Patent | Date |
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Laser Annealing Apparatus And Method For Manufacturing Electronic Device App 20220009031 - TANAKA; Satoshi ;   et al. | 2022-01-13 |
Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation system Grant 10,141,186 - Hosoda , et al. Nov | 2018-11-27 |
Filter and target supply apparatus Grant 10,143,074 - Ichinose , et al. Nov | 2018-11-27 |
Laser apparatus and extreme ultraviolet light generation system Grant 10,122,145 - Kurosawa , et al. November 6, 2 | 2018-11-06 |
Target Image-capture Device, Extreme-ultraviolet-light Generation Device, And Extreme-ultraviolet-light Generation System App 20170358442 - HOSODA; Hirokazu ;   et al. | 2017-12-14 |
Laser apparatus and laser apparatus manufacturing method Grant 9,837,779 - Kawasuji , et al. December 5, 2 | 2017-12-05 |
Laser Apparatus And Extreme Ultraviolet Light Generation System App 20170317464 - KUROSAWA; Yoshiaki ;   et al. | 2017-11-02 |
Laser amplifier, laser apparatus, and extreme ultraviolet light generating system Grant 9,685,756 - Suganuma , et al. June 20, 2 | 2017-06-20 |
Extreme Ultraviolet Light Generation System And Extreme Ultraviolet Light Generation Method App 20170127505 - SUNAHARA; Atsushi ;   et al. | 2017-05-04 |
Laser Apparatus And Laser Apparatus Manufacturing Method App 20160365694 - KAWASUJI; Yasufumi ;   et al. | 2016-12-15 |
Filter And Target Supply Apparatus App 20160227637 - ICHINOSE; Tomohide ;   et al. | 2016-08-04 |
Laser Amplifier, Laser Apparatus, And Extreme Ultraviolet Light Generating System App 20160172820 - SUGANUMA; Takashi ;   et al. | 2016-06-16 |
Optical device, laser apparatus, and extreme ultraviolet light generation system Grant 9,362,703 - Mizoguchi , et al. June 7, 2 | 2016-06-07 |
Laser beam output control with optical shutter Grant 9,318,864 - Nowak , et al. April 19, 2 | 2016-04-19 |
Wavelength converter, wavelength converting device, solid state laser device, and laser system Grant 8,934,510 - Kakizaki , et al. January 13, 2 | 2015-01-13 |
Optical Device, Laser Apparatus, And Extreme Ultraviolet Light Generation System App 20140374605 - MIZOGUCHI; Hakaru ;   et al. | 2014-12-25 |
Optical device, laser apparatus, and extreme ultraviolet light generation system Grant 8,891,161 - Mizoguchi , et al. November 18, 2 | 2014-11-18 |
Laser apparatus, extreme ultraviolet light generation system, and method for generating laser beam Grant 8,885,680 - Nakarai , et al. November 11, 2 | 2014-11-11 |
Laser device with optical element module on separate plate Grant 8,817,838 - Abe , et al. August 26, 2 | 2014-08-26 |
Temperature controller for gas laser Grant 8,811,438 - Watanabe , et al. August 19, 2 | 2014-08-19 |
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus Grant 8,804,902 - Someya , et al. August 12, 2 | 2014-08-12 |
Temperature controller for gas laser Grant 8,787,413 - Watanabe , et al. July 22, 2 | 2014-07-22 |
Method And Apparatus For Cleaning Collector Mirror In Euv Light Generator App 20140166046 - Asayama; Takeshi ;   et al. | 2014-06-19 |
Target supply device, extreme ultraviolet light generation apparatus, and method for supplying target Grant 8,742,380 - Hori , et al. June 3, 2 | 2014-06-03 |
Target output device and extreme ultraviolet light source apparatus Grant 8,710,472 - Ishihara , et al. April 29, 2 | 2014-04-29 |
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source, and method of adjusting laser light source device for extreme ultraviolet light source device Grant 8,698,114 - Moriya , et al. April 15, 2 | 2014-04-15 |
Extreme ultraviolet light generation system Grant 8,698,111 - Nishisaka , et al. April 15, 2 | 2014-04-15 |
Temperature Controller For Gas Laser App 20130294470 - WATANABE; Yukio ;   et al. | 2013-11-07 |
Temperature Controller For Gas Laser App 20130294469 - WATANABE; Yukio ;   et al. | 2013-11-07 |
Extreme ultraviolet light source apparatus Grant 8,558,202 - Yanagida , et al. October 15, 2 | 2013-10-15 |
Method and apparatus for cleaning collector mirror in EUV light generator Grant 8,536,550 - Asayama , et al. September 17, 2 | 2013-09-17 |
Collector Mirror Exchanging Apparatus And Method For Extreme Ultraviolet Light Source Apparatus App 20130221247 - Someya; Hiroshi ;   et al. | 2013-08-29 |
Target Supply Device, Extreme Ultraviolet Light Generation Apparatus, And Method For Supplying Target App 20130221246 - HORI; Tsukasa ;   et al. | 2013-08-29 |
Optical Device, Laser Apparatus, And Extreme Ultraviolet Light Generation System App 20130208742 - Mizoguchi; Hakaru ;   et al. | 2013-08-15 |
Extreme ultraviolet light source apparatus Grant 8,507,883 - Endo , et al. August 13, 2 | 2013-08-13 |
Wavelength Converter, Wavelength Converting Device, Solid State Laser Device, And Laser System App 20130202003 - KAKIZAKI; Kouji ;   et al. | 2013-08-08 |
Temperature controller for gas laser Grant 8,498,317 - Watanabe , et al. July 30, 2 | 2013-07-30 |
Apparatus for and method of withdrawing ions in EUV light production apparatus Grant 8,492,738 - Ueno , et al. July 23, 2 | 2013-07-23 |
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and method for controlling saturable absorber used in extreme ultraviolet light source device Grant 8,476,609 - Endo , et al. July 2, 2 | 2013-07-02 |
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus Grant 8,477,412 - Someya , et al. July 2, 2 | 2013-07-02 |
Extreme Ultraviolet Light Source Device, Laser Light Source Device For Extreme Ultraviolet Light Source Device, And Method Of Adjusting Laser Light Source Device For Extreme Ultraviolet Light Source Device App 20130148677 - MORIYA; Masato ;   et al. | 2013-06-13 |
Extreme ultraviolet light source apparatus and target supply device Grant 8,445,877 - Someya , et al. May 21, 2 | 2013-05-21 |
Extreme ultraviolet light source apparatus Grant 8,436,328 - Yanagida , et al. May 7, 2 | 2013-05-07 |
Laser Apparatus, Extreme Ultraviolet Light Generation System, And Method For Generating Laser Beam App 20130099140 - Nakarai; Hiroaki ;   et al. | 2013-04-25 |
Apparatus and method of adjusting a laser light source for an EUV source device Grant 8,395,133 - Moriya , et al. March 12, 2 | 2013-03-12 |
Laser Apparatus And Extreme Ultraviolet Light Generation System Including The Laser Apparatus App 20130032735 - Nowak; Krzysztof ;   et al. | 2013-02-07 |
Extreme ultra violet light source apparatus Grant 8,324,601 - Hoshino , et al. December 4, 2 | 2012-12-04 |
Temperature Controller For Gas Laser App 20120267343 - WATANABE; Yukio ;   et al. | 2012-10-25 |
Apparatus for and method of withdrawing ions in EUV light production apparatus Grant 8,288,743 - Ueno , et al. October 16, 2 | 2012-10-16 |
Extreme Ultra Violet Light Source Apparatus App 20120228527 - ABE; Tamotsu ;   et al. | 2012-09-13 |
Apparatus For And Method Of Withdrawing Ions In Euv Light Production Apparatus App 20120217414 - UENO; Yoshifumi ;   et al. | 2012-08-30 |
Temperature controller for gas laser Grant 8,238,392 - Watanabe , et al. August 7, 2 | 2012-08-07 |
Extreme ultra violet light source apparatus Grant 8,212,228 - Abe , et al. July 3, 2 | 2012-07-03 |
Extreme Ultraviolet Light Source System App 20120119118 - WATANABE; Yukio ;   et al. | 2012-05-17 |
Extreme Ultraviolet Light Generation System App 20120104290 - Nishisaka; Toshihiro ;   et al. | 2012-05-03 |
Extreme Ultraviolet Light Source Apparatus App 20120091893 - YANAGIDA; Tatsuya ;   et al. | 2012-04-19 |
Extreme Ultraviolet Light Source Device, Laser Light Source Device For Extreme Ultraviolet Light Source Device, And Method For Controlling Saturable Absorber Used In Extreme Ultraviolet Light Source Device App 20120068091 - ENDO; Akira ;   et al. | 2012-03-22 |
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device and method for controlling saturable absorber used in extreme ultraviolet light source device Grant 8,093,571 - Endo , et al. January 10, 2 | 2012-01-10 |
Target Output Device And Extreme Ultraviolet Light Source Apparatus App 20110284774 - ISHIHARA; Takanobu ;   et al. | 2011-11-24 |
Laser System App 20110261844 - ABE; Tamotsu ;   et al. | 2011-10-27 |
Driver Laser For Extreme Ultra Violet Light Source Device App 20110211601 - ARIGA; Tatsuya ;   et al. | 2011-09-01 |
Extreme ultraviolet light source apparatus and nozzle protection device Grant 8,003,962 - Someya , et al. August 23, 2 | 2011-08-23 |
Laser system Grant 8,000,361 - Abe , et al. August 16, 2 | 2011-08-16 |
Extreme Ultraviolet Light Source Apparatus And Nozzle Protection Device App 20110174996 - SOMEYA; Hiroshi ;   et al. | 2011-07-21 |
Extreme Ultra Violet Light Source Apparatus App 20110057126 - HOSHINO; HIDEO ;   et al. | 2011-03-10 |
Extreme ultra violet light source apparatus Grant 7,842,937 - Hoshino , et al. November 30, 2 | 2010-11-30 |
Temperature Controller For Gas Laser App 20100217444 - Watanabe; Yukio ;   et al. | 2010-08-26 |
Extreme Ultraviolet Light Source System App 20100193711 - WATANABE; Yukio ;   et al. | 2010-08-05 |
Extreme Ultraviolet Light Source Apparatus App 20100181503 - Yanagida; Tatsuya ;   et al. | 2010-07-22 |
Extreme Ultraviolet Light Source Apparatus App 20100090132 - ENDO; Akira ;   et al. | 2010-04-15 |
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device and method for controlling saturable absorber used in extreme ultraviolet light source device App 20100078580 - Endo; Akira ;   et al. | 2010-04-01 |
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and method of adjusting laser light source device for extreme ultraviolet light source device App 20100078577 - Moriya; Masato ;   et al. | 2010-04-01 |
Extreme ultraviolet light source apparatus and nozzle protection device App 20100019173 - Someya; Hiroshi ;   et al. | 2010-01-28 |
Method And Apparatus For Cleaning Collector Mirror In Euv Light Generator App 20090301517 - Asayama; Takeshi ;   et al. | 2009-12-10 |
Apparatus For And Method Of Withdrawing Ions In Euv Light Production Apparatus App 20090261242 - UENO; Yoshifumi ;   et al. | 2009-10-22 |
Laser system App 20090232171 - Abe; Tamotsu ;   et al. | 2009-09-17 |
Extreme ultra violet light source apparatus App 20090224181 - Abe; Tamotsu ;   et al. | 2009-09-10 |
Laser Device App 20090103575 - ABE; Tamotsu ;   et al. | 2009-04-23 |
Extreme ultra violet light source apparatus App 20080197299 - Hoshino; Hideo ;   et al. | 2008-08-21 |
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus App 20080104828 - Someya; Hiroshi ;   et al. | 2008-05-08 |
Driver laser for extreme ultra violet light source device App 20080069157 - Ariga; Tatsuya ;   et al. | 2008-03-20 |
Debris collector for EUV light generator Grant 7,297,968 - Endo , et al. November 20, 2 | 2007-11-20 |
Extreme ultra violet light source device Grant 7,271,401 - Imai , et al. September 18, 2 | 2007-09-18 |
Debris collector for euv light generator App 20060249698 - Endo; Akira ;   et al. | 2006-11-09 |
Extreme ultra violet light source device App 20060186356 - Imai; Yousuke ;   et al. | 2006-08-24 |
Light source device and exposure equipment using the same Grant 6,987,279 - Hoshino , et al. January 17, 2 | 2006-01-17 |
Light source device and exposure equipment using the same App 20050167618 - Hoshino, Hideo ;   et al. | 2005-08-04 |