; Elmar | 2016-01-14 |
Customizing a Particle-Beam Writer Using a Convolution Kernel
App 20160012170 - Platzgummer; Elmar | 2016-01-14 |
Compensation of Dose Inhomogeneity Using Overlapping Exposure Spots
App 20150347660 - Platzgummer; Elmar ; et al. | 2015-12-03 |
Multi-Beam Tool for Cutting Patterns
App 20150311030 - Platzgummer; Elmar ; et al. | 2015-10-29 |
Multi-Beam Tool for Cutting Patterns
App 20150311031 - Platzgummer; Elmar ; et al. | 2015-10-29 |
Compensation Of Defective Beamlets In A Charged-particle Multi-beam Exposure Tool
App 20150248993 - Reiter; Rafael ; et al. | 2015-09-03 |
Pattern definition device having multiple blanking arrays
Grant 9,099,277 - Platzgummer August 4, 2 | 2015-08-04 |
High-voltage insulation device for charged-particle optical apparatus
Grant 9,093,201 - Platzgummer , et al. July 28, 2 | 2015-07-28 |
Method for charged-particle multi-beam exposure
Grant 9,053,906 - Platzgummer June 9, 2 | 2015-06-09 |
Charged-particle Multi-beam Apparatus Having Correction Plate
App 20150069260 - Platzgummer; Elmar | 2015-03-12 |
Method For Charged-particle Multi-beam Exposure
App 20150028230 - Platzgummer; Elmar | 2015-01-29 |
Pattern Definition Device Having Multiple Blanking Arrays
App 20150021493 - Platzgummer; Elmar | 2015-01-22 |
High-voltage Insulation Device For Charged-particle Optical Apparatus
App 20140197327 - Platzgummer; Elmar ; et al. | 2014-07-17 |
Multi-beam deflector array means with bonded electrodes
Grant 8,563,942 - Platzgummer October 22, 2 | 2013-10-22 |
Pattern definition device with multiple multibeam array
Grant 8,546,767 - Platzgummer , et al. October 1, 2 | 2013-10-01 |
Method for multi-beam exposure on a target
Grant 8,378,320 - Platzgummer February 19, 2 | 2013-02-19 |
Charged-particle exposure apparatus with electrostatic zone plate
Grant 8,304,749 - Platzgummer , et al. November 6, 2 | 2012-11-06 |
Global point spreading function in multi-beam patterning
Grant 8,278,635 - Platzgummer , et al. October 2, 2 | 2012-10-02 |
Compensation of dose inhomogeneity and image distortion
Grant 8,258,488 - Platzgummer , et al. September 4, 2 | 2012-09-04 |
Method for maskless particle-beam exposure
Grant 8,222,621 - Fragner , et al. July 17, 2 | 2012-07-17 |
Method for producing a multi-beam deflector array device having electrodes
Grant 8,198,601 - Platzgummer , et al. June 12, 2 | 2012-06-12 |
Multi-beam source
Grant 8,183,543 - Platzgummer May 22, 2 | 2012-05-22 |
Method for maskless particle-beam exposure
Grant 8,115,183 - Platzgummer February 14, 2 | 2012-02-14 |
Constant current multi-beam patterning
Grant 8,057,972 - Fragner , et al. November 15, 2 | 2011-11-15 |
Method For Multi-beam Exposure On A Target
App 20110226968 - Platzgummer; Elmar | 2011-09-22 |
Multi-beam Deflector Array Means With Bonded Electrodes
App 20100288938 - Platzgummer; Elmar | 2010-11-18 |
Method For Maskless Particle-beam Exposure
App 20100252733 - Platzgummer; Elmar | 2010-10-07 |
Global Point Spreading Function in Multi-Beam Patterning
App 20100224790 - Platzgummer; Elmar ; et al. | 2010-09-09 |
Particle-beam exposure apparatus with overall-modulation of a patterned beam
Grant 7,781,748 - Platzgummer August 24, 2 | 2010-08-24 |
Method for maskless particle-beam exposure
Grant 7,777,201 - Fragner , et al. August 17, 2 | 2010-08-17 |
Pattern lock system for particle-beam exposure apparatus
Grant 7,772,574 - Stengl , et al. August 10, 2 | 2010-08-10 |
Method For Producing A Multi-beam Deflector Array Device Having Electrodes
App 20100187434 - Platzgummer; Elmar ; et al. | 2010-07-29 |
Particle-beam apparatus with improved wien-type filter
Grant 7,763,851 - Platzgummer July 27, 2 | 2010-07-27 |
Charged-particle exposure apparatus
Grant 7,737,422 - Platzgummer , et al. June 15, 2 | 2010-06-15 |
Method For Maskless Particle-beam Exposure
App 20100127185 - Fragner; Heinrich ; et al. | 2010-05-27 |
Constant Current Multi-beam Patterning
App 20100124722 - Fragner; Heinrich ; et al. | 2010-05-20 |
Pattern definition device having distinct counter-electrode array plate
Grant 7,714,298 - Platzgummer May 11, 2 | 2010-05-11 |
Multi-beam deflector array device for maskless particle-beam processing
Grant 7,687,783 - Platzgummer , et al. March 30, 2 | 2010-03-30 |
Compensation Of Dose Inhomogeneity And Image Distortion
App 20100038554 - Platzgummer; Elmar ; et al. | 2010-02-18 |
Particle-beam Exposure Apparatus With Overall-modulation Of A Patterned Beam
App 20090200495 - Platzgummer; Elmar | 2009-08-13 |
Pattern Lock System for Particle-Beam Exposure Apparatus
App 20090146082 - Stengl; Gerhard ; et al. | 2009-06-11 |
Multi-beam Source
App 20090026389 - Platzgummer; Elmar | 2009-01-29 |
Charged-Particle Exposure Apparatus
App 20080258084 - Platzgummer; Elmar ; et al. | 2008-10-23 |
Method For Maskless Particle-beam Exposure
App 20080237460 - Fragner; Heinrich ; et al. | 2008-10-02 |
Charged-Particle Exposure Apparatus With Electrostatic Zone Plate
App 20080230711 - Platzgummer; Elmar ; et al. | 2008-09-25 |
Multi-beam Deflector Array Device For Maskless Particle-beam Processing
App 20080203317 - Platzgummer; Elmar ; et al. | 2008-08-28 |
Particle-beam Apparatus With Improved Wien-type Filter
App 20080149846 - Platzgummer; Elmar | 2008-06-26 |
Charged-particle exposure apparatus
App 20080099693 - Platzgummer; Elmar | 2008-05-01 |
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