Ewald; Robert A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ewald; Robert A..The latest application filed is for "apparatus and methods for using a polishing tape cassette".

Company Profile

0.2.9

Ewald; Robert A. - Aptos CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Extended pad life for ECMP and barrier removal Grant 8,012,000 - Wang , et al. September 6, 2	2011-09-06
Apparatus And Methods For Using A Polishing Tape Cassette App 20090264053 - Manens; Antoine P. ; et al.	2009-10-22
Extended Pad Life For Ecmp And Barrier Removal App 20080242202 - Wang; Yuchun ; et al.	2008-10-02
Conductive Polishing Article for Electrochemical Mechanical Polishing App 20080108288 - Hu; Yongqi ; et al.	2008-05-08
Soft Conductive Polymer Processing Pad And Method For Fabricating The Same App 20070218587 - Wang; Yuchun ; et al.	2007-09-20
Process And Composition For Passivating A Substrate During Electrochemical Mechanical Polishing App 20070144915 - Tian; Yuan A. ; et al.	2007-06-28
Conditioning element for electrochemical mechanical processing App 20060276111 - Tian; Yuan A. ; et al.	2006-12-07
Process and composition for electrochemical mechanical polishing App 20060249395 - Wang; You ; et al.	2006-11-09
Method and composition for polishing a substrate App 20060169597 - Liu; Feng Q. ; et al.	2006-08-03
Conductive polishing article for electrochemical mechanical polishing App 20040020789 - Hu, Yongqi ; et al.	2004-02-05
Wafer processing reactor having a gas flow control system and method Grant 6,143,080 - Bartholomew , et al. November 7, 2	2000-11-07

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