Patent | Date |
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Chamber Body Design Architecture For Next Generation Advanced Plasma Technology App 20220213959 - HOWARD; Bradley J. ;   et al. | 2022-07-07 |
Chamber body design architecture for next generation advanced plasma technology Grant 11,333,246 - Nguyen , et al. May 17, 2 | 2022-05-17 |
Methods for etching a metal layer to form an interconnection structure for semiconductor applications Grant 9,960,052 - Agarwal , et al. May 1, 2 | 2018-05-01 |
Chamber Body Design Architecture For Next Generation Advanced Plasma Technology App 20160215883 - NGUYEN; ANDREW ;   et al. | 2016-07-28 |
Methods for cyclically etching a metal layer for an interconnection structure for semiconductor applications Grant 9,359,679 - Agarwal , et al. June 7, 2 | 2016-06-07 |
Methods For Cyclically Etching A Metal Layer For An Interconnection Structure For Semiconductor Applications App 20160097131 - AGARWAL; Sumit ;   et al. | 2016-04-07 |
Methods For Etching A Barrier Layer For An Interconnection Structure For Semiconductor Applications App 20160099173 - AGARWAL; Sumit ;   et al. | 2016-04-07 |
Methods For Etching A Metal Layer To Form An Interconnection Structure For Semiconductor Appilcations App 20150287634 - AGARWAL; Sumit ;   et al. | 2015-10-08 |
Recessing Ultra-low K Dielectric Using Remote Plasma Source App 20150200042 - Ling; Mang Mang ;   et al. | 2015-07-16 |
Method of controlling striations and CD loss in contact oxide etch Grant 8,093,155 - Li , et al. January 10, 2 | 2012-01-10 |
Optical system and methods for monitoring erosion of electrostatic chuck edge bead materials Grant 7,952,694 - Howard , et al. May 31, 2 | 2011-05-31 |
Electrical and optical system and methods for monitoring erosion of electrostatic chuck edge bead materials Grant 7,884,925 - Howard , et al. February 8, 2 | 2011-02-08 |
Optical System And Methods For Monitoring Erosion Of Electrostatic Chuck Edge Bead Materials App 20110007303 - Howard; Bradley J. ;   et al. | 2011-01-13 |
Multifrequency plasma reactor Grant 7,625,460 - Howard December 1, 2 | 2009-12-01 |
Electrical And Optical System And Methods For Monitoring Erosion Of Electrostatic Chuck Edge Bead Materials App 20090290145 - Howard; Bradley J. ;   et al. | 2009-11-26 |
Plasma etching methods and contact opening forming methods Grant 7,615,164 - Howard , et al. November 10, 2 | 2009-11-10 |
Etch aided by electrically shorting upper and lower sidewall portions during the formation of a semiconductor device Grant 7,573,116 - Howard , et al. August 11, 2 | 2009-08-11 |
Barrier layer, IC via, and IC line forming methods Grant 7,538,028 - Sandu , et al. May 26, 2 | 2009-05-26 |
Method Of Controlling Striations And Cd Loss In Contact Oxide Etch App 20090081877 - Li; Li ;   et al. | 2009-03-26 |
Method of plasma etching a substrate Grant 7,470,625 - Li , et al. December 30, 2 | 2008-12-30 |
Process for using photo-definable layers in the manufacture of semiconductor devices and resulting structures of same Grant 7,323,292 - Howard January 29, 2 | 2008-01-29 |
Barrier layer, IC via, and IC line forming methods Grant 7,271,089 - Sandu , et al. September 18, 2 | 2007-09-18 |
Method of forming contact openings Grant 7,255,803 - Howard , et al. August 14, 2 | 2007-08-14 |
Etch aided by electrically shorting upper and lower sidewall portions during the formation of a semiconductor device App 20060281319 - Howard; Bradley J. ;   et al. | 2006-12-14 |
Barrier layer, IC via, and IC line forming methods App 20060264037 - Sandhu; Gurtej S. ;   et al. | 2006-11-23 |
Method of forming contact openings App 20060255011 - Howard; Bradley J. ;   et al. | 2006-11-16 |
Method of plasma etching a substrate App 20060252198 - Li; Li ;   et al. | 2006-11-09 |
Method of plasma etching a substrate Grant 7,122,480 - Li , et al. October 17, 2 | 2006-10-17 |
Method of in-situ chamber cleaning App 20060201624 - Howard; Bradley J. | 2006-09-14 |
Etch aided by electrically shorting upper and lower sidewall portions during the formation of a semiconductor device Grant 7,094,699 - Howard , et al. August 22, 2 | 2006-08-22 |
Multifrequency plasma reactor and method of etching App 20060054596 - Howard; Bradley J. | 2006-03-16 |
Barrier layer, IC via, and IC line forming methods App 20060046472 - Sandhu; Gurtej S. ;   et al. | 2006-03-02 |
Plasma etching methods and contact opening forming methods App 20050284843 - Howard, Bradley J. ;   et al. | 2005-12-29 |
Plasma etching methods Grant 6,958,297 - Becker , et al. October 25, 2 | 2005-10-25 |
Method of plasma etching a substrate App 20050056875 - Li, Li ;   et al. | 2005-03-17 |
Multi-frequency plasma reactor and method of etching App 20050022933 - Howard, Bradley J. | 2005-02-03 |
Plasma etching methods Grant 6,812,154 - Becker , et al. November 2, 2 | 2004-11-02 |
Etch aided by electrically shorting upper and lower sidewall portions during the formation of a semiconductor device App 20040203240 - Howard, Bradley J. ;   et al. | 2004-10-14 |
Method of controlling striations and CD loss in contact oxide etch Grant 6,753,264 - Li , et al. June 22, 2 | 2004-06-22 |
Process for using photo-definable layers in the manufacture of semiconductor devices and resulting structures of same App 20040101784 - Howard, Bradley J. | 2004-05-27 |
Etch aided by electrically shorting upper and lower sidewall portions during the formation of a semiconductor device Grant 6,730,609 - Howard , et al. May 4, 2 | 2004-05-04 |
Method of controlling striations and CD loss in contact oxide etch Grant 6,716,763 - Li , et al. April 6, 2 | 2004-04-06 |
Method of in-situ chamber cleaning App 20040025903 - Howard, Bradley J. | 2004-02-12 |
Plasma etching methods App 20030207581 - Becker, David S. ;   et al. | 2003-11-06 |
Method of controlling striations and CD loss in contact oxide etch App 20030096506 - Li, Li ;   et al. | 2003-05-22 |
Etch aided by electrically shorting upper and lower sidewall portions during the formation of a semiconductor device App 20030068896 - Howard, Bradley J. ;   et al. | 2003-04-10 |
Plasma etching methods App 20030036283 - Becker, David S. ;   et al. | 2003-02-20 |
Method For Manufacturing Tapered Openings Using An Anisotropic Etch During The Formation Of A Semiconductor Device App 20030017638 - Figura, Thomas A. ;   et al. | 2003-01-23 |
Process for using photo-definable layers in the manufacture of semiconductor devices and resulting structures of same App 20030008513 - Howard, Bradley J. | 2003-01-09 |
Plasma etching methods Grant 6,492,279 - Becker , et al. December 10, 2 | 2002-12-10 |
Formation of a self-aligned structure Grant 6,420,259 - Howard July 16, 2 | 2002-07-16 |
Process For Using Photo-definable Layers In The Manufacture Of Semiconductor Devices And Resulting Structures Of Same App 20020039809 - HOWARD, BRADLEY J. | 2002-04-04 |
Method of controlling striations and CD loss in contact oxide etch App 20020019140 - Li, Li ;   et al. | 2002-02-14 |
Method of controlling striations and CD loss in contact oxide etch App 20010050413 - Li, Li ;   et al. | 2001-12-13 |
Self-limiting method of reducing contamination in a contact opening, method of making contacts and semiconductor devices therewith, and resulting structures Grant 6,232,219 - Blalock , et al. May 15, 2 | 2001-05-15 |
Semiconductor processing methods, and methods of forming capacitors Grant 6,127,239 - Jost , et al. October 3, 2 | 2000-10-03 |
Method of forming an integrated circuit structure Grant 6,117,767 - Howard September 12, 2 | 2000-09-12 |
Apparatus for improving the performance of a temperature-sensitive etch process Grant 6,056,850 - Blalock , et al. May 2, 2 | 2000-05-02 |
Method for forming a contact during the formation of a semiconductor device Grant 6,046,505 - Howard April 4, 2 | 2000-04-04 |
Capacitor and method for forming a capacitor Grant 6,028,763 - Howard February 22, 2 | 2000-02-22 |
Method of forming recessed container cells Grant 5,888,877 - Dennison , et al. March 30, 1 | 1999-03-30 |
Mask having a tapered profile used during the formation of a semiconductor device Grant 5,750,441 - Figura , et al. May 12, 1 | 1998-05-12 |
Method for forming a contact during the formation of a semiconductor device Grant 5,686,357 - Howard November 11, 1 | 1997-11-11 |
Method of forming a capacitor using a photoresist contact sidewall having standing wave ripples Grant 5,438,011 - Blalock , et al. August 1, 1 | 1995-08-01 |