| Patent | Date |
|---|
Method for producing a moisture sensor at the wafer level and moisture sensor
Grant 11,428,661 - Haubold , et al. August 30, 2 | 2022-08-30 |
Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device
Grant 11,422,151 - Kautzsch , et al. August 23, 2 | 2022-08-23 |
Method Of Generating A Germanium Structure And Optical Device Comprising A Germanium Structure
App 20220069156 - Roeth; Andre ; et al. | 2022-03-03 |
Method for manufacturing a pressure sensitive field effect transistor including a membrane structure
Grant 11,239,375 - Komenko , et al. February 1, 2 | 2022-02-01 |
Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
Grant 11,078,072 - Kautzsch , et al. August 3, 2 | 2021-08-03 |
Infrared radiation sensors and methods of manufacturing infrared radiation sensors
Grant 11,015,980 - Komenko , et al. May 25, 2 | 2021-05-25 |
Stressed decoupled micro-electro-mechanical system sensor
Grant 10,870,575 - Theuss , et al. December 22, 2 | 2020-12-22 |
Capacitive Microelectromechanical Device And Method For Forming A Capacitive Microelectromechanical Device
App 20200300886 - KAUTZSCH; Thoralf ; et al. | 2020-09-24 |
Microelectromechanical Device, Method For Manufacturing A Microelectromechanical Device, And Method For Manufacturing A System On Chip Using A Cmos Process
App 20200290867 - KAUTZSCH; Thoralf ; et al. | 2020-09-17 |
Light Emitter Devices, Optical Filter Structures and Methods for Forming Light Emitter Devices and Optical Filter Structures
App 20200253000 - Kind Code | 2020-08-06 |
Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
Grant 10,683,203 - Kautzsch , et al. | 2020-06-16 |
Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device
Grant 10,684,306 - Bieselt , et al. | 2020-06-16 |
Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures
Grant 10,681,777 - Kautzsch , et al. | 2020-06-09 |
Method for Producing a Moisture Sensor at the Wafer Level and Moisture Sensor
App 20200166471 - Haubold; Marco ; et al. | 2020-05-28 |
Method For Manufacturing A Pressure Sensitive Transistor And Pressure Sensitive Field Effect Transistor
App 20200105945 - Komenko; Vladislav ; et al. | 2020-04-02 |
Moisture Sensor
App 20200072778 - Kravchenko; Andrey ; et al. | 2020-03-05 |
Integrated semiconductor device and manufacturing method
Grant 10,544,037 - Kautzsch , et al. Ja | 2020-01-28 |
Stressed Decoupled Micro-electro-mechanical System Sensor
App 20200002159 - THEUSS; Horst ; et al. | 2020-01-02 |
Pressure sensor device and manufacturing method
Grant 10,386,255 - Kautzsch , et al. A | 2019-08-20 |
Graded-index structure for optical systems
Grant 10,347,778 - Kautzsch , et al. July 9, 2 | 2019-07-09 |
Infrared Radiation Sensors And Methods Of Manufacturing Infrared Radiation Sensors
App 20190162600 - KOMENKO; Vladislav ; et al. | 2019-05-30 |
Emitter and method for manufacturing the same
Grant 10,290,805 - Bieselt , et al. | 2019-05-14 |
Graded-index Structure For Optical Systems
App 20180358483 - KAUTZSCH; Thoralf ; et al. | 2018-12-13 |
Microelectromechanical Device, Method For Manufacturing A Microelectromechanical Device, And Method For Manufacturing A System On Chip Using A Cmos Process
App 20180297838 - KAUTZSCH; Thoralf ; et al. | 2018-10-18 |
Graded-index structure for optical systems
Grant 10,084,101 - Kautzsch , et al. September 25, 2 | 2018-09-25 |
Sensor structures, systems and methods with improved integration and optimized footprint
Grant 10,060,816 - Kautzsch , et al. August 28, 2 | 2018-08-28 |
Emitter And Method For Manufacturing The Same
App 20180159034 - BIESELT; Steffen ; et al. | 2018-06-07 |
Integrated Semiconductor Device And Manufacturing Method
App 20180155188 - Kautzsch; Thoralf ; et al. | 2018-06-07 |
Graded-index Structure For Optical Systems
App 20180130914 - KAUTZSCH; Thoralf ; et al. | 2018-05-10 |
System and method for a comb-drive MEMS device
Grant 9,938,133 - Kautzsch , et al. April 10, 2 | 2018-04-10 |
Integrated semiconductor device and manufacturing method
Grant 9,896,329 - Kautzsch , et al. February 20, 2 | 2018-02-20 |
Emitter and method for manufacturing the same
Grant 9,887,355 - Bieselt , et al. February 6, 2 | 2018-02-06 |
Pressure Sensor Device And Manufacturing Method
App 20180017456 - Kautzsch; Thoralf ; et al. | 2018-01-18 |
System and Method for a Comb-drive MEMS Device
App 20170297895 - Kautzsch; Thoralf ; et al. | 2017-10-19 |
Light Emitter Devices, Optical Filter Structures and Methods for Forming Light Emitter Devices and Optical Filter Structures
App 20170290098 - Kautzsch; Thoralf ; et al. | 2017-10-05 |
Sensor structures, systems and methods with improved integration and optimized footprint
Grant 9,752,943 - Kautzsch , et al. September 5, 2 | 2017-09-05 |
Method and structure for creating cavities with extreme aspect ratios
Grant 9,663,355 - Kautzsch , et al. May 30, 2 | 2017-05-30 |
Sensor Structures, Systems And Methods With Improved Integration And Optimized Footprint
App 20170089790 - Kautzsch; Thoralf ; et al. | 2017-03-30 |
Integrated Semiconductor Device And Manufacturing Method
App 20170015546 - Kautzsch; Thoralf ; et al. | 2017-01-19 |
Capacitive Microelectromechanical Device And Method For Forming A Capacitive Microelectromechanical Device
App 20170010301 - BIESELT; Steffen ; et al. | 2017-01-12 |
Emitter And Method For Manufacturing The Same
App 20160308084 - BIESELT; Steffen ; et al. | 2016-10-20 |
Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin region
Grant 9,452,923 - Kautzsch , et al. September 27, 2 | 2016-09-27 |
Micromechanical system and method for manufacturing a micromechanical system
Grant 9,382,111 - Kautzsch , et al. July 5, 2 | 2016-07-05 |
Systems And Methods For Horizontal Integration Of Acceleration Sensor Structures
App 20160185594 - Kautzsch; Thoralf ; et al. | 2016-06-30 |
Method for manufacturing a micromechanical system
Grant 9,376,314 - Kautzsch , et al. June 28, 2 | 2016-06-28 |
Microelectromechanical Resonators
App 20160126926 - Kautzsch; Thoralf ; et al. | 2016-05-05 |
Method And Structure For Creating Cavities With Extreme Aspect Ratios
App 20160060106 - Kautzsch; Thoralf ; et al. | 2016-03-03 |
Micromechanical System And Method For Manufacturing A Micromechanical System
App 20150375999 - Kautzsch; Thoralf ; et al. | 2015-12-31 |
Micromechanical System And Method For Manufacturing A Micromechanical System
App 20150375998 - Kautzsch; Thoralf ; et al. | 2015-12-31 |
Microelectromechanical resonators
Grant 9,209,778 - Kautzsch , et al. December 8, 2 | 2015-12-08 |
Microelectromechanical Resonators
App 20140266484 - Kautzsch; Thoralf ; et al. | 2014-09-18 |
Method For Manufacturing A Micromechanical System Comprising A Removal Of Sacrificial Material Through A Hole In A Margin Region
App 20140175571 - Kautzsch; Thoralf ; et al. | 2014-06-26 |
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