Haukka; Suvi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Haukka; Suvi.The latest application filed is for "method for treatment of deposition reactor".
Company Profile
35.69.87
- Haukka; Suvi - Helsinki FI
Patent Activity
| Patent | Date |
|---|---|
| Method For Treatment Of Deposition Reactor App 20220277937 - Haukka; Suvi ; et al. | 2022-09-01 |
| Apparatuses for thin film deposition Grant 11,421,321 - Kawahara , et al. August 23, 2 | 2022-08-23 |
| Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process Grant 11,387,106 - Haukka July 12, 2 | 2022-07-12 |
| Thermal Atomic Layer Etching Processes App 20220119961 - Blomberg; Tom E. ; et al. | 2022-04-21 |
| Thermal Atomic Layer Etching Processes App 20220119962 - Blomberg; Tom E. ; et al. | 2022-04-21 |
| Methods for forming doped silicon oxide thin films Grant 11,302,527 - Takamure , et al. April 12, 2 | 2022-04-12 |
| Selective Peald Of Oxide On Dielectric App 20220076949 - Tois; Eva ; et al. | 2022-03-10 |
| Thermal atomic layer etching processes Grant 11,230,770 - Blomberg , et al. January 25, 2 | 2022-01-25 |
| Titanium Aluminum And Tantalum Aluminum Thin Films App 20210399111 - Haukka; Suvi ; et al. | 2021-12-23 |
| Atomic layer etching processes Grant 11,183,367 - Blomberg , et al. November 23, 2 | 2021-11-23 |
| Selective PEALD of oxide on dielectric Grant 11,170,993 - Tois , et al. November 9, 2 | 2021-11-09 |
| Method And Apparatus For Filling A Gap App 20210313167 - PORE; Viljami ; et al. | 2021-10-07 |
| Titanium aluminum and tantalum aluminum thin films Grant 11,139,383 - Haukka , et al. October 5, 2 | 2021-10-05 |
| Simultaneous Selective Deposition Of Two Different Materials On Two Different Surfaces App 20210301391 - Givens; Michael Eugene ; et al. | 2021-09-30 |
| Method For Depositing A Ruthenium-containing Film On A Substrate By A Cyclical Deposition Process App 20210066083 - Haukka; Suvi | 2021-03-04 |
| Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process Grant 10,896,820 - Haukka January 19, 2 | 2021-01-19 |
| Deposition of metal borides and silicides Grant 10,865,475 - Raisanen , et al. December 15, 2 | 2020-12-15 |
| Methods For Forming Doped Silicon Oxide Thin Films App 20200388487 - Takamure; Noboru ; et al. | 2020-12-10 |
| Deposition of metal borides Grant 10,851,456 - Zhu , et al. December 1, 2 | 2020-12-01 |
| Methods For Depositing Thin Films Comprising Indium Nitride By Atomic Layer Deposition App 20200335342 - Haukka; Suvi ; et al. | 2020-10-22 |
| Titanium Aluminum And Tantalum Aluminum Thin Films App 20200328285 - Haukka; Suvi ; et al. | 2020-10-15 |
| Atomic Layer Etching Processes App 20200312620 - Blomberg; Tom E. ; et al. | 2020-10-01 |
| Thermal Atomic Layer Etching Processes App 20200308710 - Blomberg; Tom E. ; et al. | 2020-10-01 |
| Methods for forming doped silicon oxide thin films Grant 10,784,105 - Takamure , et al. Sept | 2020-09-22 |
| Organic Reactants For Atomic Layer Deposition App 20200224311 - Niskanen; Antti ; et al. | 2020-07-16 |
| Methods for depositing thin films comprising indium nitride by atomic layer deposition Grant 10,707,082 - Haukka , et al. | 2020-07-07 |
| Methods for forming silicon nitride thin films App 20200203145 - Niskanen; Antti ; et al. | 2020-06-25 |
| Methods For Forming Doped Silicon Oxide Thin Films App 20200185218 - Takamure; Noboru ; et al. | 2020-06-11 |
| Thermal atomic layer etching processes Grant 10,662,534 - Blomberg , et al. | 2020-05-26 |
| Titanium aluminum and tantalum aluminum thin films Grant 10,636,889 - Haukka , et al. | 2020-04-28 |
| Organic reactants for atomic layer deposition Grant 10,612,137 - Niskanen , et al. | 2020-04-07 |
| Temperature-indexed Thin Film Deposition Reactors App 20200071828 - Jongbloed; Bert ; et al. | 2020-03-05 |
| Selective Peald Of Oxide On Dielectric App 20200066512 - Tois; Eva ; et al. | 2020-02-27 |
| Methods for forming silicon nitride thin films Grant 10,573,511 - Niskanen , et al. Feb | 2020-02-25 |
| Precursors And Methods For Atomic Layer Deposition Of Transition Metal Oxides App 20190382887 - Hatanpaa; Timo ; et al. | 2019-12-19 |
| Methods for forming doped silicon oxide thin films Grant 10,510,530 - Takamure , et al. Dec | 2019-12-17 |
| Aligned Carbon Nanotubes App 20190375638 - Haukka; Suvi | 2019-12-12 |
| Method For Depositing A Ruthenium-containing Film On A Substrate By A Cyclical Deposition Process App 20190252195 - Haukka; Suvi | 2019-08-15 |
| Thermal Atomic Layer Etching Processes App 20190242019 - Blomberg; Tom E. ; et al. | 2019-08-08 |
| Precursors and methods for atomic layer deposition of transition metal oxides Grant 10,344,378 - Hatanpaa , et al. July 9, 2 | 2019-07-09 |
| Aligned carbon nanotubes Grant 10,343,920 - Haukka July 9, 2 | 2019-07-09 |
| Methods For Forming Doped Silicon Oxide Thin Films App 20190172708 - Takamure; Noboru ; et al. | 2019-06-06 |
| Deposition Of Metal Borides App 20190153593 - Zhu; Chiyu ; et al. | 2019-05-23 |
| Atomic layer etching processes Grant 10,283,319 - Blomberg , et al. | 2019-05-07 |
| Thermal atomic layer etching processes Grant 10,280,519 - Blomberg , et al. | 2019-05-07 |
| Thermal atomic layer etching processes Grant 10,273,584 - Blomberg , et al. | 2019-04-30 |
| Methods for thin film deposition Grant 10,204,790 - Kawahara , et al. Feb | 2019-02-12 |
| Titanium Aluminum And Tantalum Aluminum Thin Films App 20190043962 - Haukka; Suvi ; et al. | 2019-02-07 |
| Deposition of metal borides Grant 10,190,213 - Zhu , et al. Ja | 2019-01-29 |
| Chalcogenide Films For Selector Devices App 20190006586 - Maes; Jan Willem ; et al. | 2019-01-03 |
| Plasma Enhanced Deposition Processes For Controlled Formation Of Metal Oxide Thin Films App 20180350587 - Jia; Lingyun ; et al. | 2018-12-06 |
| Methods for forming doped silicon oxide thin films Grant 10,147,600 - Takamure , et al. De | 2018-12-04 |
| Deposition of metal borides Grant 10,087,522 - Raisanen , et al. October 2, 2 | 2018-10-02 |
| Methods For Forming Doped Silicon Oxide Thin Films App 20180211834 - Takamure; Noboru ; et al. | 2018-07-26 |
| Atomic Layer Etching Processes App 20180182597 - Blomberg; Tom E. ; et al. | 2018-06-28 |
| Titanium aluminum and tantalum aluminum thin films Grant 10,002,936 - Haukka , et al. June 19, 2 | 2018-06-19 |
| Thermal Atomic Layer Etching Processes App 20180163312 - Blomberg; Tom E. ; et al. | 2018-06-14 |
| Thermal Atomic Layer Etching Processes App 20180166255 - Blomberg; Tom E. ; et al. | 2018-06-14 |
| Methods for forming doped silicon oxide thin films Grant 9,875,893 - Takamure , et al. January 23, 2 | 2018-01-23 |
| Organic Reactants For Atomic Layer Deposition App 20180010247 - Niskanen; Antti Juhani ; et al. | 2018-01-11 |
| Methods For Forming Doped Silicon Oxide Thin Films App 20170338111 - Takamure; Noboru ; et al. | 2017-11-23 |
| Method and apparatus for filling a gap Grant 9,812,320 - Pore , et al. November 7, 2 | 2017-11-07 |
| Deposition Of Metal Borides App 20170306480 - Zhu; Chiyu ; et al. | 2017-10-26 |
| Deposition Of Metal Borides App 20170306478 - Raisanen; Petri ; et al. | 2017-10-26 |
| Deposition Of Metal Borides And Silicides App 20170306479 - Raisanen; Petri ; et al. | 2017-10-26 |
| Aligned Carbon Nanotubes App 20170267531 - Haukka; Suvi | 2017-09-21 |
| Precursors And Methods For Atomic Layer Deposition Of Transition Metal Oxides App 20170253966 - Hatanpaa; Timo ; et al. | 2017-09-07 |
| Precursors and methods for atomic layer deposition of transition metal oxides Grant 9,677,173 - Hatanpaa , et al. June 13, 2 | 2017-06-13 |
| Silane And Borane Treatments For Titanium Carbide Films App 20170154778 - Chen; Jerry ; et al. | 2017-06-01 |
| Silane and borane treatments for titanium carbide films Grant 9,583,348 - Chen , et al. February 28, 2 | 2017-02-28 |
| Methods for forming doped silicon oxide thin films Grant 9,564,314 - Takamure , et al. February 7, 2 | 2017-02-07 |
| Apparatuses For Thin Film Deposition App 20170029947 - Kawahara; Jun ; et al. | 2017-02-02 |
| Methods For Thin Film Deposition App 20170032956 - Kawahara; Jun ; et al. | 2017-02-02 |
| System For Treatment Of Deposition Reactor App 20160376700 - Haukka; Suvi ; et al. | 2016-12-29 |
| Method of making a resistive random access memory Grant 9,520,562 - Xie , et al. December 13, 2 | 2016-12-13 |
| Method of growing oxide thin films Grant 9,514,956 - Tois , et al. December 6, 2 | 2016-12-06 |
| Method of making a resistive random access memory device Grant 9,472,757 - Xie , et al. October 18, 2 | 2016-10-18 |
| Precursors And Methods For Atomic Layer Deposition Of Transition Metal Oxides App 20160258054 - Hatanpaa; Timo ; et al. | 2016-09-08 |
| Methods For Forming Doped Silicon Oxide Thin Films App 20160196970 - Takamure; Noboru ; et al. | 2016-07-07 |
| Silane And Borane Treatments For Titanium Carbide Films App 20160196977 - Chen; Jerry ; et al. | 2016-07-07 |
| Precursors and methods for atomic layer deposition of transition metal oxides Grant 9,365,926 - Hatanpaa , et al. June 14, 2 | 2016-06-14 |
| Methods for forming doped silicon oxide thin films Grant 9,368,352 - Takamure , et al. June 14, 2 | 2016-06-14 |
| Method And System For Treatment Of Deposition Reactor App 20160115590 - Haukka; Suvi ; et al. | 2016-04-28 |
| Titanium Aluminum And Tantalum Aluminum Thin Films App 20160118261 - Haukka; Suvi ; et al. | 2016-04-28 |
| Silane and borane treatments for titanium carbide films Grant 9,236,247 - Chen , et al. January 12, 2 | 2016-01-12 |
| Method for treatment of deposition reactor Grant 9,228,259 - Haukka , et al. January 5, 2 | 2016-01-05 |
| Methods for forming doped silicon oxide thin films Grant 9,153,441 - Takamure , et al. October 6, 2 | 2015-10-06 |
| Silane or borane treatment of metal thin films Grant 9,111,749 - Shero , et al. August 18, 2 | 2015-08-18 |
| Precursors And Methods For Atomic Layer Deposition Of Transition Metal Oxides App 20150191817 - Hatanpaa; Timo ; et al. | 2015-07-09 |
| Silane And Borane Treatments For Titanium Carbide Films App 20150179440 - Chen; Jerry ; et al. | 2015-06-25 |
| Methods For Forming Doped Silicon Oxide Thin Films App 20150147875 - Takamure; Noboru ; et al. | 2015-05-28 |
| Method Of Making A Resistive Random Access Memory Device App 20150021540 - Xie; Qi ; et al. | 2015-01-22 |
| Method Of Making A Resistive Random Access Memory Device App 20150021537 - XIE; Qi ; et al. | 2015-01-22 |
| Methods For Forming Doped Silicon Oxide Thin Films App 20150017794 - Takamure; Noboru ; et al. | 2015-01-15 |
| Method for forming Si-containing film using two precursors by ALD Grant 8,912,101 - Tsuji , et al. December 16, 2 | 2014-12-16 |
| Silane Or Borane Treatment Of Metal Thin Films App 20140295673 - Shero; Eric ; et al. | 2014-10-02 |
| Silane or borane treatment of metal thin films Grant 8,846,550 - Shero , et al. September 30, 2 | 2014-09-30 |
| Methods for depositing thin films comprising gallium nitride by atomic layer deposition Grant 8,846,502 - Haukka , et al. September 30, 2 | 2014-09-30 |
| Silane and borane treatments for titanium carbide films Grant 8,841,182 - Chen , et al. September 23, 2 | 2014-09-23 |
| Silane Or Borane Treatment Of Metal Thin Films App 20140273428 - Shero; Eric ; et al. | 2014-09-18 |
| Methods For Forming Silicon Nitride Thin Films App 20140273527 - Niskanen; Antti ; et al. | 2014-09-18 |
| Silane And Borane Treatments For Titanium Carbide Films App 20140273510 - Chen; Jerry ; et al. | 2014-09-18 |
| Method And System For Treatment Of Deposition Reactor App 20140220247 - Haukka; Suvi ; et al. | 2014-08-07 |
| Methods for forming doped silicon oxide thin films Grant 8,679,958 - Takamure , et al. March 25, 2 | 2014-03-25 |
| High temperature atomic layer deposition of dielectric oxides Grant 8,592,294 - Haukka , et al. November 26, 2 | 2013-11-26 |
| Method for Forming Si-Containing Film Using Two Precursors by ALD App 20130244446 - Tsuji; Naoto ; et al. | 2013-09-19 |
| Method of growing electrical conductors Grant 8,536,058 - Kostamo , et al. September 17, 2 | 2013-09-17 |
| Methods For Forming Doped Silicon Oxide Thin Films App 20130115763 - Takamure; Noboru ; et al. | 2013-05-09 |
| Methods For Depositing Thin Films Comprising Indium Nitride By Atomic Layer Deposition App 20130109160 - Haukka; Suvi ; et al. | 2013-05-02 |
| Methods For Depositing Thin Films Comprising Gallium Nitride By Atomic Layer Deposition App 20130012003 - Haukka; Suvi ; et al. | 2013-01-10 |
| Deposition Of Silicon Dioxide On Hydrophobic Surfaces App 20120263876 - Haukka; Suvi ; et al. | 2012-10-18 |
| Methods for forming roughened surfaces and applications thereof Grant 8,252,703 - Huotari , et al. August 28, 2 | 2012-08-28 |
| Method Of Growing Electrical Conductors App 20120028474 - Kostamo; Juhana ; et al. | 2012-02-02 |
| Precursors And Methods For Atomic Layer Deposition Of Transition Metal Oxides App 20110293830 - Hatanpaa; Timo ; et al. | 2011-12-01 |
| Methods For Forming Roughened Surfaces And Applications Thereof App 20110256722 - Huotari; Hannu ; et al. | 2011-10-20 |
| Method for depositing thin films by mixed pulsed CVD and ALD Grant 8,017,182 - Hendriks , et al. September 13, 2 | 2011-09-13 |
| High Temperature Atomic Layer Deposition Of Dielectric Oxides App 20110207283 - Haukka; Suvi ; et al. | 2011-08-25 |
| Method of growing electrical conductors Grant 7,955,979 - Kostamo , et al. June 7, 2 | 2011-06-07 |
| Method Of Growing Oxide Thin Films App 20110104906 - Tois; Eva ; et al. | 2011-05-05 |
| Method for forming roughened surface Grant 7,923,382 - Huotari , et al. April 12, 2 | 2011-04-12 |
| Method of growing oxide thin films Grant 7,824,492 - Tois , et al. November 2, 2 | 2010-11-02 |
| Atomic-layer-chemical-vapor-deposition of films that contain silicon dioxide Grant 7,771,533 - Tois , et al. August 10, 2 | 2010-08-10 |
| Method of growing oxide thin films Grant 7,771,534 - Tois , et al. August 10, 2 | 2010-08-10 |
| Process For Forming High Resistivity Thin Metallic Film App 20100136313 - Shimizu; Akira ; et al. | 2010-06-03 |
| Methods for Forming Roughened Surfaces and Applications thereof App 20090246931 - Huotari; Hannu ; et al. | 2009-10-01 |
| Method of producing thin films Grant 7,563,715 - Haukka , et al. July 21, 2 | 2009-07-21 |
| Method of growing electrical conductors Grant 7,494,927 - Kostamo , et al. February 24, 2 | 2009-02-24 |
| Methods for forming roughened surfaces and applications thereof Grant 7,491,634 - Huotari , et al. February 17, 2 | 2009-02-17 |
| Method For Depositing Thin Films By Mixed Pulsed Cvd And Ald App 20080317972 - Hendriks; Menso ; et al. | 2008-12-25 |
| Method Of Growing Electrical Conductors App 20080146042 - Kostamo; Juhana ; et al. | 2008-06-19 |
| Methods for forming roughened surfaces and applications thereof App 20070254488 - Huotari; Hannu ; et al. | 2007-11-01 |
| Method Of Growing Oxide Thin Films App 20070163488 - Tois; Eva ; et al. | 2007-07-19 |
| Method of producing thin films App 20070128858 - Haukka; Suvi ; et al. | 2007-06-07 |
| Extended deposition range by hot spots App 20070054048 - Haukka; Suvi ; et al. | 2007-03-08 |
| Method of forming an electrode with adjusted work function Grant 7,045,406 - Huotari , et al. May 16, 2 | 2006-05-16 |
| Method of depositing barrier layer from metal gates App 20050104112 - Haukka, Suvi ; et al. | 2005-05-19 |
| Method of growing electrical conductors Grant 6,887,795 - Soininen , et al. May 3, 2 | 2005-05-03 |
| Method of depositing barrier layer for metal gates Grant 6,858,524 - Haukka , et al. February 22, 2 | 2005-02-22 |
| Low temperature method of forming a gate stack with a high k layer deposited over an interfacial oxide layer Grant 6,806,145 - Haukka , et al. October 19, 2 | 2004-10-19 |
| Sealing porous structures Grant 6,759,325 - Raaijmakers , et al. July 6, 2 | 2004-07-06 |
| Method of depositing barrier layer from metal gates App 20040104439 - Haukka, Suvi ; et al. | 2004-06-03 |
| Method of forming an electrode with adjusted work function App 20040106261 - Huotari, Hannu ; et al. | 2004-06-03 |
| Method of growing oxide thin films App 20040065253 - Tois, Eva ; et al. | 2004-04-08 |
| Method of growing electrical conductors App 20040005753 - Kostamo, Juhana ; et al. | 2004-01-08 |
| Method Of Growing Oxide Films App 20030188682 - Tois , Eva ; et al. | 2003-10-09 |
| Sealing porous structures App 20030143839 - Raaijmakers, Ivo ; et al. | 2003-07-31 |
| Method of growing electrical conductors App 20030096468 - Soininen, Pekka J. ; et al. | 2003-05-22 |
| Low temperature gate stack App 20030049942 - Haukka, Suvi ; et al. | 2003-03-13 |
| Method of growing electrical conductors by reducing metal oxide film with organic compound containing -OH, -CHO, or -COOH Grant 6,482,740 - Soininen , et al. November 19, 2 | 2002-11-19 |
| Method of growing electrical conductors App 20020004293 - Soininen, Pekka J. ; et al. | 2002-01-10 |
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