Hatanpaa; Timo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hatanpaa; Timo.The latest application filed is for "deposition of transition metal -comprising material".

Company Profile

4.35.40

Hatanpaa; Timo - Espoo FI
Hatanpaa; Timo - Helsinki FI

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Deposition Of Transition Metal -comprising Material App 20220251701 - Mattinen; Miika ; et al.	2022-08-11
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process Grant 11,390,946 - Hatanpaa , et al. July 19, 2	2022-07-19
Synthesis And Use Of Precursors For Ald Of Tellurium And Selenium Thin Films App 20210347795 - Pore; Viljami ; et al.	2021-11-11
Cyclic Deposition Methods For Forming Metal-containing Material And Films And Structures Including The Metal-containing Material App 20210317576 - Vayrynen; Katja ; et al.	2021-10-14
Vapor Deposition Of Thin Films Comprising Gold App 20210277519 - Makela; Maarit ; et al.	2021-09-09
Cyclic Deposition Methods For Forming Metal-containing Material And Films And Structures Including The Metal-containing Material App 20210269914 - Vayrynen; Katja ; et al.	2021-09-02
Synthesis And Use Of Precursors For Ald Of Molybdenum Or Tungsten Containing Thin Films App 20210269915 - McKee; Tiina ; et al.	2021-09-02
Synthesis And Use Of Precursors For Vapor Deposition Of Tungsten Containing Thin Films App 20210246095 - Hatanpaa; Timo ; et al.	2021-08-12
Synthesis and use of precursors for ALD of tellurium and selenium thin films Grant 11,072,622 - Pore , et al. July 27, 2	2021-07-27
Vapor deposition of thin films comprising gold Grant 11,047,046 - Makela , et al. June 29, 2	2021-06-29
Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films Grant 11,047,042 - McKee , et al. June 29, 2	2021-06-29
Synthesis And Use Of Precursors For Ald Of Group Va Element Containing Thin Films App 20210164101 - Pore; Viljami ; et al.	2021-06-03
Synthesis and use of precursors for vapor deposition of tungsten containing thin films Grant 11,014,866 - Hatanpaa , et al. May 25, 2	2021-05-25
Synthesis and use of precursors for ALD of group VA element containing thin films Grant 10,941,487 - Pore , et al. March 9, 2	2021-03-09
Method Of Forming A Transition Metal Containing Film On A Substrate By A Cyclical Deposition Process, A Method For Supplying A Transition Metal Halide Compound To A Reaction Chamber, And Related Vapor Deposition Apparatus App 20200340113 - Hatanpaa; Timo ; et al.	2020-10-29
Synthesis And Use Of Precursors For Ald Of Group Va Element Containing Thin Films App 20200291518 - Pore; Viljami ; et al.	2020-09-17
Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus Grant 10,731,249 - Hatanpaa , et al.	2020-08-04
Methods Of Forming A Transition Metal Containing Film On A Substrate By A Cyclical Deposition Process App 20200232096 - Hatanpaa; Timo ; et al.	2020-07-23
Synthesis and use of precursors for ALD of group VA element containing thin films Grant 10,619,244 - Pore , et al.	2020-04-14
Precursors And Methods For Atomic Layer Deposition Of Transition Metal Oxides App 20190382887 - Hatanpaa; Timo ; et al.	2019-12-19
Synthesis And Use Of Precursors For Vapor Deposition Of Tungsten Containing Thin Films App 20190300468 - Hatanpaa; Timo ; et al.	2019-10-03
Synthesis And Use Of Precursors For Ald Of Tellurium And Selenium Thin Films App 20190263848 - Pore; Viljami ; et al.	2019-08-29
Method Of Forming A Transition Metal Containing Film On A Substrate By A Cyclical Deposition Process, A Method For Supplying A T App 20190249300 - Hatanpaa; Timo ; et al.	2019-08-15
Synthesis and use of precursors for vapor deposition of tungsten containing thin films Grant 10,358,407 - Hatanpaa , et al. July 23, 2	2019-07-23
Precursors and methods for atomic layer deposition of transition metal oxides Grant 10,344,378 - Hatanpaa , et al. July 9, 2	2019-07-09
Synthesis And Use Of Precursors For Ald Of Group Va Element Containing Thin Films App 20190177843 - Pore; Viljami ; et al.	2019-06-13
Synthesis and use of precursors for ALD of tellurium and selenium thin films Grant 10,308,673 - Pore , et al.	2019-06-04
Vapor Deposition Of Thin Films Comprising Gold App 20190071775 - Makela; Maarit ; et al.	2019-03-07
Synthesis and use of precursors for ALD of group VA element containing thin films Grant 10,208,379 - Pore , et al. Feb	2019-02-19
Vapor deposition of thin films comprising gold Grant 10,145,009 - Makela , et al. De	2018-12-04
Vapor Deposition Of Thin Films Comprising Gold App 20180209041 - Makela; Maarit ; et al.	2018-07-26
Synthesis And Use Of Precursors For Ald Of Molybdenum Or Tungsten Containing Thin Films App 20180127873 - Sarnet; Tiina ; et al.	2018-05-10
Synthesis And Use Of Precursors For Vapor Deposition Of Tungsten Containing Thin Films App 20180099916 - Hatanpaa; Timo ; et al.	2018-04-12
Synthesis And Use Of Precursors For Ald Of Group Va Element Containing Thin Films App 20180087154 - Pore; Viljami ; et al.	2018-03-29
Synthesis And Use Of Precursors For Ald Of Tellurium And Selenium Thin Films App 20180072764 - Pore; Viljami ; et al.	2018-03-15
Metamaterial thin films Grant 9,878,516 - Glembocki , et al. January 30, 2	2018-01-30
Synthesis and use of precursors for ALD of group VA element containing thin films Grant 9,828,674 - Pore , et al. November 28, 2	2017-11-28
Synthesis and use of precursors for ALD of tellurium and selenium thin films Grant 9,783,563 - Pore , et al. October 10, 2	2017-10-10
Atomic layer deposition of metal phosphates and lithium silicates Grant 9,765,431 - Hamalainen , et al. September 19, 2	2017-09-19
Precursors And Methods For Atomic Layer Deposition Of Transition Metal Oxides App 20170253966 - Hatanpaa; Timo ; et al.	2017-09-07
Precursors and methods for atomic layer deposition of transition metal oxides Grant 9,677,173 - Hatanpaa , et al. June 13, 2	2017-06-13
Atomic Layer Deposition Of Metal Phosphates And Lithium Silicates App 20160265110 - Hamalainen; Jani ; et al.	2016-09-15
Precursors And Methods For Atomic Layer Deposition Of Transition Metal Oxides App 20160258054 - Hatanpaa; Timo ; et al.	2016-09-08
Synthesis And Use Of Precursors For Ald Of Group Va Element Containing Thin Films App 20160222515 - Pore; Viljami ; et al.	2016-08-04
Precursors and methods for atomic layer deposition of transition metal oxides Grant 9,365,926 - Hatanpaa , et al. June 14, 2	2016-06-14
Atomic layer deposition of metal phosphates and lithium silicates Grant 9,315,894 - Hamalainen , et al. April 19, 2	2016-04-19
Synthesis and use of precursors for ALD of group VA element containing thin films Grant 9,315,896 - Pore , et al. April 19, 2	2016-04-19
Synthesis And Use Of Precursors For Ald Of Tellurium And Selenium Thin Films App 20160031919 - Pore; Viljami ; et al.	2016-02-04
Synthesis and use of precursors for ALD of tellurium and selenium thin films Grant 9,175,390 - Pore , et al. November 3, 2	2015-11-03
Process for producing oxide films Grant 9,169,557 - Hatanpaa , et al. October 27, 2	2015-10-27
Precursors And Methods For Atomic Layer Deposition Of Transition Metal Oxides App 20150191817 - Hatanpaa; Timo ; et al.	2015-07-09
Metal oxide films Grant 8,685,165 - Rahtu , et al. April 1, 2	2014-04-01
Metamaterial Thin Films App 20130252016 - Glembocki; Orest J. ; et al.	2013-09-26
Methods for forming thin films comprising tellurium Grant 8,372,483 - Pore , et al. February 12, 2	2013-02-12
Synthesis And Use Of Precursors For Ald Of Group Va Element Containing Thin Films App 20120329208 - Pore; Viljami ; et al.	2012-12-27
Atomic Layer Deposition Of Metal Phosphates And Lithium Silicates App 20120276305 - Hamalainen; Jani ; et al.	2012-11-01
Precursors And Methods For Atomic Layer Deposition Of Transition Metal Oxides App 20110293830 - Hatanpaa; Timo ; et al.	2011-12-01
Process For Producing Oxide Films App 20100285217 - Hatanpaa; Timo ; et al.	2010-11-11
Process for producing oxide films Grant 7,713,584 - Hatanpaa , et al. May 11, 2	2010-05-11
Synthesis and Use of Precursors for ALD of Tellurium and Selenium Thin Films App 20100009078 - PORE; Viljami ; et al.	2010-01-14
Methods For Forming Thin Films Comprising Tellurium App 20090324821 - Pore; Viljami ; et al.	2009-12-31
Process for producing bismuth-containing oxide films Grant 7,618,681 - Vehkamaki , et al. November 17, 2	2009-11-17
Metal Oxide Films App 20080072819 - Rahtu; Antti ; et al.	2008-03-27
Process for producing oxide films App 20070148347 - Hatanpaa; Timo ; et al.	2007-06-28
Oxide films containing titanium App 20060219157 - Rahtu; Antti ; et al.	2006-10-05
Method for growing oxide thin films containing barium and strontium Grant 7,108,747 - Leskela , et al. September 19, 2	2006-09-19
Process for producing oxide films App 20050089632 - Vehkamaki, Marko ; et al.	2005-04-28

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