Feldmann; Heiko

Patent Applications and Registrations

Patent applications and USPTO patent grants for Feldmann; Heiko.The latest application filed is for "optical diffraction component".

Company Profile

5.66.73

Feldmann; Heiko - Aalen DE
Feldmann; Heiko - Germany DE
Feldmann; Heiko - Schwaebisch Gmuend DE
Feldmann; Heiko - Schwabisch Gmund DE
Feldmann; Heiko - Gmund DE
Feldmann; Heiko - Schwaebish Gmuend DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Optical Diffraction Component App 20220171292 - Feldmann; Heiko	2022-06-02
Apparatus And Method For Characterizing A Microlithographic Mask App 20210397099 - Ruoff; Johannes ; et al.	2021-12-23
Optical diffraction component for suppressing at least one target wavelength by destructive interference Grant 11,194,256 - Feldmann , et al. December 7, 2	2021-12-07
Optical Diffraction Component For Suppressing At Least One Target Wavelength By Destructive Interference App 20210318622 - Feldmann; Heiko ; et al.	2021-10-14
Inspection Device For Masks For Semiconductor Lithography And Method App 20210156809 - Seitz; Holger ; et al.	2021-05-27
Inspection device for masks for semiconductor lithography and method Grant 10,928,332 - Seitz , et al. February 23, 2	2021-02-23
Optical diffraction component for suppressing at least one target wavelength by destructive interference Grant 10,852,640 - Feldmann , et al. December 1, 2	2020-12-01
Optical Diffraction Component For Suppressing At Least One Target Wavelength By Destructive Interference App 20200225586 - Feldmann; Heiko ; et al.	2020-07-16
Microlithography projection objective Grant 10,281,824 - Feldmann , et al.	2019-05-07
Mirror and related EUV systems and methods Grant 10,274,649 - Ruoff , et al.	2019-04-30
Inspection Device For Masks For Semiconductor Lithography And Method App 20190011376 - Seitz; Holger ; et al.	2019-01-10
Illumination system and projection objective of a mask inspection apparatus Grant 10,114,293 - Feldmann , et al. October 30, 2	2018-10-30
Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same Grant 10,101,668 - Epple , et al. October 16, 2	2018-10-16
Microlithographic Projection Exposure Apparatus App 20170322343 - Kamenov; Vladimir ; et al.	2017-11-09
Optical Device App 20170284893 - FREIMANN; Rolf ; et al.	2017-10-05
Microlithographic projection exposure apparatus Grant 9,733,395 - Kamenov , et al. August 15, 2	2017-08-15
Microlithography Projection Objective App 20170192362 - Feldmann; Heiko ; et al.	2017-07-06
Arrangement of a mirror Grant 9,658,533 - Ruoff , et al. May 23, 2	2017-05-23
Projection lens with wavefront manipulator Grant 9,651,872 - Feldmann May 16, 2	2017-05-16
Method for improving the imaging properties of a projection objective, and such a projection objective Grant 9,581,813 - Conradi , et al. February 28, 2	2017-02-28
Optical device Grant 9,568,394 - Freimann , et al. February 14, 2	2017-02-14
Method of manufacturing a projection objective and projection objective Grant 9,360,775 - Feldmann , et al. June 7, 2	2016-06-07
Projection lens with wavefront manipulator Grant 9,298,102 - Feldmann March 29, 2	2016-03-29
Projection exposure apparatus for EUV microlithography and method for microlithographic exposure Grant 9,298,097 - Bienert , et al. March 29, 2	2016-03-29
Projection Lens With Wavefront Manipulator App 20150370172 - Feldmann; Heiko	2015-12-24
Projection lens system of a microlithographic projection exposure installation Grant 9,164,396 - Beierl , et al. October 20, 2	2015-10-20
Method For Improving The Imaging Properties Of A Projection Objective, And Such A Projection Objective App 20150293352 - Conradi; Olaf ; et al.	2015-10-15
Optical imaging device and imaging method for microscopy Grant 9,104,026 - Epple , et al. August 11, 2	2015-08-11
Microlithography projection objective Grant 9,097,984 - Feldmann , et al. August 4, 2	2015-08-04
Method for improving the imaging properties of a projection objective, and such a projection objective Grant 9,069,263 - Conradi , et al. June 30, 2	2015-06-30
Optical Arrangement For Three-dimensionally Patterning A Material Layer App 20150098071 - Feldmann; Heiko	2015-04-09
Microlithographic projection exposure apparatus Grant 8,982,325 - Totzeck , et al. March 17, 2	2015-03-17
Microlithography Projection Objective App 20140333913 - Feldmann; Heiko ; et al.	2014-11-13
Microlithographic Projection Exposure Apparatus App 20140320955 - Kamenov; Vladimir ; et al.	2014-10-30
Illumination system for a microlithgraphic exposure apparatus Grant 8,873,151 - Sohmer , et al. October 28, 2	2014-10-28
Microlithography Projection Objective App 20140293256 - Feldmann; Heiko ; et al.	2014-10-02
Projection Lens With Wavefront Manipulator App 20140268084 - Feldmann; Heiko	2014-09-18
Magnifying imaging optical system and metrology system with an imaging optical system of this type Grant 8,837,041 - Mann , et al. September 16, 2	2014-09-16
Arrangement Of A Mirror App 20140240686 - Ruoff; Johannes ; et al.	2014-08-28
Optical imaging device and imaging method for microscopy Grant 8,711,472 - Mann , et al. April 29, 2	2014-04-29
Method and apparatus for analyzing and/or repairing of an EUV mask defect Grant 8,674,329 - Budach , et al. March 18, 2	2014-03-18
Optical Device App 20140023835 - FREIMANN; Rolf ; et al.	2014-01-23
Method For Mask Inspection, And Mask Inspection Installation App 20130335552 - Feldmann; Heiko ; et al.	2013-12-19
Projection system with compensation of intensity variations and compensation element therefor Grant 8,605,257 - Scheible , et al. December 10, 2	2013-12-10
Projection Exposure Apparatus for EUV Microlithography and Method for Microlithographic Exposure App 20130250265 - Bienert; Marc ; et al.	2013-09-26
Chromatically Corrected Objective With Specifically Structured And Arranged Dioptric Optical Elements And Projection Exposure Apparatus Including The Same App 20130201464 - EPPLE; Alexander ; et al.	2013-08-08
Mirror and Related EUV Systems and Methods App 20130188163 - Ruoff; Johannes ; et al.	2013-07-25
Method And Apparatus For Analyzing And/or Repairing Of An Euv Mask Defect App 20130156939 - Budach; Michael ; et al.	2013-06-20
Imaging microoptics for measuring the position of an aerial image Grant 8,451,458 - Rostalski , et al. May 28, 2	2013-05-28
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection Grant RE44,216 - Totzeck , et al. May 14, 2	2013-05-14
Projection objective for microlithography Grant 8,436,982 - Beierl , et al. May 7, 2	2013-05-07
Projection Lens System Of A Microlithographic Projection Exposure Installation App 20130070224 - Beierl; Helmut ; et al.	2013-03-21
Illumination System And Projection Objective Of A Mask Inspection Apparatus App 20130038850 - Feldmann; Heiko ; et al.	2013-02-14
Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same Grant 8,345,350 - Epple , et al. January 1, 2	2013-01-01
Projection objective of a microlithographic projection exposure apparatus Grant 8,325,426 - Schuster , et al. December 4, 2	2012-12-04
Projection lens system of a microlithographic projection exposure installation Grant 8,319,944 - Beierl , et al. November 27, 2	2012-11-27
Method of manufacturing a projection objective and projection objective Grant 8,310,752 - Feldmann , et al. November 13, 2	2012-11-13
Interference systems for microlithgraphic projection exposure systems Grant 8,294,991 - Mueller , et al. October 23, 2	2012-10-23
Imaging Microoptics For Measuring The Position Of An Aerial Image App 20120176670 - Rostalski; Hans-Juergen ; et al.	2012-07-12
Method and apparatus for structuring a radiation-sensitive material Grant 8,211,627 - Feldmann July 3, 2	2012-07-03
Method Of Manufacturing A Projection Objective And Projection Objective App 20120134016 - Feldmann; Heiko ; et al.	2012-05-31
Magnifying Imaging Optical System And Metrology System With An Imaging Optical System Of This Type App 20120127566 - Mann; Hans-Juergen ; et al.	2012-05-24
Imaging microoptics for measuring the position of an aerial image Grant 8,164,759 - Rostalski , et al. April 24, 2	2012-04-24
Microlithographic Projection Exposure Apparatus App 20120092637 - Totzeck; Michael ; et al.	2012-04-19
Microlithographic projection exposure apparatus Grant 8,107,054 - Totzeck , et al. January 31, 2	2012-01-31
Projection objective for lithography Grant 8,068,276 - Feldmann , et al. November 29, 2	2011-11-29
Illumination system or projection lens of a microlithographic exposure system Grant 8,031,326 - Totzeck , et al. October 4, 2	2011-10-04
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20110235013 - Schuster; Karl-Heinz ; et al.	2011-09-29
Microlithographic Projection Exposure Apparatus App 20110222043 - Kamenov; Vladimir ; et al.	2011-09-15
Projection objective of a microlithographic projection exposure apparatus Grant 7,982,969 - Schuster , et al. July 19, 2	2011-07-19
Projection objective and projection exposure apparatus including the same Grant 7,965,453 - Ulrich , et al. June 21, 2	2011-06-21
Microlithographic Projection Exposure Apparatus App 20110134403 - Feldmann; Heiko ; et al.	2011-06-09
Projection Objective For Lithography App 20110026110 - Feldmann; Heiko ; et al.	2011-02-03
Hologram and method of manufacturing an optical element using a hologram Grant 7,848,031 - Hetzler , et al. December 7, 2	2010-12-07
Method For Improving The Imaging Properties Of A Projection Objective, And Such A Projection Objective App 20100290024 - Conradi; Olaf ; et al.	2010-11-18
Projection exposure apparatus, projection exposure method and projection objective Grant 7,834,981 - Rostalski , et al. November 16, 2	2010-11-16
Projection objective for lithography Grant 7,835,073 - Feldmann , et al. November 16, 2	2010-11-16
Projection Lens System Of A Microlithographic Projection Exposure Installation App 20100265478 - Beierl; Helmut ; et al.	2010-10-21
Projection exposure method and projection exposure apparatus for microlithography Grant 7,800,732 - Zimmermann , et al. September 21, 2	2010-09-21
Imaging Microoptics For Measuring The Position Of An Aerial Image App 20100214565 - Rostalski; Hans-Juergen ; et al.	2010-08-26
Projection lens system of a microlithographic projection exposure installation Grant 7,782,440 - Beierl , et al. August 24, 2	2010-08-24
Method for improving the imaging properties of a projection objective, and such a projection objective Grant 7,777,963 - Conradi , et al. August 17, 2	2010-08-17
Projection Objective For Microlithography App 20100201959 - Beierl; Helmut ; et al.	2010-08-12
Optical imaging device and imaging method for microscopy App 20100188738 - Epple; Alexander ; et al.	2010-07-29
Projection Objective And Projection Exposure Apparatus Including The Same App 20100172019 - ULRICH; WILHELM ; et al.	2010-07-08
Projection Exposure Method And Projection Exposure Apparatus For Microlithography App 20100157266 - Zimmermann; Joerg ; et al.	2010-06-24
Optical imaging device and imaging method for microscopy App 20100149632 - Mann; Hans-Juergen ; et al.	2010-06-17
Projection objective and projection exposure apparatus including the same Grant 7,738,188 - Ulrich , et al. June 15, 2	2010-06-15
Optical System Of A Microlithographic Projection Exposure Apparatus App 20100134891 - Mueller; Ralf ; et al.	2010-06-03
Method for describing, evaluating and improving optical polarization properties of a microlithographic projection exposure apparatus Grant 7,728,975 - Totzeck , et al. June 1, 2	2010-06-01
Chromatically Corrected Objective And Projection Exposure Apparatus Including The Same App 20100128240 - Epple; Alexander ; et al.	2010-05-27
Optical Arrangement For Three-dimensionally Patterning A Material Layer App 20100112465 - Feldmann; Heiko	2010-05-06
Projection objective of a microlithographic projection exposure apparatus Grant 7,710,640 - Beder , et al. May 4, 2	2010-05-04
Symmetrical objective having four lens groups for microlithography Grant 7,697,211 - Shafer , et al. April 13, 2	2010-04-13
Chromatically Corrected Objective And Projection Exposure Apparatus Including The Same App 20090316256 - EPPLE; Alexander ; et al.	2009-12-24
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20090284831 - Schuster; Karl-Heinz ; et al.	2009-11-19
Projection objective adapted for use with different immersion fluids or liquids, method of conversion of such and production method Grant 7,589,903 - Beder , et al. September 15, 2	2009-09-15
Method Of Manufacturing A Projection Objective And Projection Objective App 20090207487 - Feldmann; Heiko ; et al.	2009-08-20
Method And Apparatus For Structuring A Radiation-sensitive Material App 20090191490 - Feldmann; Heiko	2009-07-30
Microlithography projection objective App 20090115986 - Feldmann; Heiko ; et al.	2009-05-07
Symmetrical Objective Having Four Lens Groups For Microlithography App 20090080086 - Shafer; David R. ; et al.	2009-03-26
Microlithographic Projection Exposure Apparatus App 20090073398 - Totzeck; Michael ; et al.	2009-03-19
Projection Lens Of A Microlithographic Exposure System App 20090021830 - Totzeck; Michael ; et al.	2009-01-22
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20080316455 - Hellweg; Dirk ; et al.	2008-12-25
Method for Improving the Imaging Properties of a Projection Objective, and Such a Projection Objective App 20080310029 - Conradi; Olaf ; et al.	2008-12-18
Microlithographic projection exposure apparatus App 20080297754 - Kamenov; Vladimir ; et al.	2008-12-04
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20080278799 - Beder; Susanne ; et al.	2008-11-13
Projection Objective Adapted For Use With Different Immersion Fluids Or Liquids, Method Of Conversion Of Such And Production Method App 20080273248 - Beder; Susanne ; et al.	2008-11-06
Illumination System Or Projection Lens Of A Microlithographic Exposure System App 20080204877 - Totzeck; Michael ; et al.	2008-08-28
Illumination System for a Microlithgraphic Exposure Apparatus App 20080192359 - Sohmer; Alexander ; et al.	2008-08-14
Projection Objective For Lithography App 20080174858 - Feldmann; Heiko ; et al.	2008-07-24
Multiple-use Projection System App 20080151211 - Kaiser; Winfried ; et al.	2008-06-26
Hologram and Method of Manufacturing an Optical Element Using a Hologram App 20080137090 - Hetzler; Jochen ; et al.	2008-06-12
Projection Exposure Apparatus, Projection Exposure Method And Projection Objective App 20080117400 - Rostalski; Hans-Juergen ; et al.	2008-05-22
Projection Lens System of a Microlithographic Projection Exposure Installation App 20080106711 - Beierl; Helmut ; et al.	2008-05-08
Projection System with Compensation of Intensity Variations and Compensation Element Therefor App 20080094599 - Scheible; Patrick ; et al.	2008-04-24
Projection objective and projection exposure apparatus including the same App 20080037112 - Ulrich; Wilhelm ; et al.	2008-02-14
Microlithographic Projection Exposure Apparatus App 20070285644 - Brotsack; Markus ; et al.	2007-12-13
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection Grant 7,286,284 - Totzeck , et al. October 23, 2	2007-10-23
Method of manufacturing projection objectives and set of projection objectives manufactured by that method App 20070013882 - Dodoc; Aurelian ; et al.	2007-01-18
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection App 20060012873 - Totzeck; Michael ; et al.	2006-01-19