DIERICHS; Marcel Mathijs Theodore Marie

Patent Applications and Registrations

Patent applications and USPTO patent grants for DIERICHS; Marcel Mathijs Theodore Marie.The latest application filed is for "lithographic apparatus and device manufacturing method".

Company Profile

3.68.51

DIERICHS; Marcel Mathijs Theodore Marie - Venlo NL

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Patent Activity

Patent	Date
Lithographic Apparatus And Device Manufacturing Method App 20190324374 - STREEFKERK; Bob ; et al.	2019-10-24
Lithographic apparatus and device manufacturing method Grant 10,345,712 - Streefkerk , et al. July 9, 2	2019-07-09
Lithographic Apparatus And Device Manufacturing Method App 20190086819 - LOOPSTRA; Erik Roelof ; et al.	2019-03-21
Lithographic apparatus and device manufacturing method Grant 10,146,142 - Loopstra , et al. De	2018-12-04
Lithographic Apparatus And Device Manufacturing Method App 20180203364 - STREEFKERK; Bob ; et al.	2018-07-19
Lithographic apparatus and device manufacturing method Grant 9,964,858 - De Smit , et al. May 8, 2	2018-05-08
Lithographic apparatus and device manufacturing method Grant 9,952,515 - Streefkerk , et al. April 24, 2	2018-04-24
Lithographic Apparatus And Device Manufacturing Method App 20170160650 - LOOPSTRA; Erik Roelof ; et al.	2017-06-08
Lithographic Apparatus And Device Manufacturing Method App 20170139333 - DIERICHS; Marcel Mathijs Theodore Marie ; et al.	2017-05-18
Lithographic apparatus and device manufacturing method Grant 9,606,448 - Loopstra , et al. March 28, 2	2017-03-28
Lithographic apparatus and device manufacturing method Grant 9,581,914 - Dierichs , et al. February 28, 2	2017-02-28
Lithographic apparatus and device manufacturing method Grant 9,442,388 - Loopstra , et al. September 13, 2	2016-09-13
Lithographic Apparatus And Device Manufacturing Method App 20160004171 - STREEFKERK; Bob ; et al.	2016-01-07
Lithographic Apparatus And Device Manufacturing Method App 20150331334 - DE SMIT; Joannes Theodoor ; et al.	2015-11-19
Lithographic apparatus and method for reducing stray radiation Grant 9,188,881 - Dierichs , et al. November 17, 2	2015-11-17
Lithographic apparatus and device manufacturing method Grant 9,134,623 - Streefkerk , et al. September 15, 2	2015-09-15
Lithographic apparatus and device manufacturing method Grant 9,134,622 - Streefkerk , et al. September 15, 2	2015-09-15
Lithographic apparatus and device manufacturing method Grant 9,110,389 - De Smit , et al. August 18, 2	2015-08-18
Lithographic Apparatus And Device Manufacturing Method App 20150205214 - DIERICHS; Marcel Mathijs Theodore Marie ; et al.	2015-07-23
Lithographic apparatus and device manufacturing method Grant 9,025,127 - Dierichs , et al. May 5, 2	2015-05-05
Lithographic apparatus and device manufacturing method Grant 8,953,144 - Dierichs , et al. February 10, 2	2015-02-10
Lithographic Apparatus And Device Manufacturing Method App 20140233004 - Streefkerk; Bob ; et al.	2014-08-21
Lithographic apparatus and device manufacturing method involving fluid mixing and control of the physical property of a fluid Grant 8,755,027 - Lipson , et al. June 17, 2	2014-06-17
Lithographic apparatus and device manufacturing method Grant 8,634,056 - Streefkerk , et al. January 21, 2	2014-01-21
Lithographic apparatus and device manufacturing method Grant 8,629,971 - Dierichs , et al. January 14, 2	2014-01-14
Lithographic apparatus and device manufacturing method Grant 8,547,519 - Streefkerk , et al. October 1, 2	2013-10-01
Homogenizer Grant 8,508,716 - Claessens , et al. August 13, 2	2013-08-13
Lithographic apparatus and device manufacturing method Grant 8,416,385 - Streefkerk , et al. April 9, 2	2013-04-09
Lithographic apparatus and device manufacturing method Grant 8,363,208 - De Smit , et al. January 29, 2	2013-01-29
Controllable radiation lithographic apparatus and method Grant 8,345,225 - Onvlee , et al. January 1, 2	2013-01-01
Lithographic apparatus and device manufacturing method Grant 8,279,405 - Dierichs , et al. October 2, 2	2012-10-02
Device manufacturing method and mask for use therein Grant 8,252,487 - Dierichs , et al. August 28, 2	2012-08-28
Lithographic apparatus and device manufacturing method Grant 8,208,123 - Loopstra , et al. June 26, 2	2012-06-26
Lithographic Apparatus And Method For Reducing Stray Radiation App 20120075610 - Dierichs; Marcel Mathijs Theodore Marie ; et al.	2012-03-29
Radiation system with contamination barrier Grant 8,129,702 - Bakker , et al. March 6, 2	2012-03-06
Lithographic Apparatus And Device Manufacturing Method App 20120013872 - DE SMIT; Joannes Theodoor ; et al.	2012-01-19
Lithographic Apparatus And Device Manufacturing Method App 20120013874 - DIERICHS; Marcel Mathijs Theodore Marie ; et al.	2012-01-19
Lithographic Apparatus And Device Manufacturing Method App 20120013870 - DIERICHS; Marcel Mathijs Theodore Marie ; et al.	2012-01-19
Lithographic Apparatus And Device Manufacturing Method App 20110273677 - STREEFKERK; Bob ; et al.	2011-11-10
Lithographic apparatus and device manufacturing method Grant 8,027,026 - Lipson , et al. September 27, 2	2011-09-27
Lithographic Apparatus And Device Manufacturing Method App 20110134402 - LIPSON; Matthew ; et al.	2011-06-09
Homogenizer App 20110122385 - CLAESSENS; Bert Jan ; et al.	2011-05-26
Lithographic apparatus and device manufacturing method Grant 7,894,040 - Lipson , et al. February 22, 2	2011-02-22
Lithographic Apparatus And Device Manufacturing Method App 20100321652 - Streefkerk; Bob ; et al.	2010-12-23
Lithographic Apparatus And Device Manufacturing Method App 20100265476 - Dierichs; Marcel Mathijs Theodore Marie ; et al.	2010-10-21
Lithographic apparatus and device manufacturing method using acidic liquid Grant 7,808,611 - Streefkerk , et al. October 5, 2	2010-10-05
Lithographic apparatus and device manufacturing method using acidic liquid Grant 7,804,574 - Streefkerk , et al. September 28, 2	2010-09-28
Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method Grant 7,800,079 - Banine , et al. September 21, 2	2010-09-21
Lithographic Apparatus, Device Manufacturing Method And A Substrate App 20100221660 - DIERICHS; Marcel Mathijs Theodore Marie ; et al.	2010-09-02
Radiation System With Contamination Barrier App 20100200772 - BAKKER; Levinus Pieter ; et al.	2010-08-12
Device manufacturing method, top coat material and substrate Grant 7,763,355 - Mulkens , et al. July 27, 2	2010-07-27
Lithographic apparatus, device manufacturing method and a substrate Grant 7,746,445 - Dierichs , et al. June 29, 2	2010-06-29
Contamination barrier with expandable lamellas Grant 7,737,425 - Bakker , et al. June 15, 2	2010-06-15
Lithographic apparatus and device manufacturing method Grant 7,733,459 - Dierichs , et al. June 8, 2	2010-06-08
Lithographic Apparatus And Device Manufacturing Method App 20100128235 - De Smit; Joannes Theodoor ; et al.	2010-05-27
Lithographic apparatus and device manufacturing method Grant 7,697,116 - Dierichs , et al. April 13, 2	2010-04-13
Lithographic apparatus and device manufacturing method Grant 7,684,008 - De Smit , et al. March 23, 2	2010-03-23
Controllable radiation lithographic apparatus and method App 20100045954 - ONVLEE; Johannes ; et al.	2010-02-25
Lithographic Apparatus And Device Manufacturing Method App 20090207397 - Streefkerk; Bob ; et al.	2009-08-20
Lithographic apparatus and device manufacturing method Grant 7,528,929 - Streefkerk , et al. May 5, 2	2009-05-05
Device manufacturing method, top coat material and substrate App 20090075061 - Mulkens; Johannes Catharinus Hubertus ; et al.	2009-03-19
Device manufacturing method, top coat material and substrate Grant 7,491,661 - Mulkens , et al. February 17, 2	2009-02-17
Lithographic apparatus and method App 20080259304 - Dierichs; Marcel Mathijs Theodore Marie	2008-10-23
Cover for shielding a portion of an arc lamp App 20080170308 - Dierichs; Marcel Mathijs Theodore Marie ; et al.	2008-07-17
Uniformity correction for lithographic apparatus Grant 7,362,413 - Kremer , et al. April 22, 2	2008-04-22
Lithographic apparatus and device manufacturing method Grant 7,333,178 - Dierichs , et al. February 19, 2	2008-02-19
Device manufacturing method and a substrate Grant 7,326,522 - Dierichs February 5, 2	2008-02-05
Lithographic apparatus and device manufacturing method Grant 7,317,504 - De Smit , et al. January 8, 2	2008-01-08
Lithographic apparatus and device manufacturing method Grant 7,277,158 - Dierichs October 2, 2	2007-10-02
Diffuser unit, lithographic apparatus, method for homogenizing a beam of radiation, a device manufacturing method and device manufactured thereby Grant 7,259,827 - Dierichs August 21, 2	2007-08-21
Contamination barrier with expandable lamellas Grant 7,247,866 - Bakker , et al. July 24, 2	2007-07-24
Optical component, optical system including such an optical component, lithographic apparatus, method of correcting apodization in an optical system, device manufacturing method, and device manufactured thereby Grant 7,224,430 - Dierichs May 29, 2	2007-05-29
Lithographic apparatus and device manufacturing method Grant 7,224,440 - Kruijswijk , et al. May 29, 2	2007-05-29
Lithographic apparatus, device manufacturing method and a substrate App 20070103655 - Dierichs; Marcel Mathijs Theodore Marie ; et al.	2007-05-10
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems Grant 7,206,059 - Flagello , et al. April 17, 2	2007-04-17
Lithographic apparatus and device manufacturing method App 20070046915 - Streefkerk; Bob ; et al.	2007-03-01
Lithographic apparatus, device manufacturing method and a substrate Grant 7,175,968 - Dierichs , et al. February 13, 2	2007-02-13
Lithographic apparatus and device manufacturing method Grant 7,148,952 - Eurlings , et al. December 12, 2	2006-12-12
Radiation system, lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,113,261 - Dierichs , et al. September 26, 2	2006-09-26
Lithographic apparatus and device manufacturing method Grant 7,108,960 - Dierichs September 19, 2	2006-09-19
Lithographic apparatus and device manufacturing method App 20060119824 - Dierichs; Marcel Mathijs Theodore Marie	2006-06-08
Device manufacturing method and computer program Grant 7,042,550 - Lowisch , et al. May 9, 2	2006-05-09
Lithographic apparatus and device manufacturing method App 20060072088 - Lipson; Matthew ; et al.	2006-04-06
Lithographic apparatus and device manufacturing method Grant 7,023,524 - Van Dijsseldonk , et al. April 4, 2	2006-04-04
Diffuser unit, lithographic apparatus, method for homogenizing a beam of radiation, a device manufacturing method and device manufactured thereby App 20060012770 - Dierichs; Marcel Mathijs Theodore Marie	2006-01-19
Lithographic apparatus and device manufacturing method Grant 6,987,275 - Bakker , et al. January 17, 2	2006-01-17
Radiation system, lithographic apparatus, device manufacturing method and device manufactured thereby App 20050270511 - Dierichs, Marcel Mathijs Theodore Marie ; et al.	2005-12-08
Lithographic apparatus and device manufacturing method App 20050225734 - De Smit, Joannes Theodoor ; et al.	2005-10-13
Use of a reticle absorber material in reducing aberrations App 20050221238 - Dierichs, Marcel Mathijs Theodore Marie	2005-10-06
Device manufacturing method and a substrate App 20050175940 - Dierichs, Marcel Mathijs Theodore Marie	2005-08-11
Lithographic apparatus and device manufacturing method App 20050175776 - Streefkerk, Bod ; et al.	2005-08-11
Mask for use in lithography, method of making a mask, lithographic apparatus, and device manufacturing method Grant 6,927,004 - Eurlings , et al. August 9, 2	2005-08-09
Lithographic apparatus and device manufacturing method App 20050146702 - Eurlings, Markus Franciscus Antonius ; et al.	2005-07-07
Device manufacturing method and mask for use therein App 20050136334 - Dierichs, Marcel Mathijs Theodore Marie ; et al.	2005-06-23
Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method App 20050133727 - Banine, Vadim Yevgenyevich ; et al.	2005-06-23
Lithographic apparatus and device manufacturing method App 20050094119 - Loopstra, Erik Roelof ; et al.	2005-05-05
Lithographic apparatus and device manufacturing method App 20050078286 - Dierichs, Marcel Mathijs Theodore Marie ; et al.	2005-04-14
Lithographic apparatus, device manufacturing method and a substrate App 20050042554 - Dierichs, Marcel Mathijs Theodore Marie ; et al.	2005-02-24
Lithographic apparatus and device manufacturing method App 20050024609 - De Smit, Joannes Theodoor ; et al.	2005-02-03
Lithographic apparatus and device manufacturing method App 20050007570 - Streefkerk, Bob ; et al.	2005-01-13
Lithographic apparatus and device manufacturing method App 20040227922 - Dierichs, Marcel Mathijs Theodore Marie ; et al.	2004-11-18
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems App 20040227923 - Flagello, Donis George ; et al.	2004-11-18
Lithographic apparatus and device manufacturing method Grant 6,771,352 - Dierichs August 3, 2	2004-08-03
Method of fabricating an optical element, lithographic apparatus and device manufacturing method App 20040120458 - Dierichs, Marcel Mathijs Theodore Marie ; et al.	2004-06-24
Lithographic apparatus and device manufacturing method App 20040106068 - Dierichs, Marcel Mathijs Theodore Marie	2004-06-03
Lithographic apparatus and device manufacturing method App 20030227603 - Dierichs, Marcel Mathijs Theodore Marie	2003-12-11
Mask for use in lithography, method of making a mask, lithographic apparatus, and device manufacturing method App 20030180632 - Eurlings, Markus Franciscus Antonius ; et al.	2003-09-25