Hasebe; Kazuhide

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hasebe; Kazuhide.The latest application filed is for "film forming method and semiconductor production apparatus".

Company Profile

6.107.123

Hasebe; Kazuhide - Yamanashi JP
HASEBE; Kazuhide - Nirasaki-shi Yamanashi
Hasebe; Kazuhide - Nirasaki JP
HASEBE; Kazuhide - Nirasaki City JP
Hasebe; Kazuhide - Narasaki JP
Hasebe; Kazuhide - Minamialps JP
Hasebe; Kazuhide - Minami-alps JP
Hasebe; Kazuhide - Tokyo-To JP
Hasebe; Kazuhide - Tokyo JP
Hasebe; Kazuhide - Minamialps-shi JP
Hasebe; Kazuhide - Minato-Ku JP
Hasebe; Kazuhide - Minami-alps-shi JP
Hasebe, Kazuhide - Yamanashi-ken JP
Hasebe; Kazuhide - Shirane-machi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Film deposition apparatus for fine pattern forming Grant 11,404,272 - Hasebe , et al. August 2, 2	2022-08-02
Film deposition apparatus for fine pattern forming Grant 11,404,271 - Hasebe , et al. August 2, 2	2022-08-02
Film Forming Method And Semiconductor Production Apparatus App 20220010424 - SUZUKI; Yusuke ; et al.	2022-01-13
Mask pattern forming method, fine pattern forming method, and film deposition apparatus Grant 10,879,066 - Hasebe , et al. December 29, 2	2020-12-29
Method of growing crystal in recess and processing apparatus used therefor Grant 10,822,714 - Chiba , et al. November 3, 2	2020-11-03
Film-forming Processing Apparatus, Film-forming Method, And Storage Medium App 20200157683 - KATO; Hitoshi ; et al.	2020-05-21
Mask Pattern Forming Method, Fine Pattern Forming Method, And Film Deposition Apparatus App 20190115204 - HASEBE; Kazuhide ; et al.	2019-04-18
Mask Pattern Forming Method, Fine Pattern Forming Method, And Film Deposition Apparatus App 20190096658 - HASEBE; Kazuhide ; et al.	2019-03-28
Mask Pattern Forming Method, Fine Pattern Forming Method, And Film Deposition Apparatus App 20190041756 - HASEBE; Kazuhide ; et al.	2019-02-07
Mask pattern forming method, fine pattern forming method, and film deposition apparatus Grant 10,191,378 - Hasebe , et al. Ja	2019-01-29
Mask pattern forming method, fine pattern forming method, and film deposition apparatus Grant 10,176,992 - Hasebe , et al. J	2019-01-08
Mask pattern forming method, fine pattern forming method, and film deposition apparatus Grant 10,141,187 - Hasebe , et al. Nov	2018-11-27
Plasma processing apparatus Grant 9,970,110 - Hasebe , et al. May 15, 2	2018-05-15
Method and apparatus of forming silicon nitride film Grant 9,920,422 - Kakimoto , et al. March 20, 2	2018-03-20
Mask Pattern Forming Method, Fine Pattern Forming Method, And Film Deposition Apparatus App 20180019113 - HASEBE; Kazuhide ; et al.	2018-01-18
Nitride film forming method using nitrading active species Grant 9,865,457 - Hasebe , et al. January 9, 2	2018-01-09
Silicon film forming method, thin film forming method and cross-sectional shape control method Grant 9,758,865 - Hasebe , et al. September 12, 2	2017-09-12
Method Of Growing Crystal In Recess And Processing Apparatus Used Therefor App 20170253989 - CHIBA; Yoichiro ; et al.	2017-09-07
Plasma Processing Apparatus And Film Deposition Method App 20170167019 - HASEBE; Kazuhide ; et al.	2017-06-15
Mask Pattern Forming Method, Fine Pattern Forming Method, And Film Deposition Apparatus App 20170162381 - HASEBE; Kazuhide ; et al.	2017-06-08
Nitride Film Forming Method App 20170125238 - HASEBE; Kazuhide ; et al.	2017-05-04
Batch-type vertical substrate processing apparatus and substrate holder Grant 9,613,838 - Okada , et al. April 4, 2	2017-04-04
Film-forming Processing Apparatus, Film-forming Method, And Storage Medium App 20170009345 - KATO; Hitoshi ; et al.	2017-01-12
Apparatus for forming silicon-containing thin film Grant 9,353,442 - Okada , et al. May 31, 2	2016-05-31
Substrate Processing Apparatus, Substrate Processing Method And Storage Medium App 20160148801 - YABE; Kazuo ; et al.	2016-05-26
Stacked semiconductor device, and method and apparatus of manufacturing the same Grant 9,343,292 - Hasebe , et al. May 17, 2	2016-05-17
Method And Apparatus Of Forming Silicon Nitride Film App 20160108519 - KAKIMOTO; Akinobu ; et al.	2016-04-21
Method and apparatus of forming silicon nitride film Grant 9,263,250 - Kakimoto , et al. February 16, 2	2016-02-16
Method for fabricating semiconductor device and the semiconductor device Grant 9,230,799 - Teramoto , et al. January 5, 2	2016-01-05
Thin film formation method Grant 9,190,271 - Hasebe , et al. November 17, 2	2015-11-17
Vacuum Processing Apparatus App 20150275360 - HASEBE; Kazuhide ; et al.	2015-10-01
Amorphous silicon film formation method and amorphous silicon film formation apparatus Grant 9,123,782 - Hasebe , et al. September 1, 2	2015-09-01
Amorphous Silicon Film Formation Method And Amorphous Silicon Film Formation Apparatus App 20150206795 - HASEBE; Kazuhide ; et al.	2015-07-23
Method For Manufacturing Semiconductor Device App 20150194441 - YATSUDA; Koichi ; et al.	2015-07-09
Processing Apparatus And Active Species Generating Method App 20150167171 - HASEBE; Kazuhide ; et al.	2015-06-18
Plasma Processing Apparatus App 20150107517 - HASEBE; Kazuhide ; et al.	2015-04-23
Apparatus For Forming Silicon-containing Thin Film App 20150101532 - OKADA; Mitsuhiro ; et al.	2015-04-16
Film deposition method and film deposition apparatus Grant 9,005,459 - Kakimoto , et al. April 14, 2	2015-04-14
Amorphous silicon film formation method and amorphous silicon film formation apparatus Grant 9,006,021 - Hasebe , et al. April 14, 2	2015-04-14
Method and Apparatus of Forming Silicon Nitride Film App 20150099374 - KAKIMOTO; Akinobu ; et al.	2015-04-09
Silicon Film Forming Method, Thin Film Forming Method and Cross-Sectional Shape Control Method App 20150037970 - HASEBE; Kazuhide ; et al.	2015-02-05
Method of forming seed layer and method of forming silicon-containing thin film Grant 8,946,065 - Okada , et al. February 3, 2	2015-02-03
Film formation apparatus Grant 8,945,339 - Kakimoto , et al. February 3, 2	2015-02-03
Vertical heat treatment apparatus Grant 8,940,097 - Hasebe January 27, 2	2015-01-27
Method For Fabricating Semiconductor Device And The Semiconductor Device App 20140367699 - TERAMOTO; Akinobu ; et al.	2014-12-18
Method Of Forming A Germanium Thin Film App 20140331928 - KAKIMOTO; Akinobu ; et al.	2014-11-13
Batch-type Vertical Substrate Processing Apparatus And Substrate Holder App 20140283750 - OKADA; Mitsuhiro ; et al.	2014-09-25
Stacked Semiconductor Device, And Method And Apparatus Of Manufacturing The Same App 20140284808 - HASEBE; Kazuhide ; et al.	2014-09-25
Method of forming a germanium thin film Grant 8,815,714 - Kakimoto , et al. August 26, 2	2014-08-26
Thin Film Formation Method App 20140206180 - HASEBE; Kazuhide ; et al.	2014-07-24
Method and apparatus for forming silicon nitride film Grant 8,753,984 - Murakami , et al. June 17, 2	2014-06-17
Thin film formation method and film formation apparatus Grant 8,728,957 - Hasebe , et al. May 20, 2	2014-05-20
Trench-filling method and film-forming system Grant 8,722,510 - Watanabe , et al. May 13, 2	2014-05-13
Film formation apparatus and method for using same Grant 8,697,578 - Nodera , et al. April 15, 2	2014-04-15
Film Crack Detecting Apparatus And Film Forming Apparatus App 20140020626 - SUGAWARA; Yudo ; et al.	2014-01-23
SiCN film formation method and apparatus Grant 8,591,989 - Chou , et al. November 26, 2	2013-11-26
Method and apparatus for forming silicon film Grant 8,586,448 - Kakimoto , et al. November 19, 2	2013-11-19
Method For Fabricating Semiconductor Device And The Semiconductor Device App 20130292700 - Teramoto; Akinobu ; et al.	2013-11-07
Vertical film formation apparatus and method for using same Grant 8,563,096 - Matsunaga , et al. October 22, 2	2013-10-22
Method Of Forming A Germanium Thin Film App 20130230975 - KAKIMOTO; Akinobu ; et al.	2013-09-05
Mask Pattern Forming Method, Fine Pattern Forming Method, And Film Deposition Apparatus App 20130213301 - HASEBE; Kazuhide ; et al.	2013-08-22
Low Temperature Deposition of Silicon-Containing Films App 20130189853 - Yang; Liu ; et al.	2013-07-25
Method Of Forming Silicon Oxide Film App 20130109197 - MURAKAMI; Hiroki ; et al.	2013-05-02
Method Of Forming Seed Layer And Method Of Forming Silicon-containing Thin Film App 20130109155 - OKADA; Mitsuhiro ; et al.	2013-05-02
Film formation method and film formation apparatus Grant 8,431,494 - Murakami , et al. April 30, 2	2013-04-30
Mask pattern forming method, fine pattern forming method, and film deposition apparatus Grant 8,426,117 - Hasebe , et al. April 23, 2	2013-04-23
Micro pattern forming method Grant 8,383,522 - Nakajima , et al. February 26, 2	2013-02-26
Film formation method for forming silicon-containing insulating film Grant 8,357,619 - Hasebe , et al. January 22, 2	2013-01-22
Film formation apparatus and method for using same Grant 8,349,401 - Sato , et al. January 8, 2	2013-01-08
Method And Apparatus For Forming Silicon Film App 20130005142 - Kakimoto; Akinobu ; et al.	2013-01-03
Film formation method and apparatus for semiconductor process Grant 8,343,594 - Hasebe , et al. January 1, 2	2013-01-01
SiCN FILM FORMATION METHOD AND APPARATUS App 20120282418 - CHOU; Pao-Hwa ; et al.	2012-11-08
Low temperature deposition of silicon-containing films Grant 8,298,628 - Yang , et al. October 30, 2	2012-10-30
Film Deposition Method And Film Deposition Apparatus App 20120267340 - KAKIMOTO; Akinobu ; et al.	2012-10-25
Film formation method in vertical batch CVD apparatus Grant 8,257,789 - Matsunaga , et al. September 4, 2	2012-09-04
Method And Apparatus For Forming Silicon Nitride Film App 20120178264 - MURAKAMI; Hiroki ; et al.	2012-07-12
Film formation method and apparatus Grant 8,216,648 - Matsunaga , et al. July 10, 2	2012-07-10
Film formation method and apparatus for semiconductor process Grant 8,178,448 - Nodera , et al. May 15, 2	2012-05-15
Vertical Heat Treatment Apparatus App 20120103256 - Hasebe; Kazuhide	2012-05-03
Film Formation Apparatus App 20120103518 - KAKIMOTO; Akinobu ; et al.	2012-05-03
Film formation method and apparatus for semiconductor process Grant 8,168,270 - Hasebe , et al. May 1, 2	2012-05-01
Patterning method Grant 8,168,375 - Nakajima , et al. May 1, 2	2012-05-01
Oxidation method providing parallel gas flow over substrates in a semiconductor process Grant 8,124,181 - Hasebe , et al. February 28, 2	2012-02-28
Film formation method and apparatus for semiconductor process Grant 8,119,544 - Hasebe , et al. February 21, 2	2012-02-21
Trench-filling Method And Film-forming System App 20120028437 - WATANABE; Masahisa ; et al.	2012-02-02
Film Formation Method And Film Formation Apparatus App 20110312192 - MURAKAMI; Hiroki ; et al.	2011-12-22
Film formation method and apparatus for semiconductor process Grant 8,080,290 - Hasebe , et al. December 20, 2	2011-12-20
Film formation apparatus and method for using same Grant 8,080,477 - Nodera , et al. December 20, 2	2011-12-20
Silicon Film Formation Method And Silicon Film Formation Apparatus App 20110287629 - KAKIMOTO; Akinobu ; et al.	2011-11-24
Thin Film Formation Method And Film Formation Apparatus App 20110269315 - Hasebe; Kazuhide ; et al.	2011-11-03
Amorphous Silicon Film Formation Method And Amorphous Silicon Film Formation Apparatus App 20110263105 - HASEBE; Kazuhide ; et al.	2011-10-27
Film formation method and apparatus for forming silicon-containing insulating film doped with metal Grant 8,034,673 - Kadonaga , et al. October 11, 2	2011-10-11
Micro Pattern Forming Method App 20110237082 - Nakajima; Shigeru ; et al.	2011-09-29
Film formation apparatus for semiconductor process and method for using the same Grant 8,025,931 - Chou , et al. September 27, 2	2011-09-27
Method of modifying insulating film Grant 8,021,987 - Sugawara , et al. September 20, 2	2011-09-20
Film formation apparatus and method for using the same Grant 7,993,705 - Nodera , et al. August 9, 2	2011-08-09
Patterning method Grant 7,989,354 - Nakajima , et al. August 2, 2	2011-08-02
Film Formation Method For Forming Silicon-containing Insulating Film App 20110151679 - HASEBE; Kazuhide ; et al.	2011-06-23
Film formation method and apparatus for semiconductor process Grant 7,964,241 - Hasebe , et al. June 21, 2	2011-06-21
Film formation apparatus and method for semiconductor process Grant 7,959,733 - Hasebe , et al. June 14, 2	2011-06-14
Film Formation Method And Apparatus App 20110129619 - Matsunaga; Masanobu ; et al.	2011-06-02
Vertical Film Formation Apparatus And Method For Using Same App 20110129618 - MATSUNAGA; Masanobu ; et al.	2011-06-02
Film formation method and apparatus for forming silicon-containing insulating film Grant 7,923,378 - Hasebe , et al. April 12, 2	2011-04-12
Mask Pattern Forming Method And Semiconductor Device Manufacturing Method App 20110065280 - Nakajima; Shigeru ; et al.	2011-03-17
Film formation method and apparatus for forming silicon oxide film Grant 7,906,168 - Hasebe , et al. March 15, 2	2011-03-15
Oxidation Method And Apparatus For Semiconductor Process App 20100319619 - FUJITA; Takehiko ; et al.	2010-12-23
Film Formation Method And Apparatus For Semiconductor Process App 20100304574 - NODERA; Nobutake ; et al.	2010-12-02
Low Temperature Deposition of Silicon-Containing Films App 20100304047 - Yang; Liu ; et al.	2010-12-02
Oxidation method and apparatus for semiconductor process Grant 7,795,158 - Fujita , et al. September 14, 2	2010-09-14
Film Formation Apparatus And Method For Using Same App 20100189927 - SATO; Jun ; et al.	2010-07-29
Method and apparatus for forming silicon-containing insulating film Grant 7,758,920 - Hasebe , et al. July 20, 2	2010-07-20
Patterning method utilizing SiBN and photolithography Grant 7,754,622 - Chou , et al. July 13, 2	2010-07-13
Film Formation Method In Vertical Batch Cvd Apparatus App 20100136260 - Matsunaga; Masanobu ; et al.	2010-06-03
Patterning Method App 20100130015 - Nakajima; Shigeru ; et al.	2010-05-27
Method for manufacturing semiconductor device Grant 7,718,497 - Akasaka , et al. May 18, 2	2010-05-18
Film forming method, film forming system and recording medium Grant 7,713,354 - Hasebe , et al. May 11, 2	2010-05-11
Patterning Method App 20100112796 - Chou; Pao-Hwa ; et al.	2010-05-06
Patterning Method App 20100112496 - Nakajima; Shigeru ; et al.	2010-05-06
Method Of Modifying Insulating Film App 20100105215 - SUGAWARA; Takuya ; et al.	2010-04-29
Mask Pattern Forming Method, Fine Pattern Forming Method, And Film Deposition Apparatus App 20100081094 - HASEBE; KAZUHIDE ; et al.	2010-04-01
Method of modifying insulating film Grant 7,655,574 - Sugawara , et al. February 2, 2	2010-02-02
Method and apparatus for forming silicon oxide film Grant 7,651,730 - Hasebe January 26, 2	2010-01-26
Method for forming a vapor phase growth film Grant 7,651,733 - Hasebe , et al. January 26, 2	2010-01-26
Vertical CVD apparatus for forming silicon-germanium film Grant 7,648,895 - Kurokawa , et al. January 19, 2	2010-01-19
Method for forming underlying insulation film Grant 7,622,402 - Sugawara , et al. November 24, 2	2009-11-24
Film Formation Apparatus And Method For Semiconductor Process App 20090275150 - Hasebe; Kazuhide ; et al.	2009-11-05
Method for removing silicon oxide film and processing apparatus Grant 7,611,995 - Hasebe , et al. November 3, 2	2009-11-03
Film Formation Method And Apparatus For Forming Silicon-containing Insulating Film Doped With Metal App 20090263975 - KADONAGA; Kentaro ; et al.	2009-10-22
Film formation apparatus and method of using the same Grant 7,604,010 - Hasebe , et al. October 20, 2	2009-10-20
Film Formation method and apparatus for forming silicon-containing insulating film App 20090203227 - Hasebe; Kazuhide ; et al.	2009-08-13
Film formation method and apparatus for semiconductor process App 20090191722 - Hasebe; Kazuhide ; et al.	2009-07-30
Film formation method and apparatus for semiconductor process App 20090181550 - Hasebe; Kazuhide ; et al.	2009-07-16
Method for cleaning reaction container and film deposition system Grant 7,546,840 - Hasebe , et al. June 16, 2	2009-06-16
Vertical plasma processing apparatus and method for using same App 20090124087 - Nodera; Nobutake ; et al.	2009-05-14
Film formation apparatus and method for using same App 20090124083 - Nodera; Nobutake ; et al.	2009-05-14
Film formation apparatus for semiconductor process App 20090114156 - Nodera; Nobutake ; et al.	2009-05-07
Film formation apparatus and method for using same App 20090117743 - Nodera; Nobutake ; et al.	2009-05-07
Vertical Cvd Appparatus For Forming Silicon-germanium Film App 20090104760 - KUROKAWA; Masaki ; et al.	2009-04-23
Thin film forming apparatus and method of cleaning the same Grant 7,520,937 - Hasebe , et al. April 21, 2	2009-04-21
Film formation method and apparatus for semiconductor process Grant 7,507,676 - Chou , et al. March 24, 2	2009-03-24
Thermal processing unit Grant 7,479,619 - Saito , et al. January 20, 2	2009-01-20
Film formation method and apparatus for semiconductor process App 20080311760 - Nodera; Nobutake ; et al.	2008-12-18
Film formation method and apparatus for semiconductor process for forming a silicon nitride film Grant 7,462,571 - Hasebe , et al. December 9, 2	2008-12-09
Method For Manufacturing Semiconductor Device App 20080299728 - Akasaka; Yasushi ; et al.	2008-12-04
Oxidation method and oxidation system Grant 7,452,826 - Hasebe , et al. November 18, 2	2008-11-18
Film Formation Method And Apparatus For Semiconductor Process App 20080274302 - Hasebe; Kazuhide ; et al.	2008-11-06
Film forming method, film forming system and recording medium App 20080264339 - Hasebe; Kazuhide ; et al.	2008-10-30
Method and apparatus for forming silicon nitride film Grant 7,427,572 - Hasebe , et al. September 23, 2	2008-09-23
SiCN film formation method and apparatus App 20080213479 - Chou; Pao-Hwa ; et al.	2008-09-04
Film forming method, film forming system and recording medium Grant 7,416,978 - Hasebe , et al. August 26, 2	2008-08-26
Film formation method and apparatus for semiconductor process App 20080107824 - Hasebe; Kazuhide ; et al.	2008-05-08
Oxidation apparatus and method for semiconductor process App 20080095678 - Hasebe; Kazuhide ; et al.	2008-04-24
Film formation method and apparatus for forming silicon oxide film App 20080081104 - Hasebe; Kazuhide ; et al.	2008-04-03
Film formation method and apparatus for semiconductor process Grant 7,351,668 - Chou , et al. April 1, 2	2008-04-01
Film formation method and apparatus for semiconductor process App 20080063791 - Hasebe; Kazuhide ; et al.	2008-03-13
Oxidation method and apparatus for semiconductor process App 20080057199 - Fujita; Takehiko ; et al.	2008-03-06
Film formation apparatus for semiconductor process and method for using the same App 20080014758 - Chou; Pao-Hwa ; et al.	2008-01-17
Film formation apparatus and method for using the same App 20080003362 - Nodera; Nobutake ; et al.	2008-01-03
Film formation apparatus and method for semiconductor process Grant 7,300,885 - Hasebe , et al. November 27, 2	2007-11-27
Film formation method and apparatus for semiconductor process Grant 7,273,818 - Kurokawa , et al. September 25, 2	2007-09-25
Film Formation Method And Apparatus For Semiconductor Process App 20070167028 - CHOU; Pao-Hwa ; et al.	2007-07-19
Film formation method and apparatus for semiconductor process Grant 7,229,917 - Umehara , et al. June 12, 2	2007-06-12
Method and apparatus for forming silicon oxide film Grant 7,220,461 - Hasebe , et al. May 22, 2	2007-05-22
Heat-processing method for semiconductor process under a vacuum pressure Grant 7,211,514 - Fujita , et al. May 1, 2	2007-05-01
Method and apparatus for forming silicon-containing insulating film App 20070032047 - Hasebe; Kazuhide ; et al.	2007-02-08
Oxidation method and oxidation system App 20060276051 - Hasebe; Kazuhide ; et al.	2006-12-07
Thermal treatment apparatus Grant 7,144,823 - Saito , et al. December 5, 2	2006-12-05
Thermal processing unit App 20060258170 - Saito; Takanori ; et al.	2006-11-16
Vapor-phase growing unit App 20060257568 - Hasebe; Kazuhide ; et al.	2006-11-16
Oxidation method and oxidation system Grant 7,129,186 - Hasebe , et al. October 31, 2	2006-10-31
Oxidation method for semiconductor process Grant 7,125,811 - Suzuki , et al. October 24, 2	2006-10-24
Method for removing silicon oxide film and processing apparatus App 20060216941 - Hasebe; Kazuhide ; et al.	2006-09-28
Method for cleaning heat treatment apparatus App 20060216949 - Hasebe; Kazuhide ; et al.	2006-09-28
Method for cleaning thin-film forming apparatus App 20060213539 - Hasebe; Kazuhide ; et al.	2006-09-28
Film formation method and apparatus for semiconductor process App 20060207504 - Hasebe; Kazuhide ; et al.	2006-09-21
Film formation method and apparatus for semiconductor process App 20060205231 - Chou; Pao-Hwa ; et al.	2006-09-14
Method of modifying insulating film App 20060199398 - Sugawara; Takuya ; et al.	2006-09-07
Film forming method, film forming system and recording medium App 20060141782 - Hasebe; Kazuhide ; et al.	2006-06-29
Heat treating system and heat treating method App 20060099805 - Fujita; Takehiko ; et al.	2006-05-11
Film forming method for depositing a plurality of high-k dielectric films Grant 7,041,546 - Morozumi , et al. May 9, 2	2006-05-09
Method of cleaning thin film deposition system, thin film deposition system and program App 20060081182 - Okada; Mitsuhiro ; et al.	2006-04-20
Method and apparatus for forming silicon nitride film App 20060068606 - Hasebe; Kazuhide ; et al.	2006-03-30
Film formation apparatus and method of using the same App 20060042544 - Hasebe; Kazuhide ; et al.	2006-03-02
Method and apparatus for forming silicon oxide film App 20060032442 - Hasebe; Kazuhide	2006-02-16
Film formation method and apparatus for semiconductor process App 20060032443 - Hasebe; Kazuhide ; et al.	2006-02-16
Reduction in size of hemispherical grains of hemispherical grained film App 20060021570 - Hasebe; Kazuhide ; et al.	2006-02-02
Film formation apparatus and method for semiconductor process App 20050287775 - Hasebe, Kazuhide ; et al.	2005-12-29
Processing system and operating method of processing system App 20050284575 - Hasebe, Kazuhide ; et al.	2005-12-29
Film formation apparatus and method for semiconductor process App 20050282365 - Hasebe, Kazuhide ; et al.	2005-12-22
Method for forming underlying insulation film App 20050255711 - Sugawara, Takuya ; et al.	2005-11-17
Method and apparatus for forming silicon oxide film App 20050196533 - Hasebe, Kazuhide ; et al.	2005-09-08
Vertical CVD apparatus for forming silicon-germanium film App 20050181586 - Kurokawa, Masaki ; et al.	2005-08-18
Film formation method and apparatus for semiconductor process App 20050176261 - Umehara, Takahito ; et al.	2005-08-11
Film formation method and apparatus for semiconductor process App 20050170617 - Kurokawa, Masaki ; et al.	2005-08-04
Oxidation method and oxidation system App 20050164518 - Hasebe, Kazuhide ; et al.	2005-07-28
Thermal processing unit and thermal processing method App 20050136693 - Hasebe, Kazuhide ; et al.	2005-06-23
Heat-processing method and apparatus for semiconductor process App 20050095826 - Fujita, Takehiko ; et al.	2005-05-05
Oxidation method for semiconductor process App 20050079699 - Suzuki, Keisuke ; et al.	2005-04-14
Thin film forming apparatus and method of cleaning the same App 20050066993 - Hasebe, Kazuhide ; et al.	2005-03-31
Thermal treating apparatus App 20050028738 - Saito, Takanori ; et al.	2005-02-10
Capacitor structure and film forming method and apparatus App 20040195653 - Morozumi, Yuichiro ; et al.	2004-10-07
Method for cleaning reaction container and film deposition system App 20040144320 - Hasebe, Kazuhide ; et al.	2004-07-29
Oxidizing method and oxidation system App 20030224618 - Sato, Shoichi ; et al.	2003-12-04
Gaseous phase growing device App 20030186560 - Hasebe, Kazuhide ; et al.	2003-10-02
Oxidizing method and oxidation system Grant 6,599,845 - Sato , et al. July 29, 2	2003-07-29
Oxidizing method and oxidation system App 20020127873 - Sato, Shoichi ; et al.	2002-09-12
Wafer boat and film formation method Grant 6,344,387 - Hasebe , et al. February 5, 2	2002-02-05
Etching method, processing apparatus and etching apparatus App 20020011465 - Yamamoto, Hiroyuki ; et al.	2002-01-31
MOCVD method of tantalum oxide film App 20010027031 - Hasebe, Kazuhide ; et al.	2001-10-04
Wafer boat and film formation method Grant 6,156,121 - Hasebe , et al. December 5, 2	2000-12-05
Film thickness measuring apparatus Grant 5,818,596 - Imai , et al. October 6, 1	1998-10-06
Vertical heat treatment apparatus Grant 5,458,685 - Hasebe , et al. October 17, 1	1995-10-17