Patent | Date |
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Contacts For Semiconductor Devices App 20220302297 - Hui; Angela T. ;   et al. | 2022-09-22 |
Contacts for semiconductor devices Grant 10,944,000 - Hui , et al. March 9, 2 | 2021-03-09 |
Contacts For Semiconductor Devices App 20200212215 - Hui; Angela T. ;   et al. | 2020-07-02 |
Split-gate semiconductor device with L-shaped gate Grant 10,593,688 - Bell , et al. | 2020-03-17 |
Contacts for semiconductor devices Grant 10,516,044 - Hui , et al. Dec | 2019-12-24 |
Split-gate Semiconductor Device With L-shaped Gate App 20180358367 - Bell; Scott A. ;   et al. | 2018-12-13 |
Split-gate semiconductor device with L-shaped gate Grant 9,589,805 - Bell , et al. March 7, 2 | 2017-03-07 |
Integrating transistors with different poly-silicon heights on the same die Grant 9,431,503 - Lin , et al. August 30, 2 | 2016-08-30 |
Spacer design to prevent trapped electrons Grant 8,836,012 - Hui September 16, 2 | 2014-09-16 |
Integrated circuit with metal and semi-conducting gate Grant 8,815,727 - Hui , et al. August 26, 2 | 2014-08-26 |
Planar cell ONO cut using in-situ polymer deposition and etch Grant 8,790,530 - Hui , et al. July 29, 2 | 2014-07-29 |
System and method for reducing cross-coupling noise between charge storage elements in a semiconductor device Grant 8,759,894 - Wu , et al. June 24, 2 | 2014-06-24 |
Integrating Transistors With Different Poly-silicon Heights On The Same Die App 20140117435 - LIN; Chuan ;   et al. | 2014-05-01 |
Spacer Design to Prevent Trapped Electrons App 20140097497 - HUI; Angela T. | 2014-04-10 |
Integrating transistors with different poly-silicon heights on the same die Grant 8,652,907 - Lin , et al. February 18, 2 | 2014-02-18 |
Contacts For Semiconductor Devices App 20140042514 - Hui; Angela T. ;   et al. | 2014-02-13 |
Void free interlayer dielectric Grant 8,614,475 - Ngo , et al. December 24, 2 | 2013-12-24 |
System and method for improving mesa width in a semiconductor device Grant 8,598,645 - Kim , et al. December 3, 2 | 2013-12-03 |
Contacts for semiconductor devices Grant 8,564,041 - Hui , et al. October 22, 2 | 2013-10-22 |
Void Free Interlayer Dielectric App 20130140720 - Ngo; Minh Van ;   et al. | 2013-06-06 |
Integrated Circuit with Metal and Semi-Conducting Gate App 20130130487 - Hui; Angela T. ;   et al. | 2013-05-23 |
Gate trim process using either wet etch or dry etch approach to target CD for selected transistors Grant 8,409,994 - Davis , et al. April 2, 2 | 2013-04-02 |
Void free interlayer dielectric Grant 8,367,493 - Ngo , et al. February 5, 2 | 2013-02-05 |
Dual spacer formation in flash memory Grant 8,349,685 - Hui , et al. January 8, 2 | 2013-01-08 |
Integrated circuit system with metal and semi-conducting gate Grant 8,283,718 - Hui , et al. October 9, 2 | 2012-10-09 |
Integrating Transistors With Different Poly-silicon Heights On The Same Die App 20120241871 - Lin; Chuan ;   et al. | 2012-09-27 |
Method And Apparatus For Nand Memory With Recessed Source/drain Region App 20120139023 - CHEN; Chun ;   et al. | 2012-06-07 |
Dual Spacer Formation In Flash Memory App 20120142175 - HUI; Angela T. ;   et al. | 2012-06-07 |
Integrated circuit system with memory system Grant 8,114,736 - Chan , et al. February 14, 2 | 2012-02-14 |
Gate Trim Process Using Either Wet Etch Or Dry Etch Approach To Target Cd For Selected Transistors App 20120032308 - Davis; Bradley M. ;   et al. | 2012-02-09 |
Gate trim process using either wet etch or dry etch approach to target CD for selected transistors Grant 8,067,314 - Davis , et al. November 29, 2 | 2011-11-29 |
Planar Cell On Cut Using In-situ Polymer Deposition And Etch App 20110195578 - Hui; Angela T. ;   et al. | 2011-08-11 |
System and method for improving reliability in a semiconductor device Grant 7,985,687 - Hui , et al. July 26, 2 | 2011-07-26 |
Integrated circuit with contact region and multiple etch stop insulation layer Grant 7,977,797 - Li , et al. July 12, 2 | 2011-07-12 |
Memory device etch methods Grant 7,972,951 - Hui , et al. July 5, 2 | 2011-07-05 |
Film stacks to prevent UV-induced device damage Grant 7,927,723 - Hui , et al. April 19, 2 | 2011-04-19 |
System And Method For Improving Mesa Width In A Semiconductor Device App 20110037115 - KIM; Unsoon ;   et al. | 2011-02-17 |
System and method for improving mesa width in a semiconductor device Grant 7,842,618 - Kim , et al. November 30, 2 | 2010-11-30 |
Gate Trim Process Using Either Wet Etch Or Dry Etch Appraoch To Target Cd For Selected Transistors App 20100264519 - Davis; Bradley M. ;   et al. | 2010-10-21 |
Memory Device Etch Methods App 20100120239 - HUI; Angela T. ;   et al. | 2010-05-13 |
Contact spacer formation using atomic layer deposition Grant 7,704,878 - Ngo , et al. April 27, 2 | 2010-04-27 |
System and method for improving oxide-nitride-oxide (ONO) coupling in a semiconductor device Grant 7,679,129 - Hui , et al. March 16, 2 | 2010-03-16 |
Memory device etch methods Grant 7,670,959 - Hui , et al. March 2, 2 | 2010-03-02 |
Semiconductor Contact Formation System And Method App 20090294969 - LI; Wenmei ;   et al. | 2009-12-03 |
Semiconductor formation method that utilizes multiple etch stop layers Grant 7,572,727 - Li , et al. August 11, 2 | 2009-08-11 |
Bit line implant Grant 7,432,178 - Hui , et al. October 7, 2 | 2008-10-07 |
Memory Device Etch Methods App 20080153298 - Hui; Angela T. ;   et al. | 2008-06-26 |
Integrated Circuit System With Memory System App 20080150042 - Chan; Simon Siu-Sing ;   et al. | 2008-06-26 |
Integrated Circuit System With Memory System App 20080153224 - Wang; Connie Pin Chin ;   et al. | 2008-06-26 |
Integrated Circuit System With Metal And Semi-conducting Gate App 20080142873 - Hui; Angela T. ;   et al. | 2008-06-19 |
Contacts For Semiconductor Devices App 20080096348 - HUI; Angela T. ;   et al. | 2008-04-24 |
Semiconductor contact and nitride spacer formation system and method Grant 7,361,587 - Li , et al. April 22, 2 | 2008-04-22 |
Disposable hard mask for forming bit lines Grant 7,341,956 - Tokuno , et al. March 11, 2 | 2008-03-11 |
Etch-back process for capping a polymer memory device Grant 7,323,418 - Ngo , et al. January 29, 2 | 2008-01-29 |
Interlayer dielectric for charge loss improvement Grant 7,300,886 - Ngo , et al. November 27, 2 | 2007-11-27 |
Structure and method for low Vss resistance and reduced DIBL in a floating gate memory cell Grant 7,301,193 - Fang , et al. November 27, 2 | 2007-11-27 |
Avoiding Field Oxide Gouging In Shallow Trench Isolation (STI) Regions App 20070262412 - Hui; Angela T. ;   et al. | 2007-11-15 |
Polymer spacers for creating sub-lithographic spaces Grant 7,285,499 - Bell , et al. October 23, 2 | 2007-10-23 |
Avoiding field oxide gouging in shallow trench isolation (STI) regions Grant 7,265,014 - Hui , et al. September 4, 2 | 2007-09-04 |
Non-volatile memory device with increased reliability Grant 7,238,571 - Tokuno , et al. July 3, 2 | 2007-07-03 |
Bit line implant App 20070093042 - Hui; Angela T. ;   et al. | 2007-04-26 |
Contact spacer formation using atomic layer deposition App 20070077754 - Ngo; Minh Van ;   et al. | 2007-04-05 |
Using thin undoped TEOS with BPTEOS ILD or BPTEOS ILD alone to improve charge loss and contact resistance in multi-bit memory devices App 20070029604 - Cheng; Ning ;   et al. | 2007-02-08 |
System and method for improving mesa width in a semiconductor device App 20070026675 - Kim; Unsoon ;   et al. | 2007-02-01 |
Using thin undoped TEOS with BPTEOS ILD or BPTEOS ILD alone to improve charge loss and contact resistance in multi bit memory devices Grant 7,157,335 - Cheng , et al. January 2, 2 | 2007-01-02 |
SO.sub.2 treatment of oxidized CuO for copper sulfide formation of memory element growth Grant 7,115,440 - Lyons , et al. October 3, 2 | 2006-10-03 |
Semiconductor device and method of fabricating the same App 20060214218 - Shishido; Kiyokazu ;   et al. | 2006-09-28 |
UV-blocking layer for reducing UV-induced charging of SONOS dual-bit flash memory devices in BEOL processing Grant 7,018,896 - Ngo , et al. March 28, 2 | 2006-03-28 |
Method for reducing anti-reflective coating layer removal during removal of photoresist Grant 7,015,134 - Plat , et al. March 21, 2 | 2006-03-21 |
Method and system for reducing contact defects using non conventional contact formation method for semiconductor cells Grant 7,015,135 - Hui , et al. March 21, 2 | 2006-03-21 |
Dual spacer process for non-volatile memory devices Grant 7,012,008 - Shields , et al. March 14, 2 | 2006-03-14 |
Flash NVROM devices with UV charge immunity Grant 6,969,654 - Pham , et al. November 29, 2 | 2005-11-29 |
In-situ surface treatment for memory cell formation App 20050227382 - Hui, Angela T. | 2005-10-13 |
Narrow wide spacer Grant 6,927,129 - Sun , et al. August 9, 2 | 2005-08-09 |
Structure and method for low Vss resistance and reduced dibl in a floating gate memory cell App 20050164450 - Fang, Shenqing ;   et al. | 2005-07-28 |
Method of making a memory cell with polished insulator layer Grant 6,867,097 - Ramsbey , et al. March 15, 2 | 2005-03-15 |
Organic spin-on anti-reflective coating over inorganic anti-reflective coating Grant 6,867,063 - Ghandehari , et al. March 15, 2 | 2005-03-15 |
System and method of forming a passive layer by a CMP process Grant 6,836,398 - Subramanian , et al. December 28, 2 | 2004-12-28 |
Method and system for tailoring core and periphery cells in a nonvolatile memory Grant 6,808,992 - Ko , et al. October 26, 2 | 2004-10-26 |
Method for protecting gate edges from charge gain/loss in semiconductor device Grant 6,808,996 - Pham , et al. October 26, 2 | 2004-10-26 |
Silicon containing material for patterning polymeric memory element Grant 6,803,267 - Subramanian , et al. October 12, 2 | 2004-10-12 |
UV-blocking layer for reducing UV-induced charging of SONOS dual-bit flash memory devices in BEOL processing App 20040191989 - Ngo, Minh V. ;   et al. | 2004-09-30 |
Polymer memory device formed in via opening Grant 6,787,458 - Tripsas , et al. September 7, 2 | 2004-09-07 |
UV-blocking layer for reducing UV-induced charging of SONOS dual-bit flash memory devices in BEOL Grant 6,774,432 - Ngo , et al. August 10, 2 | 2004-08-10 |
Uv-blocking Layer For Reducing Uv-induced Charging Of Sonos Dual-bit Flash Memory Devices In Beol Processing App 20040151025 - Ngo, Minh V. ;   et al. | 2004-08-05 |
Method(s) facilitating formation of memory cell(s) and patterned conductive Grant 6,753,247 - Okoroanyanwu , et al. June 22, 2 | 2004-06-22 |
Method and system for reducing contact defects using non conventional contact formation method for semiconductor cells App 20040110368 - Hui, Angela T. ;   et al. | 2004-06-10 |
Method and system for reducing charge gain and charge loss when using an ARC layer in interlayer dielectric formation Grant 6,727,143 - Hui , et al. April 27, 2 | 2004-04-27 |
Dual bit isolation scheme for flash memory devices having polysilicon floating gates Grant 6,680,507 - Pham , et al. January 20, 2 | 2004-01-20 |
Low K dielectic etch in high density plasma etcher Grant 6,670,265 - Wang , et al. December 30, 2 | 2003-12-30 |
Non self-aligned shallow trench isolation process with disposable space to define sub-lithographic poly space Grant 6,664,191 - Kim , et al. December 16, 2 | 2003-12-16 |
Method of forming smaller trench line width using a spacer hard mask Grant 6,664,180 - Hui , et al. December 16, 2 | 2003-12-16 |
Spin on polymers for organic memory devices Grant 6,656,763 - Oglesby , et al. December 2, 2 | 2003-12-02 |
Flash memory with controlled wordline width Grant 6,653,190 - Yang , et al. November 25, 2 | 2003-11-25 |
Method and system for reducing charge gain and charge loss in interlayer dielectric formation Grant 6,635,943 - Hui , et al. October 21, 2 | 2003-10-21 |
Memory wordline hard mask Grant 6,617,215 - Halliyal , et al. September 9, 2 | 2003-09-09 |
Interconnect methodology employing a low dielectric constant etch stop layer Grant 6,593,632 - Avanzino , et al. July 15, 2 | 2003-07-15 |
Innovative narrow gate formation for floating gate flash technology Grant 6,583,009 - Hui , et al. June 24, 2 | 2003-06-24 |
Thinning of trench and line or contact spacing by use of dual layer photoresist Grant 6,528,398 - Ghandehari , et al. March 4, 2 | 2003-03-04 |
Method of creating narrow trench lines using hard mask Grant 6,514,867 - Hui , et al. February 4, 2 | 2003-02-04 |
Method of forming smaller contact size using a spacer hard mask Grant 6,514,849 - Hui , et al. February 4, 2 | 2003-02-04 |
Method of creating a smaller contact using hard mask Grant 6,514,868 - Hui , et al. February 4, 2 | 2003-02-04 |
Method for forming high quality multiple thickness oxide using high temperature descum Grant 6,479,411 - Hui , et al. November 12, 2 | 2002-11-12 |
Method for forming a semiconductor device with self-aligned contacts using a liner oxide layer Grant 6,475,847 - Ngo , et al. November 5, 2 | 2002-11-05 |
Method of forming integrated circuit features by oxidation of titanium hard mask Grant 6,475,867 - Hui , et al. November 5, 2 | 2002-11-05 |
Low K Dielectric Etch In High Density Plasma Etcher App 20020151168 - WANG, FEI ;   et al. | 2002-10-17 |
Capping layer Grant 6,448,608 - Pham , et al. September 10, 2 | 2002-09-10 |
Plasma treatment for polymer removal after via etch Grant 6,431,182 - Rakhshandehroo , et al. August 13, 2 | 2002-08-13 |
Semiconductor device with self-aligned contacts using a liner oxide layer Grant 6,420,752 - Ngo , et al. July 16, 2 | 2002-07-16 |
Method and system for reducing ARC layer removal during removal of photoresist App 20020076931 - Plat, Marina V. ;   et al. | 2002-06-20 |
Method for forming high quality multiple thickness oxide layers by reducing descum induced defects App 20020058421 - Hui, Angela T. ;   et al. | 2002-05-16 |
Dual bit isolation scheme for flash memory devices having polysilicon floating gates App 20020048881 - Pham, Tuan ;   et al. | 2002-04-25 |
Method for removing anti-reflective coating layer using plasma etch process before contact CMP Grant 6,291,296 - Hui , et al. September 18, 2 | 2001-09-18 |
Method for contact size control for nand technology App 20010006847 - Wang, John JianShi ;   et al. | 2001-07-05 |
Method to reduce gate-to-local interconnect capacitance using a low dielectric constant material for LDD spacer Grant 6,137,126 - Avanzino , et al. October 24, 2 | 2000-10-24 |
Method and system for providing tapered shallow trench isolation structure profile Grant 5,998,301 - Pham , et al. December 7, 1 | 1999-12-07 |