HONMA; Manabu

Patent Applications and Registrations

Patent applications and USPTO patent grants for HONMA; Manabu.The latest application filed is for "substrate processing apparatus".

Company Profile

6.65.65

HONMA; Manabu - Iwate JP
Honma; Manabu - Oshu JP
HONMA; Manabu - Oshu City JP
HONMA; Manabu - Oshu-shi JP
Honma; Manabu - Tokyo-To JP
Honma; Manabu - Kai JP
Honma; Manabu - Kai-shi JP
Honma; Manabu - Shiroyama-Machi JP
Honma; Manabu - Kanagawa JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Processing Apparatus App 20220293439 - WADA; Yuki ; et al.	2022-09-15
Substrate processing apparatus Grant 11,339,472 - Honma May 24, 2	2022-05-24
Deposition Apparatus App 20210242070 - HONMA; Manabu ; et al.	2021-08-05
Rotation Driving Mechanism And Rotation Driving Method, And Substrate Processing Apparatus And Substrate Processing Method Using Same App 20210164098 - HONMA; Manabu	2021-06-03
Substrate Processing Apparatus App 20200354832 - HONMA; Manabu	2020-11-12
Film forming method Grant 10,731,255 - Honma , et al.	2020-08-04
Film Forming Apparatus And Film Forming Method App 20200149168 - HONMA; Manabu	2020-05-14
Substrate processing apparatus Grant 10,584,416 - Kato , et al.	2020-03-10
Film-forming Apparatus And Film-forming Method App 20190136377 - HONMA; Manabu ; et al.	2019-05-09
Relief Valve And Substrate Processing Apparatus App 20190136994 - NAKASATO; Yuka ; et al.	2019-05-09
Substrate processing apparatus and substrate processing method Grant 10,221,480 - Kato , et al.	2019-03-05
Film Forming Method, Film Forming Apparatus, And Computer Readable Storage Medium App 20180363134 - HONMA; Manabu ; et al.	2018-12-20
Substrate processing apparatus and method of fabricating substrate loading unit Grant 10,094,022 - Honma October 9, 2	2018-10-09
Substrate Processing Apparatus App 20180195173 - KATO; Hitoshi ; et al.	2018-07-12
Substrate processing apparatus Grant 9,988,717 - Honma June 5, 2	2018-06-05
Substrate Processing Apparatus App 20170218514 - KATO; Hitoshi ; et al.	2017-08-03
Substrate processing apparatus having a pillar support structure for preventing transformation of a ceiling portion Grant 9,683,290 - Honma June 20, 2	2017-06-20
Gas processing apparatus Grant 9,598,767 - Honma March 21, 2	2017-03-21
Substrate Processing Apparatus And Substrate Processing Method App 20170067160 - KATO; Hitoshi ; et al.	2017-03-09
Film deposition apparatus, substrate processing apparatus, film deposition method, and computer-readable storage medium for film deposition method Grant 9,416,448 - Kato , et al. August 16, 2	2016-08-16
Substrate Processing Apparatus App 20160222509 - HONMA; Manabu	2016-08-04
Substrate Processing Apparatus App 20160215395 - HONMA; Manabu	2016-07-28
Film deposition apparatus Grant 9,297,072 - Kato , et al. March 29, 2	2016-03-29
Substrate Processing Apparatus And Method Of Fabricating Substrate Loading Unit App 20160083841 - HONMA; Manabu	2016-03-24
Film deposition apparatus, substrate processing apparatus, film deposition method, and storage medium Grant 9,267,204 - Honma February 23, 2	2016-02-23
Substrate Processing Apparatus Using Rotatable Table App 20150240357 - TACHIBANA; Mitsuhiro ; et al.	2015-08-27
Film deposition apparatus Grant 9,103,030 - Kato , et al. August 11, 2	2015-08-11
Film Deposition Apparatus App 20150211119 - ONO; Yuji ; et al.	2015-07-30
Film deposition apparatus Grant 9,093,490 - Kato , et al. July 28, 2	2015-07-28
Film deposition apparatus and substrate processing apparatus Grant 9,039,837 - Honma May 26, 2	2015-05-26
Substrate processing apparatus, substrate processing method, and computer-readable storage medium Grant 8,992,685 - Kato , et al. March 31, 2	2015-03-31
Film deposition apparatus, film deposition method, computer readable storage medium for storing a program causing the apparatus to perform the method Grant 8,961,691 - Kato , et al. February 24, 2	2015-02-24
Film deposition apparatus, cleaning method for the same, and computer storage medium storing program Grant 8,944,077 - Kato , et al. February 3, 2	2015-02-03
Gas Processing Apparatus App 20140366808 - HONMA; Manabu	2014-12-18
Film deposition apparatus, film deposition method, and computer readable storage medium Grant 8,882,915 - Kato , et al. November 11, 2	2014-11-11
Substrate position detection apparatus, film deposition apparatus equipped with the same, and substrate position detection method Grant 8,854,449 - Aikawa , et al. October 7, 2	2014-10-07
Substrate processing apparatus Grant 8,845,857 - Ohizumi , et al. September 30, 2	2014-09-30
Film deposition apparatus, substrate processor, film deposition method, and computer-readable storage medium Grant 8,840,727 - Kato , et al. September 23, 2	2014-09-23
Film deposition apparatus and substrate process apparatus Grant 8,808,456 - Kato , et al. August 19, 2	2014-08-19
Film Deposition Apparatus And Film Deposition Method App 20140213068 - Kato; Hitoshi ; et al.	2014-07-31
Substrate process apparatus, substrate process method, and computer readable storage medium Grant 8,746,170 - Orito , et al. June 10, 2	2014-06-10
Film deposition apparatus Grant 8,721,790 - Kato , et al. May 13, 2	2014-05-13
Film deposition apparatus and substrate processing apparatus Grant 8,673,079 - Kato , et al. March 18, 2	2014-03-18
Film deposition apparatus, film deposition method, and storage medium Grant 8,673,395 - Kato , et al. March 18, 2	2014-03-18
Film Deposition Method And Computer Readable Storage Medium App 20130251904 - KATO; Hitoshi ; et al.	2013-09-26
Film deposition apparatus, substrate process apparatus, film deposition method, and computer readable storage medium Grant 8,518,183 - Honma August 27, 2	2013-08-27
Film deposition apparatus Grant 8,465,592 - Kato , et al. June 18, 2	2013-06-18
Film deposition apparatus Grant 8,465,591 - Kato , et al. June 18, 2	2013-06-18
Film Deposition Apparatus, Film Deposition Method, And Storage Medium App 20130122718 - KATO; Hitoshi ; et al.	2013-05-16
Film Deposition Apparatus And Substrate Processing Apparatus App 20130074770 - HONMA; Manabu	2013-03-28
Substrate Processing Apparatus And Film Deposition Apparatus App 20130047924 - Enomoto; Tadashi ; et al.	2013-02-28
Film deposition apparatus Grant 8,372,202 - Kato , et al. February 12, 2	2013-02-12
Film Deposition Apparatus And Substrate Processing Apparatus App 20130019801 - HONMA; MANABU	2013-01-24
Film Deposition Apparatus App 20120222615 - KATO; Hitoshi ; et al.	2012-09-06
Film Deposition Apparatus And Film Deposition Method App 20120094011 - HISHIYA; Katsuyuki ; et al.	2012-04-19
Substrate Position Detection Apparatus, Film Deposition Apparatus Equipped With The Same, And Substrate Position Detection Method App 20120075460 - AIKAWA; Katsuyoshi ; et al.	2012-03-29
Side wall for reactor for manufacturing semiconductor Grant D655,262 - Honma , et al. March 6, 2	2012-03-06
Gas-separating plate for reactor for manufacturing semiconductor Grant D655,260 - Honma , et al. March 6, 2	2012-03-06
Gas-separating plate for reactor for manufacturing semiconductor Grant D655,261 - Honma , et al. March 6, 2	2012-03-06
Top plate for reactor for manufacturing semiconductor Grant D655,259 - Honma , et al. March 6, 2	2012-03-06
Side wall for reactor for manufacturing semiconductor Grant D655,258 - Honma , et al. March 6, 2	2012-03-06
Top plate for reactor for manufacturing semiconductor Grant D655,257 - Honma , et al. March 6, 2	2012-03-06
Gas-separating plate for reactor for manufacturing semiconductor Grant D654,882 - Honma , et al. February 28, 2	2012-02-28
Top plate for reactor for manufacturing semiconductor Grant D654,883 - Honma , et al. February 28, 2	2012-02-28
Top plate for reactor for manufacturing semiconductor Grant D654,884 - Honma , et al. February 28, 2	2012-02-28
Film deposition apparatus and film deposition method Grant 8,034,723 - Ohizumi , et al. October 11, 2	2011-10-11
Film Deposition Apparatus And Film Deposition Method App 20110159702 - Ohizumi; Yukio ; et al.	2011-06-30
Film Deposition Apparatus And Film Deposition Method App 20110159187 - KATO; Hitoshi ; et al.	2011-06-30
Film Deposition Apparatus App 20110155056 - KATO; Hitoshi ; et al.	2011-06-30
Film Deposition Apparatus, Film Deposition Method, And Computer Readable Storage Medium App 20110151122 - KATO; HITOSHI ; et al.	2011-06-23
Film Deposition Apparatus App 20110139074 - KATO; HITOSHI ; et al.	2011-06-16
Substrate Processing Apparatus App 20110126985 - OHIZUMI; YUKIO ; et al.	2011-06-02
Substrate Process Apparatus, Substrate Process Method, And Computer Readable Storage Medium App 20110100489 - Orito; Kohichi ; et al.	2011-05-05
Substrate Processing Apparatus, Substrate Processing Method, And Computer-readable Storage Medium App 20100260936 - Kato; Hitoshi ; et al.	2010-10-14
Film Deposition Apparatus, Film Deposition Method, And Computer Readable Storage Medium App 20100260935 - KATO; HITOSHI ; et al.	2010-10-14
Film Deposition Apparatus App 20100229797 - KATO; HITOSHI ; et al.	2010-09-16
Film Deposition Apparatus, Film Deposition Method, And Computer Readable Storage Medium App 20100227059 - Kato; Hitoshi ; et al.	2010-09-09
Film Deposition Apparatus, Film Deposition Method, And Computer Readable Storage Medium App 20100227046 - KATO; HITOSHI ; et al.	2010-09-09
Film Deposition Apparatus, Film Deposition Method, And Computer-readable Storage Medium App 20100151131 - OBARA; KAZUTERU ; et al.	2010-06-17
Film Deposition Apparatus, Film Deposition Method, Semiconductor Device Fabrication Apparatus, Susceptor For Use In The Same, And Computer Readable Storage Medium App 20100136795 - HONMA; MANABU	2010-06-03
Film Deposition Apparatus App 20100132614 - KATO; HITOSHI ; et al.	2010-06-03
Film Deposition Apparatus App 20100132615 - KATO; HITOSHI ; et al.	2010-06-03
Substrate Position Detection Apparatus, Substrate Position Detection Method, Film Deposition Apparatus, Film Deposition Method, And A Computer Readable Storage Medium App 20100124610 - AIKAWA; KATSUYOSHI ; et al.	2010-05-20
Film Deposition Apparatus, Cleaning Method For The Same, And Computer Storage Medium Storing Program App 20100122710 - KATO; HITOSHI ; et al.	2010-05-20
Gas Injector And Film Deposition Apparatus App 20100116210 - KATO; HITOSHI ; et al.	2010-05-13
Processing apparatus Grant 7,674,336 - Honma , et al. March 9, 2	2010-03-09
Film Deposition Apparatus, Film Deposition Method, And Storage Medium App 20100055314 - KATO; HITOSHI ; et al.	2010-03-04
Film Deposition Apparatus, Substrate Processing Apparatus, Film Deposition Method And Storage Medium App 20100055320 - HONMA; MANABU	2010-03-04
Film Deposition Apparatus, Substrate Processing Apparatus, Film Deposition Method, And Storage Medium App 20100055316 - HONMA; MANABU	2010-03-04
Film Deposition Apparatus, Substrate Processing Apparatus, Film Deposition Method, And Computer-readable Storage Medium For Film Deposition Method App 20100055297 - KATO; HITOSHI ; et al.	2010-03-04
Film Deposition Apparatus And Substrate Process Apparatus App 20100050942 - Kato; Hitoshi ; et al.	2010-03-04
Film Deposition Apparatus And Substrate Processing Apparatus App 20100050943 - Kato; Hitoshi ; et al.	2010-03-04
Film Deposition Apparatus, Substrate Process Apparatus, And Turntable App 20100050944 - KATO; HITOSHI ; et al.	2010-03-04
Film Deposition Apparatus, Substrate Processing Apparatus, Film Deposition Method, And Computer-readable Storage Medium App 20100055312 - KATO; HITOSHI ; et al.	2010-03-04
Film Deposition Apparatus Exposing Substrate To Plural Gases In Sequence App 20100055317 - KATO; HITOSHI ; et al.	2010-03-04
Film Deposition Apparatus, Film Deposition Method, Computer Readable Storage Medium For Storing A Program Causing The Apparatus To Perform The Method App 20100055351 - KATO; HITOSHI ; et al.	2010-03-04
Film Deposition Apparatus, Substrate Processor, Film Deposition Method, And Computer-readable Storage Medium App 20100055319 - Kato; Hitoshi ; et al.	2010-03-04
Film Deposition Apparatus, Substrate Process Apparatus, Film Deposition Method, And Computer Readable Storage Medium App 20100055315 - HONMA; MANABU	2010-03-04
Film Deposition Apparatus, Film Deposition Method, And Computer Readable Storage Medium App 20090324828 - KATO; HITOSHI ; et al.	2009-12-31
Film Deposition Apparatus, Film Deposition Method, and Computer Readable Storage Medium App 20090324826 - Kato; Hitoshi ; et al.	2009-12-31
Vertical heat treatment device and method controlling the same Grant 7,432,475 - Nakajima , et al. October 7, 2	2008-10-07
Gas supply system, gas supply method, method of cleaning thin film forming apparatus, thin film forming method and thin film forming apparatus App 20080105194 - Nakao; Ken ; et al.	2008-05-08
Vertical heat treatment device and method controlling the same App 20070148606 - Nakajima; Makoto ; et al.	2007-06-28
Processing apparatus App 20070075086 - Honma; Manabu ; et al.	2007-04-05
Vertical thermal treatment apparatus Grant 6,235,121 - Honma , et al. May 22, 2	2001-05-22
Wafer boat for use in a semiconductor wafer heat processing apparatus Grant D404,015 - Honma January 12, 1	1999-01-12

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