loadpatents
Patent applications and USPTO patent grants for Hamada; Satomi.The latest application filed is for "substrate cleaning apparatus and substrate cleaning method".
Patent | Date |
---|---|
Method and apparatus for cleaning PVA brush Grant 11,382,412 - Park , et al. July 12, 2 | 2022-07-12 |
Substrate Cleaning Apparatus And Substrate Cleaning Method App 20210039142 - TAKATOH; Chikako ;   et al. | 2021-02-11 |
Method And Apparatus For Cleaning Pva Brush App 20200281347 - PARK; Jin-Goo ;   et al. | 2020-09-10 |
Wafer drying apparatus and wafer drying method Grant 10,229,841 - Imai , et al. | 2019-03-12 |
Wafer Drying Apparatus And Wafer Drying Method App 20160372344 - IMAI; Masayoshi ;   et al. | 2016-12-22 |
Substrate cleaning apparatus and method for determining timing of replacement of cleaning member Grant 8,608,858 - Hamada December 17, 2 | 2013-12-17 |
Cleaning Member, Substrate Cleaning Apparatus and Substrate Processing Apparatus App 20100212702 - Hamada; Satomi | 2010-08-26 |
Substrate Processing Method App 20100043839 - HAMADA; SATOMI ;   et al. | 2010-02-25 |
Substrate Processing Apparatus And Substrate Processing Method App 20090081810 - Hamada; Satomi ;   et al. | 2009-03-26 |
Substrate Cleaning Apparatus and Method for Determining Timing of Replacement of Cleaning Member App 20080289652 - Hamada; Satomi | 2008-11-27 |
Apparatus for cleaning a substrate having metal interconnects App 20080017220 - Kodera; Masako ;   et al. | 2008-01-24 |
Substrate processing apparatus and substrate processing method App 20050026455 - Hamada, Satomi ;   et al. | 2005-02-03 |
Apparatus for cleaning a substrate having metal interconnects App 20040177655 - Kodera, Masako ;   et al. | 2004-09-16 |
Apparatus for conveying a workpiece App 20010009157 - Maekawa, Toshiro ;   et al. | 2001-07-26 |
Washing method and washing apparatus Grant 6,106,635 - Hamada , et al. August 22, 2 | 2000-08-22 |
Cleaning apparatus Grant 5,966,765 - Hamada , et al. October 19, 1 | 1999-10-19 |
Method of and apparatus for cleaning workpiece Grant 5,860,181 - Maekawa , et al. January 19, 1 | 1999-01-19 |
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