Haukka; Suvi P.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Haukka; Suvi P..The latest application filed is for "selective passivation and selective deposition".
Company Profile
30.86.91
- Haukka; Suvi P. - Helsinki FI
- Haukka; Suvi P. - Almere NL
Patent Activity
| Patent | Date |
|---|---|
| Deposition of oxide thin films Grant 11,430,656 - Haukka , et al. August 30, 2 | 2022-08-30 |
| Deposition of organic films Grant 11,387,107 - Tois , et al. July 12, 2 | 2022-07-12 |
| Selective Passivation And Selective Deposition App 20220208542 - Maes; Jan Willem Hub ; et al. | 2022-06-30 |
| Selective Deposition Of Metals, Metal Oxides, And Dielectrics App 20220193720 - Haukka; Suvi P. ; et al. | 2022-06-23 |
| Atomic Layer Etching Processes App 20220051872 - Blomberg; Tom E. ; et al. | 2022-02-17 |
| Selective Deposition On Metal Or Metallic Surfaces Relative To Dielectric Surfaces App 20220025513 - Haukka; Suvi P. ; et al. | 2022-01-27 |
| Thermal atomic layer etching processes Grant 11,230,769 - Blomberg , et al. January 25, 2 | 2022-01-25 |
| Selective deposition of metals, metal oxides, and dielectrics Grant 11,213,853 - Haukka , et al. January 4, 2 | 2022-01-04 |
| Selective Passivation And Selective Deposition App 20210358739 - Tois; Eva E. ; et al. | 2021-11-18 |
| Selective Passivation And Selective Deposition App 20210358745 - Maes; Jan Willem ; et al. | 2021-11-18 |
| Selective deposition on metal or metallic surfaces relative to dielectric surfaces Grant 11,174,550 - Haukka , et al. November 16, 2 | 2021-11-16 |
| Selective Deposition Using Hydrophobic Precursors App 20210351031 - Farm; Elina ; et al. | 2021-11-11 |
| Selective passivation and selective deposition Grant 11,145,506 - Maes , et al. October 12, 2 | 2021-10-12 |
| Dual Selective Deposition App 20210285097 - Haukka; Suvi P. ; et al. | 2021-09-16 |
| Selective passivation and selective deposition Grant 11,094,535 - Tois , et al. August 17, 2 | 2021-08-17 |
| Selective deposition using hydrophobic precursors Grant 11,081,342 - Farm , et al. August 3, 2 | 2021-08-03 |
| Si precursors for deposition of SiN at low temperatures Grant 11,069,522 - Niskanen , et al. July 20, 2 | 2021-07-20 |
| Selective formation of metallic films on metallic surfaces Grant 11,056,385 - Haukka , et al. July 6, 2 | 2021-07-06 |
| Dual selective deposition Grant 11,047,040 - Haukka , et al. June 29, 2 | 2021-06-29 |
| Deposition Of Organic Films App 20210175092 - Tois; Eva E. ; et al. | 2021-06-10 |
| Deposition Of Organic Films App 20210151324 - Tois; Eva E. ; et al. | 2021-05-20 |
| Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES App 20210082684 - Niskanen; Antti J. ; et al. | 2021-03-18 |
| Deposition of organic films Grant 10,923,361 - Tois , et al. February 16, 2 | 2021-02-16 |
| Method of forming a structure on a substrate Grant 10,867,788 - Blanquart , et al. December 15, 2 | 2020-12-15 |
| Sulfur-containing thin films Grant 10,854,444 - Haukka , et al. December 1, 2 | 2020-12-01 |
| Deposition of organic films Grant 10,854,460 - Tois , et al. December 1, 2 | 2020-12-01 |
| Thermal Atomic Layer Etching Processes App 20200308709 - Blomberg; Tom E. ; et al. | 2020-10-01 |
| Sulfur-containing Thin Films App 20200266054 - Haukka; Suvi P. ; et al. | 2020-08-20 |
| Dual Selective Deposition App 20200181766 - Haukka; Suvi P. ; et al. | 2020-06-11 |
| Thermal atomic layer etching processes Grant 10,662,533 - Blomberg , et al. | 2020-05-26 |
| Atomic layer etching processes Grant 10,665,425 - Blomberg , et al. | 2020-05-26 |
| Selective Deposition Of Metals, Metal Oxides, And Dielectrics App 20200122191 - Haukka; Suvi P. ; et al. | 2020-04-23 |
| Selective Passivation And Selective Deposition App 20200105515 - Maes; Jan Willem Hub ; et al. | 2020-04-02 |
| Deposition Of Organic Films App 20200051829 - Tois; Eva E. ; et al. | 2020-02-13 |
| Methods for depositing nickel films and for making nickel silicide and nickel germanide Grant 10,553,440 - Pore , et al. Fe | 2020-02-04 |
| Sulfur-containing thin films Grant 10,553,424 - Haukka , et al. Fe | 2020-02-04 |
| Selective Deposition On Metal Or Metallic Surfaces Relative To Dielectric Surfaces App 20200010953 - Haukka; Suvi P. ; et al. | 2020-01-09 |
| Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES App 20190371594 - Niskanen; Antti J. ; et al. | 2019-12-05 |
| Deposition Of Organic Films App 20190333761 - Tois; Eva E. ; et al. | 2019-10-31 |
| Selective deposition of metals, metal oxides, and dielectrics Grant 10,456,808 - Haukka , et al. Oc | 2019-10-29 |
| Deposition of organic films Grant 10,453,701 - Tois , et al. Oc | 2019-10-22 |
| Dual selective deposition Grant 10,443,123 - Haukka , et al. Oc | 2019-10-15 |
| Selective deposition on metal or metallic surfaces relative to dielectric surfaces Grant 10,428,421 - Haukka , et al. October 1, 2 | 2019-10-01 |
| Si precursors for deposition of SiN at low temperatures Grant 10,395,917 - Niskanen , et al. A | 2019-08-27 |
| Sulfur-containing Thin Films App 20190259605 - Haukka; Suvi P. ; et al. | 2019-08-22 |
| Thermal Atomic Layer Etching Processes App 20190249312 - Blomberg; Tom E. ; et al. | 2019-08-15 |
| Atomic Layer Etching Processes App 20190244786 - Blomberg; Tom E. ; et al. | 2019-08-08 |
| Deposition of organic films Grant 10,373,820 - Tois , et al. | 2019-08-06 |
| Selective Formation Of Metallic Films On Metallic Surfaces App 20190181034 - Haukka; Suvi P. ; et al. | 2019-06-13 |
| Dual Selective Deposition App 20190100837 - Haukka; Suvi P. ; et al. | 2019-04-04 |
| Metal Silicide, Metal Germanide, Methods For Making The Same App 20190081149 - Pore; Viljami J. ; et al. | 2019-03-14 |
| Sulfur-containing thin films Grant 10,199,213 - Haukka , et al. Fe | 2019-02-05 |
| Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES App 20180366314 - Niskanen; Antti J. ; et al. | 2018-12-20 |
| Selective formation of metallic films on metallic surfaces Grant 10,157,786 - Haukka , et al. Dec | 2018-12-18 |
| Selective Deposition Of Metals, Metal Oxides, And Dielectrics App 20180243787 - Haukka; Suvi P. ; et al. | 2018-08-30 |
| Selective Passivation And Selective Deposition App 20180233350 - Tois; Eva E. ; et al. | 2018-08-16 |
| Dual selective deposition Grant 10,047,435 - Haukka , et al. August 14, 2 | 2018-08-14 |
| Selective formation of metallic films on metallic surfaces Grant 10,049,924 - Haukka , et al. August 14, 2 | 2018-08-14 |
| Metal silicide, metal germanide, methods for making the same Grant 10,043,880 - Pore , et al. August 7, 2 | 2018-08-07 |
| Method Of Forming A Structure On A Substrate App 20180182613 - Blanquart; Timothee Julien Vincent ; et al. | 2018-06-28 |
| Deposition Of Oxide Thin Films App 20180151345 - Haukka; Suvi P. ; et al. | 2018-05-31 |
| Selective Deposition App 20180073136 - Haukka; Suvi P. ; et al. | 2018-03-15 |
| Sulfur-containing Thin Films App 20180068846 - Haukka; Suvi P. ; et al. | 2018-03-08 |
| Selective Formation Of Metallic Films On Metallic Surfaces App 20180068885 - Haukka; Suvi P. ; et al. | 2018-03-08 |
| Si precursors for deposition of SiN at low temperatures Grant 9,905,416 - Niskanen , et al. February 27, 2 | 2018-02-27 |
| Selective deposition of metals, metal oxides, and dielectrics Grant 9,895,715 - Haukka , et al. February 20, 2 | 2018-02-20 |
| Deposition Of Organic Films App 20170352550 - Tois; Eva E. ; et al. | 2017-12-07 |
| Deposition Of Organic Films App 20170352533 - Tois; Eva E. ; et al. | 2017-12-07 |
| Metal Silicide, Metal Germanide, Methods For Making The Same App 20170352737 - Pore; Viljami J. ; et al. | 2017-12-07 |
| Selective deposition Grant 9,816,180 - Haukka , et al. November 14, 2 | 2017-11-14 |
| Selective Deposition Using Hydrophobic Precursors App 20170323776 - Farm; Elina ; et al. | 2017-11-09 |
| Sulfur-containing thin films Grant 9,721,786 - Haukka , et al. August 1, 2 | 2017-08-01 |
| Selective formation of metallic films on metallic surfaces Grant 9,679,808 - Haukka , et al. June 13, 2 | 2017-06-13 |
| Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES App 20170133216 - Niskanen; Antti J. ; et al. | 2017-05-11 |
| Doped metal germanide and methods for making the same Grant 9,634,106 - Pore , et al. April 25, 2 | 2017-04-25 |
| Atomic layer deposition of metal carbide films using aluminum hydrocarbon compounds Grant 9,631,272 - Li , et al. April 25, 2 | 2017-04-25 |
| Selective Formation Of Metallic Films On Metallic Surfaces App 20170069527 - Haukka; Suvi P. ; et al. | 2017-03-09 |
| Enhanced deposition of noble metals Grant 9,587,307 - Haukka , et al. March 7, 2 | 2017-03-07 |
| Selective Deposition On Metal Or Metallic Surfaces Relative To Dielectric Surfaces App 20170037513 - Haukka; Suvi P. ; et al. | 2017-02-09 |
| Si precursors for deposition of SiN at low temperatures Grant 9,564,309 - Niskanen , et al. February 7, 2 | 2017-02-07 |
| Methods For Depositing Nickel Films And For Making Nickel Silicide And Nickel Germanide App 20170018433 - Pore; Viljami J. ; et al. | 2017-01-19 |
| Selective formation of metallic films on metallic surfaces Grant 9,502,289 - Haukka , et al. November 22, 2 | 2016-11-22 |
| Sulfur-containing thin films Grant 9,478,419 - Haukka , et al. October 25, 2 | 2016-10-25 |
| Selective Formation Of Metallic Films On Metallic Surfaces App 20160276208 - Haukka; Suvi P. ; et al. | 2016-09-22 |
| Selective Deposition App 20160222504 - Haukka; Suvi P. ; et al. | 2016-08-04 |
| Sulfur-containing Thin Films App 20160203974 - Haukka; Suvi P. ; et al. | 2016-07-14 |
| Methods for depositing nickel films and for making nickel silicide and nickel germanide Grant 9,379,011 - Pore , et al. June 28, 2 | 2016-06-28 |
| Selective formation of metallic films on metallic surfaces Grant 9,257,303 - Haukka , et al. February 9, 2 | 2016-02-09 |
| Metal Silicide, Metal Germanide, Methods For Making The Same App 20160035852 - PORE; VILJAMI J. ; et al. | 2016-02-04 |
| Sulfur-containing thin films Grant 9,245,742 - Haukka , et al. January 26, 2 | 2016-01-26 |
| Selective Formation Of Metallic Films On Metallic Surfaces App 20160005649 - Haukka; Suvi P. ; et al. | 2016-01-07 |
| Modification of nanoimprint lithography templates by atomic layer deposition Grant 9,217,200 - Haukka , et al. December 22, 2 | 2015-12-22 |
| Dual Selective Deposition App 20150299848 - Haukka; Suvi P. ; et al. | 2015-10-22 |
| Metal silicide, metal germanide, methods for making the same Grant 9,129,897 - Pore , et al. September 8, 2 | 2015-09-08 |
| Selective formation of metallic films on metallic surfaces Grant 9,112,003 - Haukka , et al. August 18, 2 | 2015-08-18 |
| Selective Deposition Of Metals, Metal Oxides, And Dielectrics App 20150217330 - Haukka; Suvi P. ; et al. | 2015-08-06 |
| Selective Formation Of Metallic Films On Metallic Surfaces App 20150187600 - Haukka; Suvi P. ; et al. | 2015-07-02 |
| Sulfur-containing Thin Films App 20150170914 - Haukka; Suvi P. ; et al. | 2015-06-18 |
| Sulfur-containing Thin Films App 20150170907 - Haukka; Suvi P. ; et al. | 2015-06-18 |
| Selective formation of metallic films on metallic surfaces Grant 8,956,971 - Haukka , et al. February 17, 2 | 2015-02-17 |
| Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES App 20140273477 - Niskanen; Antti J. ; et al. | 2014-09-18 |
| Atomic Layer Deposition Of Metal Carbide Films Using Aluminum Hydrocarbon Compounds App 20140127405 - Li; Dong ; et al. | 2014-05-08 |
| Enhanced Deposition Of Noble Metals App 20140087076 - Haukka; Suvi P. ; et al. | 2014-03-27 |
| Methods for forming carbon nanotubes Grant 8,545,936 - Huotari , et al. October 1, 2 | 2013-10-01 |
| Silicon dioxide thin films by ALD Grant 8,501,637 - Matero , et al. August 6, 2 | 2013-08-06 |
| Enhanced deposition of noble metals Grant 8,501,275 - Haukka , et al. August 6, 2 | 2013-08-06 |
| Selective Formation Of Metallic Films On Metallic Surfaces App 20130196502 - Haukka; Suvi P. ; et al. | 2013-08-01 |
| Selective Formation Of Metallic Films On Metallic Surfaces App 20130189837 - Haukka; Suvi P. ; et al. | 2013-07-25 |
| Methods For Depositing Nickel Films And For Making Nickel Silicide And Nickel Germanide App 20130115768 - Pore; Viljami J. ; et al. | 2013-05-09 |
| Metal Silicide, Metal Germanide, Methods For Making The Same App 20120270393 - Pore; Viljami J. ; et al. | 2012-10-25 |
| Enhanced Deposition Of Noble Metals App 20120189774 - Haukka; Suvi P. ; et al. | 2012-07-26 |
| Thin Films App 20110256718 - Haukka; Suvi P. ; et al. | 2011-10-20 |
| Enhanced deposition of noble metals Grant 8,025,922 - Haukka , et al. September 27, 2 | 2011-09-27 |
| Thin films Grant 7,981,791 - Haukka , et al. July 19, 2 | 2011-07-19 |
| Modification Of Nanoimprint Lithography Templates By Atomic Layer Deposition App 20110146568 - Haukka; Suvi P. ; et al. | 2011-06-23 |
| Method for depositing nanolaminate thin films on sensitive surfaces Grant 7,749,871 - Elers , et al. July 6, 2 | 2010-07-06 |
| Atomic layer deposition of thin films on germanium Grant 7,704,896 - Haukka , et al. April 27, 2 | 2010-04-27 |
| Deposition of complex nitride films Grant 7,691,757 - Haukka , et al. April 6, 2 | 2010-04-06 |
| Conformal lining layers for damascene metallization Grant 7,670,944 - Raaijmakers , et al. March 2, 2 | 2010-03-02 |
| Atomic Layer Deposition Of Metal Carbide Films Using Aluminum Hydrocarbon Compounds App 20090315093 - LI; Dong ; et al. | 2009-12-24 |
| Methods For Forming Carbon Nanotubes App 20090246367 - Huotari; Hannu A. ; et al. | 2009-10-01 |
| Silicon Dioxide Thin Films by ALD App 20090209081 - MATERO; Raija H. ; et al. | 2009-08-20 |
| Thin Films App 20090068832 - Haukka; Suvi P. ; et al. | 2009-03-12 |
| Thin films Grant 7,419,903 - Haukka , et al. September 2, 2 | 2008-09-02 |
| Method for depositing nanolaminate thin films on sensitive surfaces Grant 7,329,590 - Elers , et al. February 12, 2 | 2008-02-12 |
| Deposition Of Complex Nitride Films App 20080003838 - Haukka; Suvi P. ; et al. | 2008-01-03 |
| Conformal lining layers for damascene metallization App 20070096321 - Raaijmakers; Ivo ; et al. | 2007-05-03 |
| Enhanced deposition of noble metals App 20070036892 - Haukka; Suvi P. ; et al. | 2007-02-15 |
| Atomic layer deposition of thin films on germanium App 20060292872 - Haukka; Suvi P. ; et al. | 2006-12-28 |
| Conformal lining layers for damascene metallization Grant 7,102,235 - Raaijmakers , et al. September 5, 2 | 2006-09-05 |
| Methods for making a dielectric stack in an integrated circuit Grant 7,038,284 - Haukka , et al. May 2, 2 | 2006-05-02 |
| Method for depositing nanolaminate thin films on sensitive surfaces App 20060079090 - Elers; Kai-Erik ; et al. | 2006-04-13 |
| Graded thin films Grant 6,933,225 - Werkhoven , et al. August 23, 2 | 2005-08-23 |
| Thin films App 20050181555 - Haukka, Suvi P. ; et al. | 2005-08-18 |
| Method for depositing nanolaminate thin films on sensitive surfaces Grant 6,902,763 - Elers , et al. June 7, 2 | 2005-06-07 |
| Method for depositing nanolaminate thin films on sensitive surfaces App 20050106877 - Elers, Kai-Erik ; et al. | 2005-05-19 |
| Method for bottomless deposition of barrier layers in integrated circuit metallization schemes Grant 6,852,635 - Satta , et al. February 8, 2 | 2005-02-08 |
| Conformal thin films over textured capacitor electrodes Grant 6,831,315 - Raaijmakers , et al. December 14, 2 | 2004-12-14 |
| Deposition of transition metal carbides Grant 6,800,552 - Elers , et al. October 5, 2 | 2004-10-05 |
| Method of forming ultrathin oxide layer Grant 6,794,314 - Raaijmakers , et al. September 21, 2 | 2004-09-21 |
| Conformal thin films over textured capacitor electrodes App 20040175586 - Raaijmakers, Ivo ; et al. | 2004-09-09 |
| Conformal thin films over textured capacitor electrodes Grant 6,780,704 - Raaijmakers , et al. August 24, 2 | 2004-08-24 |
| Conformal lining layers for damascene metallization App 20040130029 - Raaijmakers, Ivo ; et al. | 2004-07-08 |
| Method for bottomless deposition of barrier layers in integrated circuit metallization schemes App 20040121616 - Satta, Alessandra ; et al. | 2004-06-24 |
| Method of making conformal lining layers for damascene metallization Grant 6,727,169 - Raaijmakers , et al. April 27, 2 | 2004-04-27 |
| Graded thin films Grant 6,703,708 - Werkhoven , et al. March 9, 2 | 2004-03-09 |
| Methods for making a dielectric stack in an integrated circuit App 20040043557 - Haukka, Suvi P. ; et al. | 2004-03-04 |
| Method for controlling conformality with alternating layer deposition Grant 6,699,783 - Raaijmakers , et al. March 2, 2 | 2004-03-02 |
| Protective layers prior to alternating layer deposition Grant 6,686,271 - Raaijmakers , et al. February 3, 2 | 2004-02-03 |
| Method for bottomless deposition of barrier layers in integrated circuit metallization schemes Grant 6,664,192 - Satta , et al. December 16, 2 | 2003-12-16 |
| Methods for making a dielectric stack in an integrated circuit Grant 6,660,660 - Haukka , et al. December 9, 2 | 2003-12-09 |
| Controlled conformality with alternating layer deposition App 20030134508 - Raaijmakers, Ivo ; et al. | 2003-07-17 |
| Graded thin films App 20030129826 - Werkhoven, Christiaan J. ; et al. | 2003-07-10 |
| Method of forming ultrathin oxide layer App 20030060057 - Raaijmakers, Ivo ; et al. | 2003-03-27 |
| Protective layers prior to alternating layer deposition App 20030054631 - Raaijmakers, Ivo ; et al. | 2003-03-20 |
| Method of forming graded thin films using alternating pulses of vapor phase reactants Grant 6,534,395 - Werkhoven , et al. March 18, 2 | 2003-03-18 |
| Deposition of transition metal carbides App 20030031807 - Elers, Kai-Erik ; et al. | 2003-02-13 |
| Graded thin films App 20030032281 - Werkhoven, Christiaan J. ; et al. | 2003-02-13 |
| Method of forming ultrathin oxide layer Grant 6,492,283 - Raaijmakers , et al. December 10, 2 | 2002-12-10 |
| Protective layers prior to alternating layer deposition Grant 6,482,733 - Raaijmakers , et al. November 19, 2 | 2002-11-19 |
| Deposition of transition metal carbides Grant 6,482,262 - Elers , et al. November 19, 2 | 2002-11-19 |
| Method for bottomless deposition of barrier layers in integrated circuit metallization schemes App 20020155722 - Satta, Alessandra ; et al. | 2002-10-24 |
| Dielectric interface films and methods therefor App 20020115252 - Haukka, Suvi P. ; et al. | 2002-08-22 |
| Method for bottomless deposition of barrier layers in integrated circuit metallization schemes Grant 6,391,785 - Satta , et al. May 21, 2 | 2002-05-21 |
| Protective layers prior to alternating layer deposition App 20010054769 - Raaijmakers, Ivo ; et al. | 2001-12-27 |
| Graded thin films App 20010041250 - Werkhoven, Christian J. ; et al. | 2001-11-15 |
| Method of forming ultrathin oxide layer App 20010031562 - Raaijmakers, Ivo ; et al. | 2001-10-18 |
| Conformal thin films over textured capacitor electrodes App 20010024387 - Raaijmakers, Ivo ; et al. | 2001-09-27 |
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