| Patent | Date |
|---|
Semiconductor Device And Semiconductor Memory Device
App 20220302320 - GAWASE; Akifumi ; et al. | 2022-09-22 |
Semiconductor Device And Semiconductor Memory Device
App 20220262954 - ISHIMARU; Tomoki ; et al. | 2022-08-18 |
Semiconductor device and semiconductor memory device
Grant 11,349,033 - Ishimaru , et al. May 31, 2 | 2022-05-31 |
Polishing Apparatus And Polishing Method
App 20220048155 - SAKASHITA; Mikiya ; et al. | 2022-02-17 |
Semiconductor Device And Semiconductor Memory Device
App 20210305431 - ISHIMARU; Tomoki ; et al. | 2021-09-30 |
Polishing Pad, Semiconductor Fabricating Device And Fabricating Method Of Semiconductor Device
App 20210260719 - KAWASAKI; Takahiko ; et al. | 2021-08-26 |
Polishing Device, Polishing Head, Polishing Method, And Method Of Manufacturing Semiconductor Device
App 20210170542 - SAKASHITA; Mikiya ; et al. | 2021-06-10 |
Semiconductor device production method
Grant 10,998,283 - Kawasaki , et al. May 4, 2 | 2021-05-04 |
Manufacturing method of semiconductor device and semiconductor device manufacturing apparatus
Grant 10,991,588 - Gawase , et al. April 27, 2 | 2021-04-27 |
Method for manufacturing semiconductor device
Grant 10,985,027 - Gawase , et al. April 20, 2 | 2021-04-20 |
Film Forming Apparatus And Film Forming Method
App 20210087669 - KONNO; Yuta ; et al. | 2021-03-25 |
Method For Manufacturing Semiconductor Device
App 20210082711 - GAWASE; Akifumi ; et al. | 2021-03-18 |
Manufacturing method of semiconductor device and semiconductor manufacturing apparatus
Grant 10,850,363 - Matsui , et al. December 1, 2 | 2020-12-01 |
Polishing Device And Polishing Method
App 20200298363 - GAWASE; Akifumi | 2020-09-24 |
Semiconductor Device Production Method
App 20200035636 - KAWASAKI; Takahiro ; et al. | 2020-01-30 |
Polishing Pad, Semiconductor Fabricating Device And Fabricating Method Of Semiconductor Device
App 20190283206 - KAWASAKI; Takahiko ; et al. | 2019-09-19 |
Semiconductor Device And Method For Manufacturing Same
App 20190259777 - YOSHIMIZU; Yasuhito ; et al. | 2019-08-22 |
Semiconductor memory device having air gap
Grant 10,319,734 - Yoshimizu , et al. | 2019-06-11 |
Planarization method and planarization apparatus
Grant 10,283,383 - Gawase , et al. | 2019-05-07 |
Dresser, method of manufacturing dresser, and method of manufacturing semiconductor device
Grant 10,195,716 - Kawasaki , et al. Fe | 2019-02-05 |
Manufacturing method of semiconductor device
Grant 10,121,677 - Matsui , et al. November 6, 2 | 2018-11-06 |
Manufacturing Method Of Semiconductor Device And Semiconductor Manufacturing Apparatus
App 20180277388 - MATSUI; Yukiteru ; et al. | 2018-09-27 |
Semiconductor storage device
Grant 10,079,153 - Gawase , et al. September 18, 2 | 2018-09-18 |
Abrasive cloth and polishing method
Grant 10,010,997 - Gawase , et al. July 3, 2 | 2018-07-03 |
Manufacturing method of semiconductor device and semiconductor manufacturing apparatus
Grant 10,008,390 - Matsui , et al. June 26, 2 | 2018-06-26 |
Manufacturing Method Of Semiconductor Device And Semiconductor Device Manufacturing Apparatus
App 20180061654 - Gawase; Akifumi ; et al. | 2018-03-01 |
Dresser, Method Of Manufacturing Dresser, And Method Of Manufacturing Semiconductor Device
App 20180056482 - KAWASAKI; Takahiko ; et al. | 2018-03-01 |
Manufacturing method of semiconductor device and semiconductor device manufacturing apparatus
Grant 9,837,279 - Gawase , et al. December 5, 2 | 2017-12-05 |
Semiconductor Storage Device
App 20170250081 - GAWASE; Akifumi ; et al. | 2017-08-31 |
A Three-dimensional Memory Device
App 20170141122 - YOSHIMIZU; Yasuhito ; et al. | 2017-05-18 |
Manufacturing Method Of Semiconductor Device And Slurry For Chemical Mechanical Polishing
App 20170133238 - KAWASAKI; Takahiko ; et al. | 2017-05-11 |
Three-dimensional memory device
Grant 9,646,989 - Yoshimizu , et al. May 9, 2 | 2017-05-09 |
Semiconductor Device And Method For Manufacturing Same
App 20170110471 - YOSHIMIZU; Yasuhito ; et al. | 2017-04-20 |
Manufacturing Method of Semiconductor Device and Semiconductor Device Manufacturing Apparatus
App 20170076953 - GAWASE; Akifumi ; et al. | 2017-03-16 |
Semiconductor Device And Method For Manufacturing Same
App 20170062459 - YOSHIMIZU; Yasuhito ; et al. | 2017-03-02 |
Manufacturing method of semiconductor device
Grant 9,558,961 - Gawase , et al. January 31, 2 | 2017-01-31 |
Manufacturing Method Of Semiconductor Device
App 20160358787 - GAWASE; Akifumi ; et al. | 2016-12-08 |
Manufacturing Method Of Semiconductor Device
App 20160322231 - Matsui; Yukiteru ; et al. | 2016-11-03 |
Retainer Ring, Polishing Apparatus, And Manufacturing Method Of Semiconductor Device
App 20160229026 - KAWASAKI; Takahiko ; et al. | 2016-08-11 |
Manufacturing Method Of Semiconductor Device And Semiconductor Manufacturing Apparatus
App 20160207163 - MATSUI; Yukiteru ; et al. | 2016-07-21 |
Abrasive cloth and polishing method
App 20160129548 - GAWASE; Akifumi ; et al. | 2016-05-12 |
Chemical Planarization Method And Apparatus
App 20160064243 - GAWASE; Akifumi ; et al. | 2016-03-03 |
Manufacturing Method Of Semiconductor Device And Semiconductor Manufacturing Apparatus
App 20160027660 - MATSUI; YUKITERU ; et al. | 2016-01-28 |
Planarization Method And Planarization Apparatus
App 20150357212 - GAWASE; Akifumi ; et al. | 2015-12-10 |
Manufacturing method of semiconductor device
Grant 9,174,322 - Matsui , et al. November 3, 2 | 2015-11-03 |
Planarization method and planarization apparatus
Grant 9,144,879 - Gawase , et al. September 29, 2 | 2015-09-29 |
Manufacturing method of semiconductor device and polishing apparatus
Grant 9,012,246 - Eda , et al. April 21, 2 | 2015-04-21 |
Planarizing method
Grant 8,936,729 - Gawase , et al. January 20, 2 | 2015-01-20 |
Manufacturing Method Of Semiconductor Device
App 20150004878 - Matsui; Yukiteru ; et al. | 2015-01-01 |
Method of manufacturing semiconductor device
Grant 8,871,644 - Matsui , et al. October 28, 2 | 2014-10-28 |
Method Of Manufacturing Semiconductor Device
App 20140287586 - MATSUI; Yukiteru ; et al. | 2014-09-25 |
Planarization Method And Planarization Apparatus
App 20140220778 - GAWASE; Akifumi ; et al. | 2014-08-07 |
Method For Chemical Planarization And Chemical Planarization Apparatus
App 20140187042 - Matsui; Yukiteru ; et al. | 2014-07-03 |
Method for chemical planarization and chemical planarization apparatus
Grant 8,703,004 - Matsui , et al. April 22, 2 | 2014-04-22 |
Semiconductor Device Manufacturing Method
App 20140073136 - MINAMIHABA; Gaku ; et al. | 2014-03-13 |
Manufacturing Method Of Semiconductor Device And Polishing Apparatus
App 20140004628 - EDA; Hajime ; et al. | 2014-01-02 |
Semiconductor Device Manufacturing Method
App 20130331005 - GAWASE; Akifumi ; et al. | 2013-12-12 |
Semiconductor Device Manufacturing Method And Chemical Mechanical Polishing Method
App 20130331004 - MINAMIHABA; Gaku ; et al. | 2013-12-12 |
Planarizing Method
App 20130157464 - GAWASE; Akifumi ; et al. | 2013-06-20 |
Method For Chemical Planarization And Chemical Planarization Apparatus
App 20130119013 - MATSUI; Yukiteru ; et al. | 2013-05-16 |
Cmp Method, Cmp Apparatus And Method Of Manufacturing Semiconductor Device
App 20130095661 - GAWASE; Akifumi ; et al. | 2013-04-18 |
Cmp Slurry And Method For Manufacturing Semiconductor Device
App 20130078784 - MINAMIHABA; Gaku ; et al. | 2013-03-28 |
Method Of Manufacturing Semiconductor Device
App 20130040456 - EDA; Hajime ; et al. | 2013-02-14 |
Cmp Apparatus, Polishing Pad And Cmp Method
App 20120220195 - GAWASE; Akifumi ; et al. | 2012-08-30 |
Method of fabricating semiconductor device
Grant 7,781,301 - Watanabe , et al. August 24, 2 | 2010-08-24 |
Method Of Fabricating Semiconductor Device
App 20100055893 - WATANABE; Kei ; et al. | 2010-03-04 |
| 