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Method for forming gate electrode with depletion suppression and tunable workfunction Grant 9,269,633 - Hung , et al. February 23, 2 | 2016-02-23 |
Gate Electrode With Depletion Suppression And Tunable Workfunction App 20140329378 - Hung; Steven ;   et al. | 2014-11-06 |
Gate electrode with depletion suppression and tunable workfunction Grant 7,867,859 - Hung , et al. January 11, 2 | 2011-01-11 |
Gate electrode with depletion suppression and tunable workfunction App 20040113211 - Hung, Steven ;   et al. | 2004-06-17 |
Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature Grant 6,434,327 - Gronet , et al. August 13, 2 | 2002-08-13 |
Rapid thermal heating apparatus and method Grant 6,122,439 - Gronet , et al. September 19, 2 | 2000-09-19 |
Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature Grant 6,016,383 - Gronet , et al. January 18, 2 | 2000-01-18 |
Rapid thermal heating apparatus including a plurality of light pipes and a pyrometer for measuring substrate temperature Grant 5,790,751 - Gronet , et al. * August 4, 1 | 1998-08-04 |
Rapid thermal heating apparatus and method Grant 5,743,643 - Gronet , et al. April 28, 1 | 1998-04-28 |
Rapid thermal heating apparatus and control therefor Grant 5,689,614 - Gronet , et al. * November 18, 1 | 1997-11-18 |
Cooling chamber for a rapid thermal heating apparatus Grant 5,683,173 - Gronet , et al. November 4, 1 | 1997-11-04 |
Rapid thermal heating apparatus and method utilizing plurality of light pipes Grant 5,487,127 - Gronet , et al. January 23, 1 | 1996-01-23 |
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Selective and non-selective deposition of Si.sub.1-x Ge.sub.x on a Si subsrate that is partially masked with SiO.sub.2 Grant 5,202,284 - Kamins , et al. April 13, 1 | 1993-04-13 |
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Semiconductor processing with silicon cap over Si.sub.1-x Ge.sub.x Film Grant 5,084,411 - Laderman , et al. January 28, 1 | 1992-01-28 |
Rapid thermal annealing of gallium arsenide with trimethyl arsenic overpressure Grant 4,879,259 - Reynolds , et al. November 7, 1 | 1989-11-07 |
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Amorphous solar cells Grant 4,270,018 - Gibbons May 26, 1 | 1981-05-26 |
Forming controlled inset regions by ion implantation and laser bombardment Grant 4,243,433 - Gibbons January 6, 1 | 1981-01-06 |
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