Patent | Date |
---|
Systems For Coupling And Storing An Imaging Instrument App 20220079696 - Nichols; Sarah A. ;   et al. | 2022-03-17 |
Systems And Methods For Detecting An Orientation Of Medical Instruments App 20210267440 - LIN; Jue ;   et al. | 2021-09-02 |
Systems And Methods For Orientation Detection And Tool Installation App 20210267695 - HAZELTON; Andrew J. ;   et al. | 2021-09-02 |
Systems And Methods For Sensing Presence Of Medical Tools App 20210153975 - Polonsky; Andrey ;   et al. | 2021-05-27 |
Imaging Systems And Methods Of Use App 20200323424 - Hazelton; Andrew J. ;   et al. | 2020-10-15 |
System And Method For Image Detection During Instrument Grasping And Stapling App 20200315735 - HAZELTON; Andrew J. ;   et al. | 2020-10-08 |
Liquid Jet And Recovery System For Immersion Lithography App 20190129311 - NOVAK; W. Thomas ;   et al. | 2019-05-02 |
System And Method For Providing On-demand Functionality During A Medical Procedure App 20190060014 - Hazelton; Andrew J. ;   et al. | 2019-02-28 |
Liquid jet and recovery system for immersion lithography Grant 10,185,222 - Novak , et al. Ja | 2019-01-22 |
Optical metrology with purged reference chip Grant 10,082,461 - Klassen , et al. September 25, 2 | 2018-09-25 |
Environmental System Including Vacuum Scavenge For An Immersion Lithography Apparatus App 20180259860 - HAZELTON; Andrew J. ;   et al. | 2018-09-13 |
Environmental System Including A Transport Region For An Immersion Lithography Apparatus App 20180164703 - NOVAK; W. Thomas ;   et al. | 2018-06-14 |
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 9,977,350 - Hazelton , et al. May 22, 2 | 2018-05-22 |
Protected lens cover plate for an optical metrology device Grant 9,958,673 - Shields , et al. May 1, 2 | 2018-05-01 |
Environmental system including a transport region for an immersion lithography apparatus Grant 9,910,370 - Novak , et al. March 6, 2 | 2018-03-06 |
Liquid Jet And Recovery System For Immersion Lithography App 20180024442 - NOVAK; W. Thomas ;   et al. | 2018-01-25 |
Liquid jet and recovery system for immersion lithography Grant 9,785,057 - Novak , et al. October 10, 2 | 2017-10-10 |
Environmental System Including Vacuum Scavenge For An Immersion Lithography Apparatus App 20170235237 - HAZELTON; Andrew J. ;   et al. | 2017-08-17 |
Environmental System Including A Transport Region For An Immersion Lithography Apparatus App 20170219940 - NOVAK; W. Thomas ;   et al. | 2017-08-03 |
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 9,658,537 - Hazelton , et al. May 23, 2 | 2017-05-23 |
Environmental system including a transport region for an immersion lithography apparatus Grant 9,632,427 - Novak , et al. April 25, 2 | 2017-04-25 |
Immersion lithography fluid control system regulating flow velocity of gas based on position of gas outlets Grant 9,618,852 - Coon , et al. April 11, 2 | 2017-04-11 |
Liquid Jet And Recovery System For Immersion Lithography App 20160209762 - NOVAK; W. Thomas ;   et al. | 2016-07-21 |
Liquid jet and recovery system for immersion lithography Grant 9,304,409 - Novak , et al. April 5, 2 | 2016-04-05 |
Environmental System Including A Transport Region For An Immersion Lithography Apparatus App 20160085160 - NOVAK; W. Thomas ;   et al. | 2016-03-24 |
Environmental System Including Vacuum Scavenge For An Immersion Lithography Apparatus App 20160085159 - HAZELTON; Andrew J. ;   et al. | 2016-03-24 |
Protected Lens Cover Plate For An Optical Metrology Device App 20160033763 - SHIELDS; Jason Robert ;   et al. | 2016-02-04 |
Optical Metrology With Purged Reference Chip App 20160033399 - KLASSEN; Andrew S. ;   et al. | 2016-02-04 |
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 9,244,362 - Hazelton , et al. January 26, 2 | 2016-01-26 |
Environmental system including a transport region for an immersion lithography apparatus Grant 9,244,363 - Novak , et al. January 26, 2 | 2016-01-26 |
Environmental System Including A Transport Region For An Immersion Lithography Apparatus App 20140354967 - NOVAK; W. Thomas ;   et al. | 2014-12-04 |
Environmental System Including Vacuum Scavenge For An Immersion Lithography Apparatus App 20140320831 - HAZELTON; Andrew J. ;   et al. | 2014-10-30 |
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 8,836,914 - Hazelton , et al. September 16, 2 | 2014-09-16 |
Liquid Jet And Recovery System For Immersion Lithography App 20140253888 - NOVAK; W. Thomas ;   et al. | 2014-09-11 |
Environmental system including a transport region for an immersion lithography apparatus Grant 8,830,443 - Novak , et al. September 9, 2 | 2014-09-09 |
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 8,810,768 - Hazelton , et al. August 19, 2 | 2014-08-19 |
Immersion lithography fluid control system changing flow velocity of gas outlets based on motion of a surface Grant 8,797,500 - Coon , et al. August 5, 2 | 2014-08-05 |
Wafer Table Having Sensor For Immersion Lithography App 20130301018 - HAZELTON; Andrew J. ;   et al. | 2013-11-14 |
Wafer Table Having Sensor For Immersion Lithography App 20130301016 - HAZELTON; Andrew J. ;   et al. | 2013-11-14 |
Wafer table having sensor for immersion lithography Grant 8,508,718 - Hazelton , et al. August 13, 2 | 2013-08-13 |
Immersion lithography fluid control system regulating gas velocity based on contact angle Grant 8,497,973 - Coon , et al. July 30, 2 | 2013-07-30 |
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 8,456,610 - Hazelton , et al. June 4, 2 | 2013-06-04 |
Environmental System Including Vacuum Scavenge For An Immersion Lithography Apparatus App 20120262684 - HAZELTON; Andrew J. ;   et al. | 2012-10-18 |
Liquid jet and recovery system for immersion lithography App 20120019792 - Novak; W. Thomas ;   et al. | 2012-01-26 |
Immersion lithography fluid control system using an electric or magnetic field generator Grant 8,102,501 - Coon , et al. January 24, 2 | 2012-01-24 |
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 8,089,610 - Hazelton , et al. January 3, 2 | 2012-01-03 |
Liquid jet and recovery system for immersion lithography Grant 8,059,258 - Novak , et al. November 15, 2 | 2011-11-15 |
Environmental system including a transport region for an immersion lithography apparatus App 20110235007 - Novak; W. Thomas ;   et al. | 2011-09-29 |
Environmental system including a transport region for an immersion lithography apparatus Grant 7,969,552 - Novak , et al. June 28, 2 | 2011-06-28 |
Environmental system including a transport region for an immersion lithography apparatus Grant 7,965,376 - Novak , et al. June 21, 2 | 2011-06-21 |
Liquid jet and recovery system for immersion lithography Grant 7,932,989 - Novak , et al. April 26, 2 | 2011-04-26 |
Environmental system including a transport region for an immersion lithography apparatus Grant 7,929,111 - Novak , et al. April 19, 2 | 2011-04-19 |
Environmental system including a transport region for an immersion lithography apparatus Grant 7,929,110 - Novak , et al. April 19, 2 | 2011-04-19 |
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20110037959 - Hazelton; Andrew J. ;   et al. | 2011-02-17 |
Liquid jet and recovery system for immersion lithography App 20110031416 - Novak; W. Thomas ;   et al. | 2011-02-10 |
Stage assembly with lightweight fine stage and low transmissibility Grant 7,869,000 - Arai , et al. January 11, 2 | 2011-01-11 |
Wafer positioner with planar motor and mag-lev fine stage Grant RE41,232 - Hazelton , et al. April 20, 2 | 2010-04-20 |
Cleanup method for optics in immersion lithography App 20090195762 - Hazelton; Andrew J. ;   et al. | 2009-08-06 |
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20090180096 - Hazelton; Andrew J. ;   et al. | 2009-07-16 |
Cleanup method for optics in immersion lithography App 20090174872 - Hazelton; Andrew J. ;   et al. | 2009-07-09 |
Cleanup method for optics in immersion lithography App 20090161084 - Hazelton; Andrew J. ;   et al. | 2009-06-25 |
Wafer table for immersion lithography App 20090109418 - Hazelton; Andrew J. ;   et al. | 2009-04-30 |
Cleanup method for optics in immersion lithography Grant 7,522,259 - Hazelton , et al. April 21, 2 | 2009-04-21 |
Immersion lithography fluid control system App 20090075212 - Coon; Derek ;   et al. | 2009-03-19 |
Immersion lithography fluid control system App 20090075211 - Coon; Derek ;   et al. | 2009-03-19 |
Liquid jet and recovery system for immersion lithography App 20090051888 - Novak; W. Thomas ;   et al. | 2009-02-26 |
Wafer table for immersion lithography Grant 7,486,380 - Hazelton , et al. February 3, 2 | 2009-02-03 |
Z actuator with anti-gravity Grant 7,462,958 - Hazelton December 9, 2 | 2008-12-09 |
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 7,456,930 - Hazelton , et al. November 25, 2 | 2008-11-25 |
Liquid jet and recovery system for immersion lithography Grant 7,443,482 - Novak , et al. October 28, 2 | 2008-10-28 |
High Efficiency Voice Coil Motor App 20080165450 - Binnard; Michael B. ;   et al. | 2008-07-10 |
High Efficiency Voice Coil Motor App 20080165451 - Binnard; Michael B. ;   et al. | 2008-07-10 |
Fine Stage Z Support Apparatus App 20080105069 - Binnard; Michael B. ;   et al. | 2008-05-08 |
High efficiency voice coil motor Grant 7,368,838 - Binnard , et al. May 6, 2 | 2008-05-06 |
Cleanup method for optics in immersion lithography App 20080100813 - Hazelton; Andrew J. ;   et al. | 2008-05-01 |
Mover combination with two circulation flows Grant 7,355,308 - Hazelton April 8, 2 | 2008-04-08 |
Environmental system including a transport region for an immersion lithography apparatus Grant 7,345,742 - Novak , et al. March 18, 2 | 2008-03-18 |
Immersion lithography fluid control system that applies force to confine the immersion liquid Grant 7,339,650 - Coon , et al. March 4, 2 | 2008-03-04 |
Liquid jet and recovery system for immersion lithography App 20080030698 - Novak; W. Thomas ;   et al. | 2008-02-07 |
Environmental system including a transport region for an immersion lithography apparatus App 20080030704 - Novak; W. Thomas ;   et al. | 2008-02-07 |
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 7,321,415 - Hazelton , et al. January 22, 2 | 2008-01-22 |
Wafer table for immersion lithography Grant 7,301,607 - Hazelton , et al. November 27, 2 | 2007-11-27 |
Immersion lithography fluid control system App 20070268468 - Coon; Derek ;   et al. | 2007-11-22 |
Immersion lithography fluid control system App 20070263184 - Coon; Derek ;   et al. | 2007-11-15 |
Environmental system including a transport region for an immersion lithography apparatus App 20070258062 - Novak; W. Thomas ;   et al. | 2007-11-08 |
Environmental system including a transport region for an immersion lithography apparatus App 20070252961 - Novak; W. Thomas ;   et al. | 2007-11-01 |
Environmental system including a transport region for an immersion lithography apparatus App 20070252962 - Novak; W. Thomas ;   et al. | 2007-11-01 |
System and method for cooling motors of a lithographic tool Grant 7,288,864 - Eaton , et al. October 30, 2 | 2007-10-30 |
Wafer stage operable in a vacuum environment Grant 7,288,859 - Hazelton October 30, 2 | 2007-10-30 |
Cleanup method for optics in immersion lithography App 20070247601 - Hazelton; Andrew J. ;   et al. | 2007-10-25 |
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20070247603 - Hazelton; Andrew J. ;   et al. | 2007-10-25 |
Image shift optic for optical system Grant 7,283,210 - Hazelton October 16, 2 | 2007-10-16 |
Environmental system including a transport region for an immersion lithography apparatus Grant 7,251,017 - Novak , et al. July 31, 2 | 2007-07-31 |
Cleanup method for optics in immersion lithography App 20070171390 - Hazelton; Andrew J. ;   et al. | 2007-07-26 |
Environmental system including a transport region for an immersion lithography apparatus App 20070139631 - Novak; W. Thomas ;   et al. | 2007-06-21 |
Cleanup method for optics in immersion lithography App 20070132975 - Hazelton; Andrew J. ;   et al. | 2007-06-14 |
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20070132974 - Hazelton; Andrew J. ;   et al. | 2007-06-14 |
Immersion lithography fluid control system App 20070115453 - Coon; Derek ;   et al. | 2007-05-24 |
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20070103662 - Hazelton; Andrew J. ;   et al. | 2007-05-10 |
Wafer table for immersion lithography App 20070076182 - Hazelton; Andrew J. ;   et al. | 2007-04-05 |
Stage design for reflective optics Grant 7,193,683 - Hazelton March 20, 2 | 2007-03-20 |
Detachable heat sink Grant 7,164,466 - Hazelton January 16, 2 | 2007-01-16 |
System for cooling motors App 20060232145 - Binnard; Michael B. ;   et al. | 2006-10-19 |
Image shift optic for optical system App 20060215133 - Hazelton; Andrew J. | 2006-09-28 |
Multiple system vibration isolator Grant 7,095,482 - Phillips , et al. August 22, 2 | 2006-08-22 |
Bellows with spring anti-gravity device Grant 7,087,906 - Hazelton August 8, 2 | 2006-08-08 |
Stage design for reflective optics App 20060146303 - Hazelton; Andrew J. | 2006-07-06 |
Multiple System Vibration Isolator App 20060126039 - Phillips; Alton H. ;   et al. | 2006-06-15 |
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20060114435 - Hazelton; Andrew J. ;   et al. | 2006-06-01 |
Stage assembly with lightweight fine stage and low transmissibility App 20060104753 - Arai; Yoichi ;   et al. | 2006-05-18 |
Wafer table for immersion lithography App 20060103832 - Hazelton; Andrew J. ;   et al. | 2006-05-18 |
High Efficiency Voice Coil Motor App 20060091733 - Binnard; Michael B. ;   et al. | 2006-05-04 |
Bellows with spring anti-gravity device App 20060060791 - Hazelton; Andrew J. | 2006-03-23 |
Z actuator with anti-gravity App 20060061219 - Hazelton; Andrew J. | 2006-03-23 |
Dual force wafer table App 20060061218 - Hazelton; Andrew J. | 2006-03-23 |
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20060033899 - Hazelton; Andrew J. ;   et al. | 2006-02-16 |
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20060028632 - Hazelton; Andrew J. ;   et al. | 2006-02-09 |
Liquid jet and recovery system for immersion lithography App 20060023183 - Novak; W. Thomas ;   et al. | 2006-02-02 |
Immersion lithography fluid control system App 20060023184 - Coon; Derek ;   et al. | 2006-02-02 |
Environmental system including a transport region for an immersion lithography apparatus App 20060023182 - Novak; W. Thomas ;   et al. | 2006-02-02 |
Cleanup method for optics in immersion lithography App 20060023185 - Hazelton; Andrew J. ;   et al. | 2006-02-02 |
Circulation housing for a mover Grant 6,979,920 - Reynolds , et al. December 27, 2 | 2005-12-27 |
System and method for resetting a reaction mass assembly of a stage assembly Grant 6,958,808 - Tanaka , et al. October 25, 2 | 2005-10-25 |
System and method for cooling motors of a lithographic tool App 20050224222 - Eaton, John K. ;   et al. | 2005-10-13 |
Wafer stage operable in a vacuum environment App 20050168076 - Hazelton, Andrew J. | 2005-08-04 |
Circulation housing for a mover App 20050168075 - Reynolds, Ed ;   et al. | 2005-08-04 |
Tube carrier reaction apparatus Grant 6,903,467 - Hazelton June 7, 2 | 2005-06-07 |
System and method for resetting a reaction mass assembly of a stage assembly Grant 6,885,430 - Tanaka , et al. April 26, 2 | 2005-04-26 |
Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system Grant 6,880,942 - Hazelton , et al. April 19, 2 | 2005-04-19 |
Holder mover for a stage assembly Grant 6,882,126 - Watson , et al. April 19, 2 | 2005-04-19 |
Vibration-attenuation devices and methods using pressurized bellows exhibiting substantially zero lateral stiffness Grant 6,870,600 - Hazelton March 22, 2 | 2005-03-22 |
Holding member, coolant, cooling method and cooling device, linear motor device, stage device, and exposure apparatus App 20050057102 - Totsu, Masahiro ;   et al. | 2005-03-17 |
Mover combination with two circulation flows App 20050040712 - Hazelton, Andrew J. | 2005-02-24 |
Actuator to correct for off center-of-gravity line of force Grant 6,841,956 - Hazelton , et al. January 11, 2 | 2005-01-11 |
Heat pipe with temperature control App 20040244963 - Hazelton, Andrew J. | 2004-12-09 |
Isolated frame caster Grant 6,809,323 - Hazelton October 26, 2 | 2004-10-26 |
System and method for switching position signals during servo control of a device table Grant 6,801,300 - Peterson , et al. October 5, 2 | 2004-10-05 |
Bellows lateral stiffness adjustment App 20040187616 - Watson, Douglas C. ;   et al. | 2004-09-30 |
Stage device, exposure apparatus and method Grant 6,788,385 - Tanaka , et al. September 7, 2 | 2004-09-07 |
Vibration-attenuation devices and methods using pressurized bellows exhibiting substantially zero lateral stiffness App 20040135979 - Hazelton, Andrew J. | 2004-07-15 |
Tube carrier reaction apparatus App 20040130220 - Hazelton, Andrew J. | 2004-07-08 |
Stage assembly including a reaction mass assembly Grant 6,757,053 - Hazelton , et al. June 29, 2 | 2004-06-29 |
Wafer stage with magnetic bearings Grant 6,750,625 - Binnard , et al. June 15, 2 | 2004-06-15 |
Vibration damping devices and methods App 20040100007 - Engwall, Mats Anders ;   et al. | 2004-05-27 |
Stage assembly including a damping assembly Grant 6,724,466 - Ono , et al. April 20, 2 | 2004-04-20 |
Reaction frame apparatus and method Grant 6,724,000 - Hazelton April 20, 2 | 2004-04-20 |
Circulating system for a conductor App 20040070938 - Hazelton, Andrew J. ;   et al. | 2004-04-15 |
Switchable damping mechanism for use in a stage apparatus App 20040057817 - Hazelton, Andrew J. | 2004-03-25 |
System and method for resetting a reaction mass assembly of a stage assembly App 20040051854 - Tanaka, Keiichi ;   et al. | 2004-03-18 |
Actuator to correct for off center-of-gravity line of force App 20040051402 - Hazelton, Andrew J. ;   et al. | 2004-03-18 |
Detachable heat sink App 20040040694 - Hazelton, Andrew J. | 2004-03-04 |
Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system App 20040036940 - Hazelton, Andrew J. ;   et al. | 2004-02-26 |
Scanning exposure method with reduced time between scans Grant 6,686,990 - Hazelton , et al. February 3, 2 | 2004-02-03 |
System and method for resetting a reaction mass assembly of a stage assembly App 20040012768 - Tanaka, Keiichi ;   et al. | 2004-01-22 |
Method and apparatus for reducing rotary stiffness in a support mechanism App 20040004703 - Hazelton, Andrew J. | 2004-01-08 |
Multiple system vibration isolator App 20040000215 - Phillips, Alton H. ;   et al. | 2004-01-01 |
Adaptive optic off-axis metrology App 20030234993 - Hazelton, Andrew J. ;   et al. | 2003-12-25 |
Stage assembly including a reaction assembly App 20030218732 - Watson, Douglas C. ;   et al. | 2003-11-27 |
Reaction frame apparatus and method App 20030213919 - Hazelton, Andrew J. | 2003-11-20 |
Isolated frame caster App 20030189177 - Hazelton, Andrew J. | 2003-10-09 |
Stage assembly including a damping assembly App 20030184724 - Ono, Kazuya ;   et al. | 2003-10-02 |
Wafer stage with magnetic bearings App 20030173833 - Hazelton, Andrew J. ;   et al. | 2003-09-18 |
Reaction Frame For A Wafer Scanning Stage With Electromagnetic Connections To Ground App 20030169412 - Hazelton, Andrew J. | 2003-09-11 |
Stage assembly including a reaction assembly Grant 6,593,997 - Watson , et al. July 15, 2 | 2003-07-15 |
Holder mover for a stage assembly App 20030098664 - Watson, Douglas C. ;   et al. | 2003-05-29 |
Sheet coils and linear motors comprising same, and stage units and microlithography apparatuscomprising said linear motors App 20030080631 - Kageyama, Shigeki ;   et al. | 2003-05-01 |
Wafer stage chamber Grant 6,551,045 - Binnard , et al. April 22, 2 | 2003-04-22 |
System and method for switching position signals during servo control of a device table App 20030035093 - Peterson, John ;   et al. | 2003-02-20 |
Reaction force isolation frame App 20030035094 - Hazelton, Andrew J. ;   et al. | 2003-02-20 |
Wafer stage with magnetic bearings App 20030034695 - Binnard, Michael ;   et al. | 2003-02-20 |
Circulating system for a voice coil conductor App 20030016107 - Hazelton, Andrew J. | 2003-01-23 |
Stage device, exposure apparatus and method App 20020196421 - Tanaka, Keiichi ;   et al. | 2002-12-26 |
Guideless stage Grant 6,486,941 - Hazelton , et al. November 26, 2 | 2002-11-26 |
Planar electric motor with two sided magnet array App 20020149270 - Hazelton, Andrew J. | 2002-10-17 |
Multiple stage, stage assembly having independent reaction force transfer App 20020117109 - Hazelton, Andrew J. ;   et al. | 2002-08-29 |
Wafer positioner with planar motor and mag-lev fine stage Grant 6,437,463 - Hazelton , et al. August 20, 2 | 2002-08-20 |
Wafer stage assembly App 20020109823 - Binnard, Michael ;   et al. | 2002-08-15 |
Electric linear motor App 20020089237 - Hazelton, Andrew J. | 2002-07-11 |
Wafer stage chamber App 20020061243 - Binnard, Michael ;   et al. | 2002-05-23 |
Stage device, and exposure apparatus with linear motor having polygonal shaped coil units Grant 6,373,153 - Hazelton , et al. April 16, 2 | 2002-04-16 |
Magnet array for a shaft-type linear motor Grant 6,313,551 - Hazelton November 6, 2 | 2001-11-06 |
Reaction force isolation system for a planar motor App 20010023927 - Hazelton, Andrew J. | 2001-09-27 |
Reaction force isolation system App 20010020684 - Hazelton, Andrew J. | 2001-09-13 |
Planar electric motor and positioning device having transverse magnets Grant 6,285,097 - Hazelton , et al. September 4, 2 | 2001-09-04 |
Scanning exposure method with reduced time between scans Grant 6,285,438 - Hazelton , et al. September 4, 2 | 2001-09-04 |
Cooling structure for a linear motor Grant 6,278,203 - Novak , et al. August 21, 2 | 2001-08-21 |
Reaction force isolation system for a planar motor Grant 6,252,234 - Hazelton , et al. June 26, 2 | 2001-06-26 |
Scanning exposure method with reduced time between scans App 20010000974 - Hazelton, Andrew J. ;   et al. | 2001-05-10 |
Wedge and transverse magnet arrays Grant 6,188,147 - Hazelton , et al. February 13, 2 | 2001-02-13 |
Linear motor with commutation coil Grant 6,163,091 - Wasson , et al. December 19, 2 | 2000-12-19 |
Planar electric motor with dual coil and magnet arrays Grant 6,144,119 - Hazelton November 7, 2 | 2000-11-07 |
Wedge magnet array for linear motor Grant 6,104,108 - Hazelton , et al. August 15, 2 | 2000-08-15 |
Compact planar motor having multiple degrees of freedom Grant 6,097,114 - Hazelton August 1, 2 | 2000-08-01 |