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Hybrid Process for Forming Metal Gates of MOS Devices App 20090230479 - Hsu; Peng-Fu ;   et al. | 2009-09-17 |
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Methods and structures for critical dimension and profile measurement App 20060073620 - Shieh; Jyu-Horng ;   et al. | 2006-04-06 |
Method for photoresist stripping and treatment of low-k dielectric material App 20060063386 - Tsai; Jang-Shiang ;   et al. | 2006-03-23 |
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Zirconium oxide and hafnium oxide etching using halogen containing chemicals Grant 7,012,027 - Perng , et al. March 14, 2 | 2006-03-14 |
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Wet cleaning cavitation system and method to remove particulate wafer contamination App 20040187891 - Chou, Chun-Li ;   et al. | 2004-09-30 |
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Metal silicide etch resistant plasma etch method Grant 6,706,640 - Tsai , et al. March 16, 2 | 2004-03-16 |