Guenther; Rolf A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Guenther; Rolf A..The latest application filed is for "heated substrate support and method of fabricating same".

Company Profile

0.10.13

Guenther; Rolf A. - Monte Sereno CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of fabricating a heated substrate support Grant 8,065,789 - Guenther , et al. November 29, 2	2011-11-29
Heated substrate support and method of fabricating same Grant 7,674,338 - Guenther , et al. March 9, 2	2010-03-09
Heated Substrate Support And Method Of Fabricating Same App 20080271309 - Guenther; Rolf A. ; et al.	2008-11-06
Apparatus for providing gas to a processing chamber Grant 7,294,208 - Guenther November 13, 2	2007-11-13
Heated substrate support and method of fabricating same App 20060075970 - Guenther; Rolf A. ; et al.	2006-04-13
Heated substrate support and method of fabricating same App 20060075971 - Guenther; Rolf A. ; et al.	2006-04-13
Method and apparatus for providing gas to a processing chamber App 20050257735 - Guenther, Rolf A.	2005-11-24
Substrate carrier for processing substrates App 20050241771 - Rattner, Michael B. ; et al.	2005-11-03
Substrate storage cassette with substrate alignment feature Grant 6,916,147 - Suh , et al. July 12, 2	2005-07-12
Method and apparatus for generating gas to a processing chamber Grant 6,915,592 - Guenther July 12, 2	2005-07-12
Integrated method for release and passivation of MEMS structures Grant 6,902,947 - Chinn , et al. June 7, 2	2005-06-07
Method of etching variable depth features in a crystalline substrate Grant 6,900,133 - Chinn , et al. May 31, 2	2005-05-31
Integrated method for release and passivation of MEMS structures Grant 6,830,950 - Chinn , et al. December 14, 2	2004-12-14
Disposable barrier technique for through wafer etching in MEMS App 20040087054 - Chinn, Jeffrey D. ; et al.	2004-05-06
Substrate storage cassette with substrate alignment feature App 20040081547 - Suh, Dongchoon ; et al.	2004-04-29
Method of etching variable depth features in a crystalline substrate App 20040053505 - Chinn, Jeffrey D. ; et al.	2004-03-18
Integrated method for release and passivation of MEMS structures App 20040033639 - Chinn, Jeffrey D. ; et al.	2004-02-19
Method and apparatus for generating gas to a processing chamber App 20040025370 - Guenther, Rolf A.	2004-02-12
Substrate support assembly having an edge protector App 20030217693 - Rattner, Michael B. ; et al.	2003-11-27
Substrate carrier for processing substrates App 20030219986 - Rattner, Michael B. ; et al.	2003-11-27
Integrated method for release and passivation of MEMS structures App 20030166342 - Chinn, Jeffrey D. ; et al.	2003-09-04
Electrostatic chuck having a thermal transfer regulator pad Grant 5,978,202 - Wadensweiler , et al. November 2, 1	1999-11-02
Method of forming a joint between a tubular composite and a metal ring Grant 4,701,231 - Peters , et al. October 20, 1	1987-10-20

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