loadpatents
Patent applications and USPTO patent grants for Franke; Axel.The latest application filed is for "method for operating a micromechanical z-accelerometer".
Patent | Date |
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Microelectromechanical sensor module and corresponding production method Grant 9,829,357 - Pirk , et al. November 28, 2 | 2017-11-28 |
Method for calibrating yaw rate sensors Grant 9,791,275 - Franke , et al. October 17, 2 | 2017-10-17 |
Method For Operating A Micromechanical Z-accelerometer App 20170248629 - Hammer; Kay ;   et al. | 2017-08-31 |
Yaw-rate sensor Grant 9,689,676 - Neul , et al. June 27, 2 | 2017-06-27 |
Yaw-rate sensor Grant 9,593,948 - Neul , et al. March 14, 2 | 2017-03-14 |
Yaw-rate sensor Grant 9,593,949 - Neul , et al. March 14, 2 | 2017-03-14 |
Yaw-rate Sensor App 20160109236 - Neul; Reinhard ;   et al. | 2016-04-21 |
Hybrid integrated component Grant 9,266,720 - Classen , et al. February 23, 2 | 2016-02-23 |
Yaw rate sensor Grant 9,261,363 - Neul , et al. February 16, 2 | 2016-02-16 |
Yaw-rate Sensor App 20150276408 - Neul; Reinhard ;   et al. | 2015-10-01 |
Measuring element Grant 9,086,302 - Franke July 21, 2 | 2015-07-21 |
Yaw-rate sensor Grant 9,081,027 - Neul , et al. July 14, 2 | 2015-07-14 |
Method for manufacturing a cap for a MEMS component, and hybrid integrated component having such a cap Grant 9,040,336 - Classen , et al. May 26, 2 | 2015-05-26 |
Method for constructing an electrical circuit, and electrical circuit Grant 8,993,356 - Pirk , et al. March 31, 2 | 2015-03-31 |
Yaw-rate Sensor App 20140326070 - Neul; Reinhard ;   et al. | 2014-11-06 |
Sensor system and method for calibrating a sensor system Grant 8,833,135 - Franke , et al. September 16, 2 | 2014-09-16 |
Device for resonantly driving a micromechanical system Grant 8,826,735 - Franke , et al. September 9, 2 | 2014-09-09 |
Hybrid intergrated component and method for the manufacture thereof Grant 8,796,791 - Franke , et al. August 5, 2 | 2014-08-05 |
Method For Calibrating Yaw Rate Sensors App 20140116108 - FRANKE; Axel ;   et al. | 2014-05-01 |
Hybrid Integrated Component App 20140117475 - CLASSEN; Johannes ;   et al. | 2014-05-01 |
Method for manufacturing a cap for a mems component, and hybrid integrated component having such a cap App 20140110800 - CLASSEN; Johannes ;   et al. | 2014-04-24 |
Micromechanical component having a test structure for determining the layer thickness of a spacer layer and method for manufacturing such a test structure Grant 8,695,427 - Reinmuth , et al. April 15, 2 | 2014-04-15 |
Micromechanical Device for Measuring an Acceleration, a Pressure or the Like and a Corresponding Method App 20130327147 - Feyh; Ando ;   et al. | 2013-12-12 |
Microelectromechanical Sensor Module And Corresponding Production Method App 20130327163 - Pirk; Tjalf ;   et al. | 2013-12-12 |
Hybrid Intergrated Component And Method For The Manufacture Thereof App 20130299927 - Franke; Axel ;   et al. | 2013-11-14 |
Method for self-adjustment of a triaxial acceleration sensor during operation, and sensor system having a three-dimensional acceleration sensor Grant 8,566,057 - Franke , et al. October 22, 2 | 2013-10-22 |
Method for producing an electronic module Grant 8,520,396 - Schmidt , et al. August 27, 2 | 2013-08-27 |
Method for producing a micromechanical component Grant 8,492,188 - Stahl , et al. July 23, 2 | 2013-07-23 |
Sensor for capacitive detection of a mechanical deflection Grant 8,493,078 - Franke , et al. July 23, 2 | 2013-07-23 |
Method for determining the sensitivity of an acceleration sensor or magnetic field sensor Grant 8,461,833 - Classen , et al. June 11, 2 | 2013-06-11 |
Multiaxial micromechanical acceleration sensor Grant 8,429,971 - Classen , et al. April 30, 2 | 2013-04-30 |
Drive element and method for operating a drive element Grant 8,427,031 - Franke April 23, 2 | 2013-04-23 |
Micro electrical mechanical magnetic field sensor utilizing modified inertial elements Grant 8,418,556 - Chen , et al. April 16, 2 | 2013-04-16 |
Method for adjusting an acceleration sensor Grant 8,381,570 - Ohms , et al. February 26, 2 | 2013-02-26 |
Sensor element for sensing accelerations in three spatial directions Grant 8,353,213 - Zoellin , et al. January 15, 2 | 2013-01-15 |
Microsystem App 20120291543 - RETTIG; Christian ;   et al. | 2012-11-22 |
Microsystem Grant 8,286,854 - Rettig , et al. October 16, 2 | 2012-10-16 |
Contact Arrangement For Establishing A Spaced, Electrically Conducting Connection Between Microstructured Components App 20120187509 - Gottfried; Knut ;   et al. | 2012-07-26 |
Method For Producing A Micromechanical Component App 20120129291 - Stahl; Heiko ;   et al. | 2012-05-24 |
Device for resonantly driving a micromechanical system App 20120104978 - Franke; Axel ;   et al. | 2012-05-03 |
Yaw-rate Sensor App 20120060604 - Neul; Reinhard ;   et al. | 2012-03-15 |
Method for Constructing an Electrical Circuit, and Electrical Circuit App 20120061860 - Pirk; Tjalf ;   et al. | 2012-03-15 |
Sensor System And Method For Calibrating A Sensor System App 20120036915 - FRANKE; Axel ;   et al. | 2012-02-16 |
Method for Producing an Electrical Circuit and Electrical Circuit App 20120038065 - Butz; Juergen ;   et al. | 2012-02-16 |
Electrolysis device for the production of alkali metal Grant 8,114,258 - Huber , et al. February 14, 2 | 2012-02-14 |
Measuring Element App 20120025277 - Franke; Axel | 2012-02-02 |
Micromechanical Component Having A Test Structure For Determining The Layer Thickness Of A Spacer Layer And Method For Manufacturing Such A Test Structure App 20110296917 - Reinmuth; Jochen ;   et al. | 2011-12-08 |
Micro Electrical Mechanical Magnetic Field Sensor Utilizing Modified Inertial Elements App 20110192229 - Chen; Po-Jui ;   et al. | 2011-08-11 |
Multiaxial micromechanical acceleration sensor App 20110174076 - Classen; Johannes ;   et al. | 2011-07-21 |
Method for determining the sensitivity of an acceleration sensor or magnetic field sensor App 20110140692 - Classen; Johannes ;   et al. | 2011-06-16 |
Method for adjusting an acceleration sensor, and acceleration sensor App 20110120208 - Ohms; Torsten ;   et al. | 2011-05-26 |
Sensor for capacitive detection of a mechanical deflection App 20110109327 - Franke; Axel ;   et al. | 2011-05-12 |
Rotation-rate Sensor Having Two Sensitive Axes App 20110088469 - Neul; Reinhard ;   et al. | 2011-04-21 |
Method for self-adjustment of a triaxial acceleration sensor during operation, and sensor system having a three -dimentional acceleration sensor App 20110060543 - Franke; Axel ;   et al. | 2011-03-10 |
Microsystem App 20110048132 - Rettig; Christian ;   et al. | 2011-03-03 |
Capacitive sensor and actuator App 20110050251 - FRANKE; Axel ;   et al. | 2011-03-03 |
Hot-film air mass meter having frequency-modulated signal detection Grant 7,861,586 - Opitz , et al. January 4, 2 | 2011-01-04 |
Method for producing an electronic module App 20100232119 - Schmidt; Manuela ;   et al. | 2010-09-16 |
Drive Element And Method For Operating A Drive Element App 20100225255 - Franke; Axel | 2010-09-09 |
Sensor Element App 20100206076 - Zoellin; Jochen ;   et al. | 2010-08-19 |
Yaw Rate Sensor App 20100000321 - Neul; Reinhard ;   et al. | 2010-01-07 |
Hot-film Air Mass Meter Having Frequency-modulated Signal Detection App 20090314079 - Opitz; Bernard ;   et al. | 2009-12-24 |
Micromechanical component having a monolithically integrated circuit and method for manufacturing a component App 20080093690 - Reichenbach; Frank ;   et al. | 2008-04-24 |
Electrolysis Device For The Production Of Alkali Metal App 20080053837 - Huber; Gunther ;   et al. | 2008-03-06 |
Method for coating apparatuses and parts of apparatuses used in chemical manufacturing Grant 6,617,047 - Huffer , et al. September 9, 2 | 2003-09-09 |
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