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Method of controlling a temperature of a chemical mechanical polishing process, temperature control, and CMP apparatus including the temperature control
Grant 10,821,572 - Jeong , et al. November 3, 2 | 2020-11-03 |
Methods of fabricating semiconductor devices including fin-shaped active regions
Grant 10,424,503 - Youn , et al. Sept | 2019-09-24 |
Chemical supplier, processing apparatus including the chemical supplier
Grant 10,297,474 - Park , et al. | 2019-05-21 |
Method Of Controlling A Temperature Of A Chemical Mechanical Polishing Process, Temperature Control, And Cmp Apparatus Including The Temperature Control
App 20190091828 - JEONG; Suk-Hoon ; et al. | 2019-03-28 |
Methods of forming semiconductor devices including trench walls having multiple slopes
Grant 10,192,973 - Park , et al. Ja | 2019-01-29 |
Methods of fabricating semiconductor devices including fin-shaped active regions
Grant 10,090,190 - Youn , et al. October 2, 2 | 2018-10-02 |
Methods Of Fabricating Semiconductor Devices Including Fin-shaped Active Regions
App 20180174889 - Youn; Young-Sang ; et al. | 2018-06-21 |
Method for fabricating semiconductor device including replacement process of forming at least one metal gate structure
Grant 9,812,367 - Kim , et al. November 7, 2 | 2017-11-07 |
Methods Of Fabricating Semiconductor Devices Including Fin-shaped Active Regions
App 20170301581 - Youn; Young-Sang ; et al. | 2017-10-19 |
Fin-FET semiconductor device with a source/drain contact having varying different widths
Grant 9,786,764 - Park , et al. October 10, 2 | 2017-10-10 |
Apparatus for treating wafers using supercritical fluid
Grant 9,754,806 - Lee , et al. September 5, 2 | 2017-09-05 |
Methods of fabricating semiconductor devices including fin-shaped active regions
Grant 9,728,535 - Youn , et al. August 8, 2 | 2017-08-08 |
Methods Of Forming Semiconductor Devices Including Trench Walls Having Multiple Slopes
App 20160359017 - PARK; Sang-Jine ; et al. | 2016-12-08 |
Semiconductor devices and methods of manufacturing the same
Grant 9,466,697 - Park , et al. October 11, 2 | 2016-10-11 |
Semiconductor devices including trench walls having multiple slopes
Grant 9,443,979 - Park , et al. September 13, 2 | 2016-09-13 |
Methods Of Fabricating Semiconductor Devices Including Fin-shaped Active Regions
App 20160181243 - Youn; Young-sang ; et al. | 2016-06-23 |
Semiconductor Device And Method For Fabricating The Same
App 20160141417 - PARK; Chan-Jin ; et al. | 2016-05-19 |
Methods of fabricating semiconductor devices including fin-shaped active regions
Grant 9,305,825 - Youn , et al. April 5, 2 | 2016-04-05 |
Semiconductor Devices And Methods Of Manufacturing The Same
App 20150364574 - KIM; Ju-Youn ; et al. | 2015-12-17 |
Method For Fabricating Semiconductor Device
App 20150357426 - KIM; JU-YOUN ; et al. | 2015-12-10 |
Semiconductor Devices And Methods Of Manufacturing The Same
App 20150279991 - PARK; Sang-Jine ; et al. | 2015-10-01 |
Method of fabricating semiconductor device
Grant 9,136,135 - Baek , et al. September 15, 2 | 2015-09-15 |
Semiconductor Devices Including Trench Walls Having Multiple Slopes
App 20150187946 - PARK; Sang-Jine ; et al. | 2015-07-02 |
Apparatus For Treating Wafers Using Supercritical Fluid
App 20150162221 - Lee; Hyo-San ; et al. | 2015-06-11 |
Method of fabricating semiconductor device
Grant 9,054,210 - Park , et al. June 9, 2 | 2015-06-09 |
Semiconductor device and method of fabricating the same
Grant 9,040,415 - Park , et al. May 26, 2 | 2015-05-26 |
Semiconductor Device And Method Of Fabricating The Same
App 20150050793 - PARK; Sang-Jine ; et al. | 2015-02-19 |
Apparatus for treating wafers using supercritical fluid
Grant 8,951,383 - Lee , et al. February 10, 2 | 2015-02-10 |
Semiconductor Devices And Methods Of Manufacturing The Same
App 20140322881 - Park; Sang-Jine ; et al. | 2014-10-30 |
Chemical Supplier, Processing Apparatus Including The Chemical Supplier
App 20140231010 - PARK; Sang-Jine ; et al. | 2014-08-21 |
Methods of Fabricating Semiconductor Devices Including Fin-Shaped Active Regions
App 20140227857 - YOUN; YOUNG-SANG ; et al. | 2014-08-14 |
Semiconductor devices and methods of manufacturing the same
Grant 8,803,248 - Park , et al. August 12, 2 | 2014-08-12 |
Methods for fabricating semiconductor devices
Grant 8,796,107 - Ahn , et al. August 5, 2 | 2014-08-05 |
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
Grant 8,790,470 - Lee , et al. July 29, 2 | 2014-07-29 |
Methods of Fabricating Semiconductor Device Using Nitridation of Isolation Layers
App 20140206169 - Cha; Ji Hoon ; et al. | 2014-07-24 |
Methods for fabricating semiconductor devices
Grant 8,709,942 - Park , et al. April 29, 2 | 2014-04-29 |
Composition for etching silicon oxide layer, method for etching semiconductor device using the same, and composition for etching semiconductor device
Grant 8,685,272 - Kim , et al. April 1, 2 | 2014-04-01 |
Method Of Fabricating Semiconductor Device
App 20140080296 - BAEK; Jae-Jik ; et al. | 2014-03-20 |
Methods of fabricating semiconductor devices
Grant 8,673,724 - Park , et al. March 18, 2 | 2014-03-18 |
Methods of fabricating semiconductor devices using preliminary trenches with epitaxial growth
Grant 8,652,915 - Ahn , et al. February 18, 2 | 2014-02-18 |
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
Grant 8,585,917 - Lee , et al. November 19, 2 | 2013-11-19 |
Methods For Fabricating Semiconductor Devices
App 20130137240 - Ahn; Kevin ; et al. | 2013-05-30 |
Methods of Fabricating Semiconductor Devices
App 20130115759 - Park; Sang-Jine ; et al. | 2013-05-09 |
Methods for fabricating semiconductor devices
Grant 8,404,580 - Park , et al. March 26, 2 | 2013-03-26 |
Method Of Fabricating Semiconductor Device
App 20130023100 - PARK; Sang-Jine ; et al. | 2013-01-24 |
Methods For Fabricating Semiconductor Devices
App 20130023119 - Park; Sang-Jine ; et al. | 2013-01-24 |
Methods For Fabricating Semiconductor Devices
App 20120309189 - Park; Sang-Jine ; et al. | 2012-12-06 |
Semiconductor Devices and Methods of Manufacturing the Same
App 20120104514 - Park; Sang-Jine ; et al. | 2012-05-03 |
Etching, Cleaning And Drying Methods Using Supercritical Fluid And Chamber Systems Using These Methods
App 20120085495 - Lee; Hyo-San ; et al. | 2012-04-12 |
Etching, Cleaning And Drying Methods Using Supercritical Fluid And Chamber Systems Using These Methods
App 20120080059 - Lee; Hyo-san ; et al. | 2012-04-05 |
Methods Of Fabricating Semiconductor Devices Using Preliminary Trenches With Epitaxial Growth
App 20120058616 - Ahn; Kevin ; et al. | 2012-03-08 |
Semiconductor Integrated Circuit Device Including an Epitaxial Layer
App 20120049250 - Park; Sang-Jine ; et al. | 2012-03-01 |
Method of forming a contact structure
Grant 8,110,499 - Kang , et al. February 7, 2 | 2012-02-07 |
Methods of forming semiconductor devices formed by processes including the use of specific etchant solutions
Grant 8,092,698 - Kim , et al. January 10, 2 | 2012-01-10 |
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
Grant 8,084,367 - Lee , et al. December 27, 2 | 2011-12-27 |
Methods Of Forming A Pattern, Methods Of Forming A Gate Structure And Methods Of Manufacturing A Semiconductor Device Using The Same
App 20110287625 - Kang; Dae-Hyuk ; et al. | 2011-11-24 |
Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture
Grant 8,058,180 - Kwon , et al. November 15, 2 | 2011-11-15 |
Semiconductor device having capacitor
Grant 7,985,999 - Oh , et al. July 26, 2 | 2011-07-26 |
Apparatus for Treating Wafers Using Supercritical Fluid
App 20110083807 - Lee; Hyo-san ; et al. | 2011-04-14 |
Apparatus for treating wafers using supercritical fluid
Grant 7,857,939 - Lee , et al. December 28, 2 | 2010-12-28 |
Semiconductor device having capacitor and method of fabricating the same
Grant 7,820,508 - Oh , et al. October 26, 2 | 2010-10-26 |
Method of manufacturing semiconductor device
App 20100267225 - Lee; Hyo-san ; et al. | 2010-10-21 |
Semiconductor device having capacitor and method of fabricating the same
App 20100187654 - Oh; Jung-Min ; et al. | 2010-07-29 |
Method of fabricating a semiconductor device
Grant 7,704,828 - Oh , et al. April 27, 2 | 2010-04-27 |
Composition for etching silicon oxide layer, method for etching semiconductor device using the same, and composition for etching semiconductor device
App 20100035436 - Kim; Go-Un ; et al. | 2010-02-11 |
Method Of Forming A Contact Structure
App 20090280641 - Kang; Dae-Hyuk ; et al. | 2009-11-12 |
Semiconductor capacitor structure and method for manufacturing the same
Grant 7,544,985 - Shim , et al. June 9, 2 | 2009-06-09 |
Methods of manufacturing semiconductor memory devices with unit cells having charge trapping layers
Grant 7,498,217 - Oh , et al. March 3, 2 | 2009-03-03 |
Methods Of Forming Semiconductor Devices Formed By Processes Including The Use Of Specific Etchant Solutions
App 20080314868 - Kim; Yu-Kyung ; et al. | 2008-12-25 |
Methods Of Fabricating A Semiconductor Device Using A Dilute Aqueous Solution Of An Ammonia And Peroxide Mixture
App 20080194110 - Kwon; Doo-Won ; et al. | 2008-08-14 |
Composition For Cleaning Substrates And Method Of Forming Gate Using The Composition
App 20080160743 - LEE; Hyo-san ; et al. | 2008-07-03 |
Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture
Grant 7,354,868 - Kwon , et al. April 8, 2 | 2008-04-08 |
Single-substrate Type Apparatus For Processing A Substrate
App 20080047576 - KIM; Young-Ok ; et al. | 2008-02-28 |
Apparatus and method for treating wafers using supercritical fluid
App 20080029159 - Lee; Hyo-san ; et al. | 2008-02-07 |
Etching, Cleaning And Drying Methods Using Supercritical Fluid And Chamber Systems Using These Methods
App 20070293054 - Lee; Hyo-San ; et al. | 2007-12-20 |
Methods of Manufacturing Semiconductor Memory Devices with Unit Cells Having Charge Trapping Layers
App 20070264793 - Oh; Jung-Min ; et al. | 2007-11-15 |
Method Of Fabricating A Semiconductor Device
App 20070254389 - OH; Jung-Min ; et al. | 2007-11-01 |
Semiconductor device having capacitor and method of fabricating the same
App 20070111432 - Oh; Jung-Min ; et al. | 2007-05-17 |
Composition for cleaning substrates and method of forming gate using the composition
App 20070051700 - Lee; Hyo-san ; et al. | 2007-03-08 |
Method of fabricating flash memory with u-shape floating gate
App 20060246666 - Han; Jeong-nam ; et al. | 2006-11-02 |
Method of manufacturing a semiconductor device using a polysilicon etching mask
Grant 7,122,478 - Han , et al. October 17, 2 | 2006-10-17 |
Semiconductor capacitor structure and method for manufacturing the same
App 20060097410 - Shim; Woo-Gwan ; et al. | 2006-05-11 |
Semiconductor capacitor structure and method for manufacturing the same
Grant 7,018,892 - Shim , et al. March 28, 2 | 2006-03-28 |
Etchant solutions and methods of forming semiconductor devices formed by processes including the same
App 20060028865 - Kim; Yu-Kyung ; et al. | 2006-02-09 |
Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture
App 20050260830 - Kwon, Doo-Won ; et al. | 2005-11-24 |
Semiconductor capacitor structure and method for manufacturing the same
App 20050037562 - Shim, Woo-Gwan ; et al. | 2005-02-17 |
Method of manufacturing a semiconductor device using a polysilicon etching mask
App 20050026420 - Han, Jeong-Nam ; et al. | 2005-02-03 |
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