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Resolver-positioning Resin Pin Portion Structure App 20220266790 - HARA; Shinichi ;   et al. | 2022-08-25 |
Magnet wire bonding method and bonding structure Grant 11,253,947 - Kushihara , et al. February 22, 2 | 2022-02-22 |
Measurement Apparatus And Measurement Method App 20210063573 - SUZUKI; Yoshimasa ;   et al. | 2021-03-04 |
Measurement Apparatus And Measurement Method App 20210011155 - Suzuki; Yoshimasa ;   et al. | 2021-01-14 |
Measurement Apparatus And Measurement Method App 20200379112 - UJIHARA; Hiroki ;   et al. | 2020-12-03 |
Oxide sintered body, method for producing same and sputtering target Grant 10,669,208 - Itoh , et al. | 2020-06-02 |
Magnet Wire Bonding Method And Bonding Structure App 20200061735 - KUSHIHARA; Hiroshi ;   et al. | 2020-02-27 |
Manufacturing method of electron tube Grant 10,535,487 - Kodama , et al. Ja | 2020-01-14 |
Electron tube Grant 10,515,775 - Kodama , et al. Dec | 2019-12-24 |
Oxide Sintered Body, Method For Producing Same And Sputtering Target App 20190016638 - ITOH; Kenichi ;   et al. | 2019-01-17 |
Feedback gain adjusting method and device of tracking-type laser interferometer and tracking-type laser interferometer Grant 10,120,059 - Hara November 6, 2 | 2018-11-06 |
Feedback Gain Adjusting Method And Device Of Tracking-type Laser Interferometer And Tracking-type Laser Interferometer App 20180045806 - HARA; Shinichi | 2018-02-15 |
Fragrance device for vehicle and sealing component used therein Grant 8,931,712 - Nagano , et al. January 13, 2 | 2015-01-13 |
Display Device App 20140036199 - Ka; Shisei ;   et al. | 2014-02-06 |
Tracking-type laser interferometer Grant 8,199,330 - Hara June 12, 2 | 2012-06-12 |
Fragrance Device For Vehicle And Sealing Component Used Therein App 20110290903 - Nagano; Hideki ;   et al. | 2011-12-01 |
Air conditioner and antibacterial case Grant 7,971,634 - Hara , et al. July 5, 2 | 2011-07-05 |
Method for estimating distance between tracking type laser interferometer and target, and tracking type laser interferometer Grant 7,920,273 - Hara April 5, 2 | 2011-04-05 |
Package of volatile substance and air conditioner for vehicles provided with the package Grant 7,892,334 - Hara , et al. February 22, 2 | 2011-02-22 |
Tracking-type Laser Interferometer App 20100208232 - Hara; Shinichi | 2010-08-19 |
Exposure apparatus having a processing chamber, a vacuum chamber and first and second load lock chambers Grant 7,670,754 - Edo , et al. March 2, 2 | 2010-03-02 |
Fixing mechanism for a container in a vehicle air conditioning device Grant 7,621,807 - Hara , et al. November 24, 2 | 2009-11-24 |
Method for estimating distance between tracking type laser interferometer and target, and tracking type laser interferometer App 20090237674 - Hara; Shinichi | 2009-09-24 |
Exposure apparatus with tanks storing helium gas and method of manufacturing device using exposure apparatus Grant 7,566,422 - Hara , et al. July 28, 2 | 2009-07-28 |
Method for estimating absolute distance of tracking laser interferometer and tracking laser interferometer Grant 7,538,888 - Hara , et al. May 26, 2 | 2009-05-26 |
Package of Volatile Substance and Air Conditioner For Vehicles Provided With the Package App 20080210094 - Hara; Shinichi ;   et al. | 2008-09-04 |
Laser tracking interferometer Grant 7,388,674 - Yanaka , et al. June 17, 2 | 2008-06-17 |
Exposure apparatus Grant 7,325,404 - Hara February 5, 2 | 2008-02-05 |
Fixing mechanism for a container in a vehicle air conditioning device App 20080020699 - Hara; Shinichi ;   et al. | 2008-01-24 |
Apparatus and method for removing contaminant on original, method of manufacturing device, and original Grant 7,319,507 - Yonekawa , et al. January 15, 2 | 2008-01-15 |
Method For Estimating Absolute Distance Of Tracking Laser Interferometer And Tracking Laser Interferometer App 20070268494 - Hara; Shinichi ;   et al. | 2007-11-22 |
Cooling apparatus Grant 7,265,812 - Hara , et al. September 4, 2 | 2007-09-04 |
Cooling system, exposure apparatus having the same, and device manufacturing method Grant 7,212,274 - Hara , et al. May 1, 2 | 2007-05-01 |
Cooling Apparatus App 20070091275 - Hara; Shinichi ;   et al. | 2007-04-26 |
Cooling apparatus and method, and exposure apparatus having the cooling apparatus Grant 7,191,599 - Hara March 20, 2 | 2007-03-20 |
Laser Tracking Interferometer App 20070024861 - Yanaka; Shinichirou ;   et al. | 2007-02-01 |
Holding mechanism in exposure apparatus, and device manufacturing method Grant 7,158,209 - Hara January 2, 2 | 2007-01-02 |
Immersion exposure apparatus App 20060285093 - Hara; Shinichi ;   et al. | 2006-12-21 |
Cooling apparatus Grant 7,145,632 - Hara , et al. December 5, 2 | 2006-12-05 |
Air conditioner and antibacterial case App 20060225869 - Hara; Shinichi ;   et al. | 2006-10-12 |
Cooling mechanism Grant 7,106,413 - Hara September 12, 2 | 2006-09-12 |
Optical system for use in exposure apparatus and device manufacturing method using the same Grant 7,102,727 - Hara September 5, 2 | 2006-09-05 |
Cooling apparatus Grant 7,095,480 - Hara , et al. August 22, 2 | 2006-08-22 |
Illumination apparatus, projection exposure apparatus, and device fabricating method App 20060164622 - Hara; Shinichi | 2006-07-27 |
Illumination apparatus, projection exposure apparatus, and device fabrication method Grant 7,081,949 - Hara July 25, 2 | 2006-07-25 |
Reflection type mask Grant 7,072,438 - Chiba , et al. July 4, 2 | 2006-07-04 |
Holding mechanism in exposure apparatus, and device manufacturing method App 20060139584 - Hara; Shinichi | 2006-06-29 |
Holding mechanism in exposure apparatus, and device manufacturing method Grant 7,068,348 - Hara June 27, 2 | 2006-06-27 |
Method of manufacturing semiconductor devices Grant 7,054,705 - Ogawa , et al. May 30, 2 | 2006-05-30 |
Apparatus and method for removing contaminant on original, method of manufacturing device, and original App 20060082743 - Yonekawa; Masami ;   et al. | 2006-04-20 |
Cooling apparatus App 20060017896 - Hara; Shinichi ;   et al. | 2006-01-26 |
Positioning apparatus, atmosphere substituting method, exposure apparatus, and device manufacturing method Grant 6,990,173 - Kawakami , et al. January 24, 2 | 2006-01-24 |
Processing apparatus, measuring apparatus, and device manufacturing method Grant 6,984,362 - Hara , et al. January 10, 2 | 2006-01-10 |
Processing apparatus, measuring apparatus, and device manufacturing method App 20050271558 - Hara, Shinichi ;   et al. | 2005-12-08 |
Cleaning nozzle and cleaning apparatus Grant 6,935,576 - Hara August 30, 2 | 2005-08-30 |
Processing system and exposure apparatus using the same App 20050121144 - Edo, Ryo ;   et al. | 2005-06-09 |
Cooling system, exposure apparatus having the same, and device manufacturing method App 20050110967 - Hara, Shinichi ;   et al. | 2005-05-26 |
Housing unit and exposure method using the same App 20050095829 - Hara, Shinichi | 2005-05-05 |
Jetting apparatus for mixed flow of gas and liquid Grant 6,843,471 - Hara January 18, 2 | 2005-01-18 |
X-ray projection exposure apparatus and a device manufacturing method Grant 6,836,531 - Hara , et al. December 28, 2 | 2004-12-28 |
Optical system for use in exposure apparatus and device manufacturing method using the same App 20040227914 - Hara, Shinichi | 2004-11-18 |
Illumination apparatus, projection exposure apparatus, and device fabrication method App 20040227920 - Hara, Shinichi | 2004-11-18 |
Holding mechanism in exposure apparatus, and device manufacturing method App 20040218160 - Hara, Shinichi | 2004-11-04 |
Exposure apparatus App 20040200226 - Hara, Shinichi | 2004-10-14 |
Mask pattern magnification correction method, magnification correction apparatus, and mask structure Grant 6,804,323 - Moriya , et al. October 12, 2 | 2004-10-12 |
Processing apparatus for processing sample in predetermined atmosphere App 20040187786 - Tanaka, Yutaka ;   et al. | 2004-09-30 |
Cooling apparatus App 20040174504 - Hara, Shinichi ;   et al. | 2004-09-09 |
Photocatalyst deodorizer App 20040170537 - Hara, Shinichi | 2004-09-02 |
Cooling mechanism App 20040165161 - Hara, Shinichi | 2004-08-26 |
Reflection type mask App 20040125911 - Chiba, Keiko ;   et al. | 2004-07-01 |
Processing apparatus for processing sample in predetermined atmosphere Grant 6,750,946 - Tanaka , et al. June 15, 2 | 2004-06-15 |
X-ray mask, and exposure method and apparatus using the same Grant 6,728,332 - Chiba , et al. April 27, 2 | 2004-04-27 |
X-ray projection exposure apparatus and a device manufacturing method App 20040071260 - Hara, Shinichi ;   et al. | 2004-04-15 |
Exposure apparatus, gas replacement method, semiconductor device manufacturing method, semiconductor manufacturing factory and exposure apparatus maintenance method Grant 6,714,277 - Hara , et al. March 30, 2 | 2004-03-30 |
Cooling apparatus and method, and exposure apparatus having the cooling apparatus App 20040035570 - Hara, Shinichi | 2004-02-26 |
Processing apparatus, measuring apparatus, and device manufacturing method App 20040022694 - Hara, Shinichi ;   et al. | 2004-02-05 |
X-ray projection exposure apparatus and a device manufacturing method Grant 6,668,037 - Hara , et al. December 23, 2 | 2003-12-23 |
Processing apparatus with pressure control and gas recirculation system Grant 6,616,898 - Hara , et al. September 9, 2 | 2003-09-09 |
Semiconductor memory production system and semiconductor memory production method Grant 6,532,182 - Ogawa , et al. March 11, 2 | 2003-03-11 |
Mask pattern magnification correction method, magnification correction apparatus, and mask structure App 20030023339 - Moriya, Akira ;   et al. | 2003-01-30 |
Jetting apparatus for mixed flow of gas and liquid App 20020113327 - Hara, Shinichi | 2002-08-22 |
X-ray projection exposure apparatus and a device manufacturing method App 20020101956 - Hara, Shinichi ;   et al. | 2002-08-01 |
Processing Apparatus, Measuring Apparatus, And Device Manufacturing Method App 20020094306 - HARA, SHINICHI ;   et al. | 2002-07-18 |
Failure analyzing device for semiconductors App 20020059010 - Ogawa, Sumio ;   et al. | 2002-05-16 |
Method of manufacturing semiconductor devices App 20020059012 - Ogawa, Sumio ;   et al. | 2002-05-16 |
X-ray mask, and exposure method and apparatus using the same App 20020021781 - Chiba, Keiko ;   et al. | 2002-02-21 |
Semiconductor device manufacturing system and method of manufacturing semiconductor devices Grant 6,349,240 - Ogawa , et al. February 19, 2 | 2002-02-19 |
X-ray projection exposure apparatus and a device manufacturing method App 20020006180 - Hara, Shinichi ;   et al. | 2002-01-17 |
Processing apparatus for processing sample in predetermined atmosphere App 20020002946 - Tanaka, Yutaka ;   et al. | 2002-01-10 |
Cleaning nozzle and cleaning apparatus App 20020000477 - Hara, Shinichi | 2002-01-03 |
X-ray mask, and exposure method and apparatus using the same Grant 6,317,479 - Chiba , et al. November 13, 2 | 2001-11-13 |
Exposure apparatus, gas replacement method, semiconductor device manufacturing method, semiconductor manufacturing factory and exposure apparatus maintenance method App 20010035942 - Hara, Shinichi ;   et al. | 2001-11-01 |
Semiconductor memory production system and semiconductor memory production method App 20010026486 - Ogawa, Sumio ;   et al. | 2001-10-04 |
Semiconductor device manufacturing system and method of manufacturing semiconductor devices App 20010026949 - Ogawa, Sumio ;   et al. | 2001-10-04 |
Device manufacturing method with transfer magnification adjustment to correct thermal distortion of substrate Grant 6,087,053 - Hara July 11, 2 | 2000-07-11 |
X-ray projection exposure apparatus and a device manufacturing method Grant 6,084,938 - Hara , et al. July 4, 2 | 2000-07-04 |
Intermediate communication controller that sends transmission data in a predetermined order to a corresponding slave unit upon request from a master controller Grant 6,011,921 - Takahashi , et al. January 4, 2 | 2000-01-04 |
Air cleaning apparatus for vehicles Grant 5,968,214 - Nagata , et al. October 19, 1 | 1999-10-19 |
Substrate holding device and exposing apparatus using the same Grant 5,883,932 - Chiba , et al. March 16, 1 | 1999-03-16 |
Mask supporting device and correction method therefor, and exposure apparatus and device producing method utilizing the same Grant 5,854,819 - Hara , et al. December 29, 1 | 1998-12-29 |
Mask holding device, and an exposure apparatus and a device manufacturing method using the device Grant 5,608,773 - Korenaga , et al. March 4, 1 | 1997-03-04 |
Mask manufacturing method and apparatus and device manufacturing method using a mask manufactured by the method or apparatus Grant 5,593,800 - Fujioka , et al. January 14, 1 | 1997-01-14 |
X-ray mask, and exposure apparatus and device production using the mask Grant 5,485,495 - Miyachi , et al. January 16, 1 | 1996-01-16 |
Wafer cooling device Grant 5,413,167 - Hara , et al. May 9, 1 | 1995-05-09 |
Vacuum chuck Grant 5,374,829 - Sakamoto , et al. December 20, 1 | 1994-12-20 |
X-ray lithography apparatus including a dose detectable mask Grant 5,323,440 - Hara , et al. June 21, 1 | 1994-06-21 |
Wafer holding device in an exposure apparatus Grant 5,220,171 - Hara , et al. June 15, 1 | 1993-06-15 |
Exposure apparatus for controlling intensity of exposure radiation Grant 5,157,700 - Kurosawa , et al. October 20, 1 | 1992-10-20 |
Workpiece supporting mechanism Grant 5,155,523 - Hara , et al. October 13, 1 | 1992-10-13 |
Exposure apparatus with a substrate holding mechanism Grant 5,093,579 - Amemiya , et al. March 3, 1 | 1992-03-03 |
Liquid cooled X-ray lithographic exposure apparatus Grant 5,063,582 - Mori , et al. November 5, 1 | 1991-11-05 |
Method for forming thin film pattern and method for fabricating thin film magnetic head using the same Grant 4,971,896 - Kawabe , et al. November 20, 1 | 1990-11-20 |
Method of manufacturing a thin-film magnetic head Grant 4,791,719 - Kobayashi , et al. December 20, 1 | 1988-12-20 |
Production method of thin film magnetic head Grant 4,685,014 - Hanazono , et al. August 4, 1 | 1987-08-04 |
Thin film of Ni-Co-Fe ternary alloy and process for producing the same Grant 4,623,439 - Mitsuoka , et al. November 18, 1 | 1986-11-18 |
Method of patterning thin film Grant 4,592,801 - Hara , et al. June 3, 1 | 1986-06-03 |