Patent | Date |
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Graded hardmask interlayer for enhanced extreme ultraviolet performance Grant 11,367,617 - Church , et al. June 21, 2 | 2022-06-21 |
Metal brush layer for EUV patterning Grant 11,307,496 - De Silva , et al. April 19, 2 | 2022-04-19 |
Polymer Brush Adhesion Promoter With Uv Cleavable Linker App 20220043353 - Guo; Jing ;   et al. | 2022-02-10 |
Resist Underlayer Surface Modification App 20220011670 - Guo; Jing ;   et al. | 2022-01-13 |
Polymer brush adhesion promoter with UV cleavable linker Grant 11,199,778 - Guo , et al. December 14, 2 | 2021-12-14 |
Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography Grant 11,177,130 - De Silva , et al. November 16, 2 | 2021-11-16 |
Semiconductor microcooler Grant 11,056,418 - Canaperi , et al. July 6, 2 | 2021-07-06 |
Graded Hardmask Interlayer For Enhanced Extreme Ultraviolet Performance App 20210202249 - Church; Jennifer ;   et al. | 2021-07-01 |
Semiconductor microcooler Grant 11,049,789 - Canaperi , et al. June 29, 2 | 2021-06-29 |
Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography Grant 11,037,786 - De Silva , et al. June 15, 2 | 2021-06-15 |
Metal Brush Layer For Euv Patterning App 20210149298 - De Silva; Ekmini Anuja ;   et al. | 2021-05-20 |
Graded hardmask interlayer for enhanced extreme ultraviolet performance Grant 10,998,191 - Church , et al. May 4, 2 | 2021-05-04 |
Three-dimensional Microelectronic Package With Embedded Cooling Channels App 20210118854 - Sikka; Kamal K. ;   et al. | 2021-04-22 |
Three-dimensional microelectronic package with embedded cooling channels Grant 10,937,764 - Sikka , et al. March 2, 2 | 2021-03-02 |
Photoactive polymer brush materials and EUV patterning using the same Grant 10,831,102 - De Silva , et al. November 10, 2 | 2020-11-10 |
Three-dimensional Microelectronic Package With Embedded Cooling Channels App 20200294968 - Sikka; Kamal K. ;   et al. | 2020-09-17 |
Polymer Brush Adhesion Promoter With Uv Cleavable Linker App 20200292942 - Guo; Jing ;   et al. | 2020-09-17 |
Embedded etch rate reference layer for enhanced etch time precision Grant 10,748,823 - Mignot , et al. A | 2020-08-18 |
Surface treatment of titanium containing hardmasks Grant 10,678,135 - De Silva , et al. | 2020-06-09 |
Semiconductor Microcooler App 20200161216 - Canaperi; Donald F. ;   et al. | 2020-05-21 |
Spin On Adhesion Promoters App 20200150532 - GOLDFARB; Dario ;   et al. | 2020-05-14 |
Graded Hardmask Interlayer For Enhanced Extreme Ultraviolet Performance App 20200152460 - Church; Jennifer ;   et al. | 2020-05-14 |
Semiconductor Microcooler App 20200118904 - Canaperi; Donald F. ;   et al. | 2020-04-16 |
Embedded Etch Rate Reference Layer For Enhanced Etch Time Precision App 20200105628 - Mignot; Yann ;   et al. | 2020-04-02 |
Surface Treatment Of Titanium Containing Hardmasks App 20200105520 - De Silva; Ekmini A. ;   et al. | 2020-04-02 |
Semiconductor Microcooler App 20200051886 - Canaperi; Donald F. ;   et al. | 2020-02-13 |
Semiconductor Microcooler App 20200051896 - Canaperi; Donald F. ;   et al. | 2020-02-13 |
Semiconductor microcooler Grant 10,553,522 - Canaperi , et al. Fe | 2020-02-04 |
Semiconductor microcooler Grant 10,553,516 - Canaperi , et al. Fe | 2020-02-04 |
Copper microcooler structure and fabrication Grant 10,490,480 - Lie , et al. Nov | 2019-11-26 |
Copper microcooler structure and fabrication Grant 10,490,481 - Lie , et al. Nov | 2019-11-26 |
Photoactive Polymer Brush Materials And Euv Patterning Using The Same App 20190271913 - De Silva; Ekmini A. ;   et al. | 2019-09-05 |
Patterning Material Film Stack With Metal-containing Top Coat For Enhanced Sensitivity In Extreme Ultraviolet (euv) Lithography App 20190267234 - De Silva; Ekmini Anuja ;   et al. | 2019-08-29 |
Patterning Material Film Stack With Metal-containing Top Coat For Enhanced Sensitivity In Extreme Ultraviolet (euv) Lithography App 20190259601 - De Silva; Ekmini Anuja ;   et al. | 2019-08-22 |
Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography Grant 10,347,486 - De Silva , et al. July 9, 2 | 2019-07-09 |
Surface Treatment Of Titanium Containing Hardmasks App 20190189429 - De Silva; Ekmini A. ;   et al. | 2019-06-20 |
Patterning Material Film Stack With Metal-containing Top Coat For Enhanced Sensitivity In Extreme Ultraviolet (euv) Lithography App 20190189428 - De Silva; Ekmini Anuja ;   et al. | 2019-06-20 |
Method for the rapid thermal control of a work piece in liquid or supercritical fluid Grant 7,288,155 - Simons , et al. October 30, 2 | 2007-10-30 |
Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluid App 20040112402 - Simons, John P. ;   et al. | 2004-06-17 |