| Patent | Date |
|---|
Failure model for predicting failure due to resist layer
Grant 11,354,484 - Hansen June 7, 2 | 2022-06-07 |
Model For Calculating A Stochastic Variation In An Arbitrary Pattern
App 20210405538 - HANSEN; Steven George | 2021-12-30 |
Failure Model For Predicting Failure Due To Resist Layer
App 20210382393 - HANSEN; Steven George | 2021-12-09 |
Model for calculating a stochastic variation in an arbitrary pattern
Grant 11,126,090 - Hansen September 21, 2 | 2021-09-21 |
Optimization of a lithography apparatus or patterning process based on selected aberration
Grant 11,029,594 - Hansen , et al. June 8, 2 | 2021-06-08 |
Model for estimating stochastic variation
Grant 10,795,267 - Hansen October 6, 2 | 2020-10-06 |
Model For Calculating A Stochastic Variation In An Arbitrary Pattern
App 20200159125 - Hansen; Steven George | 2020-05-21 |
Model for calculating a stochastic variation in an arbitrary pattern
Grant 10,545,411 - Hansen Ja | 2020-01-28 |
Optimization Of A Lithography Apparatus Or Patterning Process Based On Selected Aberration
App 20190369480 - HANSEN; Steven George ; et al. | 2019-12-05 |
Model For Estimating Stochastic Variation
App 20190317410 - HANSEN; Steven George | 2019-10-17 |
Source mask optimization to reduce stochastic effects
Grant 9,934,346 - Hansen April 3, 2 | 2018-04-03 |
Illumination system and lithographic apparatus
Grant 9,651,875 - Mulder , et al. May 16, 2 | 2017-05-16 |
Process tuning with polarization
Grant 9,563,135 - Hansen , et al. February 7, 2 | 2017-02-07 |
Model For Calculating A Stochastic Variation In An Arbitrary Pattern
App 20170010538 - HANSEN; Steven George | 2017-01-12 |
Source Mask Optimization To Reduce Stochastic Effects
App 20160110488 - HANSEN; Steven George | 2016-04-21 |
Source mask optimization to reduce stochastic effects
Grant 9,213,783 - Hansen December 15, 2 | 2015-12-15 |
Illumination System And Lithographic Apparatus
App 20150241792 - MULDER; Heine Melle ; et al. | 2015-08-27 |
Illumination system and lithographic apparatus
Grant 9,116,439 - Mulder , et al. August 25, 2 | 2015-08-25 |
Polarization designs for lithographic apparatus
Grant 8,982,324 - Hansen March 17, 2 | 2015-03-17 |
Source-mask optimization in lithographic apparatus
Grant 8,786,824 - Hansen July 22, 2 | 2014-07-22 |
Lithographic apparatus and device manufacturing method
Grant 8,576,377 - Hansen , et al. November 5, 2 | 2013-11-05 |
Source Mask Optimization to Reduce Stochastic Effects
App 20130179847 - Hansen; Steven George | 2013-07-11 |
Lithographic Apparatus and Method
App 20130044302 - MULDER; Heine Melle ; et al. | 2013-02-21 |
Lithographic apparatus and device manufacturing method
Grant 8,043,797 - Hansen October 25, 2 | 2011-10-25 |
Reduced Pitch Multiple Exposure Process
App 20110244401 - PAXTON; Theodore A. ; et al. | 2011-10-06 |
Illumination System And Lithographic Apparatus
App 20110228247 - Mulder; Heine Melle ; et al. | 2011-09-22 |
Reduced pitch multiple exposure process
Grant 7,981,595 - Paxton , et al. July 19, 2 | 2011-07-19 |
Polarization Designs For Lithographic Apparatus
App 20110139027 - HANSEN; Steven George | 2011-06-16 |
Reduced pitch multiple exposure process
Grant 7,906,270 - Paxton , et al. March 15, 2 | 2011-03-15 |
Lithographic apparatus and device manufacturing method
Grant 7,898,644 - Hansen March 1, 2 | 2011-03-01 |
Source-mask Optimization In Lithographic Apparatus
App 20100315614 - Hansen; Steven George | 2010-12-16 |
Reduced pitch multiple exposure process
Grant 7,781,149 - Paxton , et al. August 24, 2 | 2010-08-24 |
Lithographic apparatus and device manufacturing method
Grant 7,684,013 - Hansen , et al. March 23, 2 | 2010-03-23 |
Lithographic apparatus and device manufacturing method
Grant 7,528,934 - Hansen May 5, 2 | 2009-05-05 |
Correction of optical proximity effects by intensity modulation of an illumination arrangement
Grant 7,471,375 - Finders , et al. December 30, 2 | 2008-12-30 |
Lithographic apparatus and device manufacturing method
App 20080186468 - Hansen; Steven George ; et al. | 2008-08-07 |
Lithographic apparatus and device manufacturing method
App 20080158529 - Hansen; Steven George | 2008-07-03 |
Device Manufacturing Method
App 20080030708 - Hansen; Steven George ; et al. | 2008-02-07 |
Enhanced lithographic resolution through double exposure
App 20070258073 - Finders; Jozef Maria ; et al. | 2007-11-08 |
Lithographic apparatus and device manufacturing method
App 20070242251 - Hansen; Steven George | 2007-10-18 |
Enhanced lithographic resolution through double exposure
Grant 7,256,873 - Finders , et al. August 14, 2 | 2007-08-14 |
Lithographic apparatus and method for optimizing illumination using a photolithographic simulation
Grant 7,245,356 - Hansen July 17, 2 | 2007-07-17 |
Lithographic apparatus and device manufacturing method
App 20070121090 - Chen; Alek Chi-Heng ; et al. | 2007-05-31 |
Exposure with intensity balancing to mimic complex illuminator shape
Grant 7,180,576 - Hansen February 20, 2 | 2007-02-20 |
Reduced pitch multiple exposure process
App 20070003878 - Paxton; Theodore A. ; et al. | 2007-01-04 |
Lithographic apparatus and device manufacturing method
App 20070002300 - Hansen; Steven George ; et al. | 2007-01-04 |
Reduced pitch multiple exposure process
App 20060216653 - Paxton; Theodore Allen ; et al. | 2006-09-28 |
Reduced pitch multiple exposure process
App 20060216649 - Paxton; Theodore A. ; et al. | 2006-09-28 |
Correction of optical proximity effects by intensity modulation of an illumination arrangement
App 20060192935 - Hansen; Steven George ; et al. | 2006-08-31 |
Lithographic apparatus and device manufacturing method
App 20060146307 - Hansen; Steven George ; et al. | 2006-07-06 |
Lithographic apparatus and method for optimizing illumination using a photolithographic simulation
App 20060126046 - Hansen; Steven George | 2006-06-15 |
Lithographic apparatus and method for optimizing an illumination source using photolithographic simulations
Grant 7,030,966 - Hansen April 18, 2 | 2006-04-18 |
Lithographic apparatus and device manufacturing method
App 20060078806 - Hansen; Steven George | 2006-04-13 |
Lithographic apparatus and method for optimizing an illumination source using isofocal compensation
Grant 7,016,017 - Hansen March 21, 2 | 2006-03-21 |
Enhanced lithographic resolution through double exposure
App 20050162627 - Finders, Jozef Maria ; et al. | 2005-07-28 |
Exposure with intensity balancing to mimic complex illuminator shape
App 20050018164 - Hansen, Steven George | 2005-01-27 |
Device manufacturing method
App 20050007573 - Hansen, Steven George ; et al. | 2005-01-13 |
Method for optimizing an illumination source using full resist simulation and process window response metric
Grant 6,839,125 - Hansen January 4, 2 | 2005-01-04 |
Lithographic apparatus and method for optimizing an illumination source using photolithographic simulations
App 20040156030 - Hansen, Steven George | 2004-08-12 |
Lithographic apparatus and method for optimizing an illumination source using isofocal compensation
App 20040158808 - Hansen, Steven George | 2004-08-12 |
Method For Optimizing An Illumination Source Using Full Resist Simulation And Process Window Response Metric
App 20040156029 - Hansen, Steven George | 2004-08-12 |
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