| Patent | Date |
|---|
Electronic Assemblies Including A Conformal Moisture Barrier
App 20210068631 - Foad; Majeed A. ; et al. | 2021-03-11 |
Physical vapor deposition chamber particle reduction apparatus and methods
Grant 10,763,091 - Jindal , et al. Sep | 2020-09-01 |
Extreme ultraviolet lithography system having chuck assembly and method of manufacturing thereof
Grant 10,691,013 - Foad | 2020-06-23 |
Glass Ceramic For Ultraviolet Lithography And Method Of Manufacturing Thereof
App 20200142292 - Hofmann; Ralf ; et al. | 2020-05-07 |
Extreme Ultraviolet Mask Blank Production System With Thin Absorber And Manufacturing System Therefor
App 20200058213 - Hassan; Vinayak Vishwanath ; et al. | 2020-02-20 |
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor
Grant 10,551,732 - Hassan , et al. Fe | 2020-02-04 |
Monitoring system for deposition and method of operation thereof
Grant 10,522,375 - Budiarto , et al. Dec | 2019-12-31 |
Extreme Ultraviolet Mask Blank Production System With Thin Absorber And Manufacturing System Therefor
App 20190130731 - Hassan; Vinayak Vishwanath ; et al. | 2019-05-02 |
Physical Vapor Deposition Chamber Particle Reduction Apparatus And Methods
App 20190057849 - Jindal; Vibhu ; et al. | 2019-02-21 |
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor
Grant 10,197,907 - Hassan , et al. Fe | 2019-02-05 |
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof
Grant 10,012,908 - Hofmann , et al. July 3, 2 | 2018-07-03 |
Growing Graphene On Substrates
App 20180158677 - BEASLEY; Cara ; et al. | 2018-06-07 |
Monitoring System For Deposition And Method Of Operation Thereof
App 20180114711 - Budiarto; Edward W. ; et al. | 2018-04-26 |
Extreme ultraviolet (EUV) substrate inspection system with simplified optics and method of manufacturing thereof
Grant 9,915,621 - Foad , et al. March 13, 2 | 2018-03-13 |
Growing graphene on substrates
Grant 9,905,418 - Beasley , et al. February 27, 2 | 2018-02-27 |
Monitoring system for deposition and method of operation thereof
Grant 9,870,935 - Budiarto , et al. January 16, 2 | 2018-01-16 |
Hdd Pattern Implant System
App 20170365288 - Foad; Majeed A. ; et al. | 2017-12-21 |
Extreme ultraviolet capping layer and method of manufacturing and lithography thereof
Grant 9,739,913 - Beasley , et al. August 22, 2 | 2017-08-22 |
Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof
Grant 9,690,016 - Hofmann , et al. June 27, 2 | 2017-06-27 |
HDD pattern implant system
Grant 9,685,186 - Foad , et al. June 20, 2 | 2017-06-20 |
Extreme Ultraviolet Mask Blank Production System With Thin Absorber And Manufacturing System Therefor
App 20170160632 - Hassan; Vinayak Vishwanath ; et al. | 2017-06-08 |
Growing Graphene On Substrates
App 20170148631 - BEASLEY; Cara ; et al. | 2017-05-25 |
Extreme Ultraviolet Reflective Element With Multilayer Stack And Method Of Manufacturing Thereof
App 20170131637 - Hofmann; Ralf ; et al. | 2017-05-11 |
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor
Grant 9,612,522 - Hassan , et al. April 4, 2 | 2017-04-04 |
Growing graphene on substrates
Grant 9,595,436 - Beasley , et al. March 14, 2 | 2017-03-14 |
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof
Grant 9,581,890 - Hofmann , et al. February 28, 2 | 2017-02-28 |
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor
Grant 9,581,889 - Hassan , et al. February 28, 2 | 2017-02-28 |
Modification of magnetic properties of films using ion and neutral beam implantation
Grant 9,508,375 - Foad , et al. November 29, 2 | 2016-11-29 |
Extreme Ultraviolet Lithography System Having Chuck Assembly And Method Of Manufacturing Thereof
App 20160342096 - Foad; Majeed A. | 2016-11-24 |
Extreme Ultraviolet (euv) Substrate Inspection System With Simplified Optics And Method Of Manufacturing Thereof
App 20160282280 - Foad; Majeed A. ; et al. | 2016-09-29 |
Magnetic Field Guided Crystal Orientation System For Metal Conductivity Enhancement
App 20160208415 - Bencher; Christopher Dennis ; et al. | 2016-07-21 |
Monitoring System For Deposition And Method Of Operation Thereof
App 20160181134 - Budiarto; Edward W. ; et al. | 2016-06-23 |
Portable electrostatic chuck carrier for thin substrates
Grant 9,343,347 - Haas , et al. May 17, 2 | 2016-05-17 |
Patterning of magnetic thin film using energized ions
Grant 9,263,078 - Verhaverbeke , et al. February 16, 2 | 2016-02-16 |
Extreme Ultraviolet Reflective Element With Multilayer Stack And Method Of Manufacturing Thereof
App 20160011502 - Hofmann; Ralf ; et al. | 2016-01-14 |
Extreme Ultraviolet Capping Layer And Method Of Manufacturing And Lithography Thereof
App 20160011344 - Beasley; Cara ; et al. | 2016-01-14 |
Extreme Ultraviolet Mask Blank Production System With Thin Absorber And Manufacturing System Therefor
App 20160011499 - Hassan; Vinayak Vishwanath ; et al. | 2016-01-14 |
Planarized Extreme Ultraviolet Lithography Blank With Absorber And Manufacturing System Therefor
App 20160011500 - Hassan; Vinayak Vishwanath ; et al. | 2016-01-14 |
Extreme Ultraviolet Reflective Element With Amorphous Layers And Method Of Manufacturing Thereof
App 20160011345 - Hofmann; Ralf ; et al. | 2016-01-14 |
Gas distribution system
Grant 9,206,512 - Nguyen , et al. December 8, 2 | 2015-12-08 |
Growing Graphene On Substrates
App 20150235847 - Beasley; Cara ; et al. | 2015-08-20 |
Apparatus and methods for microwave processing of semiconductor substrates
Grant 9,018,110 - Stowell , et al. April 28, 2 | 2015-04-28 |
Safe handling of low energy, high dose arsenic, phosphorus, and boron implanted wafers
Grant 8,927,400 - Foad , et al. January 6, 2 | 2015-01-06 |
Plasma immersion ion implantation reactor with extended cathode process ring
Grant 8,900,405 - Porshnev , et al. December 2, 2 | 2014-12-02 |
Safe Handling Of Low Energy, High Dose Arsenic, Phosphorus, And Boron Implanted Wafers
App 20140248759 - FOAD; Majeed A. ; et al. | 2014-09-04 |
Carbon nanotube-based solar cells
Grant 8,747,942 - Nalamasu , et al. June 10, 2 | 2014-06-10 |
Method for conformal plasma immersed ion implantation assisted by atomic layer deposition
Grant 8,709,924 - Hanawa , et al. April 29, 2 | 2014-04-29 |
Patterning Of Magnetic Thin Film Using Energized Ions And Thermal Excitation
App 20140083363 - NALAMASU; Omkaram ; et al. | 2014-03-27 |
Portable Electrostatic Chuck Carrier For Thin Substrates
App 20140071581 - HAAS; DIETER ; et al. | 2014-03-13 |
Apparatus And Methods For Microwave Processing Of Semiconductor Substrates
App 20140038431 - Stowell; Michael W. ; et al. | 2014-02-06 |
Patterning Of Magnetic Thin Film Using Energized Ions
App 20140017518 - VERHAVERBEKE; Steven ; et al. | 2014-01-16 |
HDD pattern apparatus using laser, E-beam, or focused ion beam
Grant 8,431,911 - Foad , et al. April 30, 2 | 2013-04-30 |
Method for removing implanted photo resist from hard disk drive substrates
Grant 8,354,035 - Hilkene , et al. January 15, 2 | 2013-01-15 |
Gas Distribution System
App 20120325149 - NGUYEN; HANH D. ; et al. | 2012-12-27 |
Pre Or Post-implant Plasma Treatment For Plasma Immersed Ion Implantation Process
App 20120302048 - Santhanam; Kartik ; et al. | 2012-11-29 |
Ceiling electrode with process gas dispersers housing plural inductive RF power applicators extending into the plasma
Grant 8,317,970 - Lai , et al. November 27, 2 | 2012-11-27 |
Doping profile modification in P3I process
Grant 8,288,257 - Scotney-Castle , et al. October 16, 2 | 2012-10-16 |
Plasma immersed ion implantation process using balanced etch-deposition process
Grant 8,273,624 - Porshnev , et al. September 25, 2 | 2012-09-25 |
Plasma immersion ion implantation method using a pure or nearly pure silicon seasoning layer on the chamber interior surfaces
Grant 8,168,519 - Li , et al. May 1, 2 | 2012-05-01 |
Conformal doping in P3I chamber
Grant 8,129,261 - Porshnev , et al. March 6, 2 | 2012-03-06 |
Method For Measuring Dopant Concentration During Plasma Ion Implantation
App 20110259268 - FOAD; MAJEED A. ; et al. | 2011-10-27 |
Removal Of Surface Dopants From A Substrate
App 20110256691 - Ramaswamy; Kartik ; et al. | 2011-10-20 |
Dielectric Deposition Using A Remote Plasma Source
App 20110226617 - Hofmann; Ralf ; et al. | 2011-09-22 |
Plasma Immersion Ion Implantation Method Using A Pure Or Nearly Pure Silicon Seasoning Layer On The Chamber Interior Surfaces
App 20110207307 - Li; Shijian ; et al. | 2011-08-25 |
Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking
Grant 8,003,500 - Vellaikal , et al. August 23, 2 | 2011-08-23 |
Removal of surface dopants from a substrate
Grant 7,989,329 - Ramaswamy , et al. August 2, 2 | 2011-08-02 |
Method for measuring dopant concentration during plasma ion implantation
Grant 7,977,199 - Foad , et al. July 12, 2 | 2011-07-12 |
Novel Method For Conformal Plasma Immersed Ion Implantation Assisted By Atomic Layer Deposition
App 20110159673 - Hanawa; Hiroji ; et al. | 2011-06-30 |
Reducing photoresist layer degradation in plasma immersion ion implantation
Grant 7,968,401 - Hilkene , et al. June 28, 2 | 2011-06-28 |
Plasma immersion ion implantation method using a pure or nearly pure silicon seasoning layer on the chamber interior surfaces
Grant 7,968,439 - Li , et al. June 28, 2 | 2011-06-28 |
Chamber For Processing Hard Disk Drive Substrates
App 20110127156 - Foad; Majeed A. ; et al. | 2011-06-02 |
Plasma Immersed Ion Implantation Process Using Balanced Etch-deposition Process
App 20110053360 - Porshnev; Peter ; et al. | 2011-03-03 |
In-situ dose monitoring using optical emission spectroscopy
Grant 7,871,828 - Cho , et al. January 18, 2 | 2011-01-18 |
Method For Removing Implanted Photo Resist From Hard Disk Drive Substrates
App 20110006034 - Hilkene; Martin A. ; et al. | 2011-01-13 |
Carbon Nanotube-based Solar Cells
App 20100313951 - Nalamasu; Omkaram ; et al. | 2010-12-16 |
Plasma immersed ion implantation process using balanced etch-deposition process
Grant 7,838,399 - Porshnev , et al. November 23, 2 | 2010-11-23 |
Use Special Ion Source Apparatus And Implant With Molecular Ions To Process Hdd (high Density Magnetic Disks) With Patterned Magnetic Domains
App 20100258431 - Moffatt; Stephen ; et al. | 2010-10-14 |
Hdd Pattern Apparatus Using Laser, E-beam, Or Focused Ion Beam
App 20100258758 - Foad; Majeed A. ; et al. | 2010-10-14 |
Modification Of Magnetic Properties Of Films Using Ion And Neutral Beam Implantation
App 20100261040 - Foad; Majeed A. ; et al. | 2010-10-14 |
Method of controlling metal silicide formation
Grant 7,811,877 - Ramamurthy , et al. October 12, 2 | 2010-10-12 |
Hdd Pattern Implant System
App 20100221583 - Foad; Majeed A. ; et al. | 2010-09-02 |
Method For Measuring Dopant Concentration During Plasma Ion Implantation
App 20100216258 - Foad; Majeed A. ; et al. | 2010-08-26 |
Reducing Photoresist Layer Degradation In Plasma Immersion Ion Implantation
App 20100190324 - HILKENE; MARTIN A. ; et al. | 2010-07-29 |
Safe Handling Of Low Energy, High Dose Arsenic, Phosphorus, And Boron Implanted Wafers
App 20100173484 - Foad; Majeed A. ; et al. | 2010-07-08 |
Method of ultra-shallow junction formation using Si film alloyed with carbon
Grant 7,732,269 - Kim , et al. June 8, 2 | 2010-06-08 |
Plasma immersed ion implantation process
Grant 7,732,309 - Li , et al. June 8, 2 | 2010-06-08 |
Plasma immersion ion implantation process with reduced polysilicon gate loss and reduced particle deposition
Grant 7,723,219 - Santhanam , et al. May 25, 2 | 2010-05-25 |
Method for measuring dopant concentration during plasma ion implantation
Grant 7,713,757 - Foad , et al. May 11, 2 | 2010-05-11 |
Doping Profile Modification In P3i Process
App 20100112794 - Scotney-Castle; Matthew D. ; et al. | 2010-05-06 |
Conformal Doping In P3i Chamber
App 20100112793 - Porshnev; Peter I. ; et al. | 2010-05-06 |
Plasma immersion ion implantation with highly uniform chamber seasoning process for a toroidal source reactor
Grant 7,691,755 - Li , et al. April 6, 2 | 2010-04-06 |
Plasma immersion ion implantation using an electrode with edge-effect suppression by a downwardly curving edge
Grant 7,674,723 - Porshnev , et al. March 9, 2 | 2010-03-09 |
Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking
Grant 7,659,184 - Vellaikal , et al. February 9, 2 | 2010-02-09 |
Ceiling Electrode With Process Gas Dispersers Housing Plural Inductive Rf Power Applicators Extending Into The Plasma
App 20090294065 - LAI; CANFENG ; et al. | 2009-12-03 |
Plasma Immersion Ion Implantation Process With Chamber Seasoning And Seasoning Layer Plasma Discharging For Wafer Dechucking
App 20090280628 - Vellaikal; Manoj ; et al. | 2009-11-12 |
Method For Measuring Dopant Concentration During Plasma Ion Implantation
App 20090233384 - Foad; Majeed A. ; et al. | 2009-09-17 |
Plasma Immersion Ion Implantation Process With Chamber Seasoning And Seasoning Layer Plasma Discharging For Wafer Dechucking
App 20090215251 - Vellaikal; Manoj ; et al. | 2009-08-27 |
Plasma immersion ion implantation process with reduced polysilicon gate loss and reduced particle deposition
App 20090215250 - Santhanam; Kartik ; et al. | 2009-08-27 |
Novel Method For Conformal Plasma Immersed Ion Implantation Assisted By Atomic Layer Deposition
App 20090203197 - HANAWA; HIROJI ; et al. | 2009-08-13 |
Dosimetry Using Optical Emission Spectroscopy/residual Gas Analyzer In Conjunction With Ion Current
App 20090195777 - Ramaswamy; Kartik ; et al. | 2009-08-06 |
Plasma immersion ion implantation using an electrode with edge-effect suppression by a downwardly curving edge
App 20090197010 - Porshnev; Peter I. ; et al. | 2009-08-06 |
Plasma immersion ion implantation method using a pure or nearly pure silicon seasoning layer on the chamber interior surfaces
App 20090197401 - Li; Shijian ; et al. | 2009-08-06 |
Removal Of Surface Dopants From A Substrate
App 20090162996 - Ramaswamy; Kartik ; et al. | 2009-06-25 |
Plasma immersion ion implantation reactor with extended cathode process ring
App 20090120367 - Porshnev; Peter I. ; et al. | 2009-05-14 |
Dosimetry using optical emission spectroscopy/residual gas analyzer in conjunction with ion current
Grant 7,531,469 - Ramaswamy , et al. May 12, 2 | 2009-05-12 |
Modulating The Stress Of Poly-crystaline Silicon Films And Surrounding Layers Through The Use Of Dopants And Multi-layer Silicon Films With Controlled Crystal Structure
App 20090065816 - CUNNINGHAM; KEVIN L. ; et al. | 2009-03-12 |
Method Of Controlling Metal Silicide Formation
App 20090023257 - RAMAMURTHY; SUNDAR ; et al. | 2009-01-22 |
Plasma Immersion Ion Implantation With Highly Uniform Chamber Seasoning Process For A Toroidal Source Reactor
App 20080286982 - Li; Shijian ; et al. | 2008-11-20 |
In-situ Dose Monitoring Using Optical Emission Spectroscopy
App 20080188013 - Cho; Seon-Mee ; et al. | 2008-08-07 |
Wet Photoresist Stripping Process And Apparatus
App 20080149135 - Cho; Seon-Mee ; et al. | 2008-06-26 |
Safe Handling Of Low Energy, High Dose Arsenic, Phosphorus, And Boron Implanted Wafers
App 20080153271 - Foad; Majeed A. ; et al. | 2008-06-26 |
Dry photoresist stripping process and apparatus
App 20080153306 - Cho; Seon-Mee ; et al. | 2008-06-26 |
Plasma Immersed Ion Implantation Process Using Balanced Etch-deposition Process
App 20080138968 - PORSHNEV; PETER ; et al. | 2008-06-12 |
Plasma Immersed Ion Implantation Process
App 20080138967 - Li; Shijian ; et al. | 2008-06-12 |
Dosimetry Using Optical Emission Spectroscopy/residual Gas Analyzer In Conjuntion With Ion Current
App 20080075834 - Ramaswamy; Kartik ; et al. | 2008-03-27 |
Method Of Ultra-shallow Junction Formation Using Si Film Alloyed With Carbon
App 20070256627 - KIM; YIHWAN ; et al. | 2007-11-08 |
Low energy ion implantation into SiGe
App 20030153157 - Foad, Majeed A. ; et al. | 2003-08-14 |
Technique for growing single crystal material on top of an insulator
App 20030109148 - Foad, Majeed A. | 2003-06-12 |
Boron ion sources for ion implantation apparatus
Grant 5,977,552 - Foad November 2, 1 | 1999-11-02 |
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