Patent | Date |
---|
Conductive oxide overhang structures for OLED devices Grant 11,456,345 - Choung , et al. September 27, 2 | 2022-09-27 |
Conductive oxide overhang structures for OLED devices Grant 11,348,983 - Choung , et al. May 31, 2 | 2022-05-31 |
Methods Of Fabricating Oled Panel With Inorganic Pixel Encapsulating Barrier App 20220077257 - Choung; Ji-young ;   et al. | 2022-03-10 |
Oled Panel With Inorganic Pixel Encapsulating Barrier App 20220077251 - CHOUNG; Ji-young ;   et al. | 2022-03-10 |
Methods Of Fabricating Oled Panel With Inorganic Pixel Encapsulating Barrier App 20220077252 - CHOUNG; Ji-young ;   et al. | 2022-03-10 |
Method For Cleaning A Vacuum System Used In The Manufacture Of Oled Devices, Method For Vacuum Deposition On A Substrate To Manufacture Oled Devices, And Apparatus For Vacuum Deposition On A Substrate To Manufacture Oled Devices App 20210308725 - DIEGUEZ-CAMPO; Jose Manuel ;   et al. | 2021-10-07 |
Evaporation Source For Organic Material, Deposition Apparatus For Depositing Organic Materials In A Vacuum Chamber Having An Evaporation Source For Organic Material, And Method For Evaporating Organic Material App 20210269912 - BANGERT; Stefan ;   et al. | 2021-09-02 |
Shadow Mask With Tapered Openings Formed By Double Electroforming With Reduced Internal Stresses App 20210214834 - HUANG; Xi ;   et al. | 2021-07-15 |
Integrated Lithium Deposition With Protective Layer Tool App 20210184208 - HERLE; Subramanya P. ;   et al. | 2021-06-17 |
Integrated lithium deposition with protective layer tool Grant 10,978,699 - Herle , et al. April 13, 2 | 2021-04-13 |
Low melting temperature metal purification and deposition Grant 10,916,761 - Herle , et al. February 9, 2 | 2021-02-09 |
Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrier Grant 10,837,111 - Vercesi , et al. November 17, 2 | 2020-11-17 |
Sputter deposition source, apparatus for sputter deposition and method of assembling thereof Grant 10,546,732 - Keller , et al. Ja | 2020-01-28 |
Methods of operating a deposition apparatus, and deposition apparatus Grant 10,483,465 - Dieguez-Campo , et al. Nov | 2019-11-19 |
Mask Arrangement For Masking A Substrate In A Processing Chamber, Apparatus For Depositing A Layer On A Substrate, And Method Fo App 20190301002 - BANGERT; Stefan ;   et al. | 2019-10-03 |
Apparatus And Method For Transportation Of A Deposition Source App 20190292653 - BANGERT; Stefan ;   et al. | 2019-09-26 |
Nozzle For A Distribution Assembly Of A Material Deposition Source Arrangement, Material Deposition Source Arrangement, Vacuum D App 20190226090 - LOPP; Andreas ;   et al. | 2019-07-25 |
Low Melting Temperataure Metal Purification And Deposition App 20190190000 - HERLE; Subramanya P. ;   et al. | 2019-06-20 |
Methods Of Operating A Deposition Apparatus, And Deposition Apparatus App 20190148642 - DIEGUEZ-CAMPO; Jose Manuel ;   et al. | 2019-05-16 |
Fmm Process For High Res Fmm App 20190074343 - HAAS; Dieter | 2019-03-07 |
A Processing Apparatus For Processing Devices, Particularly Devices Including Organic Materials Therein, And Method For Transferring An Evaporation Source From A Processing Vacuum Chamber To A Maintenance Vacuum Chamber Or From The Maintenance Vacuum Chamber To The Processing Vacuum Chamber App 20190032194 - DIEGUEZ-CAMPO; Jose Manuel ;   et al. | 2019-01-31 |
A Shadow Mask With Tapered Openings Formed By Double Electroforming App 20190036027 - LASSITER; Brian E. ;   et al. | 2019-01-31 |
A Shadow Mask With Tapered Openings Formed By Double Electroforming Using Positive/negative Photoresists App 20190036026 - HUANG; Xi ;   et al. | 2019-01-31 |
Atomic layer deposition processing chamber permitting low-pressure tool replacement Grant 10,184,179 - Kurita , et al. Ja | 2019-01-22 |
Integrated Lithium Deposition With Protective Layer Tool App 20190013516 - HERLE; Subramanya P. ;   et al. | 2019-01-10 |
A Shadow Mask For Organic Light Emitting Diode Manufacture App 20180138408 - LASSITER; Brian E. ;   et al. | 2018-05-17 |
System for depositing one or more layers on a substrate supported by a carrier and method using the same Grant 9,899,635 - Bangert , et al. February 20, 2 | 2018-02-20 |
Holding Arrangement For Supporting A Substrate Carrier And A Mask Carrier During Layer Deposition In A Processing Chamber, Apparatus For Depositing A Layer On A Substrate, And Method For Aligning A Substrate Carrier Supporting A Substrate And A Mask Carrier App 20180030596 - VERCESI; Tommaso ;   et al. | 2018-02-01 |
Mask Arrangement For Masking A Substrate In A Processing Chamber App 20170342541 - BANGERT; Stefan ;   et al. | 2017-11-30 |
Evaporation Source For Organic Material, Deposition Apparatus For Depositing Organic Materials In A Vacuum Chamber Having An Evaporation Source For Organic Material, And Method For Evaporating Organic Material App 20170346044 - BANGERT; Stefan ;   et al. | 2017-11-30 |
System For Depositing One Or More Layers On A Substrate Supported By A Carrier And Method Using The Same App 20170244070 - BANGERT; Stefan ;   et al. | 2017-08-24 |
A Processing Apparatus For Processing Devices, Particularly Devices Including Organic Materials Therein, And Method For Transferring An Evaporation Source From A Processing Vacuum Chamber To A Maintenance Vacuum Chamber Or From The Maintenance Vacuum Chamber To The Processing Vacuum Chamber App 20170022601 - DIEGUEZ-CAMPO; Jose Manuel ;   et al. | 2017-01-26 |
Evaporation Source For Organic Material, Apparatus Having An Evaporation Source For Organic Material, System Having An Evaporation Deposition Apparatus With An Evaporation Source For Organic Materials, And Method For Operating An Evaporation Source For Organic Material App 20170005297 - BANGERT; Stefan ;   et al. | 2017-01-05 |
Atomic Layer Deposition Processing Chamber Permitting Low-pressure Tool Replacement App 20160362788 - KURITA; Shinichi ;   et al. | 2016-12-15 |
Thin Film Encapsulation Processing System And Process Kit Permitting Low-pressure Tool Replacement App 20160319422 - KURITA; Shinichi ;   et al. | 2016-11-03 |
Sputter Deposition Source, Apparatus For Sputter Deposition And Method Of Assembling Thereof App 20160268109 - KELLER; Stefan ;   et al. | 2016-09-15 |
Methods of and factories for thin-film battery manufacturing Grant 9,350,040 - Kwak , et al. May 24, 2 | 2016-05-24 |
Portable electrostatic chuck carrier for thin substrates Grant 9,343,347 - Haas , et al. May 17, 2 | 2016-05-17 |
Method for encapsulating an organic light emitting diode Grant 9,293,706 - Haas , et al. March 22, 2 | 2016-03-22 |
Actively-aligned Fine Metal Mask App 20160043319 - WHITE; John M. ;   et al. | 2016-02-11 |
Thin film encapsulation-thin ultra high barrier layer for OLED application Grant 9,252,392 - Kumar , et al. February 2, 2 | 2016-02-02 |
Gas distribution system Grant 9,206,512 - Nguyen , et al. December 8, 2 | 2015-12-08 |
Methods of and hybrid factories for thin-film battery manufacturing Grant 9,130,238 - Kwak , et al. September 8, 2 | 2015-09-08 |
Thin Film Encapsulation-thin Ultra High Barrier Layer For Oled Application App 20140264297 - KUMAR; Bhaskar ;   et al. | 2014-09-18 |
Portable Electrostatic Chuck Carrier For Thin Substrates App 20140071581 - HAAS; DIETER ;   et al. | 2014-03-13 |
Wire holder and terminal connector for hot wire chemical vapor deposition chamber Grant 8,662,941 - Narwankar , et al. March 4, 2 | 2014-03-04 |
Methods Of And Factories For Thin-film Battery Manufacturing App 20130255076 - Kwak; Byung-Sung ;   et al. | 2013-10-03 |
Methods of and factories for thin-film battery manufacturing Grant 8,464,419 - Kwak , et al. June 18, 2 | 2013-06-18 |
Apparatus For Forming Energy Storage And Photovoltaic Devices In A Linear System App 20130074771 - PUSHPARAJ; VICTOR L. ;   et al. | 2013-03-28 |
Substrate Support, Substrate Processing Device And Method Of Placing A Substrate App 20130055953 - Haas; Dieter ;   et al. | 2013-03-07 |
Gas Distribution System App 20120325149 - NGUYEN; HANH D. ;   et al. | 2012-12-27 |
Apparatus and methods for forming energy storage and photovoltaic devices in a linear system Grant 8,334,017 - Pushparaj , et al. December 18, 2 | 2012-12-18 |
Methods Of And Hybrid Factories For Thin-film Battery Manufacturing App 20120312474 - Kwak; Byung-Sung ;   et al. | 2012-12-13 |
Substrate support, substrate processing device and method of placing a substrate Grant 8,323,412 - Haas , et al. December 4, 2 | 2012-12-04 |
Wire Holder And Terminal Connector For Hot Wire Chemical Vapor Deposition Chamber App 20120289078 - NARWANKAR; PRAVIN ;   et al. | 2012-11-15 |
Hot Wire Atomic Layer Deposition Apparatus And Methods Of Use App 20120269967 - Yudovsky; Joseph ;   et al. | 2012-10-25 |
Vacuum transport device with movable guide rail Grant 8,282,089 - Heimel , et al. October 9, 2 | 2012-10-09 |
Method For Encapsulating An Organic Light Emitting Diode App 20120208306 - HAAS; Dieter ;   et al. | 2012-08-16 |
Laminated electrically tintable windows Grant 8,218,224 - Kwak , et al. July 10, 2 | 2012-07-10 |
Hot wire chemical vapor deposition (CVD) inline coating tool Grant 8,117,987 - Haas , et al. February 21, 2 | 2012-02-21 |
Laminated Electrically Tintable Windows App 20110304899 - Kwak; Byung-Sung Leo ;   et al. | 2011-12-15 |
Apparatus and method for coating an areal substrate Grant 8,012,260 - Hoffmann , et al. September 6, 2 | 2011-09-06 |
Machine for coating a substrate, and module Grant 7,972,486 - Buchberger , et al. July 5, 2 | 2011-07-05 |
Methods Of And Factories For Thin-film Battery Manufacturing App 20110126402 - Kwak; Byung-Sung ;   et al. | 2011-06-02 |
Hot Wire Chemical Vapor Deposition (cvd) Inline Coating Tool App 20110104848 - HAAS; DIETER ;   et al. | 2011-05-05 |
Apparatus And Methods For Forming Energy Storage And Photovoltaic Devices In A Linear System App 20110100955 - PUSHPARAJ; VICTOR L. ;   et al. | 2011-05-05 |
Laminated Electrically Tintable Windows App 20100208326 - KWAK; Byung-Sung Leo ;   et al. | 2010-08-19 |
Laminated electrically tintable windows Grant 7,710,671 - Kwak , et al. May 4, 2 | 2010-05-04 |
Substrate Support, Substrate Processing Device And Method Of Placing A Substrate App 20080295773 - Haas; Dieter ;   et al. | 2008-12-04 |
Bonding Method For Cylindrical Target App 20080296352 - HOSOKAWA; AKIHIRO ;   et al. | 2008-12-04 |
Vacuum transport device with movable guide rail App 20070231111 - Heimel; Oliver ;   et al. | 2007-10-04 |
Machine for treating substrates and method App 20070144889 - Koparal; Erkan ;   et al. | 2007-06-28 |
Evaporator device App 20070022956 - Bender; Marcus ;   et al. | 2007-02-01 |
Vapor deposition device App 20070022955 - Bender; Marcus ;   et al. | 2007-02-01 |
Continuous OLED coating machine App 20070009652 - Manz; Dieter ;   et al. | 2007-01-11 |
Machine For Coating A Substrate, And Module App 20060226004 - BUCHBERGER; HANS ;   et al. | 2006-10-12 |
Infrared heating element and a substrate type vacuum chamber, particularly for vacuum coating facilities App 20060032846 - Haas; Dieter | 2006-02-16 |
Method and device for detecting a filing process Grant 6,829,932 - Laun , et al. December 14, 2 | 2004-12-14 |
Adjustable measurement head and a level measurement device and method employing it Grant 6,634,234 - Haas October 21, 2 | 2003-10-21 |
Rotor fixture for a friction vacuum pump Grant 6,599,084 - Schutz , et al. July 29, 2 | 2003-07-29 |
Method and device for detecting a filling process App 20030033869 - Laun, Robert ;   et al. | 2003-02-20 |
Apparatus and method for coating an areal substrate App 20020185069 - Hoffmann, Uwe ;   et al. | 2002-12-12 |
Printed circuit coils Grant 4,075,591 - Haas February 21, 1 | 1978-02-21 |
Printed circuit coils Grant 4,016,519 - Haas April 5, 1 | 1977-04-05 |