Patent | Date |
---|
Adherend recovery method, adherend recovery apparatus, gas-generating film and resin composition Grant 10,415,011 - Hieda , et al. Sept | 2019-09-17 |
Adherend Recovery Method, Adherend Recovery Apparatus, Gas-generating Film And Resin Composition App 20160168532 - HIEDA; Katsuhiko ;   et al. | 2016-06-16 |
Microfluidic Device, Process For Producing The Same, And Channel-forming Photosensitive Resin Composition App 20160136638 - Hieda; Katsuhiko ;   et al. | 2016-05-19 |
Electrochemical Device App 20120288747 - Naoi; Masaya ;   et al. | 2012-11-15 |
Semiconductor manufacturing apparatus, liquid container, and semiconductor device manufacturing method Grant 8,119,196 - Arisumi , et al. February 21, 2 | 2012-02-21 |
Resist Pattern Coating Agent And Resist Pattern-forming Method App 20110123936 - HORI; Masafumi ;   et al. | 2011-05-26 |
Method of manufacturing a semiconductor device Grant 7,759,174 - Hieda July 20, 2 | 2010-07-20 |
Semiconductor manufacturing apparatus, liquid container, and semiconductor device manufacturing method App 20100159710 - Arisumi; Osamu ;   et al. | 2010-06-24 |
Semiconductor device and method of manufacturing same App 20100055869 - Arisumi; Osamu ;   et al. | 2010-03-04 |
Semiconductor device and method of manufacturing the same by filling a trench which includes an additional coating step Grant 7,618,876 - Arisumi , et al. November 17, 2 | 2009-11-17 |
Semiconductor device and method of manufacture thereof Grant 7,579,241 - Hieda , et al. August 25, 2 | 2009-08-25 |
Semiconductor device and method of fabricating the same Grant 7,416,987 - Hieda , et al. August 26, 2 | 2008-08-26 |
Method for manufacturing a semiconductor device Grant 7,413,987 - Hieda , et al. August 19, 2 | 2008-08-19 |
Immersion Exposure System, and Recycle Method and Supply Method of Liquid for Immersion Exposure App 20080129970 - Furukawa; Taiichi ;   et al. | 2008-06-05 |
Semiconductor device and method of manufacture thereof App 20070287245 - Hieda; Katsuhiko ;   et al. | 2007-12-13 |
Semiconductor device and method for manufacturing the same Grant 7,253,075 - Hieda August 7, 2 | 2007-08-07 |
Semiconductor device and method of manufacturing the same App 20070122946 - Hieda; Katsuhiko | 2007-05-31 |
Semiconductor device and method of manufacture thereof Grant 7,224,019 - Hieda , et al. May 29, 2 | 2007-05-29 |
Semiconductor device and method of fabricating the same App 20070066005 - Hieda; Katsuhiko ;   et al. | 2007-03-22 |
Semiconductor device and method of manufacturing the same Grant 7,180,121 - Hieda February 20, 2 | 2007-02-20 |
Semiconductor device and method of manufacturing same App 20060270170 - Arisumi; Osamu ;   et al. | 2006-11-30 |
Semiconductor device with transistor and capacitor and its manufacture method Grant 7,112,839 - Lin , et al. September 26, 2 | 2006-09-26 |
Method for manufacturing a semiconductor device App 20060205233 - Hieda; Katsuhiko ;   et al. | 2006-09-14 |
Semiconductor device and method of fabricating the same Grant 7,105,397 - Hieda , et al. September 12, 2 | 2006-09-12 |
Method for manufacturing a semiconductor device Grant 7,071,107 - Hieda , et al. July 4, 2 | 2006-07-04 |
Semiconductor manufacturing apparatus, liquid container, and semiconductor device manufacturing method App 20060134928 - Arisumi; Osamu ;   et al. | 2006-06-22 |
Method of manufacturing a nonvolatile semiconductor memory device Grant 7,060,559 - Ozawa , et al. June 13, 2 | 2006-06-13 |
Semiconductor device and method for manufacturing the same App 20060084215 - Hieda; Katsuhiko ;   et al. | 2006-04-20 |
Semiconductor device and method for manufacturing the same Grant 6,992,358 - Hieda , et al. January 31, 2 | 2006-01-31 |
Semiconductor device and method of manufacturing the same Grant 6,964,899 - Hieda November 15, 2 | 2005-11-15 |
Semiconductor device and method of manufacturing the same App 20050224863 - Hieda, Katsuhiko ;   et al. | 2005-10-13 |
Semiconductor device and method of manufacture thereof App 20050226047 - Hieda, Katsuhiko ;   et al. | 2005-10-13 |
Semiconductor device and method of manufacturing the same App 20050218442 - Hieda, Katsuhiko | 2005-10-06 |
Semiconductor device and, manufacturing method thereof App 20050170608 - Kiyotoshi, Masahiro ;   et al. | 2005-08-04 |
Capacitor Grant 6,924,193 - Lin , et al. August 2, 2 | 2005-08-02 |
Semiconductor device and method for manufacturing the same App 20050121703 - Hieda, Katsuhiko ;   et al. | 2005-06-09 |
Semiconductor device and method of fabricating the same App 20050116300 - Hieda, Katsuhiko ;   et al. | 2005-06-02 |
Semiconductor device and method of manufacturing the same App 20050087874 - Hieda, Katsuhiko | 2005-04-28 |
Semiconductor device and method for manufacturing the same Grant 6,867,451 - Hieda , et al. March 15, 2 | 2005-03-15 |
Semiconductor device with transistor and capacitor and its manufacture method Grant 6,849,894 - Lin , et al. February 1, 2 | 2005-02-01 |
Semiconductor device with transistor and capacitor and its manufacture method App 20040262663 - Lin, Jun ;   et al. | 2004-12-30 |
Semiconductor device and method for manufacturing the same App 20040259297 - Inumiya, Seiji ;   et al. | 2004-12-23 |
Semiconductor device and method of manufacturing the same App 20040248359 - Hieda, Katsuhiko | 2004-12-09 |
Semiconductor device and method of manufacturing the same App 20040197990 - Hieda, Katsuhiko | 2004-10-07 |
Semiconductor memory device and method of manufacturing the same App 20040178470 - Hieda, Katsuhiko | 2004-09-16 |
Semiconductor device and method for manufacturing the same Grant 6,787,827 - Inumiya , et al. September 7, 2 | 2004-09-07 |
Semiconductor device that includes a plurality of capacitors having different capacities Grant 6,777,776 - Hieda August 17, 2 | 2004-08-17 |
Semiconductor device and method for manufacturing the same Grant 6,750,142 - Hieda June 15, 2 | 2004-06-15 |
Semiconductor device and method of manufacturing the same App 20040104421 - Ozawa, Yoshio ;   et al. | 2004-06-03 |
Capacitor App 20040097050 - Lin, Jun ;   et al. | 2004-05-20 |
Semiconductor device and method of manufacturing the same Grant 6,737,724 - Hieda , et al. May 18, 2 | 2004-05-18 |
Semiconductor device and method of manufacturing the same App 20040079980 - Hieda, Katsuhiko | 2004-04-29 |
Method for manufacturing a semiconductor device App 20040072429 - Hieda, Katsuhiko ;   et al. | 2004-04-15 |
Dynamic semiconductor memory device having a trench capacitor Grant 6,720,606 - Nitayama , et al. April 13, 2 | 2004-04-13 |
Semiconductor memory device and method for manufacturing the same Grant 6,707,706 - Nitayama , et al. March 16, 2 | 2004-03-16 |
Semiconductor device having a three-dimensional capacitor such as a stack-type capacitor Grant 6,696,721 - Hieda February 24, 2 | 2004-02-24 |
Capacitor Grant 6,690,054 - Lin , et al. February 10, 2 | 2004-02-10 |
Semiconductor device with transistor and capacitor and its manufacture method App 20040012047 - Lin, Jun ;   et al. | 2004-01-22 |
Semiconductor device with groove type channel structure Grant 6,664,592 - Inumiya , et al. December 16, 2 | 2003-12-16 |
Semiconductor device having a three-dimensional capacitor such as a stack-type capacitor App 20030160273 - Hieda, Katsuhiko | 2003-08-28 |
Semiconductor device provided with capacitor having cavity-provided electrode Grant 6,611,017 - Hieda August 26, 2 | 2003-08-26 |
Scanning exposure method Grant 6,600,166 - Sato , et al. July 29, 2 | 2003-07-29 |
Capacitor, method for fabricating the capacitor, and method for fabricating semiconductor device App 20030107076 - Lin, Jun ;   et al. | 2003-06-12 |
Semiconductor device and manufacturing method therefor App 20030107088 - Inumiya, Seiji ;   et al. | 2003-06-12 |
Semiconductor device and method of manufacturing the same App 20030047763 - Hieda, Katsuhiko ;   et al. | 2003-03-13 |
Semiconductor device and manufacturing method therefor Grant 6,515,338 - Inumiya , et al. February 4, 2 | 2003-02-04 |
Semiconductor memory device and method for manufacturing the same App 20030001290 - Nitayama, Akihiro ;   et al. | 2003-01-02 |
Etching method and cleaning method of chemical vapor growth apparatus App 20020190024 - Eguchi, Kazuhiro ;   et al. | 2002-12-19 |
Etching method and cleaning method of chemical vapor growth apparatus Grant 6,495,054 - Eguchi , et al. December 17, 2 | 2002-12-17 |
Semiconductor device and method of manufacturing the same Grant 6,482,714 - Hieda , et al. November 19, 2 | 2002-11-19 |
Semiconductor Device And Method For Manufacturing The Smae App 20020153552 - HIEDA, KATSUHIKO ;   et al. | 2002-10-24 |
Semiconductor device and method for manufacturing the same App 20020117698 - Inumiya, Seiji ;   et al. | 2002-08-29 |
Semiconductor memory device and method of manufacture the same Grant 6,388,282 - Hieda May 14, 2 | 2002-05-14 |
Semiconductor device and method for manufacturing the same App 20020048935 - Hieda, Katsuhiko | 2002-04-25 |
Ferroelectric capacitor with means to prevent deterioration Grant 6,351,006 - Yamakawa , et al. February 26, 2 | 2002-02-26 |
Scanning exposure method App 20020014600 - Sato, Takashi ;   et al. | 2002-02-07 |
Semiconductor device and method for manufacturing the same App 20020011612 - Hieda, Katsuhiko | 2002-01-31 |
Semiconductor device and manufacturing method thereof Grant 6,335,241 - Hieda , et al. January 1, 2 | 2002-01-01 |
Semiconductor device having a three-dimensional capacitor such as a stack-type capacitor App 20010025977 - Hieda, Katsuhiko | 2001-10-04 |
Semiconductor device and method of manufacturing the same Grant 6,278,152 - Hieda , et al. August 21, 2 | 2001-08-21 |
Semiconductor device with gate insulator formed of high dielectric film Grant 6,278,164 - Hieda , et al. August 21, 2 | 2001-08-21 |
Semiconductor device and method for manufacturing same Grant 6,251,763 - Inumiya , et al. June 26, 2 | 2001-06-26 |
Cvd Film Formation Method And Apparatus Using Molded Solid Body And The Molded Solid Body App 20010003603 - EGUCHI, KAZUHIRO ;   et al. | 2001-06-14 |
Dynamic semiconductor memory device having a trench capacitor Grant 6,236,079 - Nitayama , et al. May 22, 2 | 2001-05-22 |
Metallization structure and method for a semiconductor device Grant 6,124,189 - Watanabe , et al. September 26, 2 | 2000-09-26 |
Semiconductor device having self-aligned contact plug and metallized gate electrode Grant 6,072,221 - Hieda | 2000-06-06 |
Method of manufacturing a semiconductor device which includes forming a dummy gate Grant 6,054,355 - Inumiya , et al. April 25, 2 | 2000-04-25 |
Dynamic ram structure having a trench capacitor Grant 5,998,821 - Hieda , et al. December 7, 1 | 1999-12-07 |
Plurality of photolithographic alignment marks with shape, size and spacing based on circuit pattern features Grant 5,702,567 - Mitsui , et al. December 30, 1 | 1997-12-30 |
Dynamic semiconductor memory device with higher density bit line/word line layout Grant 5,578,847 - Aoki , et al. November 26, 1 | 1996-11-26 |
Semiconductor memory with insulation film embedded in groove formed on substrate Grant 5,561,311 - Hamamoto , et al. October 1, 1 | 1996-10-01 |
Random access memory device with trench-type one-transistor memory cell structure Grant 5,508,541 - Hieda , et al. April 16, 1 | 1996-04-16 |
Semiconductor device and process for manufacturing the same Grant 5,371,024 - Hieda , et al. December 6, 1 | 1994-12-06 |
Dynamic semiconductor memory device having high integration density Grant 5,363,325 - Sunouchi , et al. November 8, 1 | 1994-11-08 |
Method of making dynamic random access semiconductor memory device Grant 5,350,708 - Yagishita , et al. September 27, 1 | 1994-09-27 |
Pattern forming method Grant 5,262,282 - Hieda , et al. November 16, 1 | 1993-11-16 |
Semiconductor memory with pad electrode and bit line under stacked capacitor Grant 5,235,199 - Hamamoto , et al. August 10, 1 | 1993-08-10 |
A P channel MIS type semiconductor device Grant 5,164,801 - Hieda , et al. November 17, 1 | 1992-11-17 |
Method of manufacturing dynamic RAM Grant 5,155,059 - Hieda October 13, 1 | 1992-10-13 |
Semiconductor memory device with dielectric isolation Grant 5,119,155 - Hieda , et al. June 2, 1 | 1992-06-02 |
Method of making trench type dynamic random access memory device Grant 5,106,774 - Hieda , et al. April 21, 1 | 1992-04-21 |
Dynamic ram and method of manufacturing the same Grant 5,072,269 - Hieda December 10, 1 | 1991-12-10 |
Field effect transistor with lightly doped drain structure and method for manufacturing the same Grant 5,061,649 - Takenouchi , et al. October 29, 1 | 1991-10-29 |
Semiconductor memory device Grant 5,012,308 - Hieda April 30, 1 | 1991-04-30 |
MOS transistor Grant 4,979,014 - Hieda , et al. December 18, 1 | 1990-12-18 |