loadpatents
name:-0.038748979568481
name:-0.021426916122437
name:-0.0045390129089355
Fukushima; Kohei Patent Filings

Fukushima; Kohei

Patent Applications and Registrations

Patent applications and USPTO patent grants for Fukushima; Kohei.The latest application filed is for "vertical heat treatment apparatus".

Company Profile
4.20.26
  • Fukushima; Kohei - Oshu JP
  • FUKUSHIMA; Kohei - Oshu-shi JP
  • Fukushima; Kohei - Iwate JP
  • FUKUSHIMA; Kohei - Oshu City JP
  • Fukushima; Kohei - Wako JP
  • Fukushima; Kohei - Wako-shi JP
  • Fukushima; Kohei - Tokyo JP
  • Fukushima; Kohei - Esashi JP
  • Fukushima, Kohei - Esashi-Shi JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Vertical heat treatment apparatus
Grant 11,282,721 - Iriuda , et al. March 22, 2		2022-03-22
Substrate processing apparatus
Grant 11,208,721 - Fukushima , et al. December 28, 2		2021-12-28
Vertical Heat Treatment Apparatus
App 20200058526 - IRIUDA; Hiroki ;   et al.		2020-02-20
Substrate processing apparatus
Grant 10,475,641 - Fukushima , et al. Nov		2019-11-12
Substrate processing apparatus, gas supply method, substrate processing method, and film forming method
Grant 10,287,682 - Kikuchi , et al.		2019-05-14
Substrate Processing Method and Substrate Processing Apparatus
App 20190093230 - FUKUSHIMA; Kohei		2019-03-28
Substrate Processing Apparatus
App 20180258528 - FUKUSHIMA; Kohei ;   et al.		2018-09-13
Substrate processing apparatus having ground electrode
Grant 9,970,111 - Fukushima , et al. May 15, 2		2018-05-15
Gas Introduction Mechanism and Processing Apparatus
App 20180087156 - FUKUSHIMA; Kohei ;   et al.		2018-03-29
Substrate Processing Apparatus
App 20180076021 - FUKUSHIMA; Kohei ;   et al.		2018-03-15
Apparatus for detecting rammer tip-over
Grant 9,789,579 - Fukushima , et al. October 17, 2		2017-10-17
Driving method of vertical heat treatment apparatus, storage medium and vertical heat treatment apparatus
Grant 9,776,202 - Motoyama , et al. October 3, 2		2017-10-03
Substrate Processing Apparatus, Gas Supply Method, Substrate Processing Method, and Film Forming Method
App 20170275757 - KIKUCHI; Kazuyuki ;   et al.		2017-09-28
Dummy wafer
Grant D786,810 - Motoyama , et al. May 16, 2		2017-05-16
Dummy wafer
Grant D785,576 - Motoyama , et al. May 2, 2		2017-05-02
Vertical Heat Treatment Apparatus
App 20170114464 - IRIUDA; Hiroki ;   et al.		2017-04-27
Dummy wafer
Grant D784,937 - Motoyama , et al. April 25, 2		2017-04-25
Film forming apparatus, film forming method, and non-transitory computer-readable storage medium
Grant 9,624,579 - Fukushima April 18, 2		2017-04-18
Operating method of vertical heat treatment apparatus, storage medium, and vertical heat treatment apparatus
Grant 9,487,859 - Motoyama , et al. November 8, 2		2016-11-08
Film Forming Apparatus
App 20160024654 - FUKUSHIMA; Kohei ;   et al.		2016-01-28
Vertical Heat Treatment Apparatus And Method Of Operating Vertical Heat Treatment Apparatus
App 20150376789 - MOTOYAMA; Yutaka ;   et al.		2015-12-31
Film Forming Apparatus, Film Forming Method, And Non-transitory Computer-readable Storage Medium
App 20150275366 - FUKUSHIMA; Kohei		2015-10-01
Film Forming Apparatus Using Gas Nozzles
App 20150275368 - MOTOYAMA; Yutaka ;   et al.		2015-10-01
Substrate Processing Apparatus
App 20150275359 - FUKUSHIMA; Kohei ;   et al.		2015-10-01
Operating Method Of Vertical Heat Treatment Apparatus, Storage Medium, And Vertical Heat Treatment Apparatus
App 20150267293 - MOTOYAMA; Yutaka ;   et al.		2015-09-24
Vertical Heat Treatment Apparatus, Method Of Operating Vertical Heat Treatment Apparatus, And Storage Medium
App 20150259799 - MOTOYAMA; Yutaka ;   et al.		2015-09-17
Substrate Processing Apparatus
App 20150007772 - FUKUSHIMA; Kohei ;   et al.		2015-01-08
Driving Method Of Vertical Heat Treatment Apparatus, Storage Medium And Vertical Heat Treatment Apparatus
App 20140295082 - MOTOYAMA; Yutaka ;   et al.		2014-10-02
Apparatus For Detecting Rammer Tip-over
App 20140076596 - Fukushima; Kohei ;   et al.		2014-03-20
Plasma processing apparatus
Grant 8,608,902 - Fukushima , et al. December 17, 2		2013-12-17
Plasma processing apparatus
Grant 8,336,490 - Matsuura , et al. December 25, 2		2012-12-25
Plasma Processing Apparatus
App 20120103525 - MATSUURA; Hiroyuki ;   et al.		2012-05-03
Vertical plasma processing method for forming silicon containing film
Grant 7,825,039 - Takahashi , et al. November 2, 2		2010-11-02
Plasma Processing Apparatus
App 20100186898 - FUKUSHIMA; Kohei ;   et al.		2010-07-29
Method and apparatus for forming silicon-containing insulating film
Grant 7,758,920 - Hasebe , et al. July 20, 2		2010-07-20
Vertical Plasma Processing Apparatus And Method For Semiconductor Process
App 20090181548 - Takahashi; Toshiki ;   et al.		2009-07-16
Plasma processing apparatus
App 20090056877 - Matsuura; Hiroyuki ;   et al.		2009-03-05
CVD method for forming silicon nitride film
Grant 7,462,376 - Kato , et al. December 9, 2		2008-12-09
Vertical Plasma Processing Apparatus And Method For Semiconductor Process
App 20070234961 - Takahashi; Toshiki ;   et al.		2007-10-11
Method and apparatus for forming silicon-containing insulating film
App 20070032047 - Hasebe; Kazuhide ;   et al.		2007-02-08
Silicon nitride film forming method, silicon nitride film forming system and silicon nitride film forming system precleaning method
Grant 7,156,923 - Kato , et al. January 2, 2		2007-01-02
Cvd method for forming silicon nitride film
App 20060286817 - Kato; Hitoshi ;   et al.		2006-12-21
Silicon nitride film forming method, silicon nitride film forming system and silicon nitride film forming system precleaning method
App 20050081789 - Kato, Hitoshi ;   et al.		2005-04-21
Precleaning method of precleaning a silicon nitride film forming system
Grant 6,844,273 - Kato , et al. January 18, 2		2005-01-18
Silicon nitride film forming method, silicon nitride film forming system and silicon nitride film forming system precleaning method
App 20020106909 - Kato, Hitoshi ;   et al.		2002-08-08

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