| Patent | Date |
|---|
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20220004104 - BABAYAN; Viachslav ; et al. | 2022-01-06 |
Method and apparatus for post exposure processing of photoresist wafers
Grant 11,112,697 - Babayan , et al. September 7, 2 | 2021-09-07 |
Pack Lamp
App 20200400290 - Harris; Randy | 2020-12-24 |
Microelectronic substrate electro processing system
Grant 10,837,119 - Moore , et al. November 17, 2 | 2020-11-17 |
Method and apparatus for post exposure processing of photoresist wafers
Grant 10,474,033 - Babayan , et al. Nov | 2019-11-12 |
Creating and using an integrated technical data package
Grant 10,372,834 - Sokol , et al. | 2019-08-06 |
Systems and methods for wetting substrates
Grant 10,373,864 - McHugh , et al. | 2019-08-06 |
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20190187563 - BABAYAN; Viachslav ; et al. | 2019-06-20 |
System and method for simulating infrared (IR) light halos in a computer graphics display
Grant 10,249,078 - Buckmiller , et al. | 2019-04-02 |
Method and apparatus for post exposure processing of photoresist wafers
Grant 10,203,604 - Babayan , et al. Feb | 2019-02-12 |
Microelectronic Substrate Electro Processing System
App 20180298513 - Moore; Robert B. ; et al. | 2018-10-18 |
Microelectronic substrate electro processing system
Grant 10,087,544 - Moore , et al. October 2, 2 | 2018-10-02 |
Systems And Methods For Wetting Substrates
App 20180182664 - McHugh; Paul ; et al. | 2018-06-28 |
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20170363960 - BABAYAN; Viachslav ; et al. | 2017-12-21 |
Creating And Using An Intergrated Technical Data Package
App 20170206237 - Sokol; Dan Z. ; et al. | 2017-07-20 |
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20170154797 - Babayan; Viachslav ; et al. | 2017-06-01 |
Microelectronic Substrate Electro Processing System
App 20160298255 - Moore; Robert B. ; et al. | 2016-10-13 |
Microelectronic substrate electro processing system
Grant 9,399,827 - Moore , et al. July 26, 2 | 2016-07-26 |
Microelectronic Substrate Electro Processing System
App 20140318977 - Moore; Robert B. ; et al. | 2014-10-30 |
System and method for electronically delivering documents
Grant 7,333,223 - Gupton , et al. February 19, 2 | 2008-02-19 |
System and method for monitoring information delivered through an electronic delivery system
Grant 7,277,195 - Hamilton , et al. October 2, 2 | 2007-10-02 |
Breakaway pinata
App 20060234595 - Bell; Jim ; et al. | 2006-10-19 |
Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces
App 20060037855 - Hanson; Kyle M. ; et al. | 2006-02-23 |
Apparatus for manually and automatically processing microelectronic workpieces
Grant 6,991,710 - Harris , et al. January 31, 2 | 2006-01-31 |
Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces
Grant 6,921,467 - Hanson , et al. July 26, 2 | 2005-07-26 |
Adaptable electrochemical processing chamber
App 20050155864 - Woodruff, Daniel J. ; et al. | 2005-07-21 |
Adaptable electrochemical processing chamber
Grant 6,916,412 - Woodruff , et al. July 12, 2 | 2005-07-12 |
Single workpiece processing system
Grant 6,900,132 - Thompson , et al. May 31, 2 | 2005-05-31 |
Method and apparatus for accessing microelectronic workpiece containers
Grant 6,878,955 - Harris , et al. April 12, 2 | 2005-04-12 |
Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces
App 20040228719 - Woodruff, Daniel J. ; et al. | 2004-11-18 |
System and method for monitoring information delivered through an electronic delivery system
Grant 6,799,150 - Hamilton , et al. September 28, 2 | 2004-09-28 |
System and method for monitoring information delivered through an electronic delivery system
App 20040184101 - Hamilton, Scott ; et al. | 2004-09-23 |
Method and apparatus for accessing microelectronic workpiece containers
App 20040140442 - Harris, Randy ; et al. | 2004-07-22 |
Transfer Devices For Handling Microelectronic Workpieces Within An Environment Of A Processing Machine And Methods Of Manufacturing And Using Such Devices In The Processing Of Microelectronic Workpieces
Grant 6,752,584 - Woodruff , et al. June 22, 2 | 2004-06-22 |
Single workpiece processing system
App 20040112738 - Thompson, Raymon F. ; et al. | 2004-06-17 |
Microelectronic workpiece transfer devices and methods of using such devices in the processing of microelectronic workpieces
Grant 6,749,391 - Woodruff , et al. June 15, 2 | 2004-06-15 |
Integrated tools with transfer devices for handling microelectronic workpieces
Grant 6,749,390 - Woodruff , et al. June 15, 2 | 2004-06-15 |
Method and apparatus for securing microelectronic workpiece containers
App 20040089823 - Harris, Randy | 2004-05-13 |
Method and apparatus for accessing microelectronic workpiece containers
Grant 6,717,171 - Harris , et al. April 6, 2 | 2004-04-06 |
Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same
Grant 6,623,609 - Harris , et al. September 23, 2 | 2003-09-23 |
Apparatus with processing stations for manually and automatically processing microelectronic workpieces
App 20030159921 - Harris, Randy ; et al. | 2003-08-28 |
Method and apparatus for manually and automatically processing microelectronic workpieces
App 20030159277 - Harris, Randy ; et al. | 2003-08-28 |
System and method for monitoring information delivered through an electronic delivery system
App 20030115022 - Hamilton, Scott ; et al. | 2003-06-19 |
System and method for electronically delivering documents
App 20030107757 - Gupton, Junious ; et al. | 2003-06-12 |
Method and apparatus for accessing microelectronic workpiece containers
App 20020179863 - Harris, Randy ; et al. | 2002-12-05 |
Automated semiconductor immersion processing system
App 20020154976 - Harris, Randy ; et al. | 2002-10-24 |
Caulking Gun And Support
App 20020145014 - Harris, Randy | 2002-10-10 |
Automated semiconductor immersion processing system
Grant 6,439,824 - Harris , et al. August 27, 2 | 2002-08-27 |
Microelectronic workpiece transfer devices and methods of using such devices in the processing of microelectronic workpieces
App 20020102156 - Woodruff, Daniel J. ; et al. | 2002-08-01 |
Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces
App 20020053509 - Hanson, Kyle M. ; et al. | 2002-05-09 |
Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces
App 20010043856 - Woodruff, Daniel J. ; et al. | 2001-11-22 |
Adaptable electrochemical processing chamber
App 20010032788 - Woodruff, Daniel J. ; et al. | 2001-10-25 |
Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same
App 20010023821 - Harris, Randy ; et al. | 2001-09-27 |
Integrated tools with transfer devices for handling microelectronic workpieces
App 20010024611 - Woodruff, Daniel J. ; et al. | 2001-09-27 |
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