| Patent | Date |
|---|
Projection Exposure Apparatus For Semiconductor Lithography
App 20220299733 - Hartjes; Joachim ; et al. | 2022-09-22 |
Projection Exposure Apparatus For Semiconductor Lithography
App 20220260924 - Gruner; Toralf | 2022-08-18 |
Compensation of creep effects in an imaging device
Grant 11,415,895 - Nefzi , et al. August 16, 2 | 2022-08-16 |
Method And Device For Characterizing The Surface Shape Of An Optical Element
App 20220236139 - SIEGLER; Steffen ; et al. | 2022-07-28 |
Assembly In An Optical System, In Particular Of A Microlithographic Projection Exposure Apparatus
App 20220214627 - Hartjes; Joachim ; et al. | 2022-07-07 |
Mirror, in particular for a microlithographic projection exposure system
Grant 11,366,395 - Hild , et al. June 21, 2 | 2022-06-21 |
Mirror, in particular for a microlithographic projection exposure system
Grant 11,360,393 - Wylie-Van Eerd , et al. June 14, 2 | 2022-06-14 |
Method and device for determining the heating state of an optical element in an optical system for microlithography
Grant 11,320,314 - Gruner , et al. May 3, 2 | 2022-05-03 |
Mirror, In Particular For A Microlithographic Projection Exposure Apparatus
App 20220113634 - STIEPAN; Hans Michael ; et al. | 2022-04-14 |
Stop, Optical System And Lithography Apparatus
App 20220107567 - Modeste; Benjahman Julius ; et al. | 2022-04-07 |
Projection Exposure Method And Projection Lens With Setting Of The Pupil Transmission
App 20220026814 - Gruner; Toralf | 2022-01-27 |
Compensation Of Creep Effects In An Imaging Device
App 20210405542 - Nefzi; Marwene ; et al. | 2021-12-30 |
Mirror for a microlithographic projection exposure apparatus, and method for operating a deformable mirror
Grant 11,187,990 - Lippert , et al. November 30, 2 | 2021-11-30 |
Method and device for determining the heating state of a mirror in an optical system
Grant 11,156,922 - De Rapper , et al. October 26, 2 | 2021-10-26 |
Projection exposure method and projection lens with setting of the pupil transmission
Grant 11,143,967 - Gruner October 12, 2 | 2021-10-12 |
Optical module with an anticollision device for module components
Grant 11,054,755 - Hartjes , et al. July 6, 2 | 2021-07-06 |
Optical element, and method for correcting the wavefront effect of an optical element
Grant 11,029,515 - Hild , et al. June 8, 2 | 2021-06-08 |
Mirror For A Microlithographic Projection Exposure Apparatus, And Method For Operating A Deformable Mirror
App 20210149310 - LIPPERT; Johannes ; et al. | 2021-05-20 |
Method And Device For Determining The Heating State Of An Optical Element In An Optical System For Microlithography
App 20210148762 - Gruner; Toralf ; et al. | 2021-05-20 |
Method and device for the correction of imaging defects
Grant 11,003,088 - Sorg , et al. May 11, 2 | 2021-05-11 |
Mirror, In Particular For A Microlithographic Projection Exposure System
App 20210055662 - HILD; Kerstin ; et al. | 2021-02-25 |
Method And Device For Determining The Heating State Of A Mirror In An Optical System
App 20210041790 - De Rapper; Willem Michiel ; et al. | 2021-02-11 |
Mirror, in particular for a microlithographic projection exposure apparatus
Grant 10,908,509 - Lippert , et al. February 2, 2 | 2021-02-02 |
Optical Element, And Method For Correcting The Wavefront Effect Of An Optical Element
App 20200393673 - HILD; Kerstin ; et al. | 2020-12-17 |
Method And Device For The Correction Of Imaging Defects
App 20200233314 - Sorg; Franz ; et al. | 2020-07-23 |
Mirror arrangement for lithography exposure apparatus and optical system comprising mirror arrangement
Grant 10,684,466 - Hakvoort , et al. | 2020-06-16 |
Mirror, In Particular For A Microlithographic Projection Exposure System
App 20200174379 - WYLIE-VAN EERD; Ben ; et al. | 2020-06-04 |
Method and device for the correction of imaging defects
Grant 10,620,543 - Sorg , et al. | 2020-04-14 |
Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography
Grant 10,591,825 - Andre , et al. | 2020-03-17 |
Projection Exposure Method And Projection Lens With Setting Of The Pupil Transmission
App 20200081350 - Gruner; Toralf | 2020-03-12 |
Catadioptric projection objective including a reflective optical component and a measuring device
Grant 10,578,976 - Bleidistel , et al. | 2020-03-03 |
Mirror, In Particular For A Microlithographic Projection Exposure Apparatus
App 20200026195 - LIPPERT; Johannes ; et al. | 2020-01-23 |
Method And Device For The Correction Of Imaging Defects
App 20190302627 - Sorg; Franz ; et al. | 2019-10-03 |
Attenuation filter for projection lens, projection lens having attenuation filter for projection exposure apparatus, and projection exposure apparatus having projection lens
Grant 10,416,569 - Gruner , et al. Sept | 2019-09-17 |
Microlithographic projection exposure apparatus and measuring device for a projection lens
Grant 10,345,710 - Ehrmann , et al. July 9, 2 | 2019-07-09 |
Optical Module With An Anticollision Device For Module Components
App 20190171118 - Hartjes; Joachim ; et al. | 2019-06-06 |
Optical component for use in a radiation source module of a projection exposure system
Grant 10,288,894 - Patra , et al. | 2019-05-14 |
Microlithography projection objective
Grant 10,281,824 - Feldmann , et al. | 2019-05-07 |
Projection exposure apparatus with a highly flexible manipulator
Grant 10,261,425 - Wolf , et al. | 2019-04-16 |
Projection Lens With A Measurement Beam Path
App 20190107784 - WOLF; Alexander ; et al. | 2019-04-11 |
Catadioptric Projection Objective Including A Reflective Optical Component And A Measuring Device
App 20190101832 - Bleidistel; Sascha ; et al. | 2019-04-04 |
Attenuation Filter For Projection Lens, Projection Lens Having Attenuation Filter For Projection Exposure Apparatus, And Projection Exposure Apparatus Having Projection Lens
App 20190064676 - Gruner; Toralf ; et al. | 2019-02-28 |
Catadioptric Projection Objective Comprising Deflection Mirrors And Projection Exposure Method
App 20190056576 - Schicketanz; Thomas ; et al. | 2019-02-21 |
Catadioptric Projection Objective
App 20180373006 - Epple; Alexander ; et al. | 2018-12-27 |
Projection exposure apparatus comprising a measuring system for measuring an optical element
Grant 10,162,270 - Bleidistel , et al. Dec | 2018-12-25 |
Projection exposure apparatus including mechanism to reduce influence of pressure fluctuations
Grant 10,162,267 - Gruner , et al. Dec | 2018-12-25 |
Projection Lens, Projection Exposure Apparatus and Projection Exposure Method for EUV Microlithography
App 20180364583 - Andre; Stephan ; et al. | 2018-12-20 |
Catadioptric projection objective including a reflective optical component and a measuring device
Grant 10,146,137 - Bleidistel , et al. De | 2018-12-04 |
Catadioptric projection objective comprising deflection mirrors and projection exposure method
Grant 10,120,176 - Schicketanz , et al. November 6, 2 | 2018-11-06 |
Illumination intensity correction device for predefining an illumination intensity over an illumination field of a lithographic projection exposure apparatus
Grant 10,067,424 - Endres , et al. September 4, 2 | 2018-09-04 |
Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography
Grant 10,048,592 - Andre , et al. August 14, 2 | 2018-08-14 |
Catadioptric projection objective
Grant 10,042,146 - Epple , et al. August 7, 2 | 2018-08-07 |
Projection exposure apparatus with wavefront measuring device and optical wavefront manipulator
Grant 10,012,911 - Arnz , et al. July 3, 2 | 2018-07-03 |
Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element
Grant 10,001,631 - Bittner , et al. June 19, 2 | 2018-06-19 |
Projection Objective For Microlithography
App 20180164474 - Kraehmer; Daniel ; et al. | 2018-06-14 |
Mirror Arrangement For Lithography Exposure Apparatus And Optical System Comprising Mirror Arrangement
App 20180164581 - HAKVOORT; Wouter Bernardus Johannes ; et al. | 2018-06-14 |
Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method
Grant 9,946,161 - Saenger , et al. April 17, 2 | 2018-04-17 |
Catadioptric Projection Objective
App 20180095258 - Epple; Alexander ; et al. | 2018-04-05 |
Catadioptric Projection Objective Comprising Deflection Mirrors And Projection Exposure Method
App 20180095259 - Schicketanz; Thomas ; et al. | 2018-04-05 |
Projection exposure method and projection exposure apparatus
Grant 9,933,710 - Andre , et al. April 3, 2 | 2018-04-03 |
Projection Exposure Apparatus With Wavefront Measuring Device And Optical Wavefront Manipulator
App 20170336714 - Arnz; Michael ; et al. | 2017-11-23 |
Catadioptric projection objective comprising deflection mirrors and projection exposure method
Grant 9,817,220 - Schicketanz , et al. November 14, 2 | 2017-11-14 |
Microlithographic Projection Exposure Apparatus
App 20170322343 - Kamenov; Vladimir ; et al. | 2017-11-09 |
Optical Component
App 20170293154 - Patra; Michael ; et al. | 2017-10-12 |
Mirror, more particularly for a microlithographic projection exposure apparatus
Grant 9,785,054 - Gruner , et al. October 10, 2 | 2017-10-10 |
Projection Exposure Method And Projection Exposure Apparatus
App 20170285493 - Andre; Stephan ; et al. | 2017-10-05 |
Projection Lens for EUV Microlithography, Film Element and Method for Producing a Projection Lens Comprising a Film Element
App 20170261730 - Bittner; Boris ; et al. | 2017-09-14 |
Projection exposure apparatus for microlithography comprising an optical distance measurement system
Grant 9,759,550 - Wolf , et al. September 12, 2 | 2017-09-12 |
Microlithographic projection exposure apparatus
Grant 9,733,395 - Kamenov , et al. August 15, 2 | 2017-08-15 |
Catadioptric projection objective
Grant 9,726,870 - Epple , et al. August 8, 2 | 2017-08-08 |
Microlithography Projection Objective
App 20170192362 - Feldmann; Heiko ; et al. | 2017-07-06 |
Method for stress-adjusted operation of a projection exposure system and corresponding projection exposure system
Grant 9,696,631 - Kneer , et al. July 4, 2 | 2017-07-04 |
Microlithographic projection exposure apparatus and method of correcting optical wavefront deformations in such an apparatus
Grant 9,684,251 - Holzmann , et al. June 20, 2 | 2017-06-20 |
Projection Lens, Projection Exposure Apparatus And Projection Exposure Method For Euv Microlithography
App 20170168399 - Andre; Stephan ; et al. | 2017-06-15 |
Optical arrangement, EUV lithography apparatus and method for configuring an optical arrangement
Grant 9,671,703 - Baer , et al. June 6, 2 | 2017-06-06 |
Projection exposure method and projection exposure apparatus for microlithography
Grant 9,665,006 - Graeschus , et al. May 30, 2 | 2017-05-30 |
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens
App 20170082930 - Ehrmann; Albrecht ; et al. | 2017-03-23 |
Method for improving the imaging properties of a projection objective, and such a projection objective
Grant 9,581,813 - Conradi , et al. February 28, 2 | 2017-02-28 |
Catadioptric Projection Objective Comprising Deflection Mirrors And Projection Exposure Method
App 20170052355 - Schicketanz; Thomas ; et al. | 2017-02-23 |
Catadioptric projection objective comprising deflection mirrors and projection exposure method
Grant 9,459,435 - Schicketanz , et al. October 4, 2 | 2016-10-04 |
Exposure apparatus and measuring device for a projection lens
Grant 9,436,095 - Ehrmann , et al. September 6, 2 | 2016-09-06 |
Catadioptric Projection Objective
App 20160231546 - Epple; Alexander ; et al. | 2016-08-11 |
Mirror, More Particularly For A Microlithographic Projection Exposure Apparatus
App 20160209751 - GRUNER; Toralf ; et al. | 2016-07-21 |
Microlithographic Projection Exposure Apparatus And Method Of Correcting Optical Wavefront Deformations In Such An Apparatus
App 20160179018 - Holzmann; Joerg ; et al. | 2016-06-23 |
Method of manufacturing a projection objective and projection objective
Grant 9,360,775 - Feldmann , et al. June 7, 2 | 2016-06-07 |
Catadioptric Projection Objective Comprising Deflection Mirrors And Projection Exposure Method
App 20160154228 - Schicketanz; Thomas ; et al. | 2016-06-02 |
Method for operating a projection exposure tool and control apparatus
Grant 9,310,693 - Gerhard , et al. April 12, 2 | 2016-04-12 |
Catadioptric projection objective
Grant 9,279,969 - Epple , et al. March 8, 2 | 2016-03-08 |
Method For Stress-adjusted Operation Of A Projection Exposure System And Corresponding Projection Exposure System
App 20160062245 - Kneer; Bernhard ; et al. | 2016-03-03 |
Catadioptric projection objective comprising deflection mirrors and projection exposure method
Grant 9,274,327 - Schicketanz , et al. March 1, 2 | 2016-03-01 |
Projection Exposure Apparatus With A Highly Flexible Manipulator
App 20160054662 - Wolf; Alexander ; et al. | 2016-02-25 |
Method And Device For The Correction Of Imaging Defects
App 20160026094 - Sorg; Franz ; et al. | 2016-01-28 |
Projection Exposure Apparatus Including Mechanism To Reduce Influence Of Pressure Fluctuations
App 20150316854 - Gruner; Toralf ; et al. | 2015-11-05 |
Projection lens system of a microlithographic projection exposure installation
Grant 9,164,396 - Beierl , et al. October 20, 2 | 2015-10-20 |
Method For Improving The Imaging Properties Of A Projection Objective, And Such A Projection Objective
App 20150293352 - Conradi; Olaf ; et al. | 2015-10-15 |
Projection exposure system and projection exposure method
Grant 9,146,475 - Graupner , et al. September 29, 2 | 2015-09-29 |
Microlithography projection objective
Grant 9,097,984 - Feldmann , et al. August 4, 2 | 2015-08-04 |
Method for stress-adjusted operation of a projection exposure system and corresponding projection exposure system
Grant 9,086,637 - Kneer , et al. July 21, 2 | 2015-07-21 |
Projection Exposure Apparatus For Microlithography Comprising An Optical Distance Measurement System
App 20150198437 - Wolf; Alexander ; et al. | 2015-07-16 |
Optical system of microlithographic projection exposure apparatus and method of correcting wavefront deformation in same
Grant 9,081,310 - Exler , et al. July 14, 2 | 2015-07-14 |
Method for improving the imaging properties of a projection objective, and such a projection objective
Grant 9,069,263 - Conradi , et al. June 30, 2 | 2015-06-30 |
Microlithographic projection exposure apparatus
Grant 9,046,787 - Gruner , et al. June 2, 2 | 2015-06-02 |
Catadioptric Projection Objective Comprising Deflection Mirrors And Projection Exposure Method
App 20150062725 - Schicketanz; Thomas ; et al. | 2015-03-05 |
Catadioptric Projection Objective
App 20150055212 - Epple; Alexander ; et al. | 2015-02-26 |
Projection Exposure Method And Projection Exposure Apparatus For Microlithography
App 20150029479 - Graeschus; Volker ; et al. | 2015-01-29 |
Illumination Intensity Correction Device For Predefining An Illumination Intensity Over An Illumination Field Of A Lithographic Projection Exposure Apparatus
App 20150015865 - Endres; Martin ; et al. | 2015-01-15 |
Projection Lens for EUV Microlithography, Film Element and Method for Producing a Projection Lens Comprising a Film Element
App 20140347721 - Bittner; Boris ; et al. | 2014-11-27 |
Catadioptric projection objective comprising deflection mirrors and projection exposure method
Grant 8,896,814 - Schicketanz , et al. November 25, 2 | 2014-11-25 |
Projection Exposure Apparatus Comprising a Measuring System for Measuring an Optical Element
App 20140340664 - Bleidistel; Sascha ; et al. | 2014-11-20 |
Optical element and method
Grant 8,891,172 - Eva , et al. November 18, 2 | 2014-11-18 |
Microlithography Projection Objective
App 20140333913 - Feldmann; Heiko ; et al. | 2014-11-13 |
Microlithographic Projection Exposure Apparatus
App 20140320955 - Kamenov; Vladimir ; et al. | 2014-10-30 |
Catadioptric projection objective
Grant 8,873,137 - Epple , et al. October 28, 2 | 2014-10-28 |
Optical Arrangement, Euv Lithography Apparatus And Method For Configuring An Optical Arrangement
App 20140300876 - Baer; Norman ; et al. | 2014-10-09 |
Projection exposure system, method for manufacturing a micro-structured structural member by the aid of such a projection exposure system and polarization-optical element adapted for use in such a system
Grant 8,854,606 - Mann , et al. October 7, 2 | 2014-10-07 |
Microlithography Projection Objective
App 20140293256 - Feldmann; Heiko ; et al. | 2014-10-02 |
Microlithographic exposure method as well as a projection exposure system for carrying out the method
Grant 8,767,181 - Gruner , et al. July 1, 2 | 2014-07-01 |
Method for correcting a lithography projection objective, and such a projection objective
Grant 8,659,744 - Ulrich , et al. February 25, 2 | 2014-02-25 |
Method of manufacturing a miniaturized device
Grant 8,542,342 - Schwab , et al. September 24, 2 | 2013-09-24 |
Catadioptric Projection Objective
App 20130242279 - EPPLE; Alexander ; et al. | 2013-09-19 |
Optical element and method
Grant 8,508,854 - Eva , et al. August 13, 2 | 2013-08-13 |
Method for Operating a Projection Exposure Tool and Control Apparatus
App 20130188162 - Gerhard; Michael ; et al. | 2013-07-25 |
Projection Exposure Tool for Microlithography and Method for Microlithographic Exposure
App 20130182264 - Hetzler; Jochen ; et al. | 2013-07-18 |
Projection Exposure System and Projection Exposure Method
App 20130182234 - Graupner; Paul ; et al. | 2013-07-18 |
Catadioptric projection objective
Grant 8,446,665 - Epple , et al. May 21, 2 | 2013-05-21 |
Exposure Apparatus And Measuring Device For A Projection Lens
App 20130120723 - Ehrmann; Albrecht ; et al. | 2013-05-16 |
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection
Grant RE44,216 - Totzeck , et al. May 14, 2 | 2013-05-14 |
Combination stop for catoptric projection arrangement
Grant 8,436,985 - Mann , et al. May 7, 2 | 2013-05-07 |
Optical System For A Microlithographic Projection Exposure Apparatus And Microlithographic Exposure Method
App 20130077077 - Saenger; Ingo ; et al. | 2013-03-28 |
Projection Lens System Of A Microlithographic Projection Exposure Installation
App 20130070224 - Beierl; Helmut ; et al. | 2013-03-21 |
Method For Stress-adjusted Operation Of A Projection Exposure System And Corresponding Projection Exposure System
App 20130044303 - Kneer; Bernhard ; et al. | 2013-02-21 |
Optical system
Grant 8,379,188 - Mueller , et al. February 19, 2 | 2013-02-19 |
Optical System Of Microlithographic Projection Exposure Apparatus And Method Of Correcting Wavefront Deformation In Same
App 20130016331 - Exler; Matthias ; et al. | 2013-01-17 |
Exposure apparatus and measuring device for a projection lens
Grant 8,330,935 - Ehrmann , et al. December 11, 2 | 2012-12-11 |
Optical correction device
Grant 8,325,322 - Hauf , et al. December 4, 2 | 2012-12-04 |
Method and system for correcting image changes
Grant 8,325,323 - Conradi , et al. December 4, 2 | 2012-12-04 |
Projection objective of a microlithographic projection exposure apparatus
Grant 8,325,426 - Schuster , et al. December 4, 2 | 2012-12-04 |
Projection lens system of a microlithographic projection exposure installation
Grant 8,319,944 - Beierl , et al. November 27, 2 | 2012-11-27 |
Method of manufacturing a projection objective and projection objective
Grant 8,310,752 - Feldmann , et al. November 13, 2 | 2012-11-13 |
Illumination system for a microlithography projection exposure apparatus
Grant 8,305,558 - Gruner , et al. November 6, 2 | 2012-11-06 |
Catadioptric projection objective
Grant 8,300,211 - Epple , et al. October 30, 2 | 2012-10-30 |
Interference systems for microlithgraphic projection exposure systems
Grant 8,294,991 - Mueller , et al. October 23, 2 | 2012-10-23 |
Catadioptric Projection Objective Comprising Deflection Mirrors And Projection Exposure Method
App 20120236277 - Schicketanz; Thomas ; et al. | 2012-09-20 |
Combination Stop For Catoptric Projection Arrangement
App 20120236272 - Mann; Hans-Juergen ; et al. | 2012-09-20 |
Catadioptric Projection Objective Including A Reflective Optical Component And A Measuring Device
App 20120218536 - Bleidistel; Sascha ; et al. | 2012-08-30 |
Projection exposure method and projection exposure system therefor
Grant 8,248,578 - Kaller , et al. August 21, 2 | 2012-08-21 |
Optical system of a microlithographic projection exposure apparatus
Grant 8,237,918 - Totzeck , et al. August 7, 2 | 2012-08-07 |
Method For Correcting A Lithography Projection Objective, And Such A Projection Objective
App 20120188636 - Ulrich; Wilhelm ; et al. | 2012-07-26 |
Method And Device For The Correction Of Imaging Defects
App 20120176591 - Sorg; Franz ; et al. | 2012-07-12 |
Combination stop for catoptric projection arrangement
Grant 8,208,127 - Mann , et al. June 26, 2 | 2012-06-26 |
Method Of Manufacturing A Projection Objective And Projection Objective
App 20120134016 - Feldmann; Heiko ; et al. | 2012-05-31 |
Method for correcting a lithography projection objective, and such a projection objective
Grant 8,174,676 - Ulrich , et al. May 8, 2 | 2012-05-08 |
Method and device for the correction of imaging defects
Grant 8,159,648 - Sorg , et al. April 17, 2 | 2012-04-17 |
Method For Correcting A Lithography Projection Objective, And Such A Projection Objective
App 20110279803 - Ulrich; Wilhelm ; et al. | 2011-11-17 |
Projection Exposure System, Method For Manufacturing A Micro-structured Structural Member By The Aid Of Such A Projection Exposure System And Polarization-optical Element Adapted For Use In Such A System
App 20110242517 - Mann; Hans-Jurgen ; et al. | 2011-10-06 |
Projection Objective Of A Microlithographic Projection Exposure Apparatus
App 20110235013 - Schuster; Karl-Heinz ; et al. | 2011-09-29 |
Projection Objective For A Microlithographic Projection Exposure Apparatus
App 20110228246 - Kneer; Bernhard ; et al. | 2011-09-22 |
Microlithographic Projection Exposure Apparatus
App 20110222043 - Kamenov; Vladimir ; et al. | 2011-09-15 |
Projection objective of a microlithographic projection exposure apparatus
Grant 7,982,969 - Schuster , et al. July 19, 2 | 2011-07-19 |
Projection exposure system, method for manufacturing a micro-structured structural member by the aid of such a projection exposure system and polarization-optical element adapted for use in such a system
Grant 7,982,854 - Mann , et al. July 19, 2 | 2011-07-19 |
Method for determining intensity distribution in the image plane of a projection exposure arrangement
Grant 7,961,297 - Greif-Wuestenbecker , et al. June 14, 2 | 2011-06-14 |
Microlithographic Projection Exposure Apparatus
App 20110109893 - Gruner; Toralf ; et al. | 2011-05-12 |
Optical Element And Method
App 20110080569 - Eva; Eric ; et al. | 2011-04-07 |
Optical system of a microlithographic projection exposure apparatus
Grant 7,920,275 - Tschischgale , et al. April 5, 2 | 2011-04-05 |
Catadioptric Projection Objective
App 20110075121 - Epple; Alexander ; et al. | 2011-03-31 |
Microlithographic Exposure Method As Well As A Projection Exposure System For Carrying Out The Method
App 20110069296 - GRUNER; Toralf ; et al. | 2011-03-24 |
Catadioptric Projection Objective
App 20110038061 - EPPLE; Alexander ; et al. | 2011-02-17 |
Microlithographic exposure method as well as a projection exposure system for carrying out the method
Grant 7,847,921 - Gruner , et al. December 7, 2 | 2010-12-07 |
Method For Improving The Imaging Properties Of A Projection Objective, And Such A Projection Objective
App 20100290024 - Conradi; Olaf ; et al. | 2010-11-18 |
Projection Lens System Of A Microlithographic Projection Exposure Installation
App 20100265478 - Beierl; Helmut ; et al. | 2010-10-21 |
Projection exposure apparatus and method for operating the same
Grant 7,808,615 - Gruner , et al. October 5, 2 | 2010-10-05 |
Optical System
App 20100231888 - Mueller; Ralf ; et al. | 2010-09-16 |
Projection lens system of a microlithographic projection exposure installation
Grant 7,782,440 - Beierl , et al. August 24, 2 | 2010-08-24 |
Projection Objective For Micrlolithography Having An Obscurated Pupil
App 20100208225 - Kraehmer; Daniel ; et al. | 2010-08-19 |
Method for improving the imaging properties of a projection objective, and such a projection objective
Grant 7,777,963 - Conradi , et al. August 17, 2 | 2010-08-17 |
Optical System Of A Microlithographic Projection Exposure Apparatus
App 20100201960 - Tschischgale; Joerg ; et al. | 2010-08-12 |
Optical Correction Device
App 20100201958 - Hauf; Markus ; et al. | 2010-08-12 |
Exposure Apparatus And Measuring Device For A Projection Lens
App 20100141912 - Ehrmann; Albrecht ; et al. | 2010-06-10 |
Optical system of a microlithographic projection exposure apparatus
Grant 7,733,501 - Tschischgale , et al. June 8, 2 | 2010-06-08 |
Optical System Of A Microlithographic Projection Exposure Apparatus
App 20100134891 - Mueller; Ralf ; et al. | 2010-06-03 |
Projection Exposure System For Microlithography
App 20100134768 - Hetzler; Jochen ; et al. | 2010-06-03 |
Projection Objective For A Microlithography Apparatus And Method
App 20100128367 - Beckenbach; Mariella ; et al. | 2010-05-27 |
Imaging system for a microlithographical projection light system
Grant 7,719,658 - Dorsel , et al. May 18, 2 | 2010-05-18 |
Lens made of a crystalline material
Grant 7,672,044 - Enkisch , et al. March 2, 2 | 2010-03-02 |
Method For Improving Imaging Properties Of An Optical System, And Such An Optical System
App 20100014065 - Gruner; Toralf ; et al. | 2010-01-21 |
Optical System Of A Microlithographic Projection Exposure Apparatus
App 20090323042 - Totzeck; Michael ; et al. | 2009-12-31 |
Projection Objective Of A Microlithographic Projection Exposure Apparatus
App 20090284831 - Schuster; Karl-Heinz ; et al. | 2009-11-19 |
Optical Element And Method
App 20090257032 - Eva; Eric ; et al. | 2009-10-15 |
Projection Exposure Method And Projection Exposure System Therefor
App 20090237636 - KALLER; Julian ; et al. | 2009-09-24 |
Projection objective adapted for use with different immersion fluids or liquids, method of conversion of such and production method
Grant 7,589,903 - Beder , et al. September 15, 2 | 2009-09-15 |
Illumination System For A Microlithography Projection Exposure Apparatus
App 20090213356 - Gruner; Toralf ; et al. | 2009-08-27 |
Method Of Manufacturing A Projection Objective And Projection Objective
App 20090207487 - Feldmann; Heiko ; et al. | 2009-08-20 |
Method Of Manufacturing A Miniaturized Device
App 20090190116 - Schwab; Markus ; et al. | 2009-07-30 |
Device for adjusting the illumination dose on a photosensitive layer
Grant 7,551,263 - Gruner , et al. June 23, 2 | 2009-06-23 |
Method And System For Correcting Image Changes
App 20090153831 - Conradi; Olaf ; et al. | 2009-06-18 |
Microlithography projection objective
App 20090115986 - Feldmann; Heiko ; et al. | 2009-05-07 |
Method of manufacturing a miniaturized device
Grant 7,508,489 - Schwab , et al. March 24, 2 | 2009-03-24 |
Illumination System Including Grazing Incidence Mirror For Microlithography Exposure System
App 20090073392 - Mann; Hans-Juergen ; et al. | 2009-03-19 |
Microlithographic Exposure Method As Well As A Projection Exposure System For Carrying Out The Method
App 20090040496 - GRUNER; Toralf ; et al. | 2009-02-12 |
Combination Stop For Catoptric Projection Arrangement
App 20090021714 - Mann; Hans-Juergen ; et al. | 2009-01-22 |
Optical System Of A Microlithographic Projection Exposure Apparatus
App 20090015845 - Tschischgale; Joerge ; et al. | 2009-01-15 |
Method And Device For The Correction Of Imaging Defects
App 20080316444 - Sorg; Franz ; et al. | 2008-12-25 |
Method for Improving the Imaging Properties of a Projection Objective, and Such a Projection Objective
App 20080310029 - Conradi; Olaf ; et al. | 2008-12-18 |
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens
App 20080309894 - Ehrmann; Albrecht ; et al. | 2008-12-18 |
Projection Objective For A Microlithographic Projection Exposure Apparatus
App 20080304033 - Kneer; Bernhard ; et al. | 2008-12-11 |
Projection exposure apparatus
Grant 7,463,422 - Kamenow , et al. December 9, 2 | 2008-12-09 |
Projection Objective For Immersion Lithography
App 20080297745 - WEISSENRIEDER; Karl-Stefan ; et al. | 2008-12-04 |
Microlithographic projection exposure apparatus
App 20080297754 - Kamenov; Vladimir ; et al. | 2008-12-04 |
Projection objective for immersion lithography
Grant 7,460,206 - Weissenrieder , et al. December 2, 2 | 2008-12-02 |
Projection Objective For Immersion Lithography
App 20080291419 - Weissenrieder; Karl-Stefan ; et al. | 2008-11-27 |
Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatus
Grant 7,456,933 - Wegmann , et al. November 25, 2 | 2008-11-25 |
Projection Objective Adapted For Use With Different Immersion Fluids Or Liquids, Method Of Conversion Of Such And Production Method
App 20080273248 - Beder; Susanne ; et al. | 2008-11-06 |
Optical system of a microlithographic projection exposure apparatus
Grant 7,423,765 - Tschischgale , et al. September 9, 2 | 2008-09-09 |
Method for Determining Intensity Distribution in the Image Plane of a Projection Exposure Arrangement
App 20080212060 - Greif-Wuestenbecker; Joern ; et al. | 2008-09-04 |
Microlithographic Projection Exposure Apparatus And Method For Producing Microstructured Components
App 20080204692 - Gruner; Toralf ; et al. | 2008-08-28 |
Optical System, In Particular Objective Or Illumination System For A Microlithographic Projection Exposure Apparatus
App 20080198455 - Totzeck; Michael ; et al. | 2008-08-21 |
Projection Exposure System, Method For Manufacturing a Micro-Structured Structural Member by the Aid of Such a Projection Exposure System and Polarization-Optical Element Adapted for Use in Such a System
App 20080192225 - Mann; Hans-Jurgen ; et al. | 2008-08-14 |
Microlithographic Projection Exposure Apparatus
App 20080192224 - Gruner; Toralf ; et al. | 2008-08-14 |
Microlithographic exposure method as well as a projection exposure system for carrying out the method
Grant 7,408,616 - Gruner , et al. August 5, 2 | 2008-08-05 |
Optical system, in particular illumination system, of a microlithographic projection exposure apparatus
Grant 7,405,808 - Gruner , et al. July 29, 2 | 2008-07-29 |
Objective with fluoride crystal lenses
Grant 7,382,536 - Krahmer , et al. June 3, 2 | 2008-06-03 |
Projection Lens System of a Microlithographic Projection Exposure Installation
App 20080106711 - Beierl; Helmut ; et al. | 2008-05-08 |
Optical system and photolithography tool comprising same
Grant 7,355,791 - Kamenov , et al. April 8, 2 | 2008-04-08 |
Lens Made of a Crystalline Material
App 20080019013 - Enkisch; Birgit ; et al. | 2008-01-24 |
Method of optimizing an objective with fluoride crystal lenses, and objective with fluoride crystal lenses
Grant 7,321,465 - Totzeck , et al. January 22, 2 | 2008-01-22 |
Projection Exposure Apparatus And Method For Operating The Same
App 20080002167 - Gruner; Toralf ; et al. | 2008-01-03 |
Imaging System for a Microlithographical Projection Light System
App 20070285637 - Dorsel; Andreas ; et al. | 2007-12-13 |
Lens made of a crystalline material
Grant 7,292,388 - Enkisch , et al. November 6, 2 | 2007-11-06 |
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection
Grant 7,286,284 - Totzeck , et al. October 23, 2 | 2007-10-23 |
Method of determining lens materials for a projection exposure apparatus
App 20070195423 - Kamenov; Vladimir ; et al. | 2007-08-23 |
Optical system for ultraviolet light
Grant 7,256,932 - Epple , et al. August 14, 2 | 2007-08-14 |
Projection objective for a microlithographic projection exposure apparatus
App 20070165198 - Kneer; Bernhard ; et al. | 2007-07-19 |
Method of determining lens materials for a projection exposure apparatus
Grant 7,239,450 - Kamenov , et al. July 3, 2 | 2007-07-03 |
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens
App 20070070316 - Ehrmann; Albrecht ; et al. | 2007-03-29 |
Objective with fluoride crystal lenses
Grant 7,180,667 - Krahmer , et al. February 20, 2 | 2007-02-20 |
Method for correcting a lithography projection objective, and such a projection objective
App 20070019305 - Ulrich; Wilhelm ; et al. | 2007-01-25 |
Objective with fluoride crystal lenses
Grant 7,145,720 - Krahmer , et al. December 5, 2 | 2006-12-05 |
Device for adjusting the illumination dose on a photosensitive layer
App 20060244941 - Gruner; Toralf ; et al. | 2006-11-02 |
Optical system of a projection exposure apparatus
App 20060238735 - Kamenov; Vladimir ; et al. | 2006-10-26 |
Objective with fluoride crystal lenses
Grant 7,126,765 - Krahmer , et al. October 24, 2 | 2006-10-24 |
Objective in a microlithographic projection exposure apparatus
App 20060215272 - Gruner; Toralf ; et al. | 2006-09-28 |
Objective with fluoride crystal lenses
App 20060171020 - Krahmer; Daniel ; et al. | 2006-08-03 |
Device for holding a beam splitter element
Grant 7,079,331 - Weber , et al. July 18, 2 | 2006-07-18 |
Method for improving the imaging properties of at least two optical elements and photolithographic fabrication method
App 20060146427 - Kurz; Birgit ; et al. | 2006-07-06 |
Method of manufacturing a miniaturized device
App 20060146304 - Schwab; Markus ; et al. | 2006-07-06 |
Projection lens for a microlithographic projection exposure apparatus
Grant 7,068,436 - Gruner , et al. June 27, 2 | 2006-06-27 |
Method for making an optical system with coated optical components and optical system made by the method
App 20060132917 - Zaczek; Christoph ; et al. | 2006-06-22 |
Optical system for ultraviolet light
App 20060119750 - Epple; Alexander ; et al. | 2006-06-08 |
Method of determining lens materials for a projection exposure apparatus
App 20060109560 - Kamenov; Vladimir ; et al. | 2006-05-25 |
Microlithographic illumination method and a projection lens for carrying out the method
Grant 7,031,069 - Gruner , et al. April 18, 2 | 2006-04-18 |
Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatus
App 20060077371 - Wegmann; Ulrich ; et al. | 2006-04-13 |
Method for improving the imaging properties of at least two optical elements and photolithographic fabrication method
Grant 7,027,237 - Mecking , et al. April 11, 2 | 2006-04-11 |
Optical system and photolithography tool comprising same
App 20060066764 - Kamenov; Vladimir ; et al. | 2006-03-30 |
Polarizer device for generating a defined spatial distribution of polarization states
App 20060028706 - Totzeck; Michael ; et al. | 2006-02-09 |
Optical system of a microlithographic projection exposure apparatus
App 20060023179 - Tschischgale; Joerg ; et al. | 2006-02-02 |
Method for improving the imaging properties of at least two optical elements and photolithographic fabrication method
App 20050254773 - Kurz, Birgit ; et al. | 2005-11-17 |
Device for holding a beam splitter element
App 20050248858 - Weber, Ulrich ; et al. | 2005-11-10 |
Method for improving the imaging properties of at least two optical elements and photolithographic fabrication method
Grant 6,963,449 - Mecking , et al. November 8, 2 | 2005-11-08 |
Projection objective for immersion lithography
App 20050225737 - Weissenrieder, Karl-Stefan ; et al. | 2005-10-13 |
Catadioptric reduction objective
App 20050190446 - Kuerz, Birgit ; et al. | 2005-09-01 |
Method of optimizing an objective with fluoride crystal lenses, and objective with fluoride crystal lenses
App 20050180023 - Totzeck, Michael ; et al. | 2005-08-18 |
Lens made of a crystalline material
App 20050170748 - Enkisch, Birgit ; et al. | 2005-08-04 |
Optical system, in particular illumination system, of a microlithographic projection exposure apparatus
App 20050152046 - Gruner, Toralf ; et al. | 2005-07-14 |
Microlithographic exposure method as well as a projection exposure system for carrying out the method
App 20050146704 - Gruner, Toralf ; et al. | 2005-07-07 |
Mask for use in a microlithographic projection exposure apparatus
App 20050123840 - Totzeck, Michael ; et al. | 2005-06-09 |
Objective with fluoride crystal lenses
App 20050122594 - Krahmer, Daniel ; et al. | 2005-06-09 |
Optical system with birefringent optical elements
App 20050094268 - Fiolka, Damian ; et al. | 2005-05-05 |
Projection lens for a microlithographic projection exposure apparatus
App 20050018312 - Gruner, Toralf ; et al. | 2005-01-27 |
Method For Improving The Imaging Properties Of At Least Two Optical Elements And Photolithographic Fabrication Method
App 20050013012 - Kurz, Birgit ; et al. | 2005-01-20 |
Catadioptric objective
Grant 6,842,294 - Holderer , et al. January 11, 2 | 2005-01-11 |
Microlithographic illumination method and a projection lens for carrying out the method
App 20050002111 - Gruner, Toralf ; et al. | 2005-01-06 |
Retardation element made from cubic crystal and an optical system therewith
App 20040218271 - Hartmaier, Juergen ; et al. | 2004-11-04 |
Projection exposure system
Grant 6,806,942 - Schuster , et al. October 19, 2 | 2004-10-19 |
Objective with fluoride crystal lenses
App 20040190151 - Krahmer, Daniel ; et al. | 2004-09-30 |
Objective with fluoride crystal lenses
App 20040105170 - Krahmer, Daniel ; et al. | 2004-06-03 |
Microlithographic illumination method and a projection lens for carrying out the method
Grant 6,728,043 - Gruner , et al. April 27, 2 | 2004-04-27 |
Projection exposure system
App 20040017554 - Schuster, Karl-Heinz ; et al. | 2004-01-29 |
Microlithographic illumination method and a projection lens for carrying out the method
App 20020191288 - Gruner, Toralf ; et al. | 2002-12-19 |
Catadioptric objective
App 20020181125 - Holderer, Hubert ; et al. | 2002-12-05 |
Projection exposure system
App 20020075466 - Gruner, Toralf ; et al. | 2002-06-20 |
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