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Protective Multilayer Coating For Processing Chamber Components
App 20220277936 - BAJAJ; Geetika ; et al. | 2022-09-01 |
Methods For Forming Impurity Free Metal Alloy Films
App 20220267904 - Bajaj; Geetika ; et al. | 2022-08-25 |
Deposition Of Silicon-based Dielectric Films
App 20220270870 - Bajaj; Geetika ; et al. | 2022-08-25 |
Atomic layer etching of metals
Grant 11,424,134 - Deepak , et al. August 23, 2 | 2022-08-23 |
Metal Oxyfluoride Film Formation Methods
App 20220259735 - Deepak; Nitin ; et al. | 2022-08-18 |
Method of forming a fluorinated metal film
Grant 11,390,947 - Deepak , et al. July 19, 2 | 2022-07-19 |
Cleaning Materials And Processes For Lithium Processing Equipment
App 20220162747 - Chakraborty; Tapash ; et al. | 2022-05-26 |
Selective Molecular Layer Deposition Of Organic And Hybrid Organic-Inorganic Layers
App 20220130663 - Chakraborty; Tapash ; et al. | 2022-04-28 |
Aluminum Oxide Protective Coatings On Turbocharger Components And Other Rotary Equipment Components
App 20220081763 - DEEPAK; Nitin ; et al. | 2022-03-17 |
Encapsulation Materials For Flat Optical Devices
App 20220064474 - SEN; Srobona ; et al. | 2022-03-03 |
Methods For Detecting End-points For Cleaning Processes Of Aerospace Components
App 20220050051 - MANDAL; Abhishek ; et al. | 2022-02-17 |
Disinfectant Compositions And Methods Of Making And Using The Same
App 20220046927 - Johnson; Tom ; et al. | 2022-02-17 |
Methods For Refurbishing Aerospace Components
App 20220002883 - MANDAL; Abhishek ; et al. | 2022-01-06 |
Oxide Layer Compositions For Turbine Engine Components
App 20210381386 - DEEPAK; Nitin ; et al. | 2021-12-09 |
Atomic Layer Etching Of Metals
App 20210090897 - DEEPAK; Nitin ; et al. | 2021-03-25 |
Methods For Forming A Protective Coating On Processing Chamber Surfaces Or Components
App 20210071300 - BAJAJ; Geetika ; et al. | 2021-03-11 |
Selective nitride removal
Grant 10,886,137 - Goradia , et al. January 5, 2 | 2021-01-05 |
Air-spaced Encapsulated Dielectric Nanopillars For Flat Optical Devices
App 20200400990 - GODET; Ludovic ; et al. | 2020-12-24 |
Planarization Methods For Packaging Substrates
App 20200391343 - CHEN; Han-Wen ; et al. | 2020-12-17 |
Oxy-fluoride Compounds For Chamber Parts Protection
App 20200283897 - DEEPAK; Nitin ; et al. | 2020-09-10 |
Gas-phase selective etching systems and methods
Grant 10,573,527 - Bajaj , et al. Feb | 2020-02-25 |
Selective atomic layer etching of semiconductor materials
Grant 10,497,573 - Goradia , et al. De | 2019-12-03 |
Selective Nitride Removal
App 20190333776 - Goradia; Prerna Sonthalia ; et al. | 2019-10-31 |
Gas-phase Selective Etching Systems And Methods
App 20190311909 - Bajaj; Geetika ; et al. | 2019-10-10 |
Low Temperature In-situ Cleaning Method For Epi-chambers
App 20190301011 - BAJAJ; Geetika ; et al. | 2019-10-03 |
Selective Atomic Layer Etching Of Semiconductor Materials
App 20190287808 - Goradia; Prerna Sonthalia ; et al. | 2019-09-19 |
Flowable gapfill using solvents
Grant 10,280,507 - Arnepalli , et al. | 2019-05-07 |
Low vapor pressure aerosol-assisted CVD
Grant 10,273,577 - Arnepalli , et al. | 2019-04-30 |
Low vapor pressure aerosol-assisted CVD
Grant 10,163,629 - Arnepalli , et al. Dec | 2018-12-25 |
Low Temperature Selective Epitaxial Silicon Deposition
App 20180308685 - BAJAJ; Geetika ; et al. | 2018-10-25 |
Flowable Gapfill Using Solvents
App 20180298492 - Arnepalli; Ranga Rao ; et al. | 2018-10-18 |
Selective Poreseal Deposition Prevention And Residue Removal Using Sam
App 20180261500 - Bajaj; Geetika ; et al. | 2018-09-13 |
Selective poreseal deposition prevention and residue removal using SAM
Grant 10,074,559 - Bajaj , et al. September 11, 2 | 2018-09-11 |
Self-limiting Atomic Thermal Etching Systems And Methods
App 20180226278 - Arnepalli; Ranga Rao ; et al. | 2018-08-09 |
Self-limiting atomic thermal etching systems and methods
Grant 10,043,684 - Arnepalli , et al. August 7, 2 | 2018-08-07 |
Flowable gapfill using solvents
Grant 10,017,856 - Arnepalli , et al. July 10, 2 | 2018-07-10 |
Selective etching of amorphous silicon over epitaxial silicon
Grant 9,991,129 - Bajaj , et al. June 5, 2 | 2018-06-05 |
Methods And Systems For Thermal Ale And Ald
App 20180080124 - Bajaj; Geetika ; et al. | 2018-03-22 |
Generation of compact alumina passivation layers on aluminum plasma equipment components
Grant 9,903,020 - Kim , et al. February 27, 2 | 2018-02-27 |
Low Vapor Pressure Aerosol-assisted Cvd
App 20170137937 - Arnepalli; Ranga Rao ; et al. | 2017-05-18 |
Low Vapor Pressure Aerosol-assisted Cvd
App 20170140920 - Arnepalli; Ranga Rao ; et al. | 2017-05-18 |
Selective Silicon Dioxide Deposition Using Phosphonic Acid Self Assembled Monolayers As Nucleation Inhibitor
App 20170092533 - Chakraborty; Tapash ; et al. | 2017-03-30 |
Generation Of Compact Alumina Passivation Layers On Aluminum Plasma Equipment Components
App 20150275375 - KIM; SUNG JE ; et al. | 2015-10-01 |
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