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Abnormality detection device, abnormality detection method and non-transitory computer-readable recording medium Grant 10,467,745 - Fuse , et al. No | 2019-11-05 |
Etching Method And Etching Apparatus App 20190164775 - FUSE; Takashi | 2019-05-30 |
Plasma Electrode And Plasma Processing Device App 20190108984 - MORISHIMA; Masato ;   et al. | 2019-04-11 |
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Film Formation Apparatus And Film Formation Method App 20180135161 - FUJIMOTO; Madoka ;   et al. | 2018-05-17 |
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Abnormality Detection Device, Abnormality Detection Method And Non-transitory Computer-readable Recording Medium App 20170249728 - Fuse; Takashi ;   et al. | 2017-08-31 |
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Method For Forming Organic Monomolecular Film And Surface Treatment Method App 20170133608 - FUSE; Takashi ;   et al. | 2017-05-11 |
Image Processing Method And Image Processing System App 20160300376 - FUSE; TAKASHI ;   et al. | 2016-10-13 |
Substrate cleaning apparatus and substrate cleaning method Grant 9,099,298 - Dobashi , et al. August 4, 2 | 2015-08-04 |
Method And Apparatus For Forming Organic Monolayer App 20150147487 - FUSE; Takashi ;   et al. | 2015-05-28 |
Organic Molecular Film Forming Apparatus And Organic Molecular Film Forming Method App 20140357016 - Fuse; Takashi ;   et al. | 2014-12-04 |
Organic Transistor And Method For Manufacturing Same App 20140299870 - Fuse; Takashi ;   et al. | 2014-10-09 |
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Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate Grant 7,550,739 - Fuse , et al. June 23, 2 | 2009-06-23 |
Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate Grant 7,521,687 - Fuse , et al. April 21, 2 | 2009-04-21 |
Method for etching an object to be processed Grant 7,507,673 - Fuse , et al. March 24, 2 | 2009-03-24 |
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Optical-distortion correcting apparatus and optical-distortion correcting method Grant 7,443,516 - Takahashi , et al. October 28, 2 | 2008-10-28 |
Method for etching object to be processed Grant 7,432,207 - Fuse , et al. October 7, 2 | 2008-10-07 |
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Static Electricity Deflecting Device, Electron Beam Irradiating Apparatus, Substrate Processing Apparatus, Substrate Processing Method And Method Of Manufacturing Substrate App 20080067429 - Fuse; Takashi ;   et al. | 2008-03-20 |
Static Electricity Deflecting Device, Electron Beam Irradiating Apparatus, Substrate Processing Apparatus, Substrate Processing Method, And Method Of Manufacturing Substrate App 20080062608 - FUSE; Takashi ;   et al. | 2008-03-13 |
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Static Electricity Deflecting Device, Electron Beam Irradiating Apparatus, Substrate Processing Apparatus, Substrate Processing Method And Method Of Manufacturing Substrate App 20070228275 - FUSE; Takashi ;   et al. | 2007-10-04 |
Method For Etching An Object To Be Processed App 20070111530 - FUSE; TAKASHI ;   et al. | 2007-05-17 |
Plasma processing method Grant 7,141,510 - Fuse November 28, 2 | 2006-11-28 |
Plasma processing method App 20060249481 - Fuse; Takashi | 2006-11-09 |
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Method of plasma etching App 20050101140 - Yamaguchi, Tomoyo ;   et al. | 2005-05-12 |
Method for etching object to be processed App 20040206725 - Fuse, Takashi ;   et al. | 2004-10-21 |
Plasma Processing method App 20040191932 - Fuse, Takashi | 2004-09-30 |
Plasma etching method App 20040137747 - Jeong, Jae Young ;   et al. | 2004-07-15 |
Etching method App 20030153193 - Fuse, Takashi ;   et al. | 2003-08-14 |
Method and apparatus for visual inspection of bump array Grant 6,104,493 - Fuse , et al. August 15, 2 | 2000-08-15 |
Method for inspecting height, and a height inspection apparatus to carry out the method Grant 5,999,266 - Takahashi , et al. December 7, 1 | 1999-12-07 |