Fan; Su Chen

Patent Applications and Registrations

Patent applications and USPTO patent grants for Fan; Su Chen.The latest application filed is for "reversible resistive memory logic gate device".

Company Profile

62.94.111

Fan; Su Chen - Cohoes NY
Fan; Su-Chen - Tao-Yuan TW
Fan; Su Chen - Albany NY
Fan; Su-Chen - Ping-Jen TW
Fan; Su-Chen - Yonghe City TW
Fan; Su-Chen - Chung-Li TW
Fan; Su-Chen - Ping-Jen City TW
Fan; Su-Chen - Ping-Jeng City TW
Fan; Su-Chen - Chung-Li City TW
Fan; Su-Chen - Taoyuan Hsien TW

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Reversible Resistive Memory Logic Gate Device App 20220310908 - Chen; Hsueh-Chung ; et al.	2022-09-29
Sacrificial Fin For Contact Self-alignment App 20220262923 - Mignot; Yann ; et al.	2022-08-18
Wrapped-around Contact For Vertical Field Effect Transistor Top Source-drain App 20220199785 - Xie; Ruilong ; et al.	2022-06-23
Stacked Vertical Transport Field-effect Transistor Logic Gate Structures With Shared Epitaxial Layers App 20220181321 - Kang; Tsung-Sheng ; et al.	2022-06-09
Three-dimensional Field Effect Device App 20220130992 - Zhou; Huimei ; et al.	2022-04-28
Sacrificial fin for contact self-alignment Grant 11,316,029 - Mignot , et al. April 26, 2	2022-04-26
Formation of contacts for semiconductor devices Grant 11,227,801 - Xie , et al. January 18, 2	2022-01-18
Three-dimensional field effect device Grant 11,222,981 - Zhou , et al. January 11, 2	2022-01-11
Self-aligned contacts for MOL Grant 11,205,590 - Fan , et al. December 21, 2	2021-12-21
Liner and cap structures for reducing local interconnect vertical resistance without compromising reliability Grant 11,205,587 - Fan , et al. December 21, 2	2021-12-21
Silicide Formation For Source/drain Contact In A Vertical Transport Field-effect Transistor App 20210391224 - Wu; Heng ; et al.	2021-12-16
Layout Design for Threshold Voltage Tuning App 20210384139 - ZHOU; Huimei ; et al.	2021-12-09
Three-dimensional field effect device Grant 11,183,593 - Zhou , et al. November 23, 2	2021-11-23
Contacts And Liners Having Multi-segmented Protective Caps App 20210351073 - Fullam; Jennifer ; et al.	2021-11-11
Contacts and liners having multi-segmented protective caps Grant 11,171,051 - Fullam , et al. November 9, 2	2021-11-09
Barrier-free vertical interconnect structure Grant 11,164,778 - Wang , et al. November 2, 2	2021-11-02
Silicide formation for source/drain contact in a vertical transport field-effect transistor Grant 11,158,543 - Wu , et al. October 26, 2	2021-10-26
Sacrificial Fin For Contact Self-alignment App 20210328041 - Mignot; Yann ; et al.	2021-10-21
Cmos Top Source/drain Region Doping And Epitaxial Growth For A Vertical Field Effect Transistor App 20210305104 - Wu; Heng ; et al.	2021-09-30
Formation Of Contacts For Semiconductor Devices App 20210296178 - Xie; Ruilong ; et al.	2021-09-23
Middle-of-line interconnect having low metal-to-metal interface resistance Grant 11,114,382 - Varghese , et al. September 7, 2	2021-09-07
Self-aligned contacts for vertical field effect transistors Grant 11,081,566 - Fan , et al. August 3, 2	2021-08-03
Metal contact isolation for semiconductor structures Grant 11,063,126 - Fan , et al. July 13, 2	2021-07-13
Barrier-free Vertical Interconnect Structure App 20210159117 - Wang; Junli ; et al.	2021-05-27
Method and structure of metal cut Grant 11,011,417 - Fan , et al. May 18, 2	2021-05-18
Three-dimensional Field Effect Device App 20210118873 - Zhou; Huimei ; et al.	2021-04-22
Three-dimensional field effect device Grant 10,971,490 - Zhou , et al. April 6, 2	2021-04-06
Stack viabar structures Grant 10,971,356 - Fan , et al. April 6, 2	2021-04-06
Self-Aligned Contacts for MOL App 20210090950 - Fan; Su Chen ; et al.	2021-03-25
Extreme ultraviolet lithography patterning with directional deposition Grant 10,957,552 - Xu , et al. March 23, 2	2021-03-23
Gate contact over active enabled by alternative spacer scheme and claw-shaped cap Grant 10,943,990 - Greene , et al. March 9, 2	2021-03-09
Self-aligned contact for vertical field effect transistor Grant 10,896,972 - Anderson , et al. January 19, 2	2021-01-19
Silicide Formation For Source/drain Contact In A Vertical Transport Field-effect Transistor App 20210013108 - Wu; Heng ; et al.	2021-01-14
Low-resistance Top Contact On Vtfet App 20210005735 - Waskiewicz; Christopher J. ; et al.	2021-01-07
Gate tie-down enablement with inner spacer Grant 10,879,375 - Fan , et al. December 29, 2	2020-12-29
Method And Structure Of Metal Cut App 20200381296 - Fan; Su Chen ; et al.	2020-12-03
Gate contact over active region with self-aligned source/drain contact Grant 10,832,943 - Fan , et al. November 10, 2	2020-11-10
Low-resistance top contact on VTFET Grant 10,833,173 - Waskiewicz , et al. November 10, 2	2020-11-10
Sacrificial gate spacer regions for gate contacts formed over the active region of a transistor Grant 10,832,961 - Fan , et al. November 10, 2	2020-11-10
Method and structure for cost effective enhanced self-aligned contacts Grant 10,818,548 - Lai , et al. October 27, 2	2020-10-27
Sacrificial Gate Spacer Regions For Gate Contacts Formed Over The Active Region Of A Transistor App 20200335401 - Fan; Su Chen ; et al.	2020-10-22
Buried contact to provide reduced VFET feature-to-feature tolerance requirements Grant 10,804,148 - Fan , et al. October 13, 2	2020-10-13
Gate Contact Over Active Region With Self-aligned Source/drain Contact App 20200321244 - Fan; Su Chen ; et al.	2020-10-08
Buried contact to provide reduced VFET feature-to-feature tolerance requirements Grant 10,796,957 - Fan , et al. October 6, 2	2020-10-06
Self-aligned Contacts For Vertical Field Effect Transistors App 20200295156 - Fan; Su Chen ; et al.	2020-09-17
Metal Contact Isolation For Semiconductor Structures App 20200279925 - Fan; Su Chen ; et al.	2020-09-03
Bottom contact formation for vertical transistor devices Grant 10,727,317 - Fan , et al.	2020-07-28
Stack Viabar Structures App 20200203156 - FAN; Su Chen ; et al.	2020-06-25
Liner and cap structures for reducing local interconnect vertical resistance without compromising reliability Grant 10,685,876 - Fan , et al.	2020-06-16
Extreme ultraviolet lithography patterning with directional deposition Grant 10,658,190 - Xu , et al.	2020-05-19
Stack Viabar Structures App 20200135457 - FAN; Su Chen ; et al.	2020-04-30
Gate Contact Over Active Enabled by Alternative Spacer Scheme and Claw-Shaped Cap App 20200135886 - Greene; Andrew ; et al.	2020-04-30
Middle-of-line Interconnect Having Low Metal-to-metal Interface Resistance App 20200126926 - Varghese; Alex Joseph ; et al.	2020-04-23
Self-aligned contact for vertical field effect transistor Grant 10,622,458 - Anderson , et al.	2020-04-14
Bottom Contact Formation For Vertical Transistor Devices App 20200111895 - Fan; Su Chen ; et al.	2020-04-09
Stack viabar structures Grant 10,615,027 - Fan , et al.	2020-04-07
Extreme Ultraviolet Lithography Patterning With Directional Deposition App 20200098578 - Xu; Yongan ; et al.	2020-03-26
Extreme Ultraviolet Lithography Patterning With Directional Deposition App 20200098581 - Xu; Yongan ; et al.	2020-03-26
Liner And Cap Structures For Reducing Local Interconnect Vertical Resistance Without Compromising Reliability App 20200090990 - Fan; Su Chen ; et al.	2020-03-19
Liner And Cap Structures For Reducing Local Interconnect Vertical Resistance Without Compromising Reliability App 20200090989 - Fan; Su Chen ; et al.	2020-03-19
Low-resistance Top Contact On Vtfet App 20200075746 - Waskiewicz; Christopher J. ; et al.	2020-03-05
Self-aligned Contact For Vertical Field Effect Transistor App 20200052096 - Anderson; Brent A. ; et al.	2020-02-13
Three-dimensional Field Effect Device App 20200035824 - Zhou; Huimei ; et al.	2020-01-30
Three-dimensional Field Effect Device App 20200035823 - Zhou; Huimei ; et al.	2020-01-30
Gate tie-down enablement with inner spacer Grant 10,522,654 - Fan , et al. Dec	2019-12-31
Vertical field effect transistor with self-aligned contacts Grant 10,497,798 - Xie , et al. De	2019-12-03
Gate Tie-down Enablement With Inner Spacer App 20190363178 - Fan; Su Chen ; et al.	2019-11-28
Embedded bottom metal contact formed by a self-aligned contact process for vertical transistors Grant 10,490,653 - Fan , et al. Nov	2019-11-26
Three-dimensional field effect device Grant 10,490,667 - Zhou , et al. Nov	2019-11-26
Three-dimensional Field Effect Device App 20190355717 - Zhou; Huimei ; et al.	2019-11-21
Three-dimensional Field Effect Device App 20190355845 - Zhou; Huimei ; et al.	2019-11-21
Local interconnect structure including non-eroded contact via trenches Grant 10,388,602 - Fan , et al. A	2019-08-20
Vertical Field Effect Transistor With Self-aligned Contacts App 20190252267 - Xie; Ruilong ; et al.	2019-08-15
Gate tie-down enablement with inner spacer Grant 10,332,977 - Fan , et al.	2019-06-25
Replacement metal gate stack for diffusion prevention Grant 10,332,971 - Ando , et al.	2019-06-25
Embedded bottom metal contact formed by a self-aligned contact process for vertical transistors Grant 10,319,835 - Fan , et al.	2019-06-11
Method of forming vertical FinFET device having self-aligned contacts Grant 10,312,154 - Xie , et al.	2019-06-04
Self-aligned Contacts For Vertical Field Effect Transistor Cell Height Scaling App 20190088764 - XIE; Ruilong ; et al.	2019-03-21
Buried Contact To Provide Reduced Vfet Feature-to-feature Tolerance Requirements App 20190067100 - Fan; Su Chen ; et al.	2019-02-28
Buried Contact To Provide Reduced Vfet Feature-to-feature Tolerance Requirements App 20190067101 - Fan; Su Chen ; et al.	2019-02-28
Reflow interconnect using Ru Grant 10,217,664 - Clevenger , et al. Feb	2019-02-26
Reflow interconnect using Ru Grant 10,211,101 - Clevenger , et al. Feb	2019-02-19
Forming Self-Aligned Contact with Spacer First App 20190027580 - Fan; Su Chen ; et al.	2019-01-24
Forming self-aligned contact with spacer first Grant 10,186,599 - Fan , et al. Ja	2019-01-22
Gate Tie-down Enablement With Inner Spacer App 20180374932 - Fan; Su Chen ; et al.	2018-12-27
Embedded Bottom Metal Contact Formed By A Self-aligned Contact Process For Vertical Transistors App 20180337257 - Fan; Su Chen ; et al.	2018-11-22
Embedded Bottom Metal Contact Formed By A Self-aligned Contact Process For Vertical Transistors App 20180337260 - Fan; Su Chen ; et al.	2018-11-22
Self-aligned Contact For Vertical Field Effect Transistor App 20180337256 - Anderson; Brent A. ; et al.	2018-11-22
Gate tie-down enablement with inner spacer Grant 10,128,352 - Fan , et al. November 13, 2	2018-11-13
REFLOW INTERCONNECT USING Ru App 20180277432 - Clevenger; Lawrence A. ; et al.	2018-09-27
REFLOW INTERCONNECT USING Ru App 20180277433 - Clevenger; Lawrence A. ; et al.	2018-09-27
Embedded bottom metal contact formed by a self-aligned contact process for vertical transistors Grant 10,020,381 - Fan , et al. July 10, 2	2018-07-10
Gate Tie-down Enablement With Inner Spacer App 20180151433 - Fan; Su Chen ; et al.	2018-05-31
Stable multiple threshold voltage devices on replacement metal gate CMOS devices Grant 9,985,027 - Fan , et al. May 29, 2	2018-05-29
Reflow interconnect using Ru Grant 9,960,078 - Clevenger , et al. May 1, 2	2018-05-01
Replacement gate structures for transistor devices Grant 9,953,978 - Xie , et al. April 24, 2	2018-04-24
Gate tie-down enablement with inner spacer Grant 9,941,163 - Fan , et al. April 10, 2	2018-04-10
Gate tie-down enablement with inner spacer Grant 9,929,049 - Fan , et al. March 27, 2	2018-03-27
Replacement Metal Gate Stack For Diffusion Prevention App 20180083117 - Ando; Takashi ; et al.	2018-03-22
Replacement metal gate stack for diffusion prevention Grant 9,905,665 - Ando , et al. February 27, 2	2018-02-27
Gate tie-down enablement with inner spacer Grant 9,899,259 - Fan , et al. February 20, 2	2018-02-20
Wimpy and nominal semiconductor device structures for vertical finFETs Grant 9,881,842 - Chung , et al. January 30, 2	2018-01-30
Gate Tie-down Enablement With Inner Spacer App 20170372959 - Fan; Su Chen ; et al.	2017-12-28
Interconnect structure including middle of line (MOL) metal layer local interconnect on ETCH stop layer Grant 9,786,607 - Fan , et al. October 10, 2	2017-10-10
Gate Tie-down Enablement With Inner Spacer App 20170278753 - Fan; Su Chen ; et al.	2017-09-28
Gate tie-down enablement with inner spacer Grant 9,735,054 - Fan , et al. August 15, 2	2017-08-15
Interconnect structure including middle of line (MOL) metal layer local interconnect on etch stop layer Grant 9,728,456 - Fan , et al. August 8, 2	2017-08-08
Stable multiple threshold voltage devices on replacement metal gate CMOS devices Grant 9,728,462 - Fan , et al. August 8, 2	2017-08-08
Local Interconnect Structure Including Non-eroded Contact Via Trenches App 20170170118 - Fan; Su Chen ; et al.	2017-06-15
Gate Tie-down Enablement With Inner Spacer App 20170170070 - Fan; Su Chen ; et al.	2017-06-15
Gate Tie-down Enablement With Inner Spacer App 20170162438 - Fan; Su Chen ; et al.	2017-06-08
Interconnect Structure Including Middle Of Line (mol) Metal Layer Local Interconnect On Etch Stop Layer App 20170140984 - Fan; Su Chen ; et al.	2017-05-18
Freestanding spacer having sub-lithographic lateral dimension and method of forming same Grant 9,653,571 - Chen , et al. May 16, 2	2017-05-16
Gate tie-down enablement with inner spacer Grant 9,627,257 - Fan , et al. April 18, 2	2017-04-18
Self-aligned Gate Tie-down Contacts With Selective Etch Stop Liner App 20170092585 - Fan; Su Chen ; et al.	2017-03-30
Stable Multiple Threshold Voltage Devices On Replacement Metal Gate Cmos Devices App 20170077098 - Fan; Su Chen ; et al.	2017-03-16
Interconnect structure including middle of line (MOL) metal layer local interconnect on etch stop layer Grant 9,583,442 - Fan , et al. February 28, 2	2017-02-28
Contact area structure and method for manufacturing the same Grant 9,576,901 - Chen , et al. February 21, 2	2017-02-21
Gate Tie-down Enablement With Inner Spacer App 20170047254 - Fan; Su Chen ; et al.	2017-02-16
Gate Tie-down Enablement With Inner Spacer App 20170047252 - Fan; Su Chen ; et al.	2017-02-16
Self-aligned Gate Tie-down Contacts With Selective Etch Stop Liner App 20170047418 - Fan; Su Chen ; et al.	2017-02-16
Self-aligned gate tie-down contacts with selective etch stop liner Grant 9,570,573 - Fan , et al. February 14, 2	2017-02-14
Local interconnect structure including non-eroded contact via trenches Grant 9,570,397 - Fan , et al. February 14, 2	2017-02-14
Interconnect Structure Including Middle Of Line (mol) Metal Layer Local Interconnect On Etch Stop Layer App 20170018459 - Fan; Su Chen ; et al.	2017-01-19
Stable multiple threshold voltage devices on replacement metal gate CMOS devices Grant 9,536,791 - Fan , et al. January 3, 2	2017-01-03
Interconnect Structure Including Middle Of Line (mol) Metal Layer Local Interconnect On Etch Stop Layer App 20160379932 - Fan; Su Chen ; et al.	2016-12-29
Freestanding Spacer Having Sub-lithographic Lateral Dimension And Method Of Forming Same App 20160365425 - Chen; Hsueh-Chung ; et al.	2016-12-15
Stable Multiple Threshold Voltage Devices On Replacement Metal Gate Cmos Devices App 20160293493 - Fan; Su Chen ; et al.	2016-10-06
Stable Multiple Threshold Voltage Devices On Replacement Metal Gate Cmos Devices App 20160293492 - Fan; Su Chen ; et al.	2016-10-06
Methods of forming a combined gate and source/drain contact structure and the resulting device Grant 9,455,254 - Xie , et al. September 27, 2	2016-09-27
Gate tie-down enablement with inner spacer Grant 9,397,049 - Fan , et al. July 19, 2	2016-07-19
Replacement Metal Gate Stack For Diffusion Prevention App 20160197157 - Ando; Takashi ; et al.	2016-07-07
STI region for small fin pitch in FinFET devices Grant 9,385,123 - Chen , et al. July 5, 2	2016-07-05
Methods Of Forming A Combined Gate And Source/drain Contact Structure And The Resulting Device App 20160133623 - Xie; Ruilong ; et al.	2016-05-12
Replacement Gate Structures For Transistor Devices App 20160118385 - Xie; Ruilong ; et al.	2016-04-28
Replacement metal gate stack for diffusion prevention Grant 9,312,136 - Ando , et al. April 12, 2	2016-04-12
Integrated multiple gate length semiconductor device including self-aligned contacts Grant 9,293,551 - Fan , et al. March 22, 2	2016-03-22
Method for single fin cuts using selective ion implants Grant 9,287,130 - Cai , et al. March 15, 2	2016-03-15
Methods of forming replacement gate structures for transistors and the resulting devices Grant 9,257,348 - Xie , et al. February 9, 2	2016-02-09
Sti Region For Small Fin Pitch In Finfet Devices App 20150357328 - Chen; Hsueh-Chung ; et al.	2015-12-10
Integrated Multiple Gate Length Semiconductor Device Including Self-aligned Contacts App 20150349075 - Fan; Su Chen ; et al.	2015-12-03
Sti Region For Small Fin Pitch In Finfet Devices App 20150340272 - Chen; Hsueh-Chung ; et al.	2015-11-26
Recessing And Capping Of Gate Structures With Varying Metal Compositions App 20150340462 - XIE; Ruilong ; et al.	2015-11-26
Replacement Metal Gate Stack For Diffusion Prevention App 20150255458 - Ando; Takashi ; et al.	2015-09-10
Recessing and capping of gate structures with varying metal compositions Grant 9,130,029 - Xie , et al. September 8, 2	2015-09-08
Borderless Contact For Ultra-thin Body Devices App 20150155353 - Fan; Su Chen ; et al.	2015-06-04
Integrated Multiple Gate Length Semiconductor Device Including Self-aligned Contacts App 20150145057 - Fan; Su Chen ; et al.	2015-05-28
Borderless contact for ultra-thin body devices Grant 9,024,389 - Fan , et al. May 5, 2	2015-05-05
Formation of the dielectric cap layer for a replacement gate structure Grant 8,957,465 - Xie , et al. February 17, 2	2015-02-17
Methods Of Forming Replacement Gate Structures For Transistors And The Resulting Devices App 20150041905 - Xie; Ruilong ; et al.	2015-02-12
Formation Of The Dielectric Cap Layer For A Replacement Gate Structure App 20140299924 - XIE; Ruilong ; et al.	2014-10-09
Self-aligned contacts Grant 8,853,076 - Fan , et al. October 7, 2	2014-10-07
Formation of the dielectric cap layer for a replacement gate structure Grant 8,772,168 - Xie , et al. July 8, 2	2014-07-08
Recessing And Capping Of Gate Structures With Varying Metal Compositions App 20140159169 - XIE; Ruilong ; et al.	2014-06-12
Borderless contacts in semiconductor devices Grant 8,741,752 - Fan , et al. June 3, 2	2014-06-03
Recessing and capping of gate structures with varying metal compositions Grant 8,679,909 - Xie , et al. March 25, 2	2014-03-25
Method for forming a self-aligned contact opening by a lateral etch Grant 8,679,968 - Xie , et al. March 25, 2	2014-03-25
Self-aligned Contacts App 20140070282 - Fan; Su Chen ; et al.	2014-03-13
Borderless contacts in semiconductor devices Grant 8,637,908 - Fan , et al. January 28, 2	2014-01-28
Recessing And Capping Of Gate Structures With Varying Metal Compositions App 20130328111 - Xie; Ruilong ; et al.	2013-12-12
Borderless Contacts For Metal Gates Through Selective Cap Deposition App 20130320414 - Fan; Su-Chen ; et al.	2013-12-05
Borderless Contacts For Metal Gates Through Selective Cap Deposition App 20130320411 - Fan; Su-Chen ; et al.	2013-12-05
Method For Forming A Self-aligned Contact Opening By A Lateral Etch App 20130307087 - Xie; Ruilong ; et al.	2013-11-21
Formation Of The Dielectric Cap Layer For A Replacement Gate Structure App 20130187203 - XIE; Ruilong ; et al.	2013-07-25
Borderless Contact For Ultra-thin Body Devices App 20130134517 - Fan; Su Chen ; et al.	2013-05-30
Multi-gate Field-effect Transistors With Variable Fin Heights App 20130082329 - Chen; Hsueh-Chung ; et al.	2013-04-04
Multi-gate Field-effect Transistors With Variable Fin Heights App 20130082333 - Chen; Hsueh-Chung ; et al.	2013-04-04
Borderless contact for ultra-thin body devices Grant 8,383,490 - Fan , et al. February 26, 2	2013-02-26
Borderless Contact For Ultra-thin Body Devices App 20130026570 - Fan; Su Chen ; et al.	2013-01-31
Borderless Contacts in Semiconductor Devices App 20130020615 - Fan; Su Chen ; et al.	2013-01-24
Borderless Contacts in Semiconductor Devices App 20130023115 - Fan; Su Chen ; et al.	2013-01-24
Three dimensional IC device and alignment methods of IC device substrates Grant 8,232,659 - Chen , et al. July 31, 2	2012-07-31
Method of forming self-aligned local interconnect and structure formed thereby Grant 8,124,525 - Koburger, III , et al. February 28, 2	2012-02-28
Method of forming replacement metal gate with borderless contact and structure thereof Grant 8,084,311 - Horak , et al. December 27, 2	2011-12-27
Interconnect structure and method of fabricating same Grant 7,781,892 - Chen , et al. August 24, 2	2010-08-24
Three Dimensional Ic Device And Alignment Methods Of Ic Device Substrates App 20080157407 - CHEN; Hsueh-Chung ; et al.	2008-07-03
Three dimensional IC device and alignment methods of IC device substrates Grant 7,371,663 - Chen , et al. May 13, 2	2008-05-13
Direct printing lithography system and method App 20070289467 - Chen; Hsueh-Chung ; et al.	2007-12-20
Wiring structure to minimize stress induced void formation Grant 7,301,239 - Wang , et al. November 27, 2	2007-11-27
Interconnect structure and method of fabricating same App 20070145596 - Chen; Hsueh-Chung ; et al.	2007-06-28
Three dimensional IC device and alignment methods of IC device substrates App 20070020871 - Chen; Hsueh-Chung ; et al.	2007-01-25
Copper interconnect structure with modulated topography and method for forming the same App 20060099786 - Fan; Su-Chen ; et al.	2006-05-11
Wiring structure to minimize stress induced void formation App 20060019414 - Wang; Chien-Jung ; et al.	2006-01-26
Interconnect structure for integrated circuits App 20050082677 - Fan, Su-Chen ; et al.	2005-04-21
Pre-treatment for salicide process App 20040222083 - Fan, Su-Chen	2004-11-11
Pre-treatment for salicide process Grant 6,743,485 - Fan June 1, 2	2004-06-01
Pre-treatment for salicide process App 20020112951 - Fan, Su-Chen	2002-08-22
Pre-treatment for salicide process App 20010006147 - Fan, Su-Chen	2001-07-05

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