Patent | Date |
---|
Semiconductor devices and structures thereof Grant 9,401,322 - Naujok , et al. July 26, 2 | 2016-07-26 |
Stress-inducing structures, methods, and materials Grant 9,373,717 - Gutmann , et al. June 21, 2 | 2016-06-21 |
Stress-inducing Structures, Methods, and Materials App 20150137253 - Gutmann; Alois ;   et al. | 2015-05-21 |
Stress-inducing structures, methods, and materials Grant 8,907,444 - Gutmann , et al. December 9, 2 | 2014-12-09 |
Lithography systems and methods of manufacturing using thereof Grant 8,715,909 - Gutmann , et al. May 6, 2 | 2014-05-06 |
Semiconductor device manufacturing methods Grant 8,697,339 - Zhuang , et al. April 15, 2 | 2014-04-15 |
Stress-Inducing Structures, Methods, and Materials App 20130134420 - Gutmann; Alois ;   et al. | 2013-05-30 |
Alignment marks for polarized light lithography and method for use thereof Grant 8,377,800 - Marokkey , et al. February 19, 2 | 2013-02-19 |
Stress-inducing structures, methods, and materials Grant 8,361,879 - Gutmann , et al. January 29, 2 | 2013-01-29 |
Semiconductor devices and methods of manufacturing thereof Grant 8,349,528 - Lipinski , et al. January 8, 2 | 2013-01-08 |
Alignment Marks for Polarized Light Lithography and Method for Use Thereof App 20120208341 - Marokkey; Sajan ;   et al. | 2012-08-16 |
Contact patterning method with transition etch feedback Grant 8,236,699 - Jeon , et al. August 7, 2 | 2012-08-07 |
Alignment marks for polarized light lithography and method for use thereof Grant 8,183,129 - Marokkey , et al. May 22, 2 | 2012-05-22 |
Methods of manufacturing semiconductor devices Grant 8,148,235 - Naujok , et al. April 3, 2 | 2012-04-03 |
Semiconductor devices having pFET with SiGe gate electrode and embedded SiGe source/drain regions and methods of making the same Grant 8,138,055 - Han , et al. March 20, 2 | 2012-03-20 |
Lithography masks and methods of manufacture thereof Grant 8,071,261 - Gutmann , et al. December 6, 2 | 2011-12-06 |
Semiconductor Devices and Structures Thereof App 20110278730 - Naujok; Markus ;   et al. | 2011-11-17 |
Semiconductor Devices and Methods of Manufacturing Thereof App 20110250530 - Lipinski; Matthias ;   et al. | 2011-10-13 |
Semiconductor devices and structures thereof Grant 8,013,364 - Naujok , et al. September 6, 2 | 2011-09-06 |
Semiconductor devices and methods of manufacturing thereof Grant 8,007,985 - Lipinski , et al. August 30, 2 | 2011-08-30 |
Contact patterning method with transition etch feedback Grant 7,998,869 - Jeon , et al. August 16, 2 | 2011-08-16 |
Contact Patterning Method With Transition Etch Feedback App 20110183443 - Jeon; Byung-Goo ;   et al. | 2011-07-28 |
Semiconductor Device Manufacturing Methods App 20110183266 - Zhuang; Haoren ;   et al. | 2011-07-28 |
Methods of Forming Conductive Features and Structures Thereof App 20110175148 - Yan; Jiang ;   et al. | 2011-07-21 |
Methods of forming conductive features and structures thereof Grant 7,947,606 - Yan , et al. May 24, 2 | 2011-05-24 |
Lithography masks and methods of manufacture thereof Grant 7,947,431 - Sarma , et al. May 24, 2 | 2011-05-24 |
Transistor Structure App 20110006373 - Eller; Manfred ;   et al. | 2011-01-13 |
Lithography Masks and Methods of Manufacture Thereof App 20100297398 - Sarma; Chandrasekhar ;   et al. | 2010-11-25 |
Semiconductor Devices Having pFET with SiGe Gate Electrode and Embedded SiGe Source/Drain Regions and Methods of Making the Same App 20100297818 - Han; Jin-Ping ;   et al. | 2010-11-25 |
Transistor fabrication methods and structures thereof Grant 7,820,518 - Eller , et al. October 26, 2 | 2010-10-26 |
Lithography masks and methods of manufacture thereof Grant 7,799,486 - Sarma , et al. September 21, 2 | 2010-09-21 |
Semiconductor devices having pFET with SiGe gate electrode and embedded SiGe source/drain regions and methods of making the same Grant 7,800,182 - Han , et al. September 21, 2 | 2010-09-21 |
Method for forming isolation structures Grant 7,795,107 - Hampp , et al. September 14, 2 | 2010-09-14 |
Methods of Manufacturing Semiconductor Devices App 20100144112 - Naujok; Markus ;   et al. | 2010-06-10 |
Alignment Marks for Polarized Light Lithography and Method for Use Thereof App 20100128270 - Marokkey; Sajan ;   et al. | 2010-05-27 |
Feature Dimension Control in a Manufacturing Process App 20100120177 - Zhuang; Haoren ;   et al. | 2010-05-13 |
Small feature integrated circuit fabrication Grant 7,713,824 - Sarma , et al. May 11, 2 | 2010-05-11 |
Contact Patterning Method With Transition Etch Feedback App 20100112729 - Jeon; Byung-Goo ;   et al. | 2010-05-06 |
Alignment marks for polarized light lithography and method for use thereof Grant 7,687,925 - Marokkey , et al. March 30, 2 | 2010-03-30 |
Semiconductor method and device with mixed orientation substrate Grant 7,678,622 - Yan , et al. March 16, 2 | 2010-03-16 |
Feature dimension control in a manufacturing process Grant 7,674,350 - Zhuang , et al. March 9, 2 | 2010-03-09 |
Feature patterning methods Grant 7,666,800 - Marokkey , et al. February 23, 2 | 2010-02-23 |
Semiconductor Devices and Structures Thereof App 20100032841 - Naujok; Markus ;   et al. | 2010-02-11 |
Method for Forming Isolation Structures App 20090317957 - Hampp; Roland ;   et al. | 2009-12-24 |
Methods of manufacturing semiconductor devices and structures thereof Grant 7,629,225 - Naujok , et al. December 8, 2 | 2009-12-08 |
Transistor Fabrication Methods and Structures Thereof App 20090294866 - Eller; Manfred ;   et al. | 2009-12-03 |
Methods of Forming Conductive Features and Structures Thereof App 20090294986 - Yan; Jiang ;   et al. | 2009-12-03 |
Stress-Inducing Structures, Methods, and Materials App 20090283852 - Gutmann; Alois ;   et al. | 2009-11-19 |
Device performance improvement using flowfill as material for isolation structures Grant 7,615,840 - Hampp , et al. November 10, 2 | 2009-11-10 |
Feature Patterning Methods App 20090200583 - Marokkey; Sajan ;   et al. | 2009-08-13 |
Methods of forming integrated circuit structures using insulator deposition and insulator gap filling techniques Grant 7,541,288 - Kim , et al. June 2, 2 | 2009-06-02 |
Lithography Systems and Methods of Manufacturing Using Thereof App 20090091729 - Marokkey; Sajan ;   et al. | 2009-04-09 |
Lithography Systems and Methods of Manufacturing Using Thereof App 20090092926 - Gutmann; Alois ;   et al. | 2009-04-09 |
Lithography Masks and Methods of Manufacture Thereof App 20090023078 - Gutmann; Alois ;   et al. | 2009-01-22 |
Device Performance Improvement Using FlowFill as Material for Isolation Structures App 20080315267 - Hampp; Roland ;   et al. | 2008-12-25 |
Semiconductor devices and methods of manufacturing thereof App 20080303060 - Han; Jin-Ping ;   et al. | 2008-12-11 |
Semiconductor device manufacturing methods App 20080286698 - Zhuang; Haoren ;   et al. | 2008-11-20 |
Methods of Forming Integrated Circuit Structures Using Insulator Deposition and Insulator Gap Filling Techniques App 20080220584 - Kim; Jun-jung ;   et al. | 2008-09-11 |
Small Feature Integrated Circuit Fabrication App 20080199784 - Sarma; Chandrasekhar ;   et al. | 2008-08-21 |
Feature Dimension Control in a Manufacturing Process App 20080176344 - Zhuang; Haoren ;   et al. | 2008-07-24 |
Lithography masks and methods of manufacture thereof App 20080119048 - Sarma; Chandrasekhar ;   et al. | 2008-05-22 |
Semiconductor devices having pFET with SiGe gate electrode and embedded SiGe source/drain regions and methods of making the same App 20080119019 - Han; Jin-Ping ;   et al. | 2008-05-22 |
Semiconductor Method and Device with Mixed Orientation Substrate App 20080026520 - Yan; Jiang ;   et al. | 2008-01-31 |
Semiconductor method and device with mixed orientation substrate Grant 7,298,009 - Yan , et al. November 20, 2 | 2007-11-20 |
Ultraviolet (UV) Radiation Treatment Methods for Subatmospheric Chemical Vapor Deposition (SACVD) of Ozone-Tetraethoxysilane (O3-TEOS) App 20070249128 - Kim; Junjung ;   et al. | 2007-10-25 |
Process control systems and methods App 20070239305 - Zhuang; Haoren ;   et al. | 2007-10-11 |
Method for fabricating a semiconductor device with a high-K dielectric App 20070190795 - Zhuang; Haoren ;   et al. | 2007-08-16 |
Semiconductor devices and methods of manufacturing thereof App 20070178388 - Lipinski; Matthias ;   et al. | 2007-08-02 |
Alignment marks for polarized light lithography and method for use thereof App 20070052113 - Marokkey; Sajan ;   et al. | 2007-03-08 |
Methods of manufacturing semiconductor devices and structures thereof App 20060281295 - Naujok; Markus ;   et al. | 2006-12-14 |
Semiconductor method and device with mixed orientation substrate App 20060170045 - Yan; Jiang ;   et al. | 2006-08-03 |
Mask and method for using the mask in lithographic processing Grant 7,030,506 - Zaidi , et al. April 18, 2 | 2006-04-18 |
System and method of enhancing alignment marks Grant 6,954,002 - Zaidi , et al. October 11, 2 | 2005-10-11 |
Mask and method for using the mask in lithographic processing App 20050082559 - Hasan Zaidi, Syed Shoaib ;   et al. | 2005-04-21 |
System and method of enhancing alignment marks App 20040041283 - Zaidi, Shoaib H. ;   et al. | 2004-03-04 |
Mask and method for patterning a semiconductor wafer Grant 6,670,646 - Lu , et al. December 30, 2 | 2003-12-30 |
Mask and method for patterning a semiconductor wafer App 20030153126 - Lu, Zhijian ;   et al. | 2003-08-14 |
Method for forming dual damascene structure Grant 6,521,542 - Armacost , et al. February 18, 2 | 2003-02-18 |
Method of improving the etch resistance of chemically amplified photoresists by introducing silicon after patterning Grant 6,379,869 - Schroeder , et al. April 30, 2 | 2002-04-30 |